Common mode inductor, filter circuit and semiconductor process equipment

Abstract

The utility model relates to the technical field of inductors, and discloses a common mode inductor, a filter circuit and semiconductor process equipment. The common-mode inductor comprises a magnetic core and two groups of inductance wire harnesses, the two groups of inductance wire harnesses are wound on the magnetic core in parallel; the inductance wire harness comprises a wrapping sleeve and at least two sets of inductance wires, the inductance wires are wrapped and fixed by the wrapping sleeve, and the two ends of the inductance wires extend out of the two ends of the wrapping sleeve respectively. According to the embodiment of the invention, the common-mode inductor can adapt to more application scenes, and the complexity of the manufacturing process of the common-mode inductor is reduced.

Description

Technical Field

[0001] This application relates to the field of inductor technology, and in particular to a common-mode inductor, a filter circuit, and semiconductor process equipment. Background Technology

[0002] When the input terminal of the load is connected to an AC source, a common-mode inductor is usually connected to reduce common-mode noise interference in the AC source, so that the load meets the electromagnetic compatibility (EMC) requirements.

[0003] In related technologies, common-mode inductors are obtained by winding one or more pairs of inductor wires together on the same magnetic core. However, a common-mode inductor made from a single pair of inductors can only perform common-mode filtering for one AC source, limiting its applicability. A common-mode inductor made from multiple pairs of inductor wires requires multiple winding processes to complete, which is time-consuming. Utility Model Content

[0004] The purpose of this application is to provide a common-mode inductor, a filter circuit, and semiconductor process equipment, aiming to solve the technical problems of limited application scenarios for common-mode inductors and the time-consuming process of winding inductor wires.

[0005] This application provides a common-mode inductor, including a magnetic core and two sets of inductor wire harnesses;

[0006] The two sets of inductor wires are wound together on the magnetic core;

[0007] The inductor harness includes a sheath and at least two sets of inductor wires. The sheath wraps and fixes the inductor wires, and the two ends of the inductor wires extend out from the two ends of the sheath.

[0008] In one embodiment, the number of magnetic cores is at least two sets, each magnetic core is stacked, and the two sets of inductor bundles are wound around each magnetic core.

[0009] In one embodiment, the common-mode inductor further includes:

[0010] The assembly base has an assembly cavity; and

[0011] An assembly column is disposed within the assembly cavity and nested with the magnetic core.

[0012] In one embodiment, the mounting base includes:

[0013] Assembly components, including the opening of the assembly cavity; and

[0014] A stop, detachably connected to the assembly, shields the end of the assembly column when connected to the assembly.

[0015] In one embodiment, the mounting base and / or the mounting column are made of Teflon material.

[0016] In one embodiment, the end of the inductor is connected to a terminal block.

[0017] In one embodiment, each group of the inductor harness includes six groups of inductors.

[0018] This application embodiment also provides a filter circuit, including:

[0019] The aforementioned common-mode inductor; and

[0020] At least two differential-mode filter topologies are respectively connected to one set of inductors in one of the inductor bundles and one set of inductors in the other inductor bundle.

[0021] In one embodiment, the filtering circuit further includes:

[0022] A bypass common-mode filter topology is connected to the differential-mode filter topology described above.

[0023] This application also provides a semiconductor process apparatus, including:

[0024] AC load; and

[0025] The aforementioned filtering circuit is connected to the AC load and is used to connect to an external AC source and output a filtered AC signal to the AC load.

[0026] In one embodiment, the semiconductor process equipment further includes a radio frequency power supply and a reaction chamber. The radio frequency power supply is used to provide power for plasma excitation within the reaction chamber. The number of AC sources is the same as the number of AC loads, and the AC sources and AC loads are connected in pairs through the filter circuit.

[0027] In one embodiment, the semiconductor process equipment further includes a radio frequency power supply and a reaction chamber. The radio frequency power supply is used to provide power for plasma excitation within the reaction chamber. The number of AC sources is less than the number of AC loads. The AC sources are connected to a group of AC loads through the filter circuit or to several groups of AC loads through a splitter and the filter circuit.

