Negative pressure measuring device and semiconductor preparation system
By setting up a first water tank and a second water tank in the negative pressure measuring device, the problem of differential pressure sensor being affected by condensation water is solved, achieving high-precision measurement and convenient drainage, thus improving the reliability of the device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 捷捷微电(南通)科技有限公司
- Filing Date
- 2025-06-25
- Publication Date
- 2026-05-12
AI Technical Summary
In existing technologies, differential pressure sensors are susceptible to condensation in negative pressure pipelines, which can lead to decreased measurement accuracy or damage, and are also inconvenient to clean.
A negative pressure measuring device was designed, including a differential pressure sensor, a pressure tapping pipe, a first water tank, a second water tank, a first pipeline, and a second pipeline. By setting up the first and second water tanks, condensate flows into the second water tank. The differential pressure sensor is located above the first water tank to avoid being affected by the condensate. Automatic drainage is achieved through a control module and a liquid level sensor.
This effectively avoids the impact of condensation on the differential pressure sensor, improves measurement accuracy and device sealing, simplifies the drainage process, and reduces the risk of damage to the sensor.
Smart Images
Figure CN224231147U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a negative pressure measuring device and a semiconductor fabrication system. Background Technology
[0002] In semiconductor manufacturing processes, negative pressure channels (used to draw in or maintain an environment below atmospheric pressure) are an essential component for the normal operation of many critical devices.
[0003] To monitor the pressure difference between negative pressure pipelines and the atmospheric environment, differential pressure sensors are needed to measure the negative pressure in the pipeline. Currently, differential pressure sensors are typically connected to the negative pressure pipeline via a pressure-sensing pipe to achieve negative pressure measurement.
[0004] However, condensation can easily form inside the pressure tapping tube, which can affect the measurement accuracy of the differential pressure sensor and even damage it.
[0005] In summary, existing technologies suffer from the problem that the operation of differential pressure sensors is affected by condensation. Utility Model Content
[0006] The purpose of this application is to provide a negative pressure measuring device and a semiconductor fabrication system to solve the problem that the operation of differential pressure sensors in the prior art is affected by condensation.
[0007] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:
[0008] On one hand, this application provides a negative pressure measuring device, which includes a differential pressure sensor, a pressure tapping pipe, a first water tank, a second water tank, a first pipe, and a second pipe. The first water tank is connected to a negative pressure pipe through the first pipe, and the first water tank is connected to the second water tank through the second pipe. The differential pressure sensor is connected to the side of the first water tank through the pressure tapping pipe.
[0009] The second water tank is located below the first water tank, and the differential pressure sensor is located above the first water tank.
[0010] Optionally, the negative pressure measuring device further includes a first valve, which is disposed on the second pipeline, and a drain outlet is provided at the bottom of the second water storage tank;
[0011] When the drain outlet is opened, the first valve closes.
[0012] Optionally, the negative pressure measuring device further includes a third pipe and a second valve, wherein the third pipe is connected to the top of the second water tank, and the second valve is disposed on the third pipe;
[0013] When the drain outlet is opened, the second valve opens.
[0014] Optionally, the negative pressure measuring device further includes a fourth pipe and a third valve, wherein the fourth pipe is connected to the drain port of the second valve, and the third valve is disposed on the fourth pipe.
[0015] Optionally, the negative pressure measuring device further includes a control module, which is electrically connected to the first valve, the second valve, and the third valve, respectively, and is used to control the opening and closing states of the first valve, the second valve, and the third valve.
[0016] Optionally, the negative pressure measuring device further includes a first liquid level sensor and a second liquid level sensor, both of which are disposed inside the second water tank, with the height of the first liquid level sensor being higher than the height of the second liquid level sensor. Both the first and second liquid level sensors are electrically connected to the control module.
[0017] When the control module receives the liquid level information sent by the first liquid level sensor, it controls the first valve to close and controls the second valve and the third valve to open.
[0018] When no liquid level information is received from the second liquid level sensor, the control module controls the first valve to open and controls the second valve and the third valve to close.
[0019] Optionally, the negative pressure measuring device further includes a fourth valve, which is disposed on the first pipeline.
[0020] Optionally, the differential pressure sensor is positioned at a 45° angle to the pressure tapping tube.
[0021] Optionally, both the first pipe and the second pipe are configured as transparent pipes.
