Liquid crystal phase shifting device

Abstract

The utility model provides a liquid crystal phase shifting device. The liquid crystal phase shifting device comprises a first substrate, a second substrate, a plurality of retaining walls, a plurality of liquid crystal layers and a deformation film. The first substrate is provided with a plurality of through holes and a plurality of elastic films, and the elastic films cover the through holes. The second substrate and the first substrate are combined into a whole. The retaining walls are arranged between the first substrate and the second substrate, and a plurality of closed containing spaces are defined by the retaining walls, the first substrate and the second substrate. The multiple liquid crystal layers are arranged in the multiple containing spaces, and the liquid crystal layers comprise liquid crystal molecules. The deformation film is arranged on the second substrate and comprises a plurality of deformation parts, the deformation parts are arranged in the containing spaces, the deformation parts deform when receiving the control voltage, and the thickness of the liquid crystal layer in the containing spaces is changed. The through hole is used for enabling the liquid crystal molecules to overflow from the accommodating space when the deformation part deforms, and the elastic film is used for accommodating the liquid crystal molecules overflowing from the through hole. According to the liquid crystal phase shifting device, multiple different liquid crystal layer thicknesses can be achieved between two non-spliced substrates.

Description

Technical Field

[0001] This application relates to the field of microwave phased array antenna technology, specifically to a liquid crystal phase shifting device. Background Technology

[0002] Microwave phased array antennas are increasingly advantageous in communication systems due to their fast beam scanning, lack of motion inertia, strong anti-interference capability, and high reliability. As a core component of microwave phased array antennas, the performance of liquid crystal phase-shifting devices directly affects the efficiency of the communication system.

[0003] Liquid crystal phase-shifting devices have many advantages, including low cost, low control voltage, excellent high-frequency characteristics, ease of planar integration, wide operating frequency range, small size, low profile, and stable performance. The phase-shifting phase of a liquid crystal phase-shifting device is directly proportional to the refractive index of the liquid crystal and the thickness of the liquid crystal layer. When the refractive index of the liquid crystal layer remains constant, the phase-shifting phase is directly proportional to the thickness of the liquid crystal layer.

[0004] However, traditional liquid crystal phase-shifting devices are composed of multiple phase-shifting units, each corresponding to a different thickness of the liquid crystal layer to achieve phase transfer of electromagnetic waves. Current technology cannot fabricate phase-shifting units with various liquid crystal layer thicknesses on the same substrate. Existing technology typically requires first fabricating phase-shifting units with different liquid crystal layer thicknesses, and then splicing these units together. This splicing method is not only complex but also requires cutting and module assembly, thus increasing manufacturing costs and reducing production efficiency.

[0005] Therefore, it is necessary to propose a new technical solution to solve the above-mentioned technical problems. Utility Model Content

[0006] The purpose of embodiments of this application is to provide a liquid crystal phase shifting device that aims to achieve multiple different liquid crystal layer thicknesses between two non-spliced ​​substrates, thereby simplifying the manufacturing process and reducing manufacturing costs.

[0007] An embodiment of this application provides a liquid crystal phase-shifting device, comprising: a first substrate having a plurality of through holes, the first substrate including a plurality of elastic films, the elastic films sealing the through holes; a second substrate integrally formed with the first substrate, the second substrate including a deformation film; a plurality of baffles disposed between the first substrate and the second substrate, the plurality of baffles forming a plurality of closed receiving spaces with the first substrate and the second substrate; and a plurality of liquid crystal layers disposed in the plurality of receiving spaces, the liquid crystal layers including liquid crystal molecules; wherein, the deformation film includes a plurality of deformation portions disposed in the plurality of receiving spaces, the deformation portions being configured to deform upon receiving a control voltage to change the thickness of the liquid crystal layers located in the receiving spaces, the through holes being configured to allow the liquid crystal molecules to overflow from the receiving spaces when the deformation portions deform, and the elastic films being configured to contain the liquid crystal molecules overflowing from the through holes.

