Valve mechanism

Abstract

The utility model relates to a valve mechanism which is suitable for selectively sealing or opening a first opening port on a cavity. The valve mechanism comprises a displacement assembly, a carrier plate, a sealing disc and a guide assembly. The displacement assembly drives the sealing disc to do reciprocating motion through the carrier plate, and when the guiding assembly does reciprocating motion on the sealing disc, the guiding assembly correspondingly guides the direction of the sealing face of the sealing disc according to the direction of the sealing face of the first opening port in the cavity, so that the sealing face of the sealing disc is parallel to the sealing face of the first opening port in the cavity. And a first opening port on the cavity is sealed by symmetrically applying force.

Description

Technical Field

[0001] This utility model relates to valve technology, and more particularly to a valve mechanism. Background Technology

[0002] Traditional vacuum valves mostly use rubber-like elastic materials, commonly known as O-rings, as the sealing component between the valve plate and the valve body. Since O-rings achieve the desired sealing effect through compression deformation, they are only suitable for valve bodies where sealing performance is not critical. Therefore, this type of sealing component is unsuitable for high vacuum systems and high-temperature environments.

[0003] While some high-vacuum systems use all-metal valves instead of non-all-metal valves containing rubber seals, the sealing surface is formed by the contact between two metal layers. Therefore, the required closing force increases with the number of valve openings and closings, thus shortening the valve's lifespan. Furthermore, dimensional changes in the metal layers due to heating or cooling can cause relative movement and shear deformation between the two layers, potentially damaging the seal. Moreover, traditional vacuum valves, which use support plates to push the sealing disc, often experience the problem of non-driving support plates (e.g., the upper support plate) falling off. Utility Model Content

[0004] In view of this, one or more objectives of this utility model are to provide a valve mechanism to solve many of the problems of the aforementioned conventional technology.

[0005] To achieve the aforementioned objectives, this utility model proposes a valve mechanism suitable for selectively sealing or opening a first opening port on a cavity. The valve mechanism includes: a displacement assembly that performs a first reciprocating motion along a first axial direction; two carrier plates movably located on either side of the displacement assembly, for performing a second reciprocating motion along the first axial direction in conjunction with the first reciprocating motion of the displacement assembly, and the displacement assembly further driving the two carrier plates to perform a third reciprocating motion in the opposite direction along a second axial direction; and a sealing disc that performs a third reciprocating motion along the second axial direction in conjunction with the first reciprocating motion of the displacement assembly. The second reciprocating motion is performed axially, and the sealing disc performs a fourth reciprocating motion corresponding to the third reciprocating motion of one of the two carrier plates between a half-open / closed position and a hard-closed position; and a guiding component, which, during the fourth reciprocating motion of the sealing disc and its movement from the half-open / closed position to the hard-closed position, guides the sealing surface of the sealing disc according to the orientation of the sealing surface of the first opening port on the cavity, so that the sealing surface of the sealing disc is parallel to the sealing surface of the first opening port on the cavity, thereby symmetrically applying force to seal the first opening port on the cavity.

[0006] As described above, the valve mechanism of this utility model has one or more advantages or technical effects:

[0007] (1) The valve mechanism has a guiding component (or, correction component or guide component). The guiding component can adjust (or correct) the orientation of the sealing disc on the second elastic plate according to the orientation of the first opening port of the cavity, when the sealing disc contacts the first opening port (or, at that moment) or before, so that it remains completely parallel to the first opening port.

[0008] (2) The sealing disc can contact the first opening port on the cavity in parallel, and can contact the first opening port on the cavity in a way of uniform stress distribution and contact pressure distribution to symmetrically apply force to seal the first opening port, and can reduce the wear phenomenon caused when the sealing disc contacts the first opening port.

[0009] (3) The guiding component of the valve mechanism can be a second elastic plate with a bending area, so as to achieve the function of pre-adjusting (or correcting) the orientation of the sealing disc on the second elastic plate.

[0010] (4) The guide component of the valve mechanism can be a kit frame and has a reset component, which is used to abut the carrier plate according to the orientation of the first opening port of the cavity, thereby realizing the function of pre-adjusting (or correcting) the orientation of the sealing disc on the carrier plate, and the guide component can selectively have a structural design that is completely fitted with the first opening of the cavity.

[0011] (5) The guiding component may have an extension plate that extends laterally or longitudinally to prevent the sealing disc from contacting the first opening of the cavity earlier than the guiding component. By increasing the contact area, the force can be more even when the two come together, and the force arm can be increased by using a spring with a smaller elastic coefficient.

[0012] (6) Using a locking plate with a guide groove to replace part or all of the support plates helps to solve the common problem of plate falling off when the support plates are driven by traditional technology.

[0013] (7) The valve mechanism can use a clamping plate instead of a clamping ring to abut the second opening port on the cavity, so that the sealing performance of the sealing disc is no longer affected by the geometry of the clamping ring.

[0014] (8) The valve mechanism has a very small left and right offset in the cavity. Compared with the traditional valve mechanism without a guide design, the valve mechanism of this utility model has a significant leap in centering performance during the movement. Therefore, there is no need to worry about whether the geometric shape of the clamping ring will affect the sealing effect.

[0015] (9) The valve mechanism can achieve the design principle of maintaining the drive by a single drive device in a limited cavity space.

[0016] (10) The valve mechanism can be made of all-metal material. The sealing disc can directly abut the sealing surface of the first opening port of the cavity to achieve a vacuum sealing effect, and even an ultra-high vacuum sealing effect, without the need for additional gaskets or washers. Even in an ultra-high vacuum environment, the sealing disc can withstand the closing force applied to the sealing disc from inside the vacuum valve cavity and the atmospheric pressure applied to the sealing disc from outside the vacuum valve cavity. Moreover, the sealing surface of the sealing disc can rotate relative to the sealing surface of the first opening port of the cavity and maintain constant contact. This provides a lubrication effect when the metal sealing surfaces abut against each other, and also provides compensation and adjustment movements, thus improving sealing performance and extending service life, and maintaining constant vacuum sealing performance.

[0017] To enable you to have a better understanding of the technical features and effects of this utility model, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0018] Figure 1 A three-dimensional schematic diagram of the valve mechanism according to the first embodiment of this utility model is shown.

[0019] Figure 2 A front view schematic diagram of the valve mechanism of the first embodiment of the present invention for sealing or opening the cavity is shown, wherein the displacement component reaches the fully retracted height H1.

[0020] Figure 3 A front view schematic diagram of the valve mechanism of the first embodiment of the present invention for sealing or opening the cavity is shown, wherein the displacement component reaches the half-extension height H2 and the sealing disc reaches the half-open / closed position W1.

[0021] Figure 4 The diagram shows a side view of the valve mechanism of the first embodiment of the present invention for sealing the cavity, wherein the sealing disc reaches the hard sealing position W2.

[0022] Figure 5 (A) to Figure 5 (C) Draw them separately Figure 1 The diagram shown is a flow chart of the valve mechanism's sealing cavity, and only a partial structure is displayed. Figure 5 (A) Displays the displacement component reaching the half-extension height H2. Figure 5 (B) Display displacement assembly moves within the travel difference (pitch D1) to drive the sealing disc to move position. Figure 5 (B) Display displacement component drives the sealing disc to the hard seal position W2.

[0023] Figure 6A schematic diagram of the guiding component according to the first embodiment of this utility model is shown, wherein... Figure 6 (A) is the front view. Figure 6 (B) is a side view.

[0024] Figure 7 A perspective schematic diagram illustrating one embodiment of the valve mechanism of the second embodiment of this utility model is shown.

[0025] Figure 8 Draw Figure 7 Side view diagram.

[0026] Figure 9 (A) to Figure 9 (C) Draw them separately Figure 7 The diagram shown is a flow chart of the valve mechanism sealing cavity, and only a partial structure is shown.

[0027] Figure 10 (A) to Figure 10 (D) A front view and a side view of the guide assembly and the clamping plate of the second embodiment of the present invention are shown, wherein... Figure 10 (A) and Figure 10 (C) are the side view and front view of the clamping plate, respectively. Figure 10 (B) and Figure 10 (D) are the side view (including the sealing disc) and the front view of the guiding assembly, respectively.

[0028] Figure 11 A side view schematic diagram illustrating another feasible state of the valve mechanism of the second embodiment of this utility model is shown.

[0029] Figure 12 (A) to Figure 12 (C) Draw them separately Figure 11 The diagram shown is a flow chart of the valve mechanism sealing cavity, and only a partial structure is shown.

[0030] Figure 13 A three-dimensional schematic diagram of the valve mechanism according to the third embodiment of this utility model is shown.

[0031] Figure 14 (A) to Figure 14 (C) Draw them separately Figure 13 The diagram shown is a flow chart of the valve mechanism sealing cavity, and only a partial structure is shown.