[0028] The beneficial effects of this application are as follows: By employing a winding structure with two sets of inductor bundles fixed with at least two sets of inductor wires wound around a magnetic core, the common-mode inductor can be used as at least two inductors of the same specification. This is suitable for common-mode filtering of at least two sets of AC sources, and reduces the complexity of the manufacturing process and shortens the time required. The filtering circuit using the above-mentioned common-mode inductor can be used to construct a system topology that utilizes several sets of AC sources to provide noise-suppressed AC signals to several sets of loads, allowing for flexible configuration of the system topology. The semiconductor process equipment using the above-mentioned filtering circuit can be used to construct a system topology that utilizes several sets of AC sources to provide noise-suppressed AC signals to several sets of AC loads, reducing interference to the RF power supplied by the RF power supply. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of the common mode inductor provided in the first embodiment of this application.

[0030] Figure 2 This is a schematic diagram of the common-mode inductor provided in the second embodiment of this application.

[0031] Figure 3 This is a schematic diagram of the common-mode inductor provided in the third embodiment of this application.

[0032] Figure 4 This is a schematic diagram of the common-mode inductor provided in the fourth embodiment of this application.

[0033] Figure 5 This is a schematic diagram of the assembly base provided in the embodiments of this application.

[0034] Figure 6 This is a schematic diagram of the common-mode inductor provided in the fifth embodiment of this application.

[0035] Figure 7 This is a schematic diagram of the common-mode inductor provided in the sixth embodiment of this application.

[0036] Figure 8 This is a schematic diagram of the filter circuit provided in the first embodiment of this application.

[0037] Figure 9 This is a schematic diagram of the filter circuit provided in the second embodiment of this application.

[0038] Figure 10 This is a schematic diagram of the structure of the semiconductor process equipment provided in the first embodiment of this application.

[0039] Figure 11 This is a schematic diagram of the structure of the semiconductor process equipment provided in the second embodiment of this application.

[0040] Figure 12 This is a schematic diagram of the structure of the semiconductor process equipment provided in the third embodiment of this application. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0042] It should be noted that the terms "first," "second," "third," "fourth," etc. (if present) in the specification and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a system, product, or device that includes a series of circuits is not necessarily limited to those explicitly listed, but may include other circuits not explicitly listed or inherent to such systems, products, or devices.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit this application.

[0044] A common-mode inductor is an electromagnetic component used to suppress common-mode noise. It is widely used in power supply filtering, signal line interference suppression (such as USB and CAN buses), and EMI / EMC design. Its core function is to allow differential-mode signals to pass through while blocking common-mode interference.

[0045] In related technologies, common-mode inductors are made by winding one or more pairs of inductor wires with the same number of turns onto the same magnetic core, with the two windings formed by the same pair of inductor wires having opposite polarities. However, due to considerations of filtering failure and safety hazards, common-mode inductors made from a single pair of inductor wires are only suitable for common-mode filtering of a single AC source. While common-mode inductors made from multiple pairs of inductor wires can perform common-mode filtering of multiple AC sources simultaneously, they require multiple inductor wire windings to complete, resulting in a complex and time-consuming manufacturing process and a less compact inductor structure.

[0046] Based on this, this application provides a common-mode inductor, a filter circuit, and semiconductor process equipment, which utilizes two sets of inductor bundles with at least two sets of inductor wires fixed for winding, so that the resulting common-mode inductor can be used for common-mode filtering of at least two AC sources, and reduces the complexity of the manufacturing process and shortens the time consumption.

[0047] See Figure 1 In one embodiment, the common-mode inductor includes a magnetic core 10 and two sets of inductor harnesses 20.

[0048] Two sets of inductor bundles 20 are wound in parallel on the magnetic core 10. Specifically, the magnetic core 10 can be a ferrite toroidal core, and the magnetic core 10 can be covered or coated with an insulating material (such as Teflon or polyetheretherketone). The magnetic core 10 can also be entirely made of insulating material. The two sets of inductor bundles 20 are of the same size, and the two sets of inductor bundles 20 are symmetrically wound with the same number of turns on the magnetic core 10. After the two sets of inductor bundles 20 are wound, the common mode inductor provided in this embodiment of the application is obtained.