[0008] In the above-described liquid crystal phase shifting device, the first substrate includes a first substrate, a first electrode layer disposed on the first substrate, and a first alignment film; the second substrate includes a second substrate, a second electrode layer disposed on the second substrate, a common electrode layer, and a second alignment film; wherein, the deformation film is disposed between the second electrode layer and the common electrode layer.

[0009] In the above-mentioned liquid crystal phase shifting device, the through hole includes: a first through hole that penetrates the first substrate; a second through hole that penetrates the first electrode layer; and a third through hole that penetrates the first alignment film; wherein the first through hole, the second through hole and the third through hole are connected.

[0010] In the above-described liquid crystal phase shifting device, the elastic film is attached to a surface of the first substrate facing away from the first electrode layer, and the elastic film seals the first through hole.

[0011] In the above-described liquid crystal phase-shifting device, the second electrode layer includes a plurality of second electrodes disposed within the space enclosed by the baffle wall; the deformable portion is disposed on the second electrode; the common electrode layer includes a plurality of common electrodes disposed within the space enclosed by the baffle wall and disposed on the deformable portion; the second alignment film includes a plurality of alignment portions disposed on the common electrode and disposed within the space enclosed by the baffle wall.

[0012] In the above-mentioned liquid crystal phase shifting device, one end of the barrier is disposed on the first substrate and the other end is disposed on the second substrate.

[0013] In the above-mentioned liquid crystal phase shifting device, one end of the baffle is located in the gap between two adjacent first electrodes, and the other end of the baffle is located in the gap between two adjacent second electrodes.

[0014] In the above-mentioned liquid crystal phase shifting device, one end of the barrier is disposed on the first alignment film of the first substrate, and the other end is disposed on the second substrate.

[0015] In the above-mentioned liquid crystal phase shifting device, one end of the barrier is located on the first alignment film, and the other end of the barrier is located in the gap between two adjacent second electrodes.

[0016] In the above-mentioned liquid crystal phase shifting device, the elastic film is a transparent film.

[0017] The liquid crystal phase-shifting device provided in this application solves the technical problem that traditional liquid crystal phase-shifting devices require splicing multiple phase-shifting units by achieving various liquid crystal layer thicknesses between two non-spliced ​​substrates, and has the following beneficial effects:

[0018] The liquid crystal phase-shifting device of this application forms multiple enclosed receiving spaces by setting multiple baffles between a first substrate and a second substrate. A liquid crystal layer is disposed in each receiving space, and a deformation film is disposed on the second substrate. The deformation film includes multiple deformation portions, which are respectively disposed in the multiple receiving spaces. When different control voltages are applied to the deformation portions in different receiving spaces, the deformation portions will deform to different degrees, thereby changing the thickness of the liquid crystal layer in the corresponding receiving space. This technical solution enables the simultaneous fabrication of multiple liquid crystal layers of different thicknesses between two complete, non-spliced ​​substrates, avoiding the complex process of first fabricating liquid crystal cells of different thicknesses and then splicing them in traditional technologies, significantly simplifying the manufacturing process and reducing manufacturing costs.

[0019] Furthermore, the liquid crystal phase-shifting device of this application has multiple through holes on the first substrate, and these through holes are sealed with an elastic film. When the deformation portion deforms, the liquid crystal molecules in the accommodating space are squeezed out from the through holes and are contained by the elastic film. This technical solution solves the problem of the destination of liquid crystal molecules when the thickness of the liquid crystal layer changes, ensuring the stability and reliability of the device. The through hole design includes a first through hole penetrating the first substrate, a second through hole penetrating the first electrode layer, and a third through hole penetrating the first alignment film. The three are connected to form a complete through hole, ensuring that the liquid crystal molecules can overflow smoothly. The design of the elastic film ensures that the overflowed liquid crystal molecules will not leak into the external environment, and at the same time, it can adaptively form a accommodating space according to the amount of liquid crystal molecules overflowing.

