Electroplating clamp for large current

Abstract

The utility model discloses an electroplating clamp for large current. The electroplating clamp comprises a first conductive part which is conducted and connected with an external power supply, the second conductive part is mounted on the first conductive part; the plurality of conductive conduction parts are vertically mounted at one end of the second conductive part, and the conductive conduction parts are connected with the second conductive part in a conducting manner; the conductive mounting plate is connected with the conductive conduction part, a plurality of clamps used for clamping products are arranged in the length direction of the conductive mounting plate, and the clamps are made of conductive materials. According to the utility model, the first conductive part, the second conductive part, the conductive conduction part and the conductive mounting plate are used as a frame for supporting the clamp, and meanwhile, large current output by an external power supply can be input from the first conductive part and then is downwards transmitted to a product from the first conductive part; according to the utility model, the structure is simple, the cost is low, the transmission of large current is stable and efficient, and the electroplating effect on products is good.

Description

Technical Field

[0001] This utility model relates to a clamp, and more particularly to an electroplating clamp for high current. Background Technology

[0002] VCP (Vertical Continuous Plating) is a highly efficient electroplating production method commonly used in the semiconductor industry. During electroplating, the plating fixture must be conductive, as it is the critical path for current transfer from the power source to the workpiece. Depending on specific process requirements (such as copper, nickel, or gold plating), wafer size (such as 8-inch or 12-inch wafers), and the characteristics of the plating solution, sometimes a high current is required for plating.

[0003] Currently, current is transferred from the power source to the product to be plated via cables, which conduct the current to the electroplating fixture and then transfer it to the product. When a large current is required for electroplating, the number of cables is increased to increase the current. However, even so, it is still not enough to meet the demand for large current. In addition, an increase in the number of cables can easily lead to unexpected factors, bringing many instabilities to high-current electroplating and making it unsuitable for actual high-current electroplating needs. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art by providing a high-current electroplating fixture with a simple structure, low cost, and the ability to meet the needs of high-current electroplating of products.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: an electroplating fixture for high current, comprising:

[0006] The first conductive component is used to connect to an external power source.

[0007] The second conductive component is mounted on the first conductive component;

[0008] A conductive component, wherein a plurality of the conductive components are vertically mounted at one end of the second conductive component, and the conductive components are electrically connected to the second conductive component;

[0009] A conductive mounting plate is connected to the conductive conductive component. The conductive mounting plate is provided with a plurality of clamps for clamping the product along its length, and the clamps are made of conductive material.

[0010] The current supplied by the external power source is transmitted to the clamp in sequence through the first conductive component, the second conductive component, the conductive conductive component and the conductive mounting plate, and then the clamp transmits the current to the product located on the clamping tip.

[0011] Furthermore, the first conductive component, the second conductive component, the conductive conductive component, and the conductive mounting plate are made of copper or brass.

[0012] Furthermore, the number of clamps is four, and the four clamps are arranged in parallel in the vertical direction of the conductive mounting plate.

[0013] Furthermore, the clamp includes a base plate, the bottom of which is provided with two lower clamping posts; a clamping plate that can rotate relative to the base plate is provided along the length direction of the base plate; the front end of the clamping plate has a clamping tip, and the side of the clamping tip corresponding to the base plate is provided with an upper clamping post corresponding to the two lower clamping posts.

[0014] Furthermore, the clamps are made of copper or brass.

[0015] Furthermore, the number of the conductive components is two, and the two conductive components overlap each other vertically.

[0016] Furthermore, the first conductive component also has an adapter for mounting.

