Flow regulating valve and wafer processing equipment

Abstract

The utility model provides a flow regulating valve and wafer processing equipment, the flow regulating valve comprises a valve body, a valve core, a valve rod, a slide rail, a regulating rod and a locking assembly, the regulating rod drives the valve rod to rotate so as to regulate the opening degree of the flow regulating valve, and the regulating rod is limited to slide along the slide rail. The adjusting rod is locked on the sliding rail through the locking bolt and the locking nut, limiting of the adjusting rod can be completed, and the adjusting rod is not prone to loosening, so that the opening degree of the flow adjusting valve is not changed. In addition, the locking bolt is further provided with an elastic limiting part for limiting the locking nut, so that the locking nut is clamped between the sliding rail and the elastic limiting part by the elastic limiting part after being in place, the adjusting rod is locked by the locking nut, the adjusting rod is not prone to loosening, and the opening degree of the flow adjusting valve does not change.

Description

Technical Field

[0001] This utility model relates to the field of wafer technology, and in particular to a flow regulating valve and wafer processing equipment. Background Technology

[0002] This section provides only background information relevant to this disclosure and is not necessarily prior art.

[0003] Currently, the exhaust piping of the process chamber of wafer processing equipment is equipped with a flow regulating valve. The flow regulating valve usually needs to be adjusted. After the opening is adjusted, the valve core may rotate unexpectedly, resulting in abnormal flow and excessively high temperature in the process chamber, which will have an adverse effect on wafer processing. Utility Model Content

[0004] The purpose of this invention is to at least solve the technical problem of easy failure of the flow regulation function of the exhaust flow regulating valve in existing wafer processing equipment. This purpose is achieved through the following technical solution:

[0005] The first aspect of this utility model provides a flow regulating valve, comprising:

[0006] Valve body;

[0007] The valve core is located inside the valve body;

[0008] A valve stem is inserted through the valve body, and one end of the valve stem is connected to the valve core;

[0009] A slide rail is provided on the outer surface of the valve body;

[0010] An adjusting rod, the first end of which is slidably connected to the slide rail, and the second end of which is connected to the other end of the valve stem, the adjusting rod being able to adjust the opening degree of the valve core during sliding;

[0011] A locking assembly includes a locking bolt and a locking nut. The locking bolt includes a bolt body and an elastic limiting part. The bolt body passes through the second end of the adjusting rod and is slidably connected to the slide rail. The locking nut is screwed onto the bolt body. The elastic limiting part is installed in the mounting groove.

[0012] The elastic limiting part has a compressed state and an extended state. In the compressed state, the elastic limiting part is completely located in the mounting groove. In the extended state, a portion of the elastic limiting part extends out of the mounting groove and clamps a portion of the locking nut between the adjusting rod and the elastic limiting part.

[0013] The flow regulating valve proposed in the first aspect of this utility model uses an adjusting rod to drive the valve stem to rotate, thereby adjusting the opening of the flow regulating valve. The adjusting rod is restricted to sliding along a slide rail, and is locked onto the slide rail by a locking bolt and a locking nut, thus limiting the adjusting rod and preventing it from loosening and causing changes in the opening of the flow regulating valve. Furthermore, the locking bolt is provided with an elastic limiting part to limit the locking nut, so that after the locking nut is in place, it is clamped between the slide rail and the elastic limiting part, thereby locking the adjusting rod and preventing it from loosening, thus ensuring that the opening of the flow regulating valve remains unchanged.

[0014] In addition, the flow regulating valve according to this utility model may also have the following additional technical features:

[0015] In some embodiments of this utility model, the elastic limiting part includes a leaf spring, one end of which is located in the mounting groove along its own length and is connected to the bolt body, and the other end of which is suspended in the air and has the compressed state and the unfolded state.

[0016] In some embodiments of this utility model, the length direction of the leaf spring is parallel to the axial direction of the bolt body, and the end of the leaf spring away from the adjusting rod along its own length direction is connected to the bolt body.

[0017] In some embodiments of this utility model, there are multiple mounting slots and multiple leaf springs, with multiple mounting slots spaced apart along the circumferential direction of the bolt body, and each mounting slot containing one leaf spring.

[0018] In some embodiments of this utility model, all the mounting grooves are equally spaced along the circumferential direction of the bolt body.

[0019] In some embodiments of this utility model, the end of the leaf spring that is away from the adjusting rod along its own length direction is welded to the bolt body.

[0020] In some embodiments of this utility model, the valve core is rotatably disposed inside the valve body, the length direction of the adjusting rod is perpendicular to the rotation axis of the valve core, the slide rail is arc-shaped, and the center of the arc of the slide rail is located on the rotation axis of the valve core.

