Single-shaft-driven semiconductor pressure control valve opposite side pressing rod auxiliary sealing mechanism

Abstract

The utility model discloses a single-shaft driven semiconductor pressure control valve opposite side pressure rod auxiliary sealing mechanism, which relates to the technical field of pressure control valves, and comprises a valve body, and a valve hole is arranged in the middle of the valve body; the valve body is internally provided with two symmetrically distributed mounting holes, the two mounting holes are symmetrically distributed in the two sides of the valve hole, the interiors of the mounting holes are slidably connected with valve plate driving shafts, and the tail ends of the two valve plate driving shafts are fixedly connected with a fixing rod and an auxiliary sealing pressing rod respectively. According to the single-shaft-driven semiconductor pressure control valve opposite-side pressing rod auxiliary sealing mechanism, through the rigid connection design of the single-side valve plate driving shaft, the fixing rod and the auxiliary sealing pressing rod, a symmetrically-distributed torque self-balancing system is formed, synchronous displacement of the double-side driving shaft is ensured by means of the symmetrical layout of the mounting holes and rigid linkage of the valve plate driving shaft, and the sealing effect of the double-side driving shaft is improved. The fixing rod and the auxiliary sealing pressing rod form a force transmission frame, single-shaft thrust is converted into axial translation of the sealing valve plate, and the deflection risk caused by asynchronous double-shaft driving is eliminated.

Description

Technical Field

[0001] This utility model relates to the field of pressure-controlled valve technology, specifically to an auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve. Background Technology

[0002] Mushroom valves are key sealing components for controlling the flow of process gases in dry etching and deposition equipment used in semiconductor and solar energy manufacturing. They meet the requirements of high cleanliness, high vacuum, corrosion resistance, and rapid response.

[0003] To achieve the above functions, a prior art Chinese patent (publication number: CN222616040U) discloses a valve body containing a first lifting cylinder and a second lifting cylinder connected internally. The first and second lifting cylinders are used to drive the first and second mushroom-shaped sealing plates to rise and fall. This mushroom-type lifting valve replaces the traditional flat sealing plate with a mushroom-shaped sealing plate. The mushroom-shaped protrusion structure of the sealing plate better prevents leakage. Under high temperatures, it is less prone to deformation than a flat valve plate, resulting in a longer service life. A stable base and a limiting sleeve fitted over the bottom and middle of the lifting cylinder limit the cylinder's position, preventing displacement during lifting. Furthermore, the limiting slide formed between the limiting plates slides and rises and falls on the limiting slide rod, limiting the position of the limiting plates and thus the sealing plate, preventing displacement between the lifting cylinder and the sealing plate and enhancing the stability of the lifting valve.

[0004] While existing technologies can overcome the shortcomings mentioned above, other problems still exist in their operation: due to machining and parts assembly errors, the valve plate of existing pressure control valves cannot fully and synchronously contact the bottom plane of the valve body, resulting in uneven force on the sealing ring and inability to ensure good airtightness of the cavity in the fully closed state. Utility Model Content

[0005] The purpose of this invention is to provide a single-axis driven semiconductor pressure-controlled valve side pressure rod auxiliary sealing mechanism to solve the problem in the prior art where the valve plate of the existing pressure-controlled valve cannot fully and synchronously contact the bottom plane of the valve body, resulting in uneven force on the sealing ring and inability to ensure good airtightness of the cavity in the fully closed state.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a single-axis driven semiconductor pressure-controlled valve side pressure rod auxiliary sealing mechanism, including a valve body, wherein a valve hole is provided in the middle of the valve body;

[0007] The valve body has two symmetrically distributed mounting holes on both sides of the valve hole. A valve plate drive shaft is slidably connected inside the mounting holes. A fixing rod and an auxiliary sealing pressure rod are fixedly connected to the ends of the two valve plate drive shafts, respectively. A sealing valve plate is fixedly connected to the end of the fixing rod away from the valve plate drive shaft.

[0008] Preferably, the valve body has a flange distributed around the valve hole on one side, and a butt sealing ring is provided on the edge of the valve body away from the flange.

[0009] Preferably, the diameter of the sealing valve plate is larger than the diameter of the valve hole, the end of the auxiliary sealing rod away from the valve plate drive shaft is in contact with the sealing valve plate, and the center of the sealing valve plate is aligned with the center of the valve hole.