[0032] Figure 15 This is a cross-sectional schematic diagram of the first embodiment of the sealing disc of this utility model, wherein the bottom surfaces of the auxiliary seat and the connecting seat are at the same height.

[0033] Figure 16This is a cross-sectional schematic diagram of the first embodiment of the sealing disc of this utility model, wherein the bottom surface heights of the auxiliary seat and the connecting seat are different.

[0034] Figure 17 This is a cross-sectional schematic diagram of the second embodiment of the sealed disc of this utility model.

[0035] Figure 18 A schematic diagram illustrating the valve mechanism of this utility model for sealing the cavity is shown.

[0036] Explanation of reference numerals in the attached figures:

[0037] 10: Valve Mechanism

[0038] 12: Base

[0039] 14: Opening

[0040] 18: Guide slot

[0041] 20: Displacement component

[0042] 21: Support components

[0043] 22: Support plate

[0044] 23: Limiting groove

[0045] 24: Tenon board

[0046] 25: Guide groove

[0047] 27: Guiding surface

[0048] 28: Pin

[0049] 40a, 40b: Carrier plates

[0050] 41: Extension plate

[0051] 42a, 42b: First elastic sheet

[0052] 45: Straight section

[0053] 43: Fixed block

[0054] 44a, 44b: Second elastic sheet

[0055] 46: Straight section

[0056] 48: Bending section

[0057] 60: Sealed disc

[0058] 62: Sealing surface

[0059] 68: Tightening plate

[0060] 70: Base

[0061] 72: Auxiliary Seat

[0062] 73: Annular inclined plane

[0063] 73': Annular concave surface

[0064] 74: Sealing plate

[0065] 75: First Wing Plate

[0066] 76: Second Wing

[0067] 78: Union Seat

[0068] 79: Connecting Hole

[0069] 80: Correction Component

[0070] 82, 82': Grooving

[0071] 84: Reset component

[0072] 86, 86': Extension plate

[0073] 90: Clamping plate

[0074] 100: Cavity

[0075] 102: Cavity wall

[0076] 104: Storage space

[0077] 106: Cavity floor

[0078] 108: Cavity Top

[0079] 110a: First Opening Port

[0080] 110b: Second Opening Port

[0081] 112: Sealing surface

[0082] 118a: First flange

[0083] 118b: Second flange

[0084] 120: Drive unit

[0085] 122: Moving stick

[0086] S10, S20, S30: Steps

[0087] D1, D2, D3, D4: Spacing

[0088] M1: First reciprocating motion

[0089] M2: Second reciprocating motion

[0090] M3: Third reciprocating motion

[0091] M4: Fourth reciprocating motion

[0092] H1: Fully closed height

[0093] H2: Semi-extension height

[0094] H3: Fully unfolded height

[0095] W1, W1': Half-open / closed position

[0096] W2, W2': Hard sealing position

[0097] P0: Bend

[0098] θ: Bending angle

[0099] α1: First included angle

[0100] α2: Second included angle

[0101] α3: Third included angle

[0102] R1: First ring connection

[0103] R2: Second ring connection

[0104] Z: First Axial Direction

[0105] X: Second axis

[0106] Y: Third axis

[0107] F: Closing force Detailed Implementation

[0108] To facilitate understanding of the technical features, content, advantages, and effects of this utility model, it is described in detail below with reference to the accompanying drawings and embodiments. The drawings used are for illustrative purposes only and do not necessarily represent the actual proportions and precise configurations of the utility model in practice. Therefore, the proportions and configurations in the accompanying drawings should not be used to interpret or limit the scope of the utility model in actual implementation. Furthermore, for ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

[0109] Furthermore, unless otherwise specified, the terms used throughout this specification and claims generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe this utility model will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing this utility model.

[0110] The use of terms such as "first," "second," "third," and "fourth" in this document does not specifically refer to any order or sequence, nor is it intended to limit the present invention. Rather, it is merely used to distinguish components or operations described using the same technical terms.

[0111] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0112] The valve mechanism of this invention is suitable for selectively sealing or opening the first opening port on a cavity. The valve mechanism of this invention can be pre-adjusted relative to the first opening port of the cavity via a guiding component, so that the sealing disc applies force symmetrically to seal the first opening port on the cavity. The sealing disc makes horizontal contact with and applies force to seal the first opening port (referred to as horizontal sealing or parallel sealing). Even through uniform stress and contact pressure distribution, good contact with the first opening port can be achieved. This invention can selectively omit the use of non-metallic sealing components (such as gaskets or O-rings) commonly used in traditional non-horizontal sealing (i.e., adjusting the orientation only after the sealing surface of the sealing disc contacts the sealing surface of the first opening port) and other asymmetric force sealing technologies. Furthermore, this invention can effectively reduce wear caused by non-uniform stress and contact pressure distribution in traditional non-horizontal sealing technologies. The valve mechanism of this utility model can realize an all-metal valve with automatic or active guidance design. However, this utility model is not limited to this; there are no specific material limitations on the valve mechanism and the applicable cavity, which can be made of all-metal or non-all-metal materials. For example, the aforementioned cavity can be the cavity of various vacuum valves. Furthermore, the cavity applicable to the valve mechanism of this utility model is not limited to a specific structure, shape, or material. Any cavity that can be used by the valve mechanism to seal or open the first opening port on the cavity is within the scope of application of this utility model. The valve mechanism of this utility model can be, for example, a single-sided sealing type or a double-sided sealing type, meaning that the valve mechanism of this utility model can not only symmetrically apply force to seal the first opening port on the cavity, but also selectively and simultaneously symmetrically apply force to seal the first and second opening ports on the cavity.

[0113] Please see Figures 1 to 6As shown in other figures, the valve mechanism 10 of the first embodiment of this utility model is used to seal or open the first opening port 110a on the cavity 100. The valve mechanism 10 and the cavity 100 constitute a valve device. The cavity 100 mainly includes a cavity wall 102, a cavity bottom 106, a cavity top 108, and a receiving space 104, wherein the receiving space 104 is mainly surrounded by the cavity wall 102, the cavity bottom 106, and the cavity top 108, and the valve mechanism 10 is disposed in the receiving space 104 of the cavity 100. The cavity 100 may also optionally have a second opening port 110b, which is located, for example, on the opposite side of the first opening port 110a. The aforementioned first opening port 110a and second opening port 110b are, for example, two opposite cavity walls 102 of the cavity 100, each having an opening thereon; or the first opening port 110a and second opening port 110b are, for example, a first flange 118a and a second flange 118b disposed on two opposite cavity walls 102 of the cavity 100, each having an opening thereon. For ease of explanation of the embodiments of this utility model, the following description mainly uses the operation of the valve mechanism 10 closing the first opening port 110a on the cavity 100 as an example. However, those skilled in the art should understand, based on the disclosure of this utility model, how the valve mechanism 10 of this utility model opens the first opening port 110a, therefore, it will not be described again here.

[0114] The valve mechanism 10 of this utility model mainly includes a displacement component 20, two carrier plates 40a and 40b, a sealing disc 60, and a guiding component 80. The displacement component 20 moves the sealing disc 60 sequentially along two different axes (e.g., the Z-axis direction and the X-axis direction) via at least one of the two carrier plates 40a and 40b (e.g., carrier plate 40a). The valve mechanism 10 of this utility model is characterized in that the guiding component 80 (or, the first correction component) can pre-adjust the orientation of the sealing surface 62 of the sealing disc 60 according to the orientation of the sealing surface of the first opening port 110a. This ensures that when the sealing surface 62 of the sealing disc 60 contacts the sealing surface 112 of the first opening port 110a (or, at that moment), or before, the sealing surface 62 of the sealing disc 60 is guided (or corrected) to be substantially (e.g., completely) parallel to the sealing surface 112 of the first opening port 110a. By achieving parallel contact with the first opening port 110a through uniform stress distribution and contact pressure distribution, the technical effect of symmetrically applying force to seal the first opening port 110a is achieved. The Z-axis direction and the X-axis direction are, for example, perpendicular to each other and both perpendicular to a third axis (e.g., the Y-axis direction).

[0115] For example, in the valve mechanism 10 of this invention, the displacement component 20 is, for example, a block-shaped body. The displacement component 20 is driven by a drive device 120 to perform a first reciprocating motion M1 along a first axial direction Z (e.g., the Z-axis direction), thereby moving its position, for example, between a fully retracted height H1 and a fully extended height H3. The drive device 120 may be, for example, a pneumatic or electric drive cylinder, which has, for example, a moving rod (e.g., a piston rod) and can be controlled, for example, entirely or partially, by manual control, automatic control, or automatic pressure control (APC). The drive device 120 is connected to the displacement component 20, for example, by a moving rod 122. The retraction or extension of the moving rod 122 allows the displacement component 20 (e.g., its bottom side) to move its position between the fully retracted height H1 and the fully extended height H3. Taking the drive device 120 as an example of a pneumatic drive cylinder, this invention can achieve smooth closing, smooth opening, or smooth actuation by controlling the air pressure or airflow supplied to the pneumatic drive cylinder. The valve mechanism 10 of this invention selectively includes a solenoid valve, a piezoelectric pressure regulating valve, or a voice coil pressure regulating valve to control the air pressure or airflow supplied to the pneumatic drive cylinder. During the first reciprocating motion M1 of the displacement component 20 along the first axial direction Z, the drive device 120 (e.g., a pneumatic or electric drive device) can selectively drive the displacement component 20 with a single pressure value and / or speed value, and / or drive the displacement component 20 with multiple pressure values ​​and / or speed values. Furthermore, the drive device 120 is not limited to driving the displacement component 20 by open-loop control or closed-loop control.