[0021] In some embodiments of this utility model, the flow regulating valve further includes an opening indicator, which is disposed on the outer surface of the valve body, and the connection between the regulating rod and the valve stem is located between the opening indicator and the slide rail.

[0022] In some embodiments of this utility model, the locking nut is a disc nut.

[0023] The second aspect of this invention provides a wafer processing apparatus, including the flow regulating valve proposed in the first aspect of this invention.

[0024] The second aspect of this utility model discloses a wafer processing equipment with a flow control valve that is not easily out of control after adjustment. This flow control valve adjusts its opening by rotating a valve stem via an adjusting rod. The adjusting rod is restricted to sliding along a slide rail. A locking bolt and a locking nut lock the adjusting rod onto the slide rail, thus limiting its position and preventing it from loosening and causing changes in the flow control valve's opening. Furthermore, an elastic limiting part is provided on the locking bolt to limit the locking nut. After the locking nut is in place, it is clamped between the slide rail and the elastic limiting part, thereby locking the adjusting rod and preventing it from loosening, thus ensuring the flow control valve's opening remains unchanged. Attached Figure Description

[0025] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0026] Figure 1 A schematic diagram of the flow regulating valve according to an embodiment of the present invention is shown.

[0027] Figure 2 A schematic diagram of the structure of a locking assembly (locking nut compression elastic limiting part) according to an embodiment of the present invention is shown.

[0028] Figure 3 A schematic cross-sectional view of a locking assembly (locking nut compression elastic limiting part) according to an embodiment of the present invention is shown.

[0029] Figure 4 A schematic diagram of the structure of a locking assembly (locking nut and elastic limiting part separated) according to an embodiment of the present invention is shown.

[0030] Figure 5 A schematic cross-sectional view of a locking assembly (locking nut separated from elastic limiting portion) according to an embodiment of the present invention is shown.

[0031] The markings in the attached diagram are as follows:

[0032] 100. Flow regulating valve;

[0033] 10. Valve body; 101. Opening degree indicator; 11. Valve stem; 12. Slide rail; 13. Adjusting rod; 14. Locking assembly; 141. Locking bolt; 1411. Bolt body; 1412. Mounting groove; 1413. Elastic limit part; 142. Locking nut. Detailed Implementation

[0034] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0035] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0036] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0037] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure is flipped, an element described as "below other elements or features" or "below other elements or features" would subsequently be oriented as "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0038] like Figures 1 to 5 As shown, Figure 1 The X direction indicates the length direction of the adjusting rod 13. Figures 2 to 5 In the first aspect of this utility model, a flow regulating valve 100 is provided, comprising a valve body 10, a valve core, a valve stem 11, a slide rail 12, an adjusting rod 13, and a locking assembly 14. The valve core is disposed inside the valve body 10; the valve stem 11 passes through the valve body 10, and one end of the valve stem 11 is connected to the valve core; the slide rail 12 is disposed on the outer surface of the valve body 10; the first end of the adjusting rod 13 is slidably connected to the slide rail 12, and the second end of the adjusting rod 13 is connected to the other end of the valve stem 11, and the adjusting rod 13 can adjust the opening degree of the valve core during sliding; the locking assembly 14 includes a locking bolt 141 and a locking nut 142. The locking bolt 141 includes a bolt body 1411 and an elastic limiting part 1413. The bolt body 1411 passes through the second end of the adjusting rod 13 and is slidably connected to the slide rail 12. The locking nut 142 is screwed onto the bolt body 1411. The elastic limiting part 1413 is installed in the mounting groove 1412. The elastic limiting part 1413 has a compressed state and an extended state. In the compressed state, the elastic limiting part 1413 is completely located in the mounting groove 1412. In the extended state, part of the elastic limiting part 1413 extends out of the mounting groove 1412 and clamps part of the locking nut 142 between the adjusting rod 13 and the elastic limiting part 1413.

[0039] As can be seen, the flow regulating valve 100 proposed in the first aspect of this utility model adjusts the opening degree of the flow regulating valve 100 by rotating the valve stem 11 through the adjusting rod 13. The adjusting rod 13 is restricted to slide along the slide rail 12, and is locked onto the slide rail 12 by the locking bolt 141 and the locking nut 142, thus limiting the adjustment rod 13 and preventing it from loosening and causing a change in the opening degree of the flow regulating valve 100. Furthermore, the locking bolt 141 is provided with an elastic limiting part 1413 to limit the locking nut 142, so that after the locking nut 142 is in place, it is clamped between the slide rail 12 and the elastic limiting part 1413, thereby locking the adjusting rod 13, making it difficult for the adjusting rod 13 to loosen and preventing a change in the opening degree of the flow regulating valve 100.