[0010] Preferably, a vacuum bellows is sleeved on the outer side of the valve plate drive shaft, and the end of the vacuum bellows is fixedly connected to one side of the valve body. The free end of the vacuum bellows is fixedly connected to the end flange of the valve plate drive shaft.

[0011] Preferably, a flow-blocking sealing ring is fixedly connected to the outside of the valve hole, and a wedge-shaped sealing groove is provided on the edge of the auxiliary sealing rod near the valve hole, and the wedge-shaped sealing groove and the flow-blocking sealing ring fit together to form a sealing structure.

[0012] Preferably, the inclined surface of the wedge-shaped sealing groove forms an angle with the valve hole axis, and the angle causes the axial component force generated when the flow-blocking sealing ring is compressed to push the sealing valve plate to tightly fit the valve hole end face.

[0013] Preferably, the fixing rod applies a force toward the valve hole to the sealing valve plate, and the fixing rod limits the maximum movement distance of the sealing valve plate away from the valve hole.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This single-axis driven semiconductor pressure-controlled valve features a side-mounted pressure rod auxiliary sealing mechanism. The rigid connection between the single-sided valve plate drive shaft, fixed rod, and auxiliary sealing pressure rod forms a symmetrically distributed torque self-balancing system. Utilizing the symmetrical layout of the mounting holes and the rigid linkage with the valve plate drive shaft, synchronous displacement of both drive shafts is ensured. The fixed rod and auxiliary sealing pressure rod constitute a force transmission frame, converting the single-axis thrust into the axial translation of the sealing valve plate, thus eliminating the risk of deflection caused by asynchronous dual-axis drive.

[0016] By engaging the wedge-shaped sealing groove of the auxiliary sealing rod with the inclined surface of the valve body's flow-blocking sealing ring, when the medium pressure pushes the flow-blocking sealing ring to deform, its force is decomposed into an axial component along the wedge-shaped inclined surface. This component automatically enhances the clamping force of the sealing valve plate on the valve hole, and the sealing contact pressure increases linearly with the increase of the medium pressure, forming a self-compensating sealing effect and overcoming the sensitivity of traditional planar seals to pressure fluctuations. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the flange structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the valve plate drive shaft structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the vacuum bellows structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the opening structure of the sealing valve plate of this utility model;

[0022] Figure 6 This is a schematic diagram of the closed structure of the sealing valve plate of this utility model.

[0023] In the diagram: 1. Valve body; 2. Valve hole; 3. Flange; 4. Butt sealing ring; 5. Mounting hole; 6. Valve plate drive shaft; 7. Fixing rod; 8. Auxiliary sealing pressure rod; 9. Sealing valve plate; 10. Vacuum bellows; 11. Wedge-shaped sealing groove; 12. Flow-stopping sealing ring. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1: Please refer to Figure 1 - Figure 6This utility model provides the following technical solution: A single-axis driven semiconductor pressure-controlled valve with an auxiliary sealing mechanism for the opposite side pressure rod, comprising a valve body 1, a valve hole 2 in the middle of the valve body 1; symmetrically distributed mounting holes 5, with two mounting holes 5 symmetrically distributed on both sides of the valve hole 2; a valve plate drive shaft 6 is slidably connected inside the mounting holes 5; a fixing rod 7 and an auxiliary sealing pressure rod 8 are respectively fixedly connected to the ends of the two valve plate drive shafts 6; a sealing valve plate 9 is fixedly connected to the end of the fixing rod 7 away from the valve plate drive shaft 6; a flange 3 is provided on one side of the valve body 1 surrounding the valve hole 2; a mating sealing ring 4 is provided on the edge of the valve body 1 away from the flange 3; the diameter of the sealing valve plate 9 is larger than the diameter of the valve hole 2; the end of the auxiliary sealing pressure rod 8 away from the valve plate drive shaft 6 is in contact with the sealing valve plate 9; and the sealing valve plate 9 has a... The valve plate drive shaft 6 is aligned with the center of the valve hole 2; a vacuum bellows 10 is sleeved on the outside of the valve plate drive shaft 6, and the end of the vacuum bellows 10 is fixedly connected to the outside of the valve body 1. The free end of the vacuum bellows 10 is fixedly connected to the end flange of the valve plate drive shaft 6; a flow-blocking sealing ring 12 is fixedly connected to the outside of the valve hole 2, and a wedge-shaped sealing groove 11 is provided on the edge of the auxiliary sealing rod 8 near the valve hole 2. The wedge-shaped sealing groove 11 and the flow-blocking sealing ring 12 fit together to form a sealing structure; the inclined surface of the wedge-shaped sealing groove 11 forms an angle with the axis of the valve hole 2, and the angle causes the flow-blocking sealing ring 12 to generate an axial component force when it is pressed, pushing the sealing valve plate 9 to fit tightly against the end face of the valve hole 2; the fixing rod 7 applies a force toward the valve hole 2 to the sealing valve plate 9, and the fixing rod 7 limits the maximum movement distance of the sealing valve plate 9 away from the valve hole 2.