[0020] Furthermore, the liquid crystal phase-shifting device of this application uses a piezoelectric material (such as lead zirconium titanate) as the material for the deformation section. This material can generate precise deformation when receiving a control voltage, thereby achieving precise control of the liquid crystal layer thickness. By applying different control voltages to the second electrode in different accommodating spaces, the deformation section in different accommodating spaces can undergo different degrees of deformation, thereby achieving multiple different liquid crystal layer thicknesses in the same device and meeting the requirements of multiphase phase shifting.

[0021] Furthermore, in the liquid crystal phase-shifting device of this application, the first electrode and the common electrode are used to control the deflection of liquid crystal molecules, while the second electrode and the common electrode are used to control the deformation of the deformable portion. This technical solution allows the deflection control of liquid crystal molecules and the control of liquid crystal layer thickness to be performed independently, enhancing the flexibility and controllability of the device and enabling more precise adjustment of the phase delay of electromagnetic waves.

[0022] Furthermore, the liquid crystal phase-shifting device of this application achieves various liquid crystal layer thicknesses between two complete, non-spliced ​​substrates, avoiding the precision loss and structural instability caused by cutting and splicing processes in traditional technologies, thus improving the overall performance and reliability of the device. At the same time, since cutting and splicing are unnecessary, the manufacturing process is simpler, production efficiency is higher, and manufacturing costs are lower.

[0023] In summary, the liquid crystal phase shifting device provided in this application achieves various liquid crystal layer thicknesses between two non-spliced ​​substrates, solving the technical problems of complex manufacturing processes and high costs of traditional liquid crystal phase shifting devices. It has the advantages of simple structure, low manufacturing cost, and high integration, and can meet the needs of modern communication systems for high-performance microwave phased array antennas. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the liquid crystal phase shifting device provided in the embodiments of this application in a state in which the deformable part has not been deformed.

[0025] Figure 2 This is a schematic diagram of the liquid crystal phase shifting device provided in the embodiments of this application, in which the deformable part has been deformed.

[0026] Figure 3 This is a schematic diagram of the step of manufacturing the first substrate in the manufacturing method of the liquid crystal phase shifting device provided in the embodiments of this application.

[0027] Figure 4 yes Figure 3 A bottom view of the first substrate in the first substrate shown.

[0028] Figure 5 yes Figure 3 The bottom view of the first substrate is shown.

[0029] Figure 6 This is a schematic diagram of the step of manufacturing the second substrate in the manufacturing method of the liquid crystal phase shifting device provided in the embodiments of this application. Detailed Implementation

[0030] The specific embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0031] The terms “first,” “second,” and similar words do not indicate any order, quantity, or importance, but are merely used to distinguish different technical features. The terms “multiple,” and similar words mean two or more, unless otherwise expressly specified.

[0032] The embodiments of this application can be combined with each other.

[0033] The liquid crystal phase-shifting device provided in the embodiments of this application includes a first substrate 101, a second substrate 102, a liquid crystal layer 103, and a control circuit. This liquid crystal phase-shifting device is suitable for microwave phased array antenna systems and is used to achieve phase modulation of electromagnetic waves.

[0034] The liquid crystal phase-shifting device includes an active region and a passive region. The active region has a liquid crystal layer 103 for phase modulation of electromagnetic waves; the passive region is located around the active region and is used to arrange control circuits and various signal lines. The liquid crystal phase-shifting device also includes multiple electrode units, multiple control lines, and a driving circuit. The multiple electrode units are arranged in an array, and the multiple control lines connect each electrode unit to the driving circuit. The driving circuit is located in the passive region and is electrically connected to the multiple electrode units. The control circuit is electrically connected to the driving circuit through a flexible connection.

[0035] The liquid crystal phase-shifting device includes a first substrate 101, a second substrate 102, and a liquid crystal layer 103 disposed between the two substrates. The first substrate 101 includes a substrate, a first electrode layer 1012 disposed on the substrate, a first alignment film 1013 disposed on the first electrode layer 1012, etc. The first electrode layer 1012 includes a plurality of independently controlled electrode units. The second substrate 102 includes a substrate, a second electrode layer 1022 disposed on the substrate, a second alignment film 1025 disposed on the second electrode layer 1022, etc. The second electrode layer 1022 is typically a common electrode layer 1024, shared by all electrode units.

