Process chamber measuring assembly

Abstract

The utility model discloses a process chamber measuring assembly, which relates to the technical field of measuring assemblies and comprises a base, a cross is mounted in the middle of the top end of the base, four sliding rail assemblies are mounted at the edge of the top end of the cross, and supporting rods are mounted at the top ends of the four sliding rail assemblies. The positions, facing the center of the cross, of one sides of the four supporting rods are each provided with a sliding frame in a sliding mode, stand columns are installed at the opposite ends of the four sliding frames, a plurality of first hinge frames are vertically installed on the outer surfaces of the stand columns, and a plurality of second hinge frames are installed on the portions, inside the first hinge frames, of the outer surfaces of the stand columns; one end of the first hinge frame and one end of the second hinge frame are each rotationally connected with a flexible roller. According to the utility model, a series of structures are arranged, so that the process chamber measuring assembly can position chambers with different shapes, manual auxiliary positioning of operators is not needed during detection of special-shaped chambers, and the application range of the process chamber measuring assembly is widened.

Description

TECHNICAL FIELD

[0001] The utility model relates to measuring assembly technical field, concretely is a process chamber measuring assembly. BACKGROUND

[0002] Process chamber measuring assembly refers to the device or system for monitoring, calibration or control of key parameters in process chamber, and its core function is to ensure the stability and precision of process, especially in the precision industrial field such as semiconductor manufacturing, vacuum coating

[0003] The existing process chamber measuring assembly is mostly fixed in the chamber to be measured through rigid clamps, and this fixing mode can fix the chamber with regular shape inside the measuring assembly, but the special-shaped chamber cannot be effectively fixed, and sometimes the operator needs to assist positioning by hand, and the chamber may shake during detection, thereby affecting the detection precision. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a process chamber measuring assembly to solve the problems in the above background technology.

[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme: a process chamber measuring assembly, comprising a base, a cross is installed at the top middle position of the base, four slide rail assemblies are installed at the top edge of the cross, a support rod is installed at the top of each of the four slide rail assemblies, a sliding frame is slidably installed at the side of each of the four support rods towards the center position of the cross, a vertical column is installed at the opposite end of each of the four sliding frames, a plurality of first hinged frames are vertically installed on the outer surface of the vertical column, a plurality of second hinged frames are installed on the outer surface of the vertical column inside the first hinged frame, a flexible roller is rotatably connected to one end of each of the first hinged frame and the second hinged frame, a loading platform is detachably installed above the base, an upper frame is installed at the top of the loading platform, an electric push rod is installed at the top of the upper frame, the bottom end of the electric push rod penetrates through the upper frame, and a wire laser displacement sensor is installed at the bottom of the electric push rod.

[0006] Preferably, four screw rods are rotatably connected to the top four corner positions of the base, a positioning column is detachably installed at the top of each of the four screw rods, the four positioning columns are respectively installed at the bottom four corner positions of the loading platform, the bottom of the positioning column is provided with a screw hole matched with the screw rod, and the positioning column is used in cooperation with the screw rod to fix the loading platform, which is convenient for disassembly and maintenance.

[0007] Preferably, a telescopic rod is hingedly installed between one side of each of the first and second hinges and the sliding frame, and a spring is installed on the outer surface of the telescopic rod, when the supporting rod moves to the middle position of the cross frame for detecting the chamber, the flexible roller contacts the outer surface of the chamber, the first and second hinges rotate, the telescopic rod extends or retracts, and the spring applies pressure to position the chamber.

[0008] Preferably, a support is installed at the top end of the electric push rod, the bottom end of the support is installed at the top end of the upper frame, the output end of the electric push rod extends out of the bottom end of the upper frame, the support supports the electric push rod, and the electric push rod drives the linear laser displacement sensor to vertically move when the electric push rod moves.

[0009] Preferably, a rubber pad is arranged at the middle position of the top end of the carrier, if the bottom of the chamber to be detected is provided with an opening, the bottom of the chamber can be in contact with the rubber pad, the rubber pad is deformed by the downward pressure to seal the bottom of the chamber, and detection is facilitated.