[0026] The valve body 1 serves as the main support of the mechanism. Two mounting holes 5 are symmetrically arranged inside the valve body 1, located on both sides of the valve hole 2. Two valve plate drive shafts 6 are inserted into the mounting holes 5 in a sliding fit manner, forming a symmetrical linear motion structure. When the external drive device applies an axial thrust to one of the valve plate drive shafts 6, the two valve plate drive shafts 6 are rigidly connected to the sealing valve plate 9 through the fixing rod 7 and the auxiliary sealing pressure rod 8. The valve plate drive shaft 6 under force slides axially along the mounting hole 5, and directly pushes the sealing valve plate 9 towards the valve hole 2 through the fixing rod 7 fixed at the end.

[0027] The valve plate drive shaft 6 on the symmetrical side moves synchronously under the rigid connection of the fixed rod 7 and the auxiliary sealing pressure rod 8. The auxiliary sealing pressure rod 8 applies an auxiliary force to the contact surface between the sealing valve plate 9 and the sealing valve plate 9 to ensure the balanced advancement of the sealing valve plate 9. The single-axis input drives the two-axis linkage, avoiding the problem of asynchronous movement that may be caused by traditional dual-axis drive. At the same time, the symmetrically distributed mounting holes 5 and the valve plate drive shaft 6 form a torque self-balancing structure to avoid the deflection of the sealing valve plate 9 caused by unilateral force.

[0028] The center of the sealing valve plate 9 is aligned with the axis of the valve hole 2, and its diameter is slightly larger than the diameter of the valve hole 2. During the valve closing process, the valve plate drive shaft 6 pushes the fixing rod 7 to move the sealing valve plate 9 toward the end face of the valve hole 2 until the sealing valve plate 9 completely covers the inlet of the valve hole 2. At this time, the end face of the sealing valve plate 9 is in close contact with the flow-blocking sealing ring 12 around the valve hole 2, forming a primary sealing interface.

[0029] Since the diameter of the sealing valve plate 9 is larger than that of the valve hole 2, when it is closed, the part that extends beyond the edge of the valve hole 2 forms a fitting gap with the inner wall of the valve body 1. This gap is strictly controlled by the rigid limiting effect of the fixing rod 7 to prevent the sealing valve plate 9 from vibrating or shifting due to pressure fluctuations. At the same time, the fixing rod 7 limits the maximum stroke of the sealing valve plate 9 away from the valve hole 2 through rigid constraint, ensuring the controllability of the flow rate when the valve is opened.

[0030] The end of the auxiliary sealing rod 8 is attached to the outer edge of the sealing valve plate 9. A wedge-shaped sealing groove 11 is machined on the side near the valve hole 2. When the valve is closed, the flow-blocking sealing ring 12 fixed on the outside of the valve hole 2 is embedded in the wedge-shaped sealing groove 11 of the auxiliary sealing rod 8 to form a secondary sealing structure.