[0022] On the other hand, embodiments of this application also provide a semiconductor fabrication system, which includes the aforementioned negative pressure measuring device.
[0023] Compared with the prior art, this application has the following advantages:
[0024] This application provides a negative pressure measuring device and a semiconductor fabrication system. The negative pressure measuring device includes a differential pressure sensor, a pressure tapping pipe, a first water tank, a second water tank, a first pipe, and a second pipe. The first water tank is connected to a negative pressure pipe via the first pipe, and the first water tank is connected to the second water tank via the second pipe. The differential pressure sensor is connected to the side of the first water tank via the pressure tapping pipe. The second water tank is located below the first water tank, and the differential pressure sensor is located above the first water tank. Because this application adds a first and second water tank to the negative pressure measuring device, when condensation occurs in the pipe, the condensation flows into the second water tank. Since the differential pressure sensor is connected to the first water tank, it is not affected by the condensation. Furthermore, because the differential pressure sensor is located above the first water tank, even if condensation occurs in the pressure tapping pipe, it will flow into the first water tank and will not affect the differential pressure sensor.
[0025] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0026] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0027] Figure 1 This is a schematic diagram of the installation of a differential pressure sensor in the prior art.
[0028] Figure 2 This is a schematic diagram of the component connection of a negative pressure measuring device provided in an embodiment of this application.
[0029] Figure 3 This is a schematic diagram of another component connection of the negative pressure measuring device provided in the embodiments of this application.
[0030] Figure 4 This is a schematic diagram of the control module connection of the negative pressure measuring device provided in the embodiments of this application.
[0031] Figure 5 This is a schematic diagram of the pressure-sensing tube provided in an embodiment of this application.
[0032] In the picture:
[0033] 110 - Differential pressure sensor; 120 - Pressure tapping pipe; 121 - Main body; 122 - First connecting part; 123 - Second connecting part; 130 - First water storage tank; 140 - Second water storage tank; 150 - First pipeline; 160 - Second pipeline; 170 - First valve; 180 - Third pipeline; 190 - Second valve; 200 - Fourth pipeline; 210 - Third valve; 220 - Control module; 230 - First liquid level sensor; 240 - Second liquid level sensor; 300 - Negative pressure pipeline. Detailed Implementation
[0034] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0035] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0036] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0037] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.
[0038] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0039] As described in the background section, currently, in order to monitor the pressure difference between negative pressure pipelines and the atmospheric environment, differential pressure sensors need to be installed. However, condensation is easily generated inside the pressure tapping pipe, which affects the use of differential pressure sensors.
[0040] like Figure 1The diagram shown illustrates the installation of a differential pressure sensor in the prior art. In the diagram, △P represents the differential pressure sensor, which is directly connected to the negative pressure pipeline via a pressure-sensing pipe. However, in practical applications, condensation easily forms inside the negative pressure pipeline, affecting the operation of the differential pressure sensor.
[0041] For example, excessive water accumulation in the negative pressure pipeline can affect the measurement accuracy of the differential pressure sensor. Furthermore, excessive condensate may enter the differential pressure sensor, causing damage. Especially when corrosive gases are present in the negative pressure pipeline, the condensate also possesses corrosive properties, further exacerbating the damage to the differential pressure sensor. In addition, once water accumulates in the pressure tapping pipe, it cannot be cleaned online; the entire pipe must be removed for cleaning, making the process quite inconvenient.
[0042] In view of this, in order to solve the above problems, this application provides a negative pressure measuring device, which, by adding a water storage tank, ensures that even if condensation occurs in the pipeline, it will not affect the use of the differential pressure sensor.
[0043] The negative pressure measuring device provided in this application is described below by way of example:
[0044] As an optional implementation, please refer to Figure 2 The negative pressure measuring device includes a differential pressure sensor 110, a pressure tapping pipe 120, a first water tank 130, a second water tank 140, a first pipe 150, and a second pipe 160. The first water tank 130 is connected to the negative pressure pipe 300 through the first pipe 150, and the first water tank 130 is connected to the second water tank 140 through the second pipe 160. The differential pressure sensor 110 is connected to the side of the first water tank 130 through the pressure tapping pipe 120. The second water tank 140 is located below the first water tank 130, and the differential pressure sensor 110 is located above the first water tank 130.