[0116] In the valve mechanism 10 of this invention, two carrier plates 40a and 40b are movably located on both sides of the displacement component 20, respectively, to accompany the displacement component 20 in performing a first reciprocating motion M1 along the first axis Z and a second reciprocating motion M2 along the first axis Z, thereby moving their positions simultaneously as the displacement component 20 moves between its fully retracted height H1 and its half-extended height H2. For example, in the valve mechanism 10 of this invention, each of the two carrier plates 40a and 40b is movably located on both sides of the displacement component 20 via at least one support component 21 [e.g., at least one support piece 22 (e.g., four), at least one latch plate 24 (e.g., four), and / or at least one support piece 22 (e.g., two) paired with at least one latch plate 24 (e.g., two)]. The displacement assembly 20 and the two carrier plates 40a and 40b may, for example, each have a limiting groove 23, and the support piece 22 may be, for example, a strip rod with both ends movably accommodated in the limiting grooves 23 of the displacement assembly 20 and the two carrier plates 40a and 40b. Alternatively, the present invention may selectively replace part or all of the support piece 22 with a latch plate 24. For example, the displacement assembly 20 may selectively include a guide groove 25, wherein the top surface of the guide groove 25 is a guide surface 27 (e.g., composed of a single slope or containing multiple different slopes). One end of the latch plate 24 is fixed to the two carrier plates 40a and / or 40b, and the other end extends toward the displacement assembly 20. The latch plate 24 may, for example, but is not limited to, be integrally formed on the carrier plates 40a and / or 40b. The use of a latch plate 24 to replace part or all of the support piece 22 in the present invention helps to solve the problem of the support piece 22 falling off at the upper position, which is common and difficult to avoid in conventional technology.

[0117] Furthermore, the movement directions of the first reciprocating motion M1 and the second reciprocating motion M2 are, for example, the same (for example, when the valve device composed of the valve mechanism 10 and the cavity 100 is to change from a fully open state to a half open / closed state, they both move from the top to the bottom of the drawing; when the valve device is to change from a half open / closed state to a fully open state, they both move from the bottom to the top of the drawing). However, the first reciprocating motion M1 and the second reciprocating motion M2 have different path lengths (for example, the first movement path of the first reciprocating motion M1 has a greater distance difference than the second movement path of the second reciprocating motion M2, for example, the distance D1). Therefore, when the displacement component 20 continues to move in part of the first reciprocating motion M1 (i.e., the extra distance difference, the gap D1 mentioned above), the displacement component 20 can pivotally expand or contract the support component 21, thereby further driving the two carrier plates 40a and 40b to perform a third reciprocating motion M3 along the second axis X (e.g., the X-axis direction) in opposite directions (e.g., directions away from each other or close to each other) between the semi-open / closed position W1' and the hard-closed position W2', thereby correspondingly causing the sealing disc 60 to perform a fourth reciprocating motion M4 between the semi-open / closed position W1 and the hard-closed position W2. In addition, since the displacement component 20 deploys the support component 21 by pivoting, causing the carrier plates 40a and 40b to perform a third reciprocating motion M3, the upper and lower movement distances of the carrier plates 40a and 40b will be unequal. Furthermore, the higher the position, the greater the distance (gap) between the carrier plate 40a and 40b and the displacement component 20. Therefore, it is more likely that the movable support piece 22 (especially the upper support piece 22) will fall off during the driving process. In other words, this utility model... Figure 1 The embodiment shown uses a combination of a latch plate 24 and a guide groove 25 to replace part or all of the combination of the support piece 22 and the limiting groove 23, which helps to solve the common and unavoidable problem of piece falling off when the support piece 22 is pivoted and displaced by conventional technology.

[0118] Therefore, it can be understood that the two carrier plates 40a and 40b of the valve mechanism 10 of this utility model can perform a first reciprocating motion M1 along the first axis Z, and a second reciprocating motion M2 along the first axis Z, accompanied by the displacement component 20. The sealing disc 60 can also perform a fourth reciprocating motion M4 between the semi-open / closed position W1 and the hard-closed position W2, corresponding to the third reciprocating motion M3 of the carrier plate 40a. For example, the sealing disc 60 is located on the side of one of the two carrier plates 40a and 40b. For instance, the sealing disc 60 is movably adjacent to the side of the carrier plate 40a or fixedly disposed on the side surface of the carrier plate 40a, so that the sealing disc 60 can move its position by the displacement of the carrier plate 40a in the second reciprocating motion M2 and the third reciprocating motion M3. Furthermore, the relative position and / or orientation relationship between the sealing disc 60 and the carrier plate 40a can be either changeable or fixed. For example, in the first embodiment of this utility model, the sealing disc 60 is fixed on the second elastic sheet 44a (described later) (meaning that the sealing disc 60 is not disposed on the carrier plate 40a), thereby movably located on the side of the carrier plate 40a. In other words, the sealing disc 60 can correspondingly perform a fourth reciprocating movement M4 between the semi-open position W1 and the hard-closed position W2 by the third reciprocating movement M3 of the carrier plate 40a. This utility model is illustrated by taking the displacement component 20 as a plate (e.g., a rectangular plate), however, this utility model is not limited to this. Any displacement component 20 of any shape (i.e., shape and structure) that can cause the two carrier plates 40a and 40b to sequentially perform a second reciprocating movement M2 and a third reciprocating movement M3 by performing a first reciprocating movement M1 falls within the scope of protection of this utility model. Furthermore, the two carrier plates 40a and 40b of this utility model are not limited to being the same or different shapes. As long as they can be located between the displacement component 20 and the sealing disc 60, and thus move the sealing disc 60 sequentially along two different axes (e.g., the Z-axis direction and the X-axis direction) in the second reciprocating motion M2 and the third reciprocating motion M3 in accompaniment to the first reciprocating motion M1 of the displacement component 20, they fall within the scope of the claims of this utility model.

[0119] One of the features of the valve mechanism 10 of this utility model is that it has a guiding component 80, which is used to directly or indirectly adjust the orientation of the sealing surface 62 of the sealing disc 60. For example, it can automatically or actively (or even passively) adjust the sealing surface 62 of the sealing disc 60 from any orientation to be parallel to the sealing surface 112 of the first opening port 110a. For example, during the fourth reciprocating motion M4 of the sealing disc 60 (e.g., moving from the semi-open position W1 to the hard-closed position W2), the guiding component 80 guides the orientation of the sealing surface 62 of the sealing disc 60 according to the orientation of the sealing surface 112 of the first opening port 110a on the cavity 100, so that the sealing surface 62 of the sealing disc 60 is parallel to the sealing surface 112 of the first opening port 110a on the cavity 100, thereby symmetrically applying force to seal the first opening port 110a on the cavity 100. The aforementioned "guidance" (or adjustment or correction) refers to the pre-adjustment of the orientation of the sealing surface 62 of the sealing disc 60, so that the sealing surface 62 of the sealing disc 60 is already parallel to the sealing surface 112 of the first opening port 110a when (or at that moment) or before contacting the sealing surface 112 of the first opening port 110a on the cavity 100. Furthermore, after the sealing surface 62 and the sealing surface 112 come into contact, the sealing surface 62 of the sealing disc 60 can move parallel to the sealing surface 112 of the first opening port 110a, thereby allowing the sealing disc 60 to tightly abut against the first opening port 110a on the cavity 100, achieving an airtight seal. Therefore, this invention does not adjust the orientation of the sealing surface 62 of the sealing disc 60 after it has contacted the sealing surface 112 of the first opening port 110a on the cavity 100.