[0040] For example, the flow regulating valve 100 can be a ball valve or a butterfly valve. Rotation of the valve stem 11 drives the valve core to rotate, causing a change in the gap between the valve core and the inner wall of the valve body 10, thereby regulating the flow rate. The slide rail 12 can be disposed on the outer surface of the valve body 10. A conventional slide rail 12 can be selected and installed on the valve body 10 by welding or bolting. To facilitate the rotation of the valve stem 11 when the regulating rod 13 slides, the slide rail 12 can be configured as an arc-shaped track to accommodate the rotation of the regulating rod 13. The regulating rod 13 can be a straight rod structure, with its two ends connected to the valve stem 11 and the slide rail 12 respectively. One end of the regulating rod 13 can be connected to the end of the valve stem 11 outside the valve body 10 by welding, sleeve, or insertion. The other end of the regulating rod 13 can be slidably connected to the slide rail 12 by providing a sliding end. Specific structures can refer to existing sliding structures. When the adjusting rod 13 rotates, the valve stem 11 rotates accordingly to adjust the opening of the valve core. Simultaneously, the slide rail 12 restricts the rotation path of the adjusting rod 13, improving stability and reliability. The locking bolt 141 passes through one end of the adjusting rod 13 that slides along the slide rail 12 and is slidably connected to the slide rail 12. A protruding portion can be provided at the bottom of the locking bolt 141 and embedded in the slide rail 12 to achieve a slidable connection. The locking nut 142 can be a hexagonal nut or a disc nut, screwed onto the locking bolt 141. When the locking nut 142 is tightened, pressure is applied to the adjusting rod 13, locking it onto the slide rail 12, thus preventing the flow regulating valve 100 from loosening and failing after the opening is adjusted. To further improve the stability after the opening is adjusted, an elastic limiting part 1413 can be added to the locking bolt 141. The elastic limiting part 1413 can be a spring, a spring sheet, or an elastic block. An installation groove 1412 can be opened on the periphery of the locking bolt 141. The elastic limiting part 1413 is connected to the locking bolt 141 by snap-fit ​​or welding and placed in the installation groove 1412. This ensures that the locking bolt 141 is not blocked by the elastic limiting part 1413 when it rotates. Furthermore, under its own elasticity, the elastic limiting part 1413 can pop out of the installation groove 1412 and block the locking nut 142 in the axial direction of the locking bolt 141. This ensures that the locking nut 142 remains in the same position after being tightened, thereby improving the stability of the flow regulating valve 100 after the opening is adjusted.

[0041] In some embodiments of this utility model, the elastic limiting part 1413 includes a leaf spring. One end of the leaf spring along its own length direction is located in the mounting groove 1412 and connected to the bolt body 1411. The other end of the leaf spring along its own length direction is suspended and has a compressed state and an unfolded state.

[0042] As can be seen, by setting a leaf spring on the bolt body 1411, the leaf spring can be fully located in the mounting groove 1412 when compressed, so that the locking nut 142 can rotate and move along the bolt body 1411 to lock the adjusting rod 13 on the slide rail 12. When relaxed, the locking nut 142 extends out of the mounting groove 1412, restricting the movement of the locking nut 142 along the bolt body 1411, or even dislodging it from the bolt body 1411, thereby improving the stability of the connection between the locking nut 142 and the locking bolt 141.

[0043] For example, the mounting groove 1412 can be cuboid in shape, formed around the periphery of the bolt body 1411, and the length direction of the mounting groove 1412 is parallel to the axial direction of the bolt body 1411. In this case, the length direction of the leaf spring is also parallel to the axial direction of the bolt body 1411. The leaf spring can be a conventional leaf spring, at least a portion of which is accommodated in the mounting groove 1412 and connected to the bolt body 1411 by welding or snap-fit. The leaf spring is arc-shaped, with the center of the arc located on the side of the leaf spring facing the locking nut 142, so that one end of the leaf spring is raised and suspended, while the other end is connected to the bolt body 1411. The spring can switch between a compressed state and an extended state by external pressure, so as to allow the locking nut 142 to move or to limit the locking nut 142. The leaf spring can also be set in an arc shape on one side of the leaf spring facing the axis of the bolt body 1411, so that the outer side of the leaf spring is arc-shaped. It can also switch between the compressed state and the unfolded state by external force to allow the locking nut 142 to move or limit the locking nut 142.

