Residual film detection system of yellow light type film tearing machine

Abstract

The utility model discloses a residual film detection system of a yellow light type film tearing machine, which comprises a machine frame, a conveying mechanism used for conveying products is arranged on the machine frame, and a material detection mechanism, a film edge pressing mechanism and a residual film detection mechanism are sequentially arranged on the upper side of the conveying direction of the conveying mechanism. The residual film detection mechanism comprises a third CCD detection assembly used for detecting whether the film is left on the product or not. The film edge pressing mechanism comprises an installation frame, a pressing block and a blocking column are arranged on the installation frame, and the film edge pressing mechanism further comprises a first driving mechanism used for driving the pressing block to do lifting motion and a second driving mechanism used for driving the blocking column to do front-back lifting motion. The film edge pressing device further comprises a control module, the control module is connected with the material detection mechanism, the film edge pressing mechanism and the residual film detection mechanism, the distance between a film and the edge of a product and product material information are accurately detected through the material detection mechanism, and the accuracy of the follow-up process is ensured.

Description

Technical Field

[0001] This utility model relates to the field of film tearing machines, and in particular to a residual film detection system for a yellow light type film tearing machine. Background Technology

[0002] The photolithography-type release film peeling machine is a precision device used in the dry film process of outer layer circuitry on substrates and related fields. It is mainly used to remove the protective film or photoresist film covering the substrate surface in the photolithography process area. Since the release film peeling machine usually uses mechanical adhesive rollers or rollers to assist in peeling off the release film, the following problems exist in actual production:

[0003] This can lead to the release film failing to peel off during the peeling process or breaking during peeling, resulting in incomplete film removal or residual film, which affects development and etching, causing circuit damage or defects. Utility Model Content

[0004] The technical problem solved by this utility model is to provide a residual film detection system for a yellow light type film tearing machine that can perform film edge detection and residual film detection.

[0005] The technical solution adopted by this utility model to solve its technical problem is: a residual film detection system for a yellow light type film tearing machine, including a frame, on which a transmission mechanism for transmitting products is provided, and a material detection mechanism, a film edge pressing mechanism and a residual film detection mechanism are sequentially arranged on the upper side along the transmission direction of the transmission mechanism. The material detection mechanism includes a first CCD detection component for detecting the distance between the film and the edge of the product and a second CCD detection component for detecting the material information of the product. The residual film detection mechanism includes a third CCD detection component for detecting whether film remains on the product.

[0006] The film edge pressing mechanism includes a mounting frame, on which a pressing block and a stop post are provided. It also includes a first driving mechanism for driving the pressing block to move up and down and a second driving mechanism for driving the stop post to move back and forth.

[0007] It also includes a control module, which is connected to the material detection mechanism, the film edge pressing mechanism and the residual film detection mechanism respectively.

[0008] Furthermore, the control module includes a membrane edge control unit and a storage unit;

[0009] The membrane edge control unit controls the forward and backward movement distance of the baffle column by using the membrane edge data detected by the first CCD detection component.

[0010] The storage unit is used to pair and store the product's material information with the product's good or defective information.

[0011] Furthermore, the first drive mechanism is a first drive cylinder.

[0012] Furthermore, the second drive mechanism includes a lead screw and a drive motor. One end of the lead screw is provided with a synchronous pulley, and the drive end of the drive motor is provided with a drive wheel. The drive wheel and the synchronous pulley are connected by a synchronous belt. The mechanism also includes a drive frame, which is connected to the drive nut of the lead screw. A second drive cylinder is provided at the bottom of the drive frame. The drive end of the second drive cylinder is connected to a stop post, and the second drive cylinder is used to drive the stop post to perform lifting and lowering movements.

[0013] Furthermore, the first CCD detection component, the second CCD detection component, and the third CCD detection component are all arranged in multiple horizontally spaced groups.

[0014] Furthermore, the drive frame and the mounting frame are slidably connected by a slide rail and a slider.

[0015] The beneficial effects of this utility model are:

[0016] 1. In this structure, the material detection mechanism accurately detects the distance between the membrane and the product edge, as well as the product material information, to ensure the accuracy of subsequent processes.

[0017] 2. The film edge pressing mechanism in this structure can adjust the position of the baffle according to the film edge data, effectively preventing the pressing block from pressing directly on the film, thereby improving the thoroughness of film tearing and reducing residual film.

[0018] 3. The residual film detection mechanism in this structure can detect whether there is residual film on the product in real time, promptly detect and handle defective products, prevent them from entering the next process, and improve product yield. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the residual film detection system of the yellow light type film tearing machine according to an embodiment of this application.

[0020] Figure 2 This is a side view of the residual film detection system of the yellow light type film tearing machine according to an embodiment of this application.

[0021] Figure 3 This is a schematic diagram of the film edge pressing mechanism of the residual film detection system of the yellow light type film tearing machine according to an embodiment of this application.