[0120] The valve mechanism 10 of this utility model further includes two first elastic plates 42a and 42b and a second elastic plate 44a. Two carrier plates 40a and 40b are respectively disposed on the first side (e.g., the top side) of the two first elastic plates 42a and 42b, and are located on both sides of the displacement assembly 20. The two sides of the displacement assembly 20 selectively have grooves (not shown) for embedding the top sides of the two first elastic plates 42a and 42b into the grooves. The second elastic plate 44a is located on the side of the first elastic plate 42a. The valve mechanism 10 of this utility model optionally includes a base 12. The shape of the base 12 is, for example, but not limited to, slightly U-shaped, with higher sides and a lower central area. The second sides (e.g., bottom sides) of the two first elastic plates 42a and 42b and the second elastic plate 44a are disposed on the base 12 (e.g., the bottom edge of the side of the base 12). The displacement component 20 is suspended above the base 12 by a distance (e.g., spacing D1). The two carrier plates 40a and 40b are disposed above the base 12 and located on both sides of the displacement component 20 via the two first elastic plates 42a and 42b and the aforementioned support component 21. The second sides (e.g., bottom sides) of the two first elastic plates 42a and 42b and the second elastic plate 44a and the base 12 respectively have openings 14. The morphology (e.g., shape and size) of these openings 14 may be the same or different from each other, and may be, for example, but not limited to, the same as the first opening port 110a and the second opening port 110b. When the sealing disc 60 hard seals the first opening port 110a on the cavity 100, the positions of these openings 14 are offset from the position of the first opening port 110a, for example, completely offset or partially offset. This invention uses a completely offset configuration as an example, but is not limited to this. The first elastic piece 42b, the first elastic piece 42a, and the second elastic piece 44a are respectively located on opposite sides of the base 12. The first elastic piece 42a and the second elastic piece 44a are located on the same side of the base 12 and selectively have a fixing block 43 between them. The thickness of the fixing block 43 allows the first elastic piece 42a and the second elastic piece 44a to be separated by a distance D4. Moreover, by adjusting the thickness of this fixing block 43, this invention can adjust the distance between the sealing disc 60 and the first opening port 110a, thereby enabling the guiding component 80 to correctly and accurately guide the orientation of the sealing disc 60.

[0121] Furthermore, the bottom side of the displacement component 20 of this invention may optionally have a pin 28, and the base 12 may optionally have a guide slot 18, for example, located on the top sides of both sides of the base 12. The depth of the guide slot 18 is preferably, but not limited to, the same as the aforementioned distance D1. By stably moving the pin 28 in the guide slot 18, the displacement component 20 can move more stably in the aforementioned first reciprocating motion M1 (distance D1). In other words, when the pin 28 moves stably in the guide slot 18, the two carrier plates 40a and 40b can also stably perform a third reciprocating motion M3 along the second axis X (e.g., the X-axis direction) in opposite directions (e.g., directions away from or close to each other), thereby more stably enabling the sealing disc 60 to perform a fourth reciprocating motion M4 between the semi-open position W1 and the hard-closed position W2.

[0122] When the sealed disc 60 fully opens the first opening port 110a on the cavity 100, the positions of the second sides (e.g., bottom sides) of the two first elastic plates 42a and 42b, the second elastic plate 44a, and the openings 14 on the base 12 move to positions corresponding to the first opening port 110a on the cavity 100. The second side (e.g., bottom side) of the displacement assembly 20 and the first side (e.g., top side) of the base 12 have, for example, the aforementioned distance D1. The displacement component 20 can use the distance difference (i.e., the aforementioned distance D1) between the first movement path of the first reciprocating motion M1 of the displacement component 20 along the first axis Z and the second movement path of the second reciprocating motion M2 of the two carrier plates 40a and 40b along the first axis Z to drive the two carrier plates 40a and 40b to perform a third reciprocating motion M3 in opposite directions along the second axis X, until the second side (e.g., the bottom side) of the displacement component 20 abuts against the first side (e.g., the top side) of the base 12.

[0123] In the first embodiment of this invention, a bent portion 48 located on the second elastic sheet 44a is used as a guiding component 80. This bent portion can be any elastic sheet with a bent shape, such as a spring. For example, the first elastic sheet 42a has a straight portion 45 extending along a first axial direction Z, and the second elastic sheet 44a has a straight portion 46 extending along the first axial direction Z. The two first elastic sheets 42a and 42b, and the second side (e.g., the bottom side) of the second elastic sheet 44a are disposed on the base 12. Furthermore, in the first embodiment of this invention, the second elastic sheet 44a mainly includes a bent portion 48 and a straight portion 46. The bent portion 48 is located on the straight portion 46 (e.g., the top side), and the bent portion 48 is integrally formed, for example, but not limited to, the straight portion 46. A sealing disc 60 is disposed on the bent portion 48 of the second elastic sheet 44a and movably positioned on the side of the carrier plate 40a, thereby allowing the bent portion 48 on the second elastic sheet 44a to be used as the guiding component 80. In one feasible embodiment of the first embodiment of this utility model, the second elastic sheet 44a is composed of a bent portion 48 and a straight portion 46. The second elastic sheet 44a of this utility model is not limited to being composed of a straight portion 46 and a bent portion 48, and the guiding component 80 can be any elastic sheet with a bending angle.

[0124] When the two carrier plates 40a and 40b are driven by the displacement component 20 to perform a third reciprocating motion M3 in opposite directions (e.g., moving away from each other) along the second axis X, the carrier plate 40a will also synchronously push the sealing disc 60 fixed on the bent portion 48 of the second elastic sheet 44a, so that the movement trajectory of the sealing disc 60 (e.g., slightly arc-shaped) can just compensate for the original orientation error. In other words, by using the guide component 80, this utility model can adjust the orientation of the sealing surface 62 of the sealing disc 60 when (or at the moment) it is about to or just before it contacts the sealing surface 112 of the first opening port 110a on the cavity 100, that is, to pre-align it with (e.g., parallel to) the sealing surface 112 of the first opening port 110a. The bent portion 48 of the second elastic sheet 44a is provided, for example, on the top side of the straight portion 46, and bends (or bends inward) from the bend point P0 toward the carrier plate 40a at a bending angle θ. In this way, when the sealing disc 60 is in the semi-open position W1, the top (e.g., the uppermost end) of the sealing surface 62 of the sealing disc 60 will be farther away from the first opening port 110a on the cavity 100 than the bottom (e.g., the lowermost end). However, when the sealing disc 60 is about to or just reaches the hard-closed position W2, the entire periphery (including the top and bottom) of the sealing surface 62 of the sealing disc 60 will be parallel to the first opening port 110a on the cavity 100, thereby simultaneously contacting the first opening port 110a through uniform stress distribution and contact pressure distribution. The bending angle θ can be any value between 0 and 180 degrees, preferably between 0 and 90 degrees, and even more preferably between 0 and 30 degrees, for example, about 5 degrees. The sealing disc 60 is, for example, fixed to the bent portion 48 of the second elastic sheet 44a, and the angle of elevation of its sealing surface 62 is substantially the same as the bending angle θ of the bent portion 48. However, this invention is not limited to this; the angle of elevation of the sealing surface 62 may also differ from the bending angle θ, depending on the actual requirements. This invention utilizes the pre-compression design of the second elastic sheet 44a bending inward (e.g., about 5 degrees) so that even if the carrier plate 40a is not parallel to the first opening port 110a when it is in the expanded state (e.g., the upper end of the carrier plate 40a is expanded more than the lower end), the sealing disc 60 can still be parallel to the first opening port 110a when it is pushed to the first opening port 110a.

[0125] Furthermore, the structural configuration of the bending portion 48 of this invention can be adjusted according to the configuration of other components of the valve mechanism 10. For example, the bending angle θ of the bending portion 48 is adjusted to correspond to the distance D2 between the semi-open / closed position W1 and the hard-closed position W2 of the sealing disc 60; the length ratio of the bending portion 48 to the straight portion 46 of the second elastic plate 44a is adjusted to correspond to the distance D2 between the semi-open / closed position W1 and the hard-closed position W2; and / or the setting position of the sealing disc 60 on the bending portion 48 is adjusted to correspond to the length ratio of the bending portion 48 to the straight portion 46 of the second elastic plate 44a. The length of the straight portion 45 of the first elastic plate 42a is, for example, but not limited to, greater than the length of the straight portion 46 of the second elastic plate 44a. In other words, the second elastic sheet 44a is not limited to a specific form. As long as it can pre-align the orientation of the sealing surface 62 of the sealing disc 60 when (or at that moment) it contacts the first opening 110a on the cavity 100, it falls within the scope of protection claimed by this utility model. Similarly, the two first elastic sheets 42a and 42b of this utility model are not limited to a specific form. Any structure that can support the two carrier plates 40a and 40b can be applied to this utility model.

[0126] In the first embodiment of this utility model, the valve mechanism 10 selectively includes a clamping disc 68, which is disposed on one of the two carrier plates 40a and 40b (e.g., carrier plate 40b). When the two carrier plates 40a and 40b perform a third reciprocating motion M3, the sealing disc 60 and the clamping disc 68 perform a fourth reciprocating motion M4 in opposite directions (e.g., towards each other), thereby abutting against the first opening port 110a and the second opening port 110b on the cavity 100 when the valve mechanism 10 hard seals the cavity 100. The structural configuration of the clamping disc 68 may be the same as or different from that of the sealing disc 60. The first embodiment of this utility model is illustrated by way of the clamping disc 68 being the same as that of the sealing disc 60, but it is not limited thereto.