[0044] In some embodiments of this utility model, the length direction of the leaf spring is parallel to the axial direction of the bolt body 1411, and the end of the leaf spring away from the adjusting rod 13 along its own length direction is connected to the bolt body 1411.

[0045] As can be seen, by setting the length direction of the leaf spring to be parallel to the axial direction of the bolt body 1411, the leaf spring extends along the axial direction of the bolt body 1411, and the end of the leaf spring away from the adjusting rod 13 is connected to the bolt body 1411, thus making the leaf spring in a state where one end is raised. When the locking nut 142 is tightened to the outside of the leaf spring, the leaf spring can be pressed into the mounting groove 1412. When the locking nut 142 is tightened further until it contacts the adjusting rod 13, the locking nut 142 disengages from the leaf spring, and the leaf spring pops out of the mounting groove 1412 under its own elasticity, while blocking one end of the locking nut 142, limiting the locking nut 142 along the axial direction of the bolt body 1411, and improving the stability of the locking nut 142 after tightening.

[0046] In some embodiments of this utility model, there are multiple mounting slots 1412 and leaf springs. Multiple mounting slots 1412 are spaced apart along the circumferential direction of the bolt body 1411, and each mounting slot 1412 contains a leaf spring.

[0047] As can be seen, by providing multiple mounting grooves 1412 and leaf springs along the circumferential direction of the bolt body 1411, the pressure applied by the leaf springs to the locking nut 142 can be evenly distributed, and the locking nut 142 is limited at multiple positions, making the connection between the locking nut 142 and the bolt body 1411 more reliable.

[0048] For example, two to four mounting slots 1412 can be provided along the circumferential direction of the bolt body 1411, such as two symmetrically arranged mounting slots 1412, and leaf springs are provided in the mounting slots 1412 to balance cost-effectiveness and limiting effect.

[0049] In some embodiments of this utility model, all mounting slots 1412 are equally spaced along the circumferential direction of the bolt body 1411.

[0050] As can be seen, by setting multiple mounting grooves 1412 at equal intervals around the bolt body 1411, and cooperating with the leaf springs in the mounting grooves 1412, the locking nut 142 is limited. The multiple leaf springs are arranged symmetrically, so that the leaf springs apply external force to the locking nut 142 more evenly.

[0051] For example, two to four mounting slots 1412 can be provided at equal intervals around the bolt body 1411 so that the number of mounting slots 1412 is not too large, and at the same time, multiple leaf springs can play a better limiting role in locking the nut 142.

[0052] In some embodiments of this utility model, the end of the leaf spring that is away from the adjusting rod 13 along its own length direction is welded to the bolt body 1411.

[0053] It can be seen that by welding the end of the leaf spring away from the adjusting rod 13 along its own length direction to the bolt body 1411, the connection between the leaf spring and the bolt body 1411 is reliable.

[0054] In some embodiments of this utility model, the valve core is rotatably disposed inside the valve body 10, the length direction of the adjusting rod 13 is perpendicular to the rotation axis of the valve core, the slide rail 12 is arc-shaped, and the center of the arc of the slide rail 12 is located on the rotation axis of the valve core.

[0055] As can be seen, by connecting the adjusting rod 13 vertically to the valve stem 11 and slidingly connecting it to the arc-shaped slide rail 12, when one end of the adjusting rod 13 rotates, the other end slides on the arc-shaped slide rail 12, thereby enabling the adjusting rod 13 to stably and reliably drive the valve core to adjust the opening.

[0056] For example, the valve core can be the valve core structure of a ball valve, and the adjusting rod 13 can be a straight rod or set according to actual needs. The slide rail 12 can refer to the existing slide rail 12 that can be slidably connected with bolts, and its sliding path is set to be arc-shaped or semi-circular, and the center of the arc of the slide rail 12 is located on the rotation axis of the valve core, so that the slide rail 12 can match the rotation path of the adjusting rod 13, and provide a limit for the adjusting rod 13 when it rotates, thereby improving the rotational stability of the adjusting rod 13.

[0057] In some embodiments of this utility model, the flow regulating valve 100 further includes an opening indicator 101, which is disposed on the outer surface of the valve body 10, and the connection between the regulating rod 13 and the valve stem 11 is located between the opening indicator 101 and the slide rail 12.

[0058] As can be seen, by setting the opening degree indicator 101 on the outer surface of the valve body 10, the opening degree of the flow regulating valve 100 can be clearly and intuitively displayed, thereby improving the user experience.

[0059] For example, the length of the opening indicator 101 can be the same as that of the slide rail 12, so that the opening indicator 101 covers the entire opening range of the flow regulating valve 100, and open and closed indicator positions can be set at both ends of the opening indicator 101. The opening indicator 101 includes a plurality of opening indicator positions set at intervals.