[0031] When the pressure inside the medium acts on the valve orifice 2, the flow-stopping sealing ring 12 undergoes radial deformation under the pressure of the medium, and tightly adheres to the inclined surface of the wedge-shaped sealing groove 11. The design angle between the inclined surface of the wedge-shaped sealing groove 11 and the axis of the valve orifice 2 causes the deformation of the flow-stopping sealing ring 12 to be decomposed into axial force and normal force on the inclined surface. The axial force pushes the auxiliary sealing pressure rod 8 and the sealing valve plate 9 that is in contact with it to further press the end face of the valve orifice 2, forming a dynamic self-reinforcing sealing effect. The normal force provides the contact pressure required for the pre-tightening seal of the flow-stopping sealing ring 12, preventing medium leakage. This makes the sealing effect of the valve stronger as the medium pressure increases under high pressure or pulse conditions, solving the problem that traditional planar pressure seals are prone to failure due to fluctuations in operating conditions.

[0032] The vacuum bellows 10, which is sleeved on the outside of the valve plate drive shaft 6, is fixed at one end to the outside of the valve body 1, and the other end is connected to the flange at the end of the valve plate drive shaft 6. Its function is twofold: when the valve plate drive shaft 6 drives the sealing valve plate 9 to open and close, the vacuum bellows 10 adapts to the displacement of the valve plate drive shaft 6 through its axial expansion and contraction characteristics, avoiding wear or leakage caused by frequent sliding of traditional packing seals.

[0033] In semiconductor processes, the medium may be a high-purity gas or a corrosive fluid. The vacuum bellows 10 completely isolates the sliding part of the valve plate drive shaft 6 from the inside of the valve body 1, preventing the medium from contacting the drive components, eliminating the risk of contamination and extending the life of the mechanism. The vacuum bellows 10 expands and contracts according to the displacement of the valve plate drive shaft 6, maintaining the integrity of the sealed cavity, while compensating for dimensional fluctuations caused by temperature or pressure changes.

[0034] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" or "linked" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A single-axis driven semiconductor pressure-controlled valve side pressure rod auxiliary sealing mechanism, comprising a valve body (1), wherein a valve hole (2) is provided in the middle of the valve body (1); Its features are: The valve body (1) has two symmetrically distributed mounting holes (5) inside, and the two mounting holes (5) are symmetrically distributed on both sides of the valve hole (2). A valve plate drive shaft (6) is slidably connected inside the mounting hole (5). A fixing rod (7) and an auxiliary sealing pressure rod (8) are fixedly connected to the ends of the two valve plate drive shafts (6), respectively. A sealing valve plate (9) is fixedly connected to the end of the fixing rod (7) away from the valve plate drive shaft (6).

2. The auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve according to claim 1, characterized in that: The valve body (1) has a flange (3) distributed around the valve hole (2) on one side, and a butt sealing ring (4) is provided on the edge of the valve body (1) away from the flange (3).

3. The auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve according to claim 2, characterized in that: The diameter of the sealing valve plate (9) is larger than the diameter of the valve hole (2). The end of the auxiliary sealing rod (8) away from the valve plate drive shaft (6) is in contact with the sealing valve plate (9), and the center of the sealing valve plate (9) is aligned with the center of the valve hole (2).

4. The auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve according to claim 3, characterized in that: A vacuum bellows (10) is sleeved on the outside of the valve plate drive shaft (6), and the end of the vacuum bellows (10) is fixedly connected to the outside of the valve body (1). The free end of the vacuum bellows (10) is fixedly connected to the end flange of the valve plate drive shaft (6).

5. The auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve according to claim 4, characterized in that: A flow-blocking sealing ring (12) is fixedly connected to the outside of the valve hole (2). A wedge-shaped sealing groove (11) is provided on the edge of the auxiliary sealing rod (8) near the valve hole (2). The wedge-shaped sealing groove (11) and the flow-blocking sealing ring (12) fit together to form a sealing structure.

6. The auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve according to claim 5, characterized in that: The inclined surface of the wedge-shaped sealing groove (11) forms an angle with the axis of the valve hole (2), and the angle causes the axial component force generated when the flow-blocking sealing ring (12) is compressed to push the sealing valve plate (9) to fit tightly against the end face of the valve hole (2).

7. The auxiliary sealing mechanism for the side pressure rod of a single-axis driven semiconductor pressure-controlled valve according to claim 6, characterized in that: The fixing rod (7) applies a force toward the valve hole (2) to the sealing valve plate (9), and the fixing rod (7) limits the maximum movement distance of the sealing valve plate (9) away from the valve hole (2).

Images