[0036] Each electrode unit corresponds to an independently controlled phase-shifting unit. When a voltage is applied to the electrode unit, the liquid crystal molecules deflect to different degrees according to the electric field strength, thereby changing the equivalent dielectric constant of the liquid crystal layer 103 for electromagnetic waves, and thus adjusting the phase delay of the electromagnetic wave as it passes through this region. By controlling the voltage of different electrode units, precise control of the electromagnetic wave phase can be achieved.

[0037] The driving circuit includes a voltage control unit and a signal processing unit. The voltage control unit generates control voltages of different magnitudes, and the signal processing unit converts the control signals into corresponding voltage control signals. The control circuit receives and processes externally input control signals, generates driving signals, and transmits these signals to the driving circuit. The power management unit provides operating voltages to various parts of the liquid crystal phase shifter, including providing control voltages to the electrode units and operating voltages to the driving circuit.

[0038] In embodiments of this application, the liquid crystal phase-shifting device further includes a deformation film 1023 disposed on the second substrate 102. The deformation film 1023 includes multiple deformation portions, which are respectively disposed within multiple independent receiving spaces 105. By applying different control voltages to the deformation portions, the deformation portions can undergo different degrees of deformation, thereby changing the thickness of the liquid crystal layer 103 and achieving further modulation of the electromagnetic wave phase. Embodiments of this application enable the realization of multiple different liquid crystal layer 103 thicknesses within the same device, meeting the requirements of multi-phase phase shifting and avoiding the complex process of splicing multiple phase-shifting units required in conventional technologies.

[0039] like Figure 1 and Figure 2 As shown, an embodiment of this application provides a liquid crystal phase-shifting device, which is a multi-phase liquid crystal phase-shifting device. The liquid crystal phase-shifting device includes a first substrate 101 and a second substrate 102. The first substrate 101 and the second substrate 102 are integrated into one unit. A plurality of baffles 104 are disposed between the first substrate 101 and the second substrate 102. The plurality of baffles 104 and the first substrate 101 and the second substrate 102 form a plurality of closed receiving spaces 105. A liquid crystal layer 103 is disposed in each closed receiving space 105. The liquid crystal layer 103 includes liquid crystal molecules.

[0040] In one embodiment of this application, a first substrate 101 is provided with a plurality of through holes 1015, and the first substrate 101 includes a plurality of elastic films 1014, the elastic films 1014 sealing the through holes 1015, such as... Figure 1 , Figure 2 and Figure 3 As shown.

[0041] In one embodiment of this application, the first substrate 101 includes a first substrate 1011, a first electrode layer 1012 disposed on the first substrate 1011, and a first alignment film 1013. The first substrate 1011 has a plurality of first through-holes 10111 arranged in an array, such as... Figure 4As shown, the first through-hole 10111 penetrates the first substrate 1011. The first electrode layer 1012 is provided with a plurality of second through-holes 10121 that correspond one-to-one with the first through-hole 10111 in position. The first alignment film 1013 is provided with a plurality of third through-holes 10131 that correspond one-to-one with the first through-hole 10111 in position. The first through-hole 10111, the second through-hole 10121 and the third through-hole 10131 are connected to form a through-hole 1015 penetrating the first substrate 101. The plurality of first through-holes 10111 are arranged in an array.

[0042] In one embodiment of this application, the elastic film 1014 is a transparent film. The elastic film 1014 is attached to a surface of the first substrate 1011 facing away from the surface where the first electrode layer 1012 is disposed, and the elastic film 1014 seals the first through hole 10111. The transparent elastic film 1014 allows light to pass through while having sufficient elasticity to temporarily store (accommodate) overflowing liquid crystal molecules, forming a temporary storage (accommodation) space.