[0022] Figure 4 This is a schematic diagram of the internal structure of the film edge pressing mechanism of the residual film detection system of the yellow light type film tearing machine according to an embodiment of this application.

[0023] The components in the diagram are labeled as follows: 1. Frame; 2. Conveying mechanism; 3. Material detection mechanism; 4. First CCD detection component; 5. Second CCD detection component; 6. Film edge pressing mechanism; 7. First drive cylinder; 8. Lead screw; 9. Drive motor; 10. Synchronous belt; 11. Second drive cylinder; 12. Stop post; 13. Slide rail; 14. Pressing block; 15. Residual film detection mechanism. Detailed Implementation

[0024] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0025] like Figure 1 As shown, embodiments of this application disclose a residual film detection system for a yellow light type film peeling machine, including a frame 1. The frame 1 is provided with a transmission mechanism 2 for transmitting products. Along the transmission direction of the transmission mechanism 2, a material detection mechanism 3, a film edge pressing mechanism 4, and a residual film detection mechanism 5 are arranged sequentially on the upper side. The material detection mechanism 3 includes a first CCD detection component 301 for detecting the distance between the film and the edge of the product and a second CCD detection component 302 for detecting product material information. The residual film detection mechanism 5 includes a third CCD detection component for detecting whether film remains on the product.

[0026] The film edge pressing mechanism 4 includes a mounting frame, on which a pressing block 408 and a stop post 406 are provided. It also includes a first driving mechanism for driving the pressing block 408 to perform lifting and lowering motion and a second driving mechanism for driving the stop post 406 to perform forward and backward lifting and lowering motion.

[0027] It also includes a control module, which is connected to the material detection mechanism 3, the film edge pressing mechanism 4 and the residual film detection mechanism 5 respectively.

[0028] Specifically, the product label has a QR code for storing product information. It should be explained that the film-peeling machine is equipped with a film-peeling component. This structure has not improved the film-peeling component. Therefore, the film-peeling component is not within the protection scope of this system.

[0029] Specifically, during operation, the product is conveyed forward by the conveying mechanism 2. When the product reaches the material detection mechanism 3, the first CCD detection component 301 and the second CCD detection component 302 respectively detect the distance between the film and the edge of the product, as well as the material information of the product. Based on the detection data of the first CCD detection component 301, the control module can precisely control the forward and backward movement distance of the baffle 406, thereby adjusting the relative position between the pressure block 408 and the film. This ensures that the pressure block 408 does not directly press on the film during the film-tearing process, thus preventing film residue. This greatly improves the thoroughness of film tearing and reduces the possibility of residual film.

[0030] Subsequently, the product enters the film edge pressing mechanism 4. The second drive mechanism adjusts the position of the stop post 406 according to the film edge data, thereby adjusting the horizontal distance between the stop post 406 and the pressing block 408. The second drive mechanism drives the stop post 406 to descend and block the product. At the same time, the first drive mechanism drives the pressing block 408 to descend and perform the edge pressing operation on the film. In this step, due to the precise adjustment of the stop post 406, the pressing block 408 can be effectively prevented from directly pressing on the film, thereby further improving the accuracy and thoroughness of film tearing.

[0031] After the film removal process is completed, the product enters the residual film detection mechanism 5. The third CCD detection component inspects the product to determine whether any film residue remains on its surface. If residual film is detected, the control module will immediately issue an alarm and notify the operator to handle the defective product to prevent it from entering the next process, thereby ensuring product yield and quality.

[0032] The entire residual film detection system of the Huangguang film peeling machine achieves comprehensive monitoring and management of the film peeling process in semiconductor manufacturing, flat panel display and other fields through precise material detection, film edge pressing and residual film detection mechanisms, which greatly improves production efficiency and product quality.

[0033] In this embodiment, the control module includes a membrane edge control unit and a storage unit;

[0034] The membrane edge control unit controls the forward and backward movement distance of the baffle post 406 by using the membrane edge data detected by the first CCD detection component 301.

[0035] The storage unit is used to pair and store the product's material information with the product's good or defective information.

[0036] Specifically, the storage unit can record the material information of each product and its corresponding good or defective status. This allows for easy tracing and analysis of product quality issues during subsequent production, providing data support for continuous improvement of production processes. Furthermore, the data in the storage unit can also be used to generate product quality reports, providing management with a basis for decision-making.

[0037] The film edge control unit can quickly and accurately calculate the distance that the stop post 406 needs to move based on the film edge position data acquired in real time by the first CCD detection component 301, and control the second drive mechanism to make corresponding adjustments. This real-time film edge control ensures that the stop post 406 always remains in the correct position, thereby effectively guiding the pressure block 408 to avoid the film during the film tearing process, applying pressure only to the edge of the substrate, and achieving a precise and complete film tearing operation.