[0049] The inductor harness 20 includes a sheath 21 and at least two sets of inductor wires 22. The sheath 21 wraps and secures the inductor wires 22, with both ends of the inductor wires 22 extending out from both ends of the sheath 21. Specifically, the two sets of inductor harnesses 20 contain the same number of inductor wires 22. The sheath 21 is made of insulating material, and each set of inductor wires 22 is covered by an insulating layer. The sheath 21 wraps and secures at least two sets of inductor wires 22 so that each set of inductor wires 22 in the inductor harness 20 is wound together on the magnetic core 10. Both ends of the inductor wires 22 extend out from both ends of the sheath 21 so that each set of inductor wires 22 can be connected to an external AC source and load, respectively.

[0050] In practical applications, depending on the number of inductor wires 22 configured in the inductor harness 20, the common-mode inductor provided in this embodiment can simultaneously connect to at least two AC sources and perform common-mode filtering. The two sets of inductor wires 22 connected to the same AC source in the two sets of inductor harnesses 20 can connect to one or more loads, serving as at least two common-mode filtering topologies. Furthermore, the inductance of each common-mode filtering topology tends to be consistent, with relatively small tolerances. For example, when there are two sets of inductor wires 22 configured in the inductor harness 20, the common-mode inductor can simultaneously connect to two AC sources. The first end of the first set of inductor wires 22 in the first set of inductor harnesses 20 and the first end of the first set of inductor wires 22 in the second set of inductor harnesses 20 are connected to the output terminal of the first AC source. The second end of the first set of inductor wires 22 in the first set of inductor harnesses 20 and the second end of the first set of inductor wires 22 in the second set of inductor harnesses 20 are connected to the input terminal of the first load. The first end of the second group of inductors 22 and the first end of the second group of inductors 22 in the first group of inductor bundles 20 are connected to the output terminal of the second group of AC sources. The second end of the second group of inductors 22 in the first group of inductor bundles 20 and the second end of the second group of inductors 22 in the second group of inductor bundles 20 are connected to the input terminal of the second group of loads. When there are three groups of inductors 22 configured in the inductor bundles 20, the common-mode inductor can be connected to three groups of AC sources simultaneously. The first end of the first group of inductors 22 in the first group of inductor bundles 20 and the second end of the second group of inductors 22 are connected to the output terminal of the second group of AC sources. The first end of the first group of inductors 22 in the two sets of inductor harnesses 20 is connected to the output terminal of the first AC source. The second end of the first group of inductors 22 in the first set of inductor harnesses 20 and the second end of the first group of inductors 22 in the second set of inductor harnesses 20 are connected to the input terminal of the first load. The first end of the second group of inductors 22 in the first set of inductor harnesses 20 and the first end of the second group of inductors 22 in the second set of inductor harnesses 20 are connected to the output terminal of the second AC source. The second group of inductors 22 in the first set of inductor harnesses 20... The second end of 2 and the second end of the second group of inductors 22 in the second group of inductor harness 20 are connected to the input terminal of the second group of loads. The first end of the third group of inductors 22 in the first group of inductor harness 20 and the first end of the third group of inductors 22 in the second group of inductor harness 20 are connected to the output terminal of the third group of AC sources. The second end of the third group of inductors 22 in the first group of inductor harness 20 and the second end of the third group of inductors 22 in the second group of inductor harness 20 are simultaneously connected to the input terminal of the third group of loads and the input terminal of the fourth group of loads.

[0051] See Figure 2 and Figure 3In some embodiments, the number of magnetic cores 10 is at least two sets, for example, two or three sets of magnetic cores 10, with each magnetic core 10 stacked, and two sets of inductor bundles 20 wound around each magnetic core 10. Specifically, the two sets of inductor bundles 20 wound around each magnetic core 10 can be achieved by stacking each magnetic core 10, with the same number of turns symmetrically wound on each of the stacked magnetic cores 10, resulting in a winding effect as shown in the image. Figure 2 As shown, alternatively, two sets of inductor bundles 20 can be wound around at least one magnetic core 10 and then wound onto another magnetic core 10. After winding, the magnetic cores 10 are stacked, and the winding effect is as shown. Figure 3 As shown. In this way, the number of magnetic cores 10 can be increased or decreased according to the actual required inductance, and corresponding common mode inductors can be manufactured to obtain common mode inductors of various specifications.