[0017] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0018] This utility model discloses a high-current electroplating fixture. The first conductive component, the second conductive component, the conductive transmission component, and the conductive mounting plate form a frame that not only supports the clamps but also, because the first conductive component, the second conductive component, the conductive transmission component, the conductive mounting plate, and the clamps are all made of conductive materials, the high current output from the external power supply can be input through the first conductive component during operation. The high current is then transmitted down through the first conductive component to the clamps, and finally transferred to the product by the clamps. This avoids the need for multiple cables to transmit the high current, resulting in a simple structure that ensures stable and efficient transmission of the high current to the product, leading to good electroplating results and meeting the requirements for high-current electroplating applications. Attached Figure Description

[0019] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0020] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0021] Figure 2 for Figure 1 A three-dimensional structural diagram from another perspective;

[0022] Figure 3 This is a schematic diagram of the clamp structure in one embodiment of the present invention;

[0023] Wherein: 1. First conductive component; 2. Second conductive component; 3. Conductive component; 4. Conductive mounting plate; 5. Clamp; 6. Adapter frame; 50. Base plate; 51. Lower clamping post; 52. Clamping plate; 53. Upper clamping post; 520. Clamping tip. Detailed Implementation

[0024] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0025] This utility model provides an electroplating fixture for high current, which solves the problem that existing electroplating fixtures require many cables when electroplating products with high current, resulting in complex and messy structures, high costs, low safety factors, and the inability to meet the high current requirements simply by increasing the number of cables.

[0026] The range of high current in this invention is between 700 and 2000 A.

[0027] For ease of understanding, the specific processes in the embodiments of this application are described below. Please refer to [link / reference]. Figures 1 to 2 An electroplating fixture for high current in this embodiment includes a first conductive component 1, a second conductive component 2, a conductive transmission component 3, a conductive mounting plate 4, and clamps 5. The first conductive component 1 is connected to an external power source, with the input terminal of the external power source connected to the first conductive component 1 to conduct current into it. The second conductive component 2 is mounted on the first conductive component 1, allowing current to flow from the first conductive component 1 into the second conductive component 2. A plurality of conductive transmission components 3 are vertically mounted at one end of the second conductive component 2, and are electrically connected to the second conductive component 2, allowing current to flow from the second conductive component 2 into the conductive transmission components 3. The conductive mounting plate 4 is mounted vertically to the conductive transmission components 3, and has multiple clamps 5 along its length for clamping products. The clamps 5 are made of conductive material.

[0028] During operation, the current supplied by the external power source is sequentially transmitted to the clamp 5 through the first conductive component 1, the second conductive component 2, the conductive conductive component 3, and the conductive mounting plate 4. Then, the clamping tip 50 of the clamp 5 transmits the current to the product located on the clamping tip, thereby realizing the conduction of current to the product without the use of cables. At the same time, this structure can also be applied to high-current electroplating, with a simple structure and good high-current electroplating effect.

[0029] Furthermore, the first conductive component 1, the second conductive component 2, the conductive conductive component 3, and the conductive mounting plate 4 are made of copper or brass. Copper and brass are excellent conductive materials, capable of excellent current transmission, and are also low in cost. Of course, other excellent conductive materials can also be used for the above components. In addition, the first conductive component 1 and the second conductive component 2 are both integrally manufactured by casting, resulting in excellent conductivity.

[0030] See Figure 2 and Figure 3 Furthermore, the number of clamps 5 is four, and the four clamps 5 are arranged parallel to each other in the vertical direction of the conductive mounting plate 4. These five clamps 5 can clamp the product in the electroplating bath. The number of clamps 5 is not limited to four; the most important thing is to ensure that the clamps 5 are also made of excellent conductive material, so as to quickly and efficiently transfer current to the product. In this embodiment, the clamps 5 can be made of copper or brass, which offers good conductivity while being low in cost.

[0031] See Figure 3 Furthermore, the clamp 5 includes a base plate 50, with two lower clamping posts 51 at the bottom of the base plate; a clamping plate 52 rotatable relative to the base plate 50 is provided along the length of the base plate; the front end of the clamping plate 52 has a clamping tip 520, and an upper clamping post 53 corresponding to the two lower clamping posts 51 is provided on the side of the clamping tip 520 corresponding to the base plate 50. During operation, the clamping plate 52 rotates so that the lower clamping posts 51 and the upper clamping posts 53 clamp the product.