[0045] Understandably, by setting up the first water storage tank 130 and the second water storage tank 140, when condensation occurs in the pipeline, the condensate flows into the second water storage tank 140. Since the differential pressure sensor 110 is connected to the first water storage tank 130, it is not affected by the condensate. Furthermore, because the differential pressure sensor 110 is located above the first water storage tank 130, even if condensation occurs in the pressure tap 120, it will flow into the first water storage tank 130 and will not affect the differential pressure sensor 110. At the same time, the first water storage tank 130 has a relatively large volume, so when condensation occurs in the pipeline, the condensate will not block the pipeline, thus not affecting the measurement accuracy of the differential pressure sensor 110.
[0046] To facilitate observation of the pipes by staff, in one optional implementation, both the first water tank 130 and the second water tank 140 are made of transparent housings, such as those made of acrylic material. Furthermore, this application does not limit the structure of the first water tank 130 and the second water tank 140; for example, both can be cubic structures. Of course, the first pipe 150 and the second pipe 160 can also be transparent pipes, such as those made of transparent PVC (Polyvinyl Chloride). Additionally, the pressure tap 120 can also be a transparent pipe.
[0047] By making the pipes, the first water tank 130, and the second water tank 140 all transparent, it is convenient for staff to observe the operation of the entire negative pressure measuring device in real time. If a large amount of condensate is found in the second water tank 140, it can be drained. For example, the second water tank 140 can be removed and the condensate poured out, or a drain outlet can be provided at the bottom of the second water tank 140 for drainage; there are no limitations on this. Compared to the method of directly connecting the pressure-sensing pipe 120 to the negative pressure pipe 300, the method of setting the first water tank 130 and the second water tank 140 in this application also makes drainage more convenient.
[0048] In this application, to make drainage of the second water storage tank 140 simpler, a drain outlet can be provided at the bottom of the second water storage tank. When drainage is required, the drain outlet can be opened directly; when drainage is not required, the drain outlet can be closed.
[0049] Since the various pipes are directly or indirectly connected to the negative pressure pipe 300, in order to maintain the negative pressure state within the negative pressure pipe 300, it is necessary to ensure the sealing of each pipe, and to achieve sealing even when the second water storage tank 140 drains water. Based on this, please refer to... Figure 3 The negative pressure measuring device also includes a first valve 170, which is installed on the second pipeline 160. It should be noted that the term "valve installed on XX pipeline" means that the pipeline is equipped with a valve. When the valve is closed, the pipeline is in a cut-off state, and gas cannot flow in the pipeline on both sides of the valve. When the valve is open or closed, gas can flow normally in the pipeline.
[0050] By setting the first valve 170, when the drain outlet of the second water tank 140 is opened for drainage, the first valve 170 can be controlled to close, thus ensuring the sealing of the first water tank 130 during drainage of the second water tank 140, and keeping the part of the negative pressure measuring device connected to the negative pressure pipeline 300 sealed. After drainage is completed, the drain outlet of the second water tank 140 can be closed, and the first valve 170 can be controlled to open, allowing condensate to flow into the second water tank 140, while the entire negative pressure measuring device remains sealed.
[0051] Furthermore, when the drain outlet is opened to drain water, the first valve 170 is closed, so there may be a pressure difference between the inside of the entire second water storage tank 140 and the external atmospheric environment, which may result in the condensate not being discharged or being discharged incompletely.
[0052] Therefore, the negative pressure measuring device provided in this application also includes a third pipe 180 and a second valve 190. The third pipe 180 is connected to the top of the second water storage tank 140, and the second valve 190 is installed on the third pipe 180. When the drain outlet is opened, the second valve 190 also opens simultaneously. By setting the second valve 190, both the bottom and top of the second water storage tank 140 are connected to the atmosphere when draining, ensuring that condensate can be completely drained; after draining, the second valve 190 can be closed to ensure the airtightness of the entire negative pressure measuring device.
[0053] To facilitate drainage control, in one implementation, the negative pressure measuring device further includes a fourth pipe 200 and a third valve 210. The fourth pipe 200 is connected to the drain outlet of the second valve 190, and the third valve 210 is installed on the fourth pipe 200.
