Mechanical locking mechanism

Abstract

The utility model belongs to the technical field of mechanical locking, and discloses a mechanical locking mechanism which comprises a fixed disc, a large rotary disc, a small rotary disc, a limiter and a bolt, the large rotary disc is rotationally connected with the fixed disc, and the small rotary disc is rotationally connected with the large rotary disc; the limiter is in sliding connection with the large rotating disc in the radial direction of the large rotating disc and comprises a limiting lock catch, an upper limiting block and a lower limiting block, the upper limiting block is installed on the upper surface of the limiting lock catch, and the lower limiting block is installed on the lower surface of the limiting lock catch; a first clamping groove matched with the upper limiting block is formed in the circumference of the small turntable; a second clamping groove matched with the lower limiting block is formed in the circumference of the fixed disc; the lower limiting block is connected with a spring; the other end of the spring is connected with the large turntable; when the bolt is inserted into the limiter, the upper limiting block is located in the first clamping groove, and the lower limiting block is separated from the second clamping groove; when the bolt is separated from the limiter, the upper limiting block is separated from the first clamping groove, the lower limiting block is located in the second clamping groove, and the spring is in a stretching state.

Description

Technical Field

[0001] This utility model belongs to the field of mechanical locking technology, and specifically relates to a mechanical locking mechanism. Background Technology

[0002] Foup cleaning machines are cleaning equipment mainly used in the semiconductor manufacturing process to clean and dry various types of wafer pods, such as FOUP (Front Opening Unified Pod), and are widely used in the semiconductor industry.

[0003] The rotating mechanism in the Foup cleaning machine requires effective and reliable motion constraints to ensure that the rotating mechanism is in the correct locked or unlocked state.

[0004] Therefore, a mechanical locking mechanism is provided to achieve the above functions. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a mechanical locking mechanism.

[0006] To achieve the above-mentioned technical objectives, the technical solution adopted by this utility model is as follows:

[0007] A mechanical locking mechanism includes a fixed plate, a large turntable, a small turntable, a limiter, and a pin for limiting the position of the limiter. The large turntable is rotatably connected to the fixed plate, the small turntable is rotatably connected to the large turntable, and the large turntable is located between the fixed plate and the small turntable.

[0008] The limiter is slidably connected to the large turntable along the radial direction. The limiter includes a limit lock, an upper limit block, and a lower limit block. The upper limit block is installed on the upper surface of the limit lock and protrudes from the upper surface of the large turntable. The lower limit block is installed on the lower surface of the limit lock and protrudes from the lower surface of the large turntable.

[0009] The circumference of the small turntable is provided with a first slot that cooperates with the upper limit block;

[0010] The circumference of the fixed plate is provided with a second slot that cooperates with the lower limit block;

[0011] The lower limit block is connected to the spring, and the other end of the spring is connected to the large turntable;

[0012] When the pin is inserted into the limiter, the upper limit block is in the first slot, and the lower limit block is disengaged from the second slot.

[0013] When the pin disengages from the limiter, the upper limit block disengages from the first slot, the lower limit block is in the second slot, and the spring is in a stretched state.

[0014] In this invention, the large turntable has a degree of rotational freedom relative to the fixed turntable, and the small turntable has a degree of rotational freedom relative to the large turntable. In the Foup cleaning machine, in the initial open state, it is necessary to restrict the rotational freedom of the small turntable while maintaining the rotational freedom of the large turntable. At this time, the pin and the limiter cooperate, with the pin fixing the position of the limiter, the upper limit block being in the first slot of the small turntable, thereby circumferentially limiting the small turntable, while the lower limit block disengages from the second slot, allowing the large turntable to rotate freely. When the Foup cleaning machine needs to be kept in a locked state, it is necessary to allow the small turntable to rotate freely while restricting the rotational freedom of the large turntable. At this time, the pin and the limiter... The limit lock of the device is released. Manually push the limiter forward to disengage the upper limit block from the first slot of the small turntable, allowing the lower limit block to enter the second slot and causing the spring to stretch. To maintain this state, the small turntable needs to be rotated so that the position on the circumference of the small turntable without the first slot contacts the upper limit block, thus keeping the upper limit block stationary. If it is necessary to return to the initial open state, simply rotate the small turntable again. When the first slot on the circumference of the small turntable corresponds to the position of the upper limit block, the limiter moves in the direction of spring contraction under the tension of the spring, and the upper limit block automatically slides into the first slot. To ensure positional stability, a pin can be inserted into the limiter.