[0127] During the first reciprocating motion M1 of the displacement component 20, moving from the fully retracted height H1 to the fully extended height H3, the distance D1 between the second side (e.g., the bottom side) of the displacement component 20 and the first side (e.g., the top side) of the base 12 remains a fixed value until the displacement component 20 reaches the fully extended height H3. That is, the first reciprocating motion M1 of the displacement component 20 does not drive the two carrier plates 40a and 40b to perform a third reciprocating motion M3 before the base 12 contacts the bottom side of the cavity 100. The value of this distance D1 is adjusted, for example, according to the required path length of the third reciprocating motion M3, and can be, for example, any default value. When the base 12 contacts the bottom side of the cavity 100 (i.e., the cavity bottom 106), the displacement component 20 will reach a half-extended height H2, and the sealing disc 60 will be in a half-open / closed position W1. The feature of this invention is that the displacement component 20 can further utilize the aforementioned distance D1 to continuously perform a first reciprocating motion M1 until the second side (e.g., the bottom side) of the displacement component 20 abuts against the first side (e.g., the top side) of the base 12 (i.e., the displacement component 20 reaches the fully extended height H3). In other words, after the base 12 contacts the cavity 100 (i.e., at the half-extension height H2), if the displacement component 20 continues to move towards the fully extended height H3, the distance between the displacement component 20 and the base 12 (i.e., the distance D1) will gradually decrease. Therefore, the displacement component 20 can synchronously drive the two carrier plates 40a and 40b to perform a third reciprocating motion M3 along the second axis X in opposite directions (e.g., in directions away from each other) via the aforementioned support component 21. At the same time, the sealing disc 60 and the pressing disc 68 can correspondingly perform a fourth reciprocating motion M4 in directions away from each other via the third reciprocating motion M3 of the carrier plates 40a and 40b. In other words, when the displacement component 20 moves to the fully extended height H3, the value of the aforementioned distance D1 will drop to 0 (i.e., the displacement component 20 contacts the base 12), and at this time the sealing disc 60 and the clamping disc 68 will just move to the hard-sealed position W2.

[0128] In other words, during the process of the valve mechanism 10 of this utility model sealing the first opening port 110a, after the base 12 abuts against the bottom of the cavity 100 with the first reciprocating motion M1 of the displacement component 20, the displacement component 20 can continue to move within the aforementioned distance D1, thereby pushing the two carrier plates 40a and 40b outward. At the same time, the two first elastic plates 42a and 42b and the second elastic plate 44a located on both sides of the two carrier plates 40a and 40b can also accumulate elastic potential energy. Similarly, when the valve mechanism 10 wants to open the first opening port 110a on the cavity 100 (that is, when the drive device 120 drives the displacement component 20 to perform the first reciprocating motion M1 from the fully extended height H3 to the fully retracted height H1), the sealing disc 60 and the pressing disc 68 can move from the hard-sealed position W2 to the semi-open position W1 by means of the elastic potential energy released by the two first elastic plates 42a and 42b and the second elastic plate 44a.

[0129] Therefore, it can be seen that the first embodiment of the valve mechanism 10 of this utility model uses the bent portion 48 located on the second elastic plate 44a as the guiding component 80. By pre-adjusting the movement trajectory of the sealing surface 62 of the sealing disc 60 during the fourth reciprocating motion M4, the sealing surface 62 can horizontally contact and horizontally seal the first opening port 110a (referred to as horizontal sealing or parallel sealing). Moreover, through uniform stress distribution and contact pressure distribution, good contact with the first opening port 110a can be achieved, which can undoubtedly effectively reduce the wear phenomenon commonly found in traditional non-horizontal sealing technology. Therefore, the valve mechanism 10 of this utility model can achieve the technical effect of automatically or actively guiding the sealing disc 60, and can even become an all-metal valve with automatic or active guiding design. Furthermore, by improving the structural design of the support component 21, the valve mechanism 10 of this utility model can effectively solve the common problem of support component 21 falling off.

[0130] When the sealing disc 60 of the valve mechanism 10 of this invention is used for vacuum sealing, the sealing disc 60 can withstand not only the closing force F applied to the sealing disc 60 from inside the cavity 100, but also the atmospheric pressure applied to the sealing disc 60 from outside the cavity 100 when the cavity 100 is in a vacuum state. The higher the vacuum level of the cavity 100, the higher the closing force F and atmospheric pressure will be. For example, when the sealing disc 60 is made of stainless steel with a thickness of about 1.8 mm, it can withstand a closing force F of about 500 kg, and when evacuated, its vacuum level can reach about 7.33 x 10⁻⁶. -11This invention is applicable to all-metal high-frequency shielded gate valves installed in the electron beam channel of superconducting accelerators. It is evident that the various functions and indicators of the sealing disc 60 of this invention, such as sealing performance, cleanliness, and structural strength, truly meet the specifications of ultra-high vacuum valve bodies. The sealing surface 62 of the sealing disc 60 can be, for example, but not limited to, a beveled surface, an arc surface, or a spherical surface. When the sealing disc 60 moves from the semi-open position W1 to the hard-closed position W2, the sealing surface 62 of the sealing disc 60 can contact the sealing surface 112 on the first opening port 110a of the cavity 100. Therefore, even if the closing force F applied from inside the cavity 100 causes the sealing disc 60 to undergo slight elastic deformation, the sealing surface 62 can still rotate and abut against the sealing surface 112, thereby maintaining the vacuum seal. Therefore, this utility model can improve the sealing performance and extend the service life by compensating for and adjusting the movement when the sealing surfaces of the metal materials abut against each other, and can avoid wear (abrasion) caused by collision between metals.

[0131] Please see Figure 15 and Figure 16 As shown in other figures, the first embodiment of the sealing disc 60 of the valve mechanism 10 of this utility model includes a base 70 and a sealing plate 74. The base 70 includes a connecting seat 78 and an auxiliary seat 72. The auxiliary seat 72 is integrally arranged around the side of the connecting seat 78. The auxiliary seat 72 and the bottom side (i.e., the upper part of the figure) of the connecting seat 78 are at the same height (e.g., the surface of the auxiliary seat 72 is the same as the surface of the bottom side of the connecting seat 78). Figure 15 (as shown) or different (e.g.) Figure 16 As shown), the auxiliary seat 72 has an annular inclined surface 73 on the top side. The sealing plate 74 is connected to the auxiliary seat 72 of the base 70, wherein the sealing surface 62 of the sealing disc 60 rotatably abuts against the sealing surface 112 on the first opening port 110a of the cavity 100 in the hard-sealed position W2, thereby maintaining a vacuum seal on the first opening port 110a.

[0132] The sealing plate 74 of the sealing disc 60 of the valve mechanism 10 of this utility model includes a first wing plate 75 and a second wing plate 76. The first wing plate 75 is integrally connected to the auxiliary seat 72 of the base 70 at the first annular joint R1, and extends outward at a first included angle α1 in a direction away from the first annular joint R1, wherein the first wing plate 75 extends outward obliquely from the top side of the base 72 toward the bottom side of the base 72. The second wing plate 76 is integrally connected to the first wing plate 75 at the second annular joint R2, and extends outward at a second included angle α2 in a direction away from the base 70, wherein the second wing plate 76 extends outward obliquely from the bottom side of the base 70 toward the top side of the base 70, wherein the sealing surface 62 of the sealing disc 60 is located on the end edge of the second wing plate 76, and the second wing plate 76 and the sealing surface 62 of the sealing plate 74 form a third included angle α3.

[0133] The coupling seat 78 is a first cylinder with a coupling hole 79, and the auxiliary seat 72 is a second cylinder with an annular inclined surface 73. The inclination of the annular inclined surface 73 of the auxiliary seat 72 is the same as the inclination of the first wing plate 75 (first included angle α1). The angle value of the first included angle α1 is between 5 degrees and 45 degrees, and can be any value therein. The angle value of the third included angle α3 is between 5 degrees and 45 degrees, and can be any value therein. The sum of the angle values ​​of the first included angle α1, the second included angle α2, and the third included angle α3 is 180 degrees. For example, the angle value of the first included angle α1 is the same as the angle value of the third included angle α3. In various feasible embodiments of the sealing disc 60 of this utility model, in terms of appearance, the cross-sectional shape of the sealing plate 74 of the sealing disc 60 can be, for example, a bent plate, a corrugated plate, an arc plate, or a wing-shaped plate. This can increase the structural strength and rigidity, that is, increase the structural toughness, making the sealing disc 60 a tough structure that simultaneously maintains strength and rigidity. However, this utility model is not limited to the above examples. The thickness of the first wing plate 75 is, for example, but not limited to, the same as the thickness of the second wing plate 76. The common projected length of the first wing plate 75 and the auxiliary seat 72 is, for example, but not limited to, the same as the projected length of the second wing plate 76. The common projected length of the first wing plate 75 and the auxiliary seat 72 is approximately 0.8 to 1.5 times the projected length of the second wing plate 76, and can be any value therein. The projected length of the base 70 is approximately 1 to 5 times the common projected length of the first wing plate 75 and the auxiliary seat 72, and can be any value therein. However, the above values ​​are only examples and are not intended to limit this utility model. The sealing surface 62 of the sealing plate 74 of the sealing disc 60 of this utility model can be selectively subjected to mechanical processing procedures such as lubrication and polishing. It is preferable to use dry polishing technology, such as dry blasting or fluid-jet polishing, to reduce surface roughness and increase lubricity by spraying abrasive particles, so that its surface roughness (Ra) is preferably less than about 0.3 μm, and more preferably less than about 0.1 μm.