[0054] By setting up the fourth pipe 200 and the third valve 210, the third valve 210 can be opened directly when drainage is needed, eliminating the need to control the drain outlet and simplifying the drainage process. Simultaneously, the fourth pipe 200 allows wastewater (i.e., condensate in the second water storage tank 140) to be discharged into a wastewater tank, making the entire drainage process smoother and preventing wastewater leakage.
[0055] In one alternative implementation, to simplify the operation of the negative pressure measuring device, the negative pressure measuring device provided in this application further includes a control module 220 based on the above structure. The control module 220 is electrically connected to the first valve 170, the second valve 190, and the third valve 210, respectively. The control module 220 is used to control the opening and closing states of the first valve 170, the second valve 190, and the third valve 210.
[0056] The control module 220 provided in this application can be a PLC control cabinet, and the first valve 170, the second valve 190, and the third valve 210 can all be electric ball valves. By setting up the control module 220, the operator only needs to send the corresponding control commands to realize the drainage operation. For example, when the operator observes that there is a lot of condensate in the second water tank 140, they can send a control command through the control module 220 to control the first valve 170 to close and the second valve 190 and the third valve 210 to open, thereby realizing the drainage operation in the second water tank 140. It should be noted that during the drainage process, the first water tank 130 also plays a role in temporary water storage. That is, while the first water tank 130 is sealed, it also serves the function of water storage. This allows the larger volume of the first water tank 130 to store the condensate generated during the drainage of the second water tank 140, preventing the condensate from entering the differential pressure sensor 110 and affecting its normal operation.
[0057] After drainage is completed, the staff can send control commands again through the control module 220 to open the first valve 170 and close the second valve 190 and the third valve 210, thus reconnecting the second water tank 140 to the negative pressure environment, while the entire negative pressure measuring device remains sealed. Furthermore, once the second water tank 140 is connected, the condensate temporarily stored in the first water tank 130 will flow into the second water tank 140.
[0058] Of course, to achieve fully automatic control, the drainage control of the second water tank 140 can also be achieved by setting sensors. In one implementation, the negative pressure measuring device further includes a first liquid level sensor 230 and a second liquid level sensor 240. Both the first liquid level sensor 230 and the second liquid level sensor 240 are installed inside the second water tank 140, and the height of the first liquid level sensor 230 is higher than the height of the second liquid level sensor 240. For example, the first liquid level sensor 230 is installed near the top of the second water tank 140, and the second liquid level sensor 240 is installed near the bottom of the second water tank 140. Figure 4 As shown, both the first liquid level sensor 230 and the second liquid level sensor 240 are electrically connected to the control module 220.
[0059] When the control module 220 receives level information from the first level sensor 230, it indicates that there is a lot of condensate in the second water tank 140, requiring drainage. At this time, the control module 220 can control the first valve 170 to close and the second valve 190 and the third valve 210 to open. As the drainage operation continues, the level of condensate in the second water tank 140 will be lower than the position of the second level sensor 240. Therefore, when the control module 220 does not receive level information from the second level sensor 240, it indicates that the condensate in the second water tank 140 is already low. At this time, the control module 220 will control the first valve 170 to open and the second valve 190 and the third valve 210 to close.
[0060] Of course, in actual use, after a period of continuous use, the staff needs to inspect and maintain the negative pressure measuring device. Therefore, in order not to affect the negative pressure state of the negative pressure pipeline 300 during this process, the negative pressure measuring device also includes a fourth valve, which is installed on the first pipeline 150.
[0061] The fourth valve can be installed in a regular ball valve. Operators can manually open and close the fourth valve. During normal use of the negative pressure measuring device, the fourth valve is open, while when the negative pressure measuring device needs to be inspected or maintained, the fourth valve can be closed.
[0062] In addition, to ensure that internal condensate does not enter the differential pressure sensor 110, the differential pressure sensor 110 and the pressure tapping tube 120 are generally set at an acute angle, for example, at 30° to 60°. Optionally, the differential pressure sensor 110 and the pressure tapping tube 120 are set at 45°.