[0052] See also Figure 1 and Figure 4 In one embodiment, the common-mode inductor further includes a mounting base 30 and a mounting post 40. The mounting base 30 has a mounting cavity 50, and the mounting post 40 is disposed within the mounting cavity 50, nesting with the magnetic core 10. Specifically, the mounting post 40 is inserted into the mounting base 30, extending from the bottom to the top of the mounting cavity 50. After the inductor bundle 20 is wound onto the magnetic core 10, the magnetic core 10 is assembled into the mounting cavity 50 and nested within the mounting post 40. Wiring openings are provided on both sides of the mounting cavity 50 for leading out the ends of the inductor wires 22 from both sides of the mounting cavity 50. Thus, the mounting base 30 and the mounting post 40 are used to fix the wound magnetic core 10, making the overall structure of the common-mode inductor more stable.

[0053] See also Figure 1 , Figure 4 and Figure 5 In one embodiment, the mounting base 30 includes a mounting part 31 and a stop 32. The mounting part 31 has a mounting cavity 50, and the stop 32 is detachably connected to the mounting part 31. When connected to the mounting part 31, the stop 32 shields the end of the mounting post 40. Specifically, the stop 32 and the mounting part 31 constitute the mounting base 30. The mounting cavity 50 is formed in the mounting part 31. After the magnetic core 10 is assembled into the mounting cavity 50 and nested in the mounting post 40, the stop 32 is detachably connected to the mounting part 31. The stop 32 shields the end of the mounting post 40, preventing the magnetic core 10 from detaching from the end of the mounting post 40. When it is necessary to nest the magnetic core 10 in the mounting post 40 or remove the magnetic core 10 from the mounting post 40, the stop 32 is first removed, then the magnetic core 10 is nested in the mounting post 40 or removed from the mounting post 40, and then the stop 32 is connected to the mounting part 31. Thus, by using the stop 32 and the assembly part 31 to form the assembly base 30, the magnetic core 10 can be easily assembled and removed.

[0054] See also Figure 1 , Figure 4 , Figure 6 and Figure 7 In some embodiments, the number of magnetic cores 10 is at least two sets, for example, two or three sets of magnetic cores 10, each magnetic core 10 is stacked and nested with the assembly post 40.

[0055] In the above embodiments, the mounting base 30 and / or mounting post 40 are made of Teflon material, which has good insulation, heat resistance, corrosion resistance and wear resistance, and can significantly improve the stability and life of the mounting base 30 and / or mounting post 40 under extreme conditions.

[0056] In the above embodiment, the end of the inductor 22 is connected to a terminal block 60. The inductor 22 is connected to an AC source or load through the terminal block 60. The terminal block 60 serves as a transfer platform, which simplifies the wiring process.

[0057] In the above embodiments, each inductor harness 20 includes six inductor wires 22, which can simultaneously connect to up to six AC sources for common-mode filtering, and simultaneously connect to multiple loads to provide common-mode filtering output.

[0058] See also Figure 1 and Figure 8 In one embodiment, the filtering circuit includes a common-mode inductor as described in the above embodiments and at least two sets of differential-mode filtering topologies 1. Each set of inductor lines 22 in the common-mode inductor has a set of filter capacitors connected to its two ends for filtering high-frequency noise. Each differential-mode filtering topology 1 is connected to one set of inductor lines 22 in one inductor bundle 20 and another set of inductor lines 22 in another inductor bundle 20. In practical applications, the filtering circuit is connected to an external AC source 2. The filtering circuit is connected to the external AC source 2 and receives the AC signal output from the AC source 2. The received AC signal is sequentially processed by the common-mode inductor to suppress or eliminate common-mode noise in the signal, and by the differential-mode filtering topology 1 to suppress or eliminate differential-mode noise in the signal, before outputting a filtered AC signal to improve the signal quality of the AC signal and the performance of the circuit system. The differential-mode filter topology 1 mainly consists of two differential-mode inductors and an X capacitor connected between the two differential-mode inductors. The number of differential-mode filter topologies 1 is no