[0015] The beneficial effects of this utility model are as follows: Through ingenious structural design, the rotating mechanism in the Foup cleaning machine is effectively and reliably constrained, ensuring that the rotating mechanism is in the correct locked or open state. This solution is simple to operate and can automatically return to the initial state when needed through the tension of the spring. Attached Figure Description

[0016] This utility model can be further illustrated by the non-limiting embodiments given in the accompanying drawings;

[0017] Figure 1 This is a first structural schematic diagram of an embodiment of the present invention in an open state;

[0018] Figure 2 For the embodiments of this utility model in Figure 1 A magnified view of a section at point A in the middle;

[0019] Figure 3 This is a schematic diagram of the second structure of this utility model embodiment when it is in the open state;

[0020] Figure 4 For the embodiments of this utility model in Figure 3 A magnified view of a section at point B in the middle;

[0021] Figure 5 This is a schematic diagram of the first structure of this utility model when it is in the locked state;

[0022] Figure 6For the embodiments of this utility model in Figure 5 A magnified view of a section at point C;

[0023] Figure 7 This is a schematic diagram of the second structure of this utility model when it is in the locked state;

[0024] Figure 8 For the embodiments of this utility model in Figure 7 A magnified view of a section at point D;

[0025] Figure 9 This is a schematic diagram of the structure of the small turntable in an embodiment of this utility model;

[0026] The symbols for the main components are explained below:

[0027] 1. Fixed plate; Second slot 11;

[0028] 2. Large spinning wheel;

[0029] 3. Small turntable; 31. First card slot;

[0030] 41. Limit lock; 42. Upper limit block; 43. Lower limit block;

[0031] 5. Bolt;

[0032] 6. Spring;

[0033] 7. Position sensor. Detailed Implementation

[0034] The technical solution of this utility model will be described in detail below with reference to specific embodiments and accompanying drawings. The embodiments described herein are specific implementations of this utility model, used to illustrate the concept of this utility model; these descriptions are explanatory and exemplary, and should not be construed as limiting the implementation methods or the scope of protection of this utility model. In addition to the embodiments described herein, those skilled in the art can employ other obvious technical solutions based on the content disclosed in the claims and specification of this application. These technical solutions include those that make any obvious substitutions and modifications to the embodiments described herein.

[0035] Example 1

[0036] like Figure 1-9 As shown, this embodiment provides a mechanical locking mechanism, including a fixed disk 1, a large turntable 2, a small turntable 3, a limiter, and a pin 5 for limiting the position of the limiter. The large turntable 2 is rotatably connected to the fixed disk 1, and the small turntable 3 is rotatably connected to the large turntable 2. The large turntable 2 is located between the fixed disk 1 and the small turntable 3.

[0037] The limiter is slidably connected to the large turntable 2 radially. The limiter includes a limit lock 41, an upper limit block 42, and a lower limit block 43. The upper limit block 42 is installed on the upper surface of the limit lock 41 and protrudes from the upper surface of the large turntable 2. The lower limit block 43 is installed on the lower surface of the limit lock 41 and protrudes from the lower surface of the large turntable 2.

[0038] The circumference of the small turntable 3 is provided with a first slot 31 that cooperates with the upper limit block 42;

[0039] The circumference of the fixed plate 1 is provided with a second slot 11 that mates with the lower limit block 43;

[0040] The lower limit block 43 is connected to the spring 6, and the other end of the spring 6 is connected to the large turntable 2;

[0041] When the pin 5 is inserted into the limiter, the upper limit block 42 is in the first slot 31, and the lower limit block 43 is disengaged from the second slot 11.

[0042] When the pin 5 disengages from the limiter, the upper limit block 42 disengages from the first slot 31, the lower limit block 43 is in the second slot 11, and the spring 6 is in a stretched state.