[0043] In one embodiment of this application, a deformation film 1023 is disposed on a second substrate 102. The deformation film 1023 includes a plurality of deformation portions disposed within a plurality of receiving spaces 105. The deformation portions are used to deform upon receiving a control voltage to change the thickness of the liquid crystal layer 103 located within the receiving space 105. A through-hole 1015 is used to allow liquid crystal molecules to overflow from the receiving space 105 when the deformation portions deform. An elastic film 1014 is used to temporarily store (receive) the liquid crystal molecules overflowing from the through-hole 1015. The second substrate 102 includes a second substrate 1021 and a second electrode layer 1022, a deformation film 1023, a common electrode layer 1024, and a second alignment film 1025 disposed on the second substrate 1021. The deformation film 1023 is disposed between the second electrode layer 1022 and the common electrode layer 1024.

[0044] In one embodiment of this application, the second electrode layer 1022 includes a plurality of second electrodes disposed within the space enclosed by the baffle 104, and the plurality of second electrodes are independent of each other. A deformation portion is disposed on the second electrodes. The common electrode layer 1024 includes a plurality of common electrodes disposed within the space enclosed by the baffle 104 and on the deformation portion, and the plurality of common electrodes are electrically connected to the same common voltage input terminal. The second alignment film 1025 includes a plurality of alignment portions disposed on the common electrodes and within the space enclosed by the baffle 104, and the plurality of alignment portions are independent of each other.

[0045] In one embodiment of this application, the material of the deformable portion is a piezoelectric material. Specifically, the deformable film 1023 is a piezoelectric material layer, and the deformable portion is a piezoelectric material block. The piezoelectric material is lead zirconium titanate. The lead zirconium titanate material is used to generate deformation when a voltage is received. The first alignment film 1013 and the second alignment film 1025 are both polyimide films. The polyimide film is used to control the alignment direction of liquid crystal molecules.

[0046] In one embodiment of this application, one end of the baffle 104 is disposed on the first substrate 1011, and the other end is disposed on the second substrate 1021. One end of the baffle 104 is located in the gap between two adjacent first electrodes, and the other end of the baffle 104 is located in the gap between two adjacent second electrodes. This arrangement ensures that the baffle 104 does not interfere with the normal operation of the electrodes, while effectively dividing the entire substrate into multiple independent receiving spaces 105.

[0047] In another embodiment of this application, one end of the barrier 104 is disposed on the first alignment film 1013 of the first substrate 101, and the other end is disposed on the second substrate 1021. One end of the barrier 104 is located on the first alignment film 1013, and the other end of the barrier 104 is located in the gap between two adjacent second electrodes. This arrangement can reduce the impact of the barrier 104 on the first electrode layer 1012 while maintaining effective separation of the accommodating space 105.

[0048] In one embodiment of this application, when a control voltage is applied to the second electrode located in a receiving space 105, the deformation portion between the second electrode and a common electrode located in the same receiving space 105 deforms in a direction perpendicular to the plane where the second substrate 1021 is located, causing the liquid crystal molecules located in the receiving space 105 and between the second alignment film 1025 and the first alignment film 1013 to be squeezed. The liquid crystal molecules overflow from the through hole 1015 formed by the first through hole 10111, the second through hole 10121, and the third through hole 10131. The elastic film 1014 forms a temporary storage (accommodation) space for temporarily storing (accommodating) the overflowed liquid crystal molecules under the pressure of the overflowed liquid crystal molecules.

[0049] In one embodiment of this application, a first electrode and a common electrode are used to control the deflection of liquid crystal molecules. By adjusting the voltage difference between the first electrode and the common electrode, the alignment direction of the liquid crystal molecules can be controlled, thereby adjusting the phase delay of the liquid crystal layer 103 for electromagnetic waves.

[0050] The following is combined Figure 3 , Figure 4 , Figure 5 and Figure 6 The manufacturing method of the liquid crystal phase shifting device of this application will be described.