[0134] Please see Figure 17 As shown in the other figures, the sealing disc 60 of the valve mechanism 10 of this utility model further includes a second embodiment, which is mostly the same as the first embodiment. The difference is that the auxiliary seat 72 has an annular concave surface 73' located on the bottom side (i.e., above the figure). Therefore, the surface heights of the auxiliary seat 72 and the bottom side (i.e., above the figure) of the connecting seat 78 are different. The auxiliary seat 72 is an annular arc-shaped body located on the side of the connecting seat 78.

[0135] In addition, please see Figures 7 to 10As shown in the other figures, the valve mechanism 10 of this utility model has a second embodiment, which differs from the first embodiment in that the sealing disc 60 is fixed on one of the two carrier plates 40a and 40b (e.g., carrier plate 40a). The two carrier plates 40a and 40b are respectively disposed on the first side (e.g., the top side) of the two first elastic plates 42a and 42b. The two first elastic plates 42a and 42b each have a straight portion 45 extending along the first axial direction Z, and the two second elastic plates 44a and 44b each have a straight portion 46 extending along the first axial direction Z. The second side (e.g., the bottom side) of the two first elastic plates 42a and 42b and the two second elastic plates 44a and 44b are disposed on the base 12.

[0136] In the second embodiment, the present invention uses a plate (or kit frame) with a slot 82 as the guiding component 80. The guiding component 80 is disposed on the first side (e.g., the top side) of the second elastic sheet 44a, and the guiding component 80 abuts against one of the two carrier plates 40a and 40b (e.g., 40a) via at least one reset component 84, so that the guiding component 80 can abut against the carrier plate 40a via the reset component 84, thereby indirectly adjusting the orientation of the sealing surface 62 of the sealing disc 60 disposed on the carrier plate 40a. The shape of the guiding component 80 with the slot 82 can surround the sealing disc 60 therein, and abut against the first opening port 110a one step ahead of the sealing disc 60, so as to facilitate the subsequent guiding action. For example, the thickness of the guiding component 80 can be selectively designed to be exactly the distance between the carrier plate 40a and the first opening port 110a in the hard-sealed state, but is not limited thereto.

[0137] In detail, when the carrier plate 40a performs the third reciprocating motion M3, since the guiding component 80 is located outside the sealing disc 60, the guiding component 80 can contact the cavity 100 earlier than the sealing disc 60. Based on the orientation of the sealing surface 112 of the first opening port 110a on the cavity 100, the resetting component 84 pushes against the carrier plate 40a (that is, the resetting component 84 can force the carrier plate 40a to rotate), thereby guiding the orientation of the sealing surface 62 of the sealing disc 60 on the carrier plate 40a. At least one of the aforementioned reset components 84 is, for example, an elastic component or elastic pusher with a default elastic coefficient (e.g., about 50 N / mm), such as a spring (e.g., a short spring or a push spring). The reset component 84 is, for example, located on the peripheral side of the plate of the guide component 80, such as the upper side, and between the carrier plate 40a and the guide component 80. The number of reset components 84 can be determined according to actual needs, such as one, two or more. In this way, the carrier plate 40a can be adjusted by abutting from one side or multiple sides (or, in a single direction or multiple directions), thereby pre-adjusting the orientation of the sealing surface 62 of the sealing disc 60. The reset component 84 of this utility model can provide a preset certain force to assist in guiding the carrier plate 40a when the carrier plate 40a moves to the hard-closed position W2, and can assist the second elastic piece 44a in closing the carrier plate 40a when the carrier plate 40a is to be moved to the semi-open position W1.

[0138] For example, the guiding component 80 of the second embodiment has a plate (or kit frame) with a slot 82. The opening shape of the slot 82 corresponds to the sealing disc 60 and is annular, such as circular, to accommodate the sealing disc 60. The slot 82 of the guiding component 80 has different opening inner diameters on both sides of its plate, for example, but not limited to, the opening inner diameter on one side of the plate (e.g., the outer side) is larger than the diameter of the sealing disc 60, and the opening inner diameter on the other side of the plate (e.g., the inner side) is smaller than the diameter of the sealing disc 60. The shape of the inner edge surface of the slot 82 corresponds to the sealing disc 60, so that the sealing disc 60 is movably confined in the slot 82 of the guiding component 80. The peripheral cross-sectional shape of the plate of the guiding component 80 is, for example, L-shaped or stepped. The sealing disc 60 is fixed on one of the two carrier plates 40a and 40b (e.g., carrier plate 40a) and is movably (e.g., flip-up) located in the slot 82 of the guiding component 80. The guiding component 80 abuts against the carrier plate 40a on one side via the reset component 84, thereby flipping the carrier plate 40a and thus guiding the orientation of the sealing surface 62 of the sealing disc 60. In the second embodiment of this utility model, the utility model is illustrated by the example that the slot 82 of the guiding component 80 has different opening inner diameters on both sides of the plate body. However, this utility model is not limited to the above example, and the slot 82 may also have the same opening inner diameter on both sides of the plate body, for example. Furthermore, in the second embodiment of this utility model, by adjusting the thickness of the fixing block 43 located between the first elastic sheet 42a and the second elastic sheet 44a, the distance between the sealing disc 60 and the first opening port 110a can be adjusted, so that after the guiding component 80 first contacts the first opening port 110a, there is still enough distance to guide the orientation of the sealing disc 60.

[0139] In short, in the second embodiment of the valve mechanism 10 of this utility model, the relative position and / or orientation of the sealing disc 60 and the carrier plate 40a are fixed to each other, while the relative position and / or orientation of the sealing disc 60 and the guiding component 80 are changeable by flipping the carrier plate 40a. This allows the guiding component 80 to pre-adjust the orientation of the sealing surface 62 of the sealing disc 60 according to the orientation of the sealing surface of the first opening port 110a, and to guide the sealing surface 62 of the sealing disc 60 to be substantially (e.g., completely) parallel to the sealing surface 112 of the first opening port 110a, thereby achieving parallel contact with the first opening port 110a through uniform stress distribution and contact pressure distribution.

[0140] Furthermore, in the second embodiment of the valve mechanism 10 of this utility model, the guide assembly 80 has a slotted plate (or a kit frame), and the guide assembly 80 may optionally have an extension plate 86 arranged laterally (e.g., vertically or at other angles) on the plate of the guide assembly 80, such as on the top side, so that the side shape of the guide assembly 80 is approximately L-shaped. The mating surface of the plate of the guide assembly 80 and the sealing surface 112 of the first opening port 110a on the cavity 100 have corresponding shapes and structures. This extension plate 86 provides a limiting function to restrict the carrier plate 40a and the sealing disc 60 to a specific position (e.g., within the space defined by the plate and the extension plate, so that the guide assembly 80 maintains a constant distance from the carrier plate 40a and the sealing disc 60). This prevents the carrier plate 40a and the sealing disc 60 from shifting position after the valve mechanism 10 performs opening and closing actions, and from contacting the first opening port 110a earlier than the guide assembly 80.

[0141] In addition, please see Figures 7 to 10As shown in other figures, in another feasible embodiment of the valve mechanism 10 of this utility model, the valve mechanism 10 of this utility model replaces the aforementioned abutment plate 68 with abutment plate 90. Two carrier plates 40a and 40b are respectively disposed on two first elastic plates 42a and 42b. A guiding component 80 and abutment plate 90 are respectively disposed on two second elastic plates 44a and 44b and respectively abut against the two carrier plates 40a and 40b with at least one reset component 84. This allows the guiding component 80 and abutment plate 90 to simultaneously abut against both sides of the cavity 100 along with the third reciprocating motion M3 of the two carrier plates 40a and 40b. Furthermore, the guiding component 80 and abutment plate 90 are, for example, plates (or, kit frames) with slots 82 and 82', and their structural form and outer surface form may be the same as or different from each other. The guiding component 80 and the clamping plate 90 can respectively contact the first opening 110a and the second opening 110b on the cavity 100 through uniform stress distribution and contact pressure distribution. For example, the diameter of the slot 82' of the clamping plate 90 can be selectively smaller or larger than the diameter of the slot 82 of the guiding component 80. Since the clamping plate 90 is used to replace the clamping disc 68 mentioned above, it does not need to support the sealing disc 60, so the clamping plate 90 can selectively have or not have the slot 82' mentioned above. In addition, the carrier plate 40a and the displacement component 20 of this invention can also selectively have holes through which locking tools (such as screwdrivers or wrenches) can pass, thereby allowing the sealing disc 60 to be locked onto the screw hole of the carrier plate 40a with a screwing component (such as a bolt) through the holes of the carrier plate 40a and the displacement component 20. In addition, the second elastic sheet 44a may optionally have a recessed area (not shown), whereby when the first elastic sheet 42a is attached to the second elastic sheet 44a (i.e., when the sealing disc 60 hard seals the first opening port 110a), the recessed area can be used to accommodate the protrusions on the carrier plate 40a that fix the second elastic sheet 44a, ensuring that no interference between parts occurs.