[0063] To facilitate communication between the pressure tapping pipe 120 and the differential pressure sensor 110 and the first water storage tank 130, the pressure tapping pipe 120 can be made of a rigid material, and an elbow is provided on the pressure tapping pipe 120. In one implementation, the pressure tapping pipe 120 includes a main body 121, a first connecting part 122, and a second connecting part 123. The two ends of the main body 121 are connected to the first connecting part 122 and the second connecting part 123 respectively and are integrally formed. The first connecting part 122 is set at a 45° angle to the main body 121, and the second connecting part 123 is also set at a 45° angle to the main body 121. The first connecting part 122 is set vertically, and the second connecting part 123 is set horizontally. The first connecting part 122 is connected to the differential pressure sensor 110, and the second connecting part 123 is connected to the first water storage tank 130.
[0064] This connection method facilitates the installation of the pressure tap 120 with the differential pressure sensor 110 and the first water tank 130. At the same time, condensate will not enter the differential pressure sensor 110 and affect its measurement.
[0065] Based on the above implementation, this application also provides a semiconductor fabrication system, which includes the negative pressure measuring device described above.
[0066] In summary, this application provides a negative pressure measuring device and a semiconductor fabrication system. The negative pressure measuring device includes a differential pressure sensor, a pressure tapping pipe, a first water tank, a second water tank, a first pipe, and a second pipe. The first water tank is connected to the negative pressure pipe via the first pipe, and the first water tank is connected to the second water tank via the second pipe. The differential pressure sensor is connected to the side of the first water tank via the pressure tapping pipe. The second water tank is located below the first water tank, and the differential pressure sensor is located above the first water tank. Because this application adds a first water tank and a second water tank to the negative pressure measuring device, when condensation occurs in the pipe, the condensation flows into the second water tank. Since the differential pressure sensor is connected to the first water tank, it is not affected by the condensation. Furthermore, because the differential pressure sensor is located above the first water tank, even if condensation occurs in the pressure tapping pipe, it will flow into the first water tank and will not affect the differential pressure sensor.
[0067] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
[0068] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A negative pressure measuring device, characterized in that, The negative pressure measuring device includes a differential pressure sensor, a pressure tapping pipe, a first water tank, a second water tank, a first pipe, and a second pipe. The first water tank is connected to the negative pressure pipe via the first pipe, and the first water tank is connected to the second water tank via the second pipe. The differential pressure sensor is connected to the side of the first water tank via the pressure tapping pipe. The second water tank is located below the first water tank, and the differential pressure sensor is located above the first water tank.
2. The negative pressure measuring device as described in claim 1, characterized in that, The negative pressure measuring device also includes a first valve, which is installed on the second pipeline, and a drain outlet is provided at the bottom of the second water storage tank; When the drain outlet is opened, the first valve closes.
3. The negative pressure measuring device as described in claim 2, characterized in that, The negative pressure measuring device also includes a third pipe and a second valve. The third pipe is connected to the top of the second water tank, and the second valve is installed on the third pipe. When the drain outlet is opened, the second valve opens.
4. The negative pressure measuring device as described in claim 3, characterized in that, The negative pressure measuring device also includes a fourth pipe and a third valve. The fourth pipe is connected to the drain port of the second valve, and the third valve is installed on the fourth pipe.
5. The negative pressure measuring device as described in claim 4, characterized in that, The negative pressure measuring device also includes a control module, which is electrically connected to the first valve, the second valve and the third valve respectively. The control module is used to control the opening and closing states of the first valve, the second valve and the third valve.
6. The negative pressure measuring device as described in claim 5, characterized in that, The negative pressure measuring device further includes a first liquid level sensor and a second liquid level sensor, both of which are disposed inside the second water storage tank. The height of the first liquid level sensor is higher than the height of the second liquid level sensor. Both the first and second liquid level sensors are electrically connected to the control module. When the control module receives the liquid level information sent by the first liquid level sensor, it controls the first valve to close and controls the second valve and the third valve to open. When no liquid level information is received from the second liquid level sensor, the control module controls the first valve to open and controls the second valve and the third valve to close.
7. The negative pressure measuring device as described in claim 1, characterized in that, The negative pressure measuring device also includes a fourth valve, which is installed on the first pipeline.
8. The negative pressure measuring device as described in claim 1, characterized in that, The differential pressure sensor is positioned at a 45° angle to the pressure tapping tube.
9. The negative pressure measuring device as described in claim 1, characterized in that, Both the first pipe and the second pipe are made into transparent pipes.
10. A semiconductor fabrication system, characterized in that, The semiconductor fabrication system includes the negative pressure measuring device as described in any one of claims 1 to 9.