[0060] In some embodiments of this utility model, the locking nut 142 is a disc nut.

[0061] As can be seen, by setting the locking nut 142 as a disc-shaped nut, the locking nut 142 has a disc-shaped operating part that is convenient for users to tighten, thus improving the user experience.

[0062] The second aspect of this utility model provides a wafer processing apparatus, including the flow regulating valve 100 proposed in the first aspect of this utility model.

[0063] The second aspect of this utility model discloses a wafer processing equipment with a flow regulating valve 100 that is not easily out of control after adjustment. The flow regulating valve 100 adjusts its opening by rotating a valve stem 11 via an adjusting rod 13. The adjusting rod 13 is restricted to sliding along a slide rail 12. A locking bolt 141 and a locking nut 142 lock the adjusting rod 13 onto the slide rail 12, thus limiting its position and preventing it from loosening and causing a change in the opening of the flow regulating valve 100. Furthermore, an elastic limiting part 1413 is provided on the locking bolt 141 to limit the locking nut 142. After the locking nut 142 is in place, it is clamped between the slide rail 12 and the elastic limiting part 1413, thereby locking the adjusting rod 13 and preventing it from loosening, thus ensuring that the opening of the flow regulating valve 100 remains unchanged.

[0064] For example, the wafer processing equipment can be a device for performing chemical mechanical polishing, chemical gas deposition coating, or physical deposition coating processes on wafers. When processing wafers, the temperature inside the process chamber rises, and exhaust is required through an exhaust pipe. The flow regulating valve 100 of this utility model can be installed on the exhaust pipe, thereby facilitating the user to adjust the exhaust flow rate, so that the air pressure and temperature inside the process chamber are kept within a suitable range, and the valve opening can be maintained after adjustment, improving reliability and stability.

[0065] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the scope of the claims.

Claims

1. A flow regulating valve, characterized in that, include: Valve body; The valve core is located inside the valve body; A valve stem is inserted through the valve body, and one end of the valve stem is connected to the valve core; A slide rail is provided on the outer surface of the valve body; An adjusting rod, the first end of which is slidably connected to the slide rail, and the second end of which is connected to the other end of the valve stem, the adjusting rod being able to adjust the opening degree of the valve core during sliding; A locking assembly includes a locking bolt and a locking nut. The locking bolt includes a bolt body and an elastic limiting part. The bolt body passes through the second end of the adjusting rod and is slidably connected to the slide rail. The locking nut is screwed onto the bolt body. An installation groove is formed on the periphery of the locking bolt, and the elastic limiting part is installed in the installation groove. The elastic limiting part has a compressed state and an extended state. In the compressed state, the elastic limiting part is completely located in the mounting groove. In the extended state, a portion of the elastic limiting part extends out of the mounting groove and clamps a portion of the locking nut between the adjusting rod and the elastic limiting part.

2. The flow regulating valve according to claim 1, characterized in that, The elastic limiting part includes a leaf spring, one end of which is located in the mounting groove and connected to the bolt body, and the other end of which is suspended and has the compressed state and the unfolded state.

3. The flow regulating valve according to claim 2, characterized in that, The length direction of the leaf spring is parallel to the axial direction of the bolt body, and the end of the leaf spring away from the adjusting rod along its own length direction is connected to the bolt body.

4. The flow regulating valve according to claim 3, characterized in that, There are multiple mounting slots and leaf springs. The multiple mounting slots are spaced apart along the circumferential direction of the bolt body, and each mounting slot contains one leaf spring.

5. The flow regulating valve according to claim 4, characterized in that, All of the mounting slots are equally spaced along the circumferential direction of the bolt body.

6. The flow regulating valve according to claim 4, characterized in that, The end of the leaf spring that is away from the adjusting rod along its own length is welded to the bolt body.

7. The flow regulating valve according to claim 1, characterized in that, The valve core is rotatably disposed inside the valve body. The length direction of the adjusting rod is perpendicular to the rotation axis of the valve core. The slide rail is arc-shaped, and the center of the arc of the slide rail is located on the rotation axis of the valve core.

8. The flow regulating valve according to claim 7, characterized in that, The flow regulating valve also includes an opening indicator, which is disposed on the outer surface of the valve body, and the connection between the regulating rod and the valve stem is located between the opening indicator and the slide rail.

9. The flow regulating valve according to any one of claims 1 to 8, characterized in that, The locking nut is a disc nut.

10. A wafer processing apparatus, characterized in that, Includes a flow regulating valve, wherein the flow regulating valve is the flow regulating valve according to any one of claims 1 to 9.

Images