[0142] In one feasible embodiment of the valve mechanism 10 of this utility model, such as Figure 11 To and Figure 12 As shown, the valve mechanism 10 may optionally include a clamping plate 68, wherein the clamping plate 68 is disposed on one of the two carrier plates 40a and 40b (e.g., carrier plate 40b), the two carrier plates 40a and 40b are respectively disposed on two first elastic plates 42a and 42b, and the guiding component 80 is disposed on a second elastic plate 44a.

[0143] Please see Figure 13 and Figure 14As shown in the other figures, the third embodiment of the valve mechanism 10 of this utility model is largely the same as the second embodiment, except that the guiding component 80 is a plate with a slot 82 (or, a kit frame), and the guiding component 80 has an extension plate 86 longitudinally (or, at a parallel or other angle) disposed on the plate of the guiding component 80 (e.g., on the top side), thereby increasing the contact area and the force arm. The carrier plates 40a and / or 40b may selectively have or not have an extension plate 41 longitudinally (or, at a parallel or other angle) disposed on the plate of the carrier plates 40a and / or 40b (e.g., on the top side). The abutment plate 90 may also selectively have an extension plate 86' longitudinally (or, at a parallel or other angle) disposed on the plate of the abutment plate 90 (e.g., on the top side). The extension plate 86, for example, protrudes longitudinally beyond the outer side of the guide assembly 80, making the side shape of the guide assembly 80 approximately I-shaped. Therefore, the upper edge of the guide assembly 80 with the extension plate 86 can contact the first opening port 110a earlier than the upper edge of the guide assembly 80 without the extension plate 86. This allows the sealing disc 60 to be pre-aligned parallel to the first opening port 110a at a distance farther from it. Furthermore, the extension plate 86 increases the contact area between the guide assembly 80 and the first opening port 110a, resulting in more even force distribution when they come together. The extension plate 86 also increases the lever arm of the guide assembly 80, allowing the reset assembly 84 to use a spring with a lower elastic coefficient. The two reset assemblies 84 can be located, for example, but not limited to, on the two extension plates 86. The number of extension plates 86 can be, for example, one or two. If there are two extension plates 86, they can be selectively arranged, for example, on both sides of the top of the guide assembly 80 plate body with a spacing of D3 between them. The aforementioned spacing D3 can serve as a displacement buffer space to avoid interference between the two reset assemblies 84 and the two carrier plates 40a and 40b. The value of the spacing D3 can be any value, as long as the above-mentioned avoidance of interference is achieved, it can be applied to this utility model.

[0144] Please see Figure 18As shown in the figures and other figures, the operation method of the valve mechanism 10 of this utility model mainly includes the following steps: providing the valve mechanism 10 described in the above embodiments (step S10); performing a driving step (step S20) to cause the displacement component 20, the two carrier plates 40a and 40b and the sealing disc 60 to perform a first reciprocating motion M1, a second and third reciprocating motion M2 and M3 and a fourth reciprocating motion M4 respectively; and performing a guiding step (step S30) to cause the sealing disc 60 to contact the first opening port 110a on the cavity 100 through a uniform stress distribution and contact pressure distribution to symmetrically seal the first opening port 110a. In detail, in the above-mentioned driving step (step S20), the valve mechanism 10 of this utility model causes the displacement component 20 to perform a first reciprocating motion M1 along the first axis Z, thereby causing the two carrier plates 40a and 40b to perform a second reciprocating motion M2 along the first axis Z in accompaniment to the first reciprocating motion M1 of the displacement component 20, and causing the displacement component 20 to further drive the two carrier plates 40a and 40b to perform a third reciprocating motion M3 in the opposite direction along the second axis X, wherein the sealing disc 60 performs a second reciprocating motion M2 along the first axis Z in accompaniment to the first reciprocating motion M1 of the displacement component 20, and the sealing disc 60 performs a fourth reciprocating motion M4 between the semi-open position W1 and the hard-closed position W2 by the third reciprocating motion M3 of one of the two carrier plates 40a and 40b (e.g., carrier plate 40b). Furthermore, in the aforementioned guiding step (step S30), during the process of the sealing disc 60 moving from the semi-open position W1 to the hard-closed position W2, the guiding component 80 guides the orientation of the sealing surface 62 of the sealing disc 60 according to the orientation of the sealing surface 112 of the first opening port 110a on the cavity 100, so that the sealing surface 62 of the sealing disc 60 is parallel to the sealing surface 112 of the first opening port 110a on the cavity 100, thereby applying force symmetrically to seal the first opening port 110a on the cavity 100.

[0145] In summary, the valve mechanism of this utility model has the following advantages:

[0146] (1) The valve mechanism has a guiding component (or, correction component or guide component). The guiding component can adjust (or correct) the orientation of the sealing disc on the second elastic plate according to the orientation of the first opening port of the cavity, when the sealing disc contacts the first opening port (or, at that moment) or before, so that it remains completely parallel to the first opening port.

[0147] (2) The sealing disc can contact the first opening port on the cavity in parallel, and can contact the first opening port on the cavity in a way of uniform stress distribution and contact pressure distribution to symmetrically apply force to seal the first opening port, and can reduce the wear phenomenon caused when the sealing disc contacts the first opening port.

[0148] (3) The guiding component of the valve mechanism can be a second elastic plate with a bending area, so as to achieve the function of pre-adjusting (or correcting) the orientation of the sealing disc on the second elastic plate.

[0149] (4) The guide component of the valve mechanism can be a kit frame and has a reset component, which is used to abut the carrier plate according to the orientation of the first opening port of the cavity, thereby realizing the function of pre-adjusting (or correcting) the orientation of the sealing disc on the carrier plate, and the guide component can selectively have a structural design that is completely fitted with the first opening of the cavity.

[0150] (5) The guiding component may have an extension plate that extends laterally or longitudinally to prevent the sealing disc from contacting the first opening of the cavity earlier than the guiding component. By increasing the contact area, the force can be more even when the two come together, and the force arm can be increased by using a spring with a smaller elastic coefficient.

[0151] (6) Using a locking plate with a guide groove to replace part or all of the support plates helps to solve the common problem of plate falling off when the support plates are driven by traditional technology.

[0152] (7) The valve mechanism can use a clamping plate instead of a clamping ring to abut the second opening port on the cavity, so that the sealing performance of the sealing disc is no longer affected by the geometry of the clamping ring.

[0153] (8) The valve mechanism has a very small left and right offset in the cavity. Compared with the traditional valve mechanism without a guide design, the valve mechanism of this utility model has a significant leap in centering performance during the movement. Therefore, there is no need to worry about whether the geometric shape of the clamping ring will affect the sealing effect.

[0154] (9) The valve mechanism can achieve the design principle of maintaining the drive by a single drive device in a limited cavity space.

[0155] (10) The valve mechanism can be made of all-metal material. The sealing disc can directly abut the sealing surface of the first opening port of the cavity to achieve a vacuum sealing effect, and even an ultra-high vacuum sealing effect, without the need for additional gaskets or washers. Even in an ultra-high vacuum environment, the sealing disc can withstand the closing force applied to the sealing disc from inside the vacuum valve cavity and the atmospheric pressure applied to the sealing disc from outside the vacuum valve cavity. Moreover, the sealing surface of the sealing disc can rotate relative to the sealing surface of the first opening port of the cavity and maintain constant contact. This provides a lubrication effect when the metal sealing surfaces abut against each other, and also provides compensation and adjustment movements, thus improving sealing performance and extending service life, and maintaining constant vacuum sealing performance.

[0156] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this utility model should be included in the appended claims.