[0010] Preferably, a screw rod is installed in each of the four supporting rods, and the outer surface of the screw rod is connected with the sliding frame through a sliding block, and the sliding block drives the sliding frame to vertically move when the screw rod operates.

[0011] Compared with the prior art, the chamber measuring assembly has the advantages that:

[0012] The chamber measuring assembly has the advantages that: BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a whole structure schematic view of the utility model;

[0014] Figure 2 It is a base structure schematic view of the utility model;

[0015] Figure 3 It is a carrier structure schematic view of the utility model; Figure 2 It is an enlarged schematic view of structure in A of the utility model;

[0016] Figure 4 It is a carrier structure schematic view of the utility model.

[0017] In the figure: 1, base; 2, positioning column; 3, loading platform; 4, upper frame; 5, electric push rod; 6, support; 7, slide rail assembly; 8, screw rod; 9, sliding frame; 10, screw rod; 11, brace; 12, cross frame; 13, spring; 14, telescopic rod; 15, flexible roller; 16, stand; 17, first hinged frame; 18, second hinged frame; 19, line laser displacement sensor; 20, rubber pad. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0019] In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0020] As Figures 1 to 4As shown, the process chamber measurement assembly of this embodiment includes a base 1. A cross 12 is installed at the center of the top of the base 1. Four slide rail assemblies 7 are installed at the top edge of the cross 12. Each of the four slide rail assemblies 7 has a support rod 11 installed at its top. The support rod 11 can move linearly through the slide rail assemblies 7. A sliding frame 9 is slidably installed on one side of each of the four support rods 11 facing the center of the cross 12. The sliding frame 9 is limited by the support rod 11 and can move vertically linearly. A column 16 is installed at the opposite end of each of the four sliding frames 9. Several first hinges 17 are vertically installed on the outer surface of the column 16. Several second hinges 18 are installed on the outer surface of the column 16 inside the first hinges 17. The first hinges 17 and the second hinges 18 can move vertically linearly on the surface of the column 16. One end of both 17 and the second hinge 18 is rotatably connected to a flexible roller 15. The circumferential surface of the flexible roller 15 is roughened. When performing chamber testing, the flexible roller 15 contacts the outer surface of the chamber to be tested and positions the chamber by friction. A platform 3 is detachably installed above the base 1. The platform 3 is used to support the testing structure. An upper frame 4 is installed at the top of the platform 3. An electric push rod 5 is installed at the top of the upper frame 4. The bottom end of the electric push rod 5 passes through the upper frame 4. A line laser displacement sensor 19 is installed at the bottom of the electric push rod 5. The line laser displacement sensor 19 contains a laser emitting module, an optical receiving system, and a signal processing unit. It adopts the laser triangulation positioning method. The laser emitting module emits a line laser beam to the surface of the gap to be tested. The optical receiving system receives the reflected light spot and calculates the gap size based on the light spot displacement.

[0021] Specifically, four screws 8 are rotatably connected at the four corners of the top of the base 1. Each of the four screws 8 has a detachable positioning post 2 installed at the top. The four positioning posts 2 are respectively installed at the four corners of the bottom of the platform 3. The bottom of the positioning post 2 is provided with screw holes that match the screws 8. The positioning post 2 and the screws 8 work together to fix the platform 3, making it easy to disassemble and perform maintenance.

[0022] Furthermore, each of the first hinge frame 17 and the second hinge frame 18 is hinged to one side of the sliding frame 9 with a telescopic rod 14. A spring 13 is installed on the outer surface of the telescopic rod 14. When the support rod 11 moves to the middle position of the cross 12 to test the chamber, the flexible roller 15 contacts the outer surface of the chamber, the first hinge frame 17 and the second hinge frame 18 will rotate, the telescopic rod 14 will extend and retract, and the spring 13 will apply pressure to position the chamber.

[0023] Furthermore, a bracket 6 is installed at the top of the electric push rod 5, and the bottom end of the bracket 6 is installed at the top of the upper frame 4. The output end of the electric push rod 5 extends out of the bottom end of the upper frame 4. The bracket 6 supports the electric push rod 5. When the electric push rod 5 moves, it drives the linear laser displacement sensor 19 to perform vertical linear motion.