[0043] In this embodiment, the large turntable 2 has a degree of rotational freedom relative to the fixed plate 1, and the small turntable 3 has a degree of rotational freedom relative to the large turntable 2. In the Foup cleaning machine, in the initial open state, it is necessary to restrict the rotational freedom of the small turntable 3 while maintaining the rotational freedom of the large turntable 2. At this time, the pin 5 cooperates with the limiter, the pin 5 fixes the position of the limiter, the upper limit block 42 is in the first slot 31 of the small turntable 3, thereby circumferentially limiting the small turntable 3, while the lower limit block 43 disengages from the second slot 11, allowing the large turntable 2 to rotate freely. When the Foup cleaning machine needs to be kept in a locked state, it is necessary to allow the small turntable 3 to rotate freely while restricting the rotational freedom of the large turntable 2. At this time, the pin 5 is engaged with the limiter's limit lock. 41. Separate the limiters manually, causing the upper limit block 42 to disengage from the first slot 31 of the small turntable 3, allowing the lower limit block 43 to enter the second slot 11 and causing the spring 6 to stretch. To maintain this state, the small turntable 3 needs to be rotated so that the position on the circumference of the small turntable 3 where the first slot 31 is not set is in contact with the upper limit block 42, thus keeping the upper limit block 42 stationary. If it is necessary to return to the initial open state, simply rotate the small turntable 3 again. When the first slot 31 on the circumference of the small turntable 3 corresponds to the position of the upper limit block 42, under the pulling force of the spring 6, the limiter moves in the direction of the spring 6 contraction, and the upper limit block 42 automatically slides into the first slot 31. To ensure positional stability, the pin 5 can be inserted into the limiter.

[0044] Example 2

[0045] like Figure 4As shown, this embodiment provides a mechanical locking mechanism, which differs from Embodiment 1 in that it also includes a position sensor 7 for detecting whether the lower limit block 43 is in the second slot 11.

[0046] In this embodiment, the position sensor 7 can detect whether the lower limit block 43 is in the second slot 11, thereby detecting the position of the limiter and determining whether the rotating mechanism in the Foup cleaning machine is locked or open. The position sensor 7 can also achieve electrical linkage with the outside world.

[0047] In some optional instances, position sensor 7 is selected as a photoelectric sensor.

[0048] Example 3

[0049] like Figure 2 , 9 As shown, this embodiment provides a mechanical locking mechanism. The difference from embodiment 1 is that the openings of the first slot 31 and the second slot 11 are both widened by outward expansion. The limiting lock 41 is provided with a hole for cooperating with the pin 5, and the outer end of the limiting lock 41 is provided with a pull ring for easy pushing and pulling.

[0050] In this embodiment, the flared opening increases the range of the opening, which is beneficial for the sliding in and out of the upper limit block 42 and the lower limit block 43. The insertion hole is used to cooperate with the pin 5, and the pull ring is easy to pull and prevents it from slipping out of your hand.

[0051] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A mechanical locking mechanism, characterized in that: It includes a fixed disk (1), a large turntable (2), a small turntable (3), a limiter, and a pin (5) for limiting the position of the limiter. The large turntable (2) is rotatably connected to the fixed disk (1), and the small turntable (3) is rotatably connected to the large turntable (2). The large turntable (2) is located between the fixed disk (1) and the small turntable (3). The limiter is slidably connected to the large turntable (2) radially. The limiter includes a limit lock (41), an upper limit block (42), and a lower limit block (43). The upper limit block (42) is installed on the upper surface of the limit lock (41) and protrudes from the upper surface of the large turntable (2). The lower limit block (43) is installed on the lower surface of the limit lock (41) and protrudes from the lower surface of the large turntable (2). The circumference of the small turntable (3) is provided with a first slot (31) that cooperates with the upper limit block (42); The circumference of the fixed disk (1) is provided with a second slot (11) that cooperates with the lower limit block (43); The lower limit block (43) is connected to the spring (6), and the other end of the spring (6) is connected to the large turntable (2); When the pin (5) is inserted into the limiter, the upper limit block (42) is in the first slot (31), and the lower limit block (43) is disengaged from the second slot (11); When the pin (5) disengages from the limiter, the upper limit block (42) disengages from the first slot (31), the lower limit block (43) is in the second slot (11), and the spring (6) is in a stretched state.

2. The mechanical locking mechanism according to claim 1, characterized in that: It also includes a position sensor (7) for detecting whether the lower limit block (43) is in the second slot (11).

3. The mechanical locking mechanism according to claim 1, characterized in that: The openings of the first card slot (31) and the second card slot (11) are both flared outwards.

4. The mechanical locking mechanism according to claim 1, characterized in that: The limiting latch (41) is provided with a socket for engaging with the pin (5).

5. A mechanical locking mechanism according to claim 4, characterized in that: The outer end of the limiting lock (41) is provided with a pull ring for easy pushing and pulling.

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