Claims

1. A valve mechanism suitable for selectively sealing or opening a first opening port on a cavity, characterized in that, Include: A displacement component that performs a first reciprocating motion along a first axis; Two carrier plates are movably located on both sides of the displacement assembly, and are used to perform a second reciprocating motion along the first axis in accompaniment to the first reciprocating motion of the displacement assembly, and the displacement assembly further drives the two carrier plates to perform a third reciprocating motion in opposite directions along a second axis. A sealing disc, which reciprocates along a first axial direction in conjunction with the first reciprocating motion of the displacement assembly, and which reciprocates a fourth time between a partially open / closed position and a hard-closed position in response to the third reciprocating motion of one of the two carrier plates; and A guiding component, during the fourth reciprocating motion of the sealing disc and its movement from the semi-open position to the hard-closed position, guides one of the sealing surfaces of the sealing disc according to the orientation of one of the sealing surfaces of the first opening port on the cavity, so that the sealing surface of the sealing disc is parallel to the sealing surface of the first opening port on the cavity, thereby applying force symmetrically to seal the first opening port on the cavity.

2. The valve mechanism as described in claim 1, characterized in that, The displacement component drives the two carrier plates to perform a third reciprocating motion in opposite directions along the second axis by means of the path difference between the first motion path of the first reciprocating motion of the displacement component along the first axis and the second motion path of the second reciprocating motion of the two carrier plates along the first axis.

3. The valve mechanism as described in claim 2, characterized in that, The displacement component uses at least one support plate, at least one latch plate, and / or the support plate and the latch plate together to drive the two carrier plates to perform the third reciprocating motion in opposite directions along the second axis.

4. The valve mechanism as described in claim 2, characterized in that, The two carrier plates are respectively disposed on the first side of one of the two first elastic sheets, and the sealing disc is disposed on the first side of one of the second elastic sheets or on one of the two carrier plates. The first elastic sheet has a straight portion extending along the first axial direction, and the second elastic sheet has a straight portion extending along the first axial direction. The two first elastic sheets and the second side of one of the second elastic sheets are disposed on a base.

5. The valve mechanism as described in claim 4, characterized in that, The displacement component drives the two carrier plates to perform a third reciprocating motion in opposite directions along the second axis by the path difference between the first and second motion paths until the displacement component reaches the base.

6. The valve mechanism as described in claim 4, characterized in that, The two first elastic sheets, the second side of the second elastic sheet, and the base each have a slot. When the sealing disc seals the first opening on the cavity, the second side of the two first elastic sheets, the second elastic sheet, and the slot of the base are offset from the first opening. When the sealing disc opens the first opening on the cavity, the positions of the second side of the two first elastic sheets, the second elastic sheet, and the slot of the base correspond to the first opening on the cavity.

7. The valve mechanism as described in claim 4, characterized in that, The second elastic sheet has a bent portion on the straight portion to serve as the guiding component, and the sealing disc is located on the bent portion of the second elastic sheet.

8. The valve mechanism as described in claim 7, characterized in that, The second elastic sheet is bent at a bending angle from a bend toward one of the two carrier plates, such that when the sealing disc is in the semi-open position, the top of the sealing surface is farther away from the first opening port on the cavity than the bottom.

9. The valve mechanism as described in claim 8, characterized in that, The bending angle of the bent portion is adjusted according to a distance between the semi-open position and the hard-closed position of the sealing disc; the length ratio of the bent portion to the straight portion of the second elastic sheet is adjusted according to the distance between the semi-open position and the hard-closed position; and / or the position of the sealing disc on the bent portion is adjusted according to the length ratio of the bent portion to the straight portion of the second elastic sheet.

10. The valve mechanism as described in claim 2, characterized in that, The sealing disc is disposed on one of the two carrier plates, and the guiding component is disposed on a second elastic sheet and abuts against one of the two carrier plates with at least one reset component. When one of the two carrier plates performs the third reciprocating motion, the guiding component contacts the cavity earlier than the sealing disc, thereby using the reset component to push against one of the two carrier plates according to the orientation of the sealing surface of the first opening on the cavity, thereby correcting the orientation of the sealing surface of the sealing disc.

11. The valve mechanism as described in claim 10, characterized in that, The guiding component has a slotted plate. The sealing disc is disposed on one of the two carrier plates and is movably located in the slot of the guiding component. The guiding component pushes one of the two carrier plates from one side through the reset component to flip the one of the two carrier plates, thereby guiding the orientation of the sealing surface of the sealing disc.

12. The valve mechanism as described in claim 11, characterized in that, The guiding component further includes an extension plate that is disposed horizontally or vertically on the plate body.

13. The valve mechanism as described in claim 11, characterized in that, The mating surface of the plate of the guiding component and the sealing surface of the first opening port on the cavity have corresponding shapes and structures.

14. The valve mechanism as described in claim 1, characterized in that, It further includes a clamping plate, the two carrier plates are respectively disposed on two first elastic sheets, the sealing disc is disposed on a second elastic sheet or on one of the two carrier plates, and the clamping plate is disposed on the other of the two carrier plates. The sealing disc and the clamping plate perform the fourth reciprocating motion in opposite directions to abut against the first opening and the second opening on the cavity.

15. The valve mechanism as described in claim 1, characterized in that, It further includes a clamping plate. The two carrier plates are respectively disposed on two first elastic sheets. The guiding component and the clamping plate are respectively disposed on two second elastic sheets and are respectively abutted against the two carrier plates by at least one reset component, so that the guiding component and the clamping plate simultaneously abut against both sides of the cavity along with the third reciprocating motion of the two carrier plates.

16. The valve mechanism as described in claim 15, characterized in that, The guiding component and the abutting plate are both plates with a slot.

17. The valve mechanism as described in claim 1, characterized in that, The displacement component is a plate. Driven by a drive device, the displacement component performs a first reciprocating motion between a fully retracted height and a fully extended height. The two carrier plates and the sealing disc perform a second reciprocating motion between the fully retracted height and a half-extended height, accompanying the first reciprocating motion of the displacement component.

18. The valve mechanism as described in claim 1, characterized in that, The valve mechanism is an all-metal valve.

19. The valve mechanism as described in claim 1, characterized in that, The sealed disc contains: A base, comprising a connecting seat and an auxiliary seat, the auxiliary seat being integrally arranged around one side of the connecting seat, the auxiliary seat having the same or different heights as the bottom surface of the connecting seat, and the auxiliary seat having an annular inclined surface on its top side; and A sealing plate is connected to the auxiliary seat of the base, wherein the sealing surface of the sealing disc rotatably abuts against the sealing surface of the first opening port of the cavity at the hard-sealed position, thereby maintaining a vacuum seal on the first opening port.

20. The valve mechanism as described in claim 19, characterized in that, The sealing plate includes: A first wing plate integrally encircles the auxiliary seat of the base at a first annular joint and extends outward at a first included angle in a direction away from the first annular joint, wherein the first wing plate extends outward obliquely from the top side of the base toward the bottom side of the base; and A second wing plate integrally encircles the first wing plate at a second annular joint and extends outward at a second included angle in a direction away from the base. The second wing plate extends outward at an angle from the bottom side of the base toward the top side of the base. The sealing surface of the sealing disc is located on the end edge of the second wing plate, and a third included angle is formed between the second wing plate and the sealing surface of the sealing plate.

21. The valve mechanism as described in claim 20, characterized in that, The connecting seat is a first cylinder with a connecting hole, and the auxiliary seat is a second cylinder with an annular inclined surface.

22. The valve mechanism as described in claim 20, characterized in that, The coupling seat is a first cylinder with a coupling hole, and the auxiliary seat is an annular arc-shaped body located on the side of the coupling seat.

23. The valve mechanism as described in claim 20, characterized in that, The first wing plate extends outward from the top side of the base in a direction obliquely toward the bottom side of the base, and the second wing plate extends outward from the bottom side of the base in a direction obliquely toward the top side of the base.

24. The valve mechanism as described in claim 20, characterized in that, The angle of the first included angle is between 5 degrees and 45 degrees, the angle of the third included angle is between 5 degrees and 45 degrees, and the sum of the angles of the first included angle, the second included angle, and the third included angle is 180 degrees.

25. The valve mechanism as described in claim 1, characterized in that, It further includes a pneumatic or electric drive device for driving the displacement component to perform the first reciprocating motion along the first axis.

26. The valve mechanism as described in claim 25, characterized in that, The pneumatic or electric drive device drives the displacement component entirely or partially by manual control, automatic control, or automatic pressure control.

27. The valve mechanism as described in claim 25, characterized in that, The pneumatic or electric drive device is a pneumatic drive cylinder. By controlling the air pressure or airflow supplied to the pneumatic drive cylinder, the effects of smooth closing, smooth opening, or smooth operation can be achieved.

28. The valve mechanism as described in claim 27, characterized in that, It also includes solenoid valves, piezoelectric pressure regulating valves or voice coil pressure regulating valves to control the air pressure or airflow supplied to the pneumatic drive cylinder.

29. The valve mechanism as described in claim 25, characterized in that, During the first reciprocating motion of the displacement component along the first axial direction, the pneumatic or electric drive device drives the displacement component with a plurality of pressure values ​​and / or speed values.

30. The valve mechanism as described in claim 25, characterized in that, The pneumatic or electric drive device drives the displacement component through open-loop control or closed-loop control.

Images