[0038] In this embodiment, the first driving mechanism may be a first driving cylinder 401, and the second driving mechanism includes a lead screw 402 and a driving motor 403. One end of the lead screw 402 is provided with a synchronous pulley, and the driving end of the driving motor 403 is provided with a driving wheel. The driving wheel and the synchronous pulley are connected by a synchronous belt 404. The mechanism also includes a driving frame, which is connected to the driving nut of the lead screw 402. A second driving cylinder 405 is provided at the bottom of the driving frame. The driving end of the second driving cylinder 405 is connected to a stop post 406, and the second driving cylinder 405 is used to drive the stop post 406 to perform lifting and lowering movements.

[0039] Specifically, the second drive mechanism drives the synchronous pulley and synchronous belt 404 to rotate via the drive motor 403, which in turn drives the lead screw 402 to rotate. The rotation of the lead screw 402 is converted into linear motion of the drive frame via the drive nut, achieving precise adjustment of the stop post 406 in the horizontal direction. This achieves adjustment of the horizontal distance between the stop post 406 and the pressure block 408. At the same time, the second drive cylinder 405 can further drive the stop post 406 to perform lifting and lowering movements, ensuring that the stop post 406 can accurately block the product during the film-tearing process. For example, when the distance between the film edge and the product edge is detected to be 30mm, the position of the baffle 406 can be adjusted so that the distance between the baffle and the foremost edge of the pressure block 408 is less than 30mm, for example, 26mm. When the baffle 406 blocks the product, the pressure block 408 presses down on the product. At this time, the distance between the foremost edge of the pressure block 408 and the film edge is 4mm, which ensures that the pressure block 408 will not press on the film. This structural design not only improves the accuracy and stability of the baffle 406 adjustment, but also makes the entire film tearing process more automated and intelligent.

[0040] In this embodiment, multiple CCD detection components—the first CCD detection component 301, the second CCD detection component 302, and the third CCD detection component—are horizontally spaced to ensure comprehensive product inspection. The arrangement of multiple CCD detection components allows for simultaneous inspection of different locations on the product, improving inspection efficiency and accuracy. Furthermore, this design increases system redundancy; even if one CCD detection component malfunctions, other components can continue to operate, ensuring the stability and reliability of the entire inspection system.

[0041] In this embodiment, the drive frame and the mounting frame are slidably connected via a slide rail 407 and a slider. This connection method ensures the stability and accuracy of the drive frame during movement. The design of the slide rail 407 and the slider not only reduces friction and resistance during the movement of the drive frame, but also enables the drive frame to move precisely along a predetermined trajectory, thereby achieving precise adjustment of the position of the stop post 406.

[0042] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A residual film detection system for a yellow light type film tearing machine, characterized in that: The device includes a frame (1), on which a transmission mechanism (2) for transmitting products is provided. Along the transmission direction of the transmission mechanism (2), a material detection mechanism (3), a film edge pressing mechanism (4), and a residual film detection mechanism (5) are arranged sequentially on the upper side. The material detection mechanism (3) includes a first CCD detection component (301) for detecting the distance between the film and the edge of the product and a second CCD detection component (302) for detecting the material information of the product. The residual film detection mechanism (5) includes a third CCD detection component for detecting whether the film is left on the product. The film edge pressing mechanism (4) includes a mounting frame, on which a pressing block (408) and a stop post (406) are provided. It also includes a first driving mechanism for driving the pressing block (408) to move up and down and a second driving mechanism for driving the stop post (406) to move back and forth up and down. It also includes a control module, which is connected to the material detection mechanism (3), the film edge pressing mechanism (4) and the residual film detection mechanism (5) respectively.

2. The residual film detection system for a yellow-light type film tearing machine as described in claim 1, characterized in that: The control module includes a membrane edge control unit and a storage unit; The membrane edge control unit controls the forward and backward movement distance of the baffle (406) by using the membrane edge data detected by the first CCD detection component (301); The storage unit is used to pair and store the product's material information with the product's good or defective information.

3. The residual film detection system for a yellow-light type film tearing machine as described in claim 1, characterized in that: The first driving mechanism is a first driving cylinder.

4. The residual film detection system for a yellow-light type film tearing machine as described in claim 1, characterized in that: The second driving mechanism includes a lead screw (402) and a drive motor (403). One end of the lead screw (402) is provided with a synchronous pulley, and the drive end of the drive motor (403) is provided with a drive wheel. The drive wheel and the synchronous pulley are connected by a synchronous belt (404). The mechanism also includes a drive frame, which is connected to the drive nut of the lead screw (402). A second drive cylinder (405) is provided at the bottom of the drive frame. The drive end of the second drive cylinder (405) is connected to a stop column (406), and the second drive cylinder (405) is used to drive the stop column (406) to move up and down.

5. The residual film detection system for a yellow-light type film tearing machine as described in claim 1, characterized in that: The first CCD detection component (301), the second CCD detection component (302) and the third CCD detection component are all arranged horizontally at intervals.

6. The residual film detection system for a yellow-light type film tearing machine as described in claim 4, characterized in that: The drive frame and the mounting frame are slidably connected by a slide rail (407) and a slider.

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