[0051] First, a plurality of first vias 10111 are formed on the first substrate 1011. Specifically, a plurality of first vias 10111 arranged in a two-dimensional array are formed on the first substrate 1011 by laser drilling process, and the first vias 10111 penetrate the first substrate 1011.

[0052] Then, a first electrode layer 1012 and a first alignment film 1013 are formed on the first substrate 1011. Specifically, the first electrode layer 1012 and the first alignment film 1013 are formed on the portion of the first substrate 1011 where no holes are provided. The first electrode layer 1012 is provided with a plurality of second through holes 10121 that correspond one-to-one with the first through holes 10111 in position, and the first alignment film 1013 is provided with a plurality of third through holes 10131 that correspond one-to-one with the first through holes 10111 in position. The first through holes 10111, the second through holes 10121, and the third through holes 10131 are interconnected. This ensures that liquid crystal molecules can overflow from the receiving space 105 through these interconnected through holes 1015.

[0053] Next, a plurality of elastic films 1014 are formed on a surface of the first substrate 1011 facing away from the first electrode layer 1012. Specifically, a plurality of transparent elastic films 1014 arranged in a two-dimensional array are formed on a surface of the first substrate 1011 facing away from the first electrode layer 1012 and the first alignment film 1013. Each transparent elastic film 1014 is independent of the others and is located at the first through-hole 10111. The transparent elastic film 1014 seals the first through-hole 10111, forming a liquid crystal temporary storage component. The elastic film 1014 can form a temporary storage (accommodation) space when liquid crystal molecules overflow, preventing liquid crystal molecules from leaking into the external environment.

[0054] Then, a second electrode layer 1022 and a deformation film 1023 are formed on the second substrate 1021. Specifically, a second electrode layer 1022 is formed on one surface of the second substrate 1021, and the second electrode layer 1022 includes a plurality of second electrodes; a deformation film 1023 is formed on the second electrode layer 1022, and the deformation film 1023 includes a plurality of deformation portions.

[0055] Next, a common electrode layer 1024 and a second alignment film 1025 are formed on the deformation film 1023. Specifically, the common electrode layer 1024, which includes a plurality of common electrodes, is formed on the deformation film 1023; the second alignment film 1025, which includes a plurality of alignment portions, is formed on the common electrode layer 1024. The second electrode and the common electrode are used to jointly apply a control voltage to the deformation portion, causing the deformation portion to deform. Furthermore, the common electrode and the second electrode are used to jointly control the degree of deformation of the deformation portion, and the common electrode, together with the first electrode, controls the deflection of the liquid crystal molecules.

[0056] Finally, a sealant is applied as a barrier 104 on the first substrate 1011 or the second substrate 1021 to combine the first substrate 101 and the second substrate 102 into one unit, with liquid crystal molecules disposed between the first substrate 101 and the second substrate 102. The sealant effectively seals the accommodating space 105, preventing liquid crystal molecule leakage.

[0057] In one embodiment of this application, the common electrode is maintained at a preset potential (e.g., zero potential), the first electrode layer 1012 is energized to control the deflection of liquid crystal molecules, and different voltages are applied to the second electrode to control the deformation portion to undergo different degrees of deformation, thereby changing the thickness of the liquid crystal layer 103. By applying different control voltages to the second electrode in different accommodating spaces 105, the deformation portion in different accommodating spaces 105 can undergo different degrees of deformation, thereby achieving the formation of liquid crystal layers 103 of various thicknesses between two complete, non-spliced ​​substrates.

[0058] Through the above technical solution, the liquid crystal phase-shifting device of this application forms multiple receiving spaces 105 between two complete, non-spliced ​​substrates, and a deformation part is provided in each receiving space 105. By applying different voltages to the second electrode in each receiving space 105, the deformation part undergoes deformation of different lengths, thereby changing the thickness of the liquid crystal layer 103 located in the receiving space 105. The squeezed liquid crystal overflows through the through-hole 1015 of the first substrate 101, which is composed of the first through-hole 10111, the second through-hole 10121, and the third through-hole 10131, to the elastic film 1014, where the overflowing liquid crystal is temporarily stored (accommodated). This solution can achieve multiple different thicknesses of the liquid crystal layer 103 between two complete, non-spliced ​​substrates, realizing multi-phase transfer, thus reducing cutting and assembly processes and saving manufacturing costs.