[0024] Furthermore, a rubber pad 20 is provided at the top center of the stage 3. If the bottom of the chamber to be tested has an opening, the bottom of the chamber can be brought into contact with the rubber pad 20, and the rubber pad 20 can be deformed by applying downward pressure to seal the bottom of the chamber, which facilitates testing.

[0025] Furthermore, each of the four support rods 11 has a lead screw 10 installed inside. The outer surface of the lead screw 10 is connected to the sliding frame 9 via a slider. When the lead screw 10 is running, it drives the slider to make the sliding frame 9 move vertically and linearly.

[0026] The usage method of this embodiment is as follows: When using the process chamber measurement component, first place the chamber to be tested on the top of the rubber pad 20, then adjust the height of the sliding frame 9 through the lead screw 10 to make the sliding frame 9 adapt to the height of the chamber, and then drive the support rod 11 to make linear movement through the four slide rail components 7, so that the four support rods 11 move towards the chamber, and the flexible roller 15 contacts the outer surface of the chamber. The first hinge 17 and the second hinge 18 will rotate, the telescopic rod 14 will move in extension and retraction, and the spring 13 will apply pressure to position the chamber and fix the chamber above the platform 3. The chamber to be tested may be irregular in shape. During positioning, the rotation angles of several first hinges 17 and second hinges 18 are different, which can ensure that the flexible roller 15 is in close contact with the outer surface of the chamber to be tested. After the chamber is fixed, drive the linear laser displacement sensor 19 downward through the electric push rod 5. The laser triangulation positioning method is adopted. The laser emitting module emits a linear laser beam to the surface of the gap to be measured, and the reflected light spot is received through the optical receiving system. The gap size is calculated based on the light spot displacement.

[0027] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A process chamber measuring assembly, comprising a base (1), characterized in that: A cross (12) is installed at the top center of the base (1). Four slide rail assemblies (7) are installed at the top edge of the cross (12). Each of the four slide rail assemblies (7) has a support rod (11) installed at its top. A sliding frame (9) is slidably installed on one side of each of the four support rods (11) facing the center of the cross (12). A column (16) is installed at the opposite end of each of the four sliding frames (9). Several first hinges (17) are vertically installed on the outer surface of the column (16). 17) Several second hinges (18) are installed on the outer surface of the internal column (16). One end of the first hinge (17) and the second hinge (18) are rotatably connected to a flexible roller (15). A platform (3) is detachably installed above the base (1). An upper frame (4) is installed on the top of the platform (3). An electric push rod (5) is installed on the top of the upper frame (4). The bottom end of the electric push rod (5) passes through the upper frame (4). A wire laser displacement sensor (19) is installed at the bottom of the electric push rod (5).

2. The process chamber measurement assembly according to claim 1, characterized in that: Four screws (8) are rotatably connected at the four corners of the top of the base (1). Each of the four screws (8) has a detachable positioning post (2) installed at the top. The four positioning posts (2) are respectively installed at the four corners of the bottom of the platform (3).

3. The process chamber measurement assembly according to claim 1, characterized in that: Each of the first hinge (17) and the second hinge (18) is hinged to one side of the sliding frame (9) with a telescopic rod (14), and a spring (13) is installed on the outer surface of the telescopic rod (14).

4. The process chamber measurement assembly according to claim 1, characterized in that: The top of the electric push rod (5) is equipped with a bracket (6), the bottom of the bracket (6) is installed on the top of the upper frame (4), and the output end of the electric push rod (5) extends out of the bottom of the upper frame (4).

5. The process chamber measurement assembly according to claim 1, characterized in that: A rubber pad (20) is provided at the middle position of the top of the platform (3).

6. The process chamber measurement assembly according to claim 1, characterized in that: Each of the four support rods (11) has a lead screw (10) installed inside, and the outer surface of the lead screw (10) is connected to the sliding frame (9) by a slider.

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