[0032] In addition, the clamping tip 520 is rectangular in shape, which increases the cross-sectional area, thereby efficiently conducting current from the lower clamping post 51 to the product and meeting the requirements for high current conduction.

[0033] Furthermore, there are two conductive conductive components 3, which are stacked one on top of the other. The conductive conductive components 3 mainly function to conduct current, so as to conduct the current flowing into the first conductive component 1 to the clamp 5, and then from the clamp 5 to the product. By using two conductive conductive components 3, the transmission area can be increased, thereby better meeting the needs of large current transmission and achieving good transmission effect.

[0034] Furthermore, the first conductive component 1 also has an adapter 6 for installation, and the electroplating fixture can be installed quickly and effectively through multiple adapters 6.

[0035] In practical applications, the electroplating fixture is first installed in place using the adapter frame 6. The first conductive component 1, the second conductive component 2, the conductive transmission component 3, and the conductive mounting plate 4 form a unified frame, providing support for the clamps 5. During operation, a large current generated by an external power source is input through the first conductive component 1. This large current is then transmitted from the first conductive component 1 to the second conductive component 2. From the second conductive component 2, the current is transmitted downwards through the two conductive transmission components 3 to the conductive mounting plate 4. The conductive mounting plate 4 then transmits the large current to multiple clamps 5. Finally, the multiple clamps 5 stably and quickly transfer the large current to the product, which is then located in the electroplating bath.

[0036] In summary, the electroplating fixture for high current of this invention avoids the use of multiple cables for high current transmission, has a simple structure, low cost, and excellent reliability and stability, meeting the requirements of high current electroplating.

[0037] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A high-current electroplating fixture, characterized in that, include: The first conductive component (1) is used to connect to an external power source. The second conductive component (2) is mounted on the first conductive component (1); A conductive component (3) is provided, wherein a plurality of the conductive components (3) are vertically mounted at one end of the second conductive component (2), and the conductive components (3) are electrically connected to the second conductive component (2); A conductive mounting plate (4) is connected to the conductive conductive component (3). The conductive mounting plate (4) has multiple clamps (5) for clamping the product along its length. The clamps (5) are made of conductive material. The current supplied by the external power source is transmitted sequentially through the first conductive component (1), the second conductive component (2), the conductive conductive component (3), and the conductive mounting plate (4) to the clamp (5), and then the clamp (5) transmits the current to the product located on the clamping tip (520).

2. The electroplating fixture for high current as described in claim 1, characterized in that: The first conductive component (1), the second conductive component (2), the conductive conductive component (3), and the conductive mounting plate (4) are made of copper or brass.

3. The electroplating fixture for high current as described in claim 1, characterized in that: The number of clamps (5) is four, and the four clamps (5) are arranged in parallel in the vertical direction of the conductive mounting plate (4).

4. The electroplating fixture for high current as described in claim 1, characterized in that: The clamp (5) includes a base plate (50), and the bottom of the base plate (50) is provided with two lower clamping posts (51); a clamping plate (52) that can rotate relative to the base plate (50) is provided along the length direction of the base plate (50); the front end of the clamping plate (52) has a clamping tip (520), and the side of the clamping tip (520) corresponding to the base plate (50) is provided with an upper clamping post (53) corresponding to the two lower clamping posts (51).

5. The electroplating fixture for high current as described in claim 1, characterized in that: The clamp (5) is made of copper or brass.

6. The electroplating fixture for high current as described in claim 1, characterized in that: The number of the conductive conductive components (3) is two, and the two conductive conductive components (3) overlap each other vertically.

7. The electroplating fixture for high current as described in claim 1, characterized in that: The first conductive component (1) also has an adapter (6) for mounting.

Images