[0059] In practical applications, the liquid crystal phase-shifting device of this application can be used in microwave phased array antenna systems. By adjusting the thickness of the liquid crystal layer 103 within different accommodating spaces 105, precise control of the electromagnetic wave phase can be achieved, thereby realizing precise beam scanning. Compared with traditional liquid crystal phase-shifting devices, the device of this application has advantages such as simple structure, low manufacturing cost, and high integration, and can meet the needs of modern communication systems for high-performance microwave phased array antennas.

[0060] The embodiments of this application have been described in detail above. The content of this specification should not be construed as limiting the scope of protection of this application.

Claims

1. A liquid crystal phase shifting device, characterized in that, include: A first substrate, wherein the first substrate is provided with a plurality of through holes, and the first substrate includes a plurality of elastic films, the elastic films covering the through holes; The second substrate is integrated with the first substrate, and the second substrate includes a deformation film; Multiple baffles are disposed between the first substrate and the second substrate, and the multiple baffles together with the first substrate and the second substrate form multiple closed receiving spaces; as well as Multiple liquid crystal layers are disposed in multiple accommodating spaces, and each liquid crystal layer comprises liquid crystal molecules; The deformable film includes a plurality of deformable portions disposed within a plurality of accommodating spaces. The deformable portions are used to deform when receiving a control voltage to change the thickness of the liquid crystal layer located within the accommodating space. The through-hole is used to allow liquid crystal molecules to overflow from the accommodating space when the deformable portions deform. The elastic film is used to contain the liquid crystal molecules overflowing from the through-hole.

2. The liquid crystal phase shifting device according to claim 1, characterized in that, The first substrate includes a first substrate, a first electrode layer disposed on the first substrate, and a first alignment film; The second substrate includes a second substrate, a second electrode layer disposed on the second substrate, a common electrode layer, and a second alignment film; The deformation film is disposed between the second electrode layer and the common electrode layer.

3. The liquid crystal phase shifting device according to claim 2, characterized in that, The through hole includes: A first through-hole, the first through-hole penetrating the first substrate; A second through-hole, the second through-hole penetrating the first electrode layer; and A third through-hole, wherein the third through-hole penetrates the first alignment membrane; The first through hole, the second through hole, and the third through hole are connected.

4. The liquid crystal phase shifting device according to claim 3, characterized in that, The elastic film is attached to a surface of the first substrate opposite to the surface where the first electrode layer is disposed, and the elastic film seals the first through hole.

5. The liquid crystal phase shifting device according to claim 2, characterized in that, The second electrode layer includes a plurality of second electrodes, which are disposed within the space enclosed by the retaining wall; The deformable part is disposed on the second electrode; The common electrode layer includes multiple common electrodes, which are disposed within the space enclosed by the retaining wall and on the deformed part; The second alignment film includes a plurality of alignment portions disposed on the common electrode and within the space enclosed by the retaining wall.

6. The liquid crystal phase shifting device according to claim 5, characterized in that, One end of the barrier is disposed on the first substrate, and the other end is disposed on the second substrate.

7. The liquid crystal phase shifting device according to claim 6, characterized in that, One end of the retaining wall is located in the gap between two adjacent first electrodes of the first electrode layer, and the other end of the retaining wall is located in the gap between two adjacent second electrodes.

8. The liquid crystal phase shifting device according to claim 5, characterized in that, One end of the barrier is disposed on the first alignment film of the first substrate, and the other end is disposed on the second substrate.

9. The liquid crystal phase shifting device according to claim 8, characterized in that, One end of the barrier is located on the first alignment film, and the other end of the barrier is located in the gap between two adjacent second electrodes.

10. The liquid crystal phase shifting device according to claim 1, characterized in that, The elastic film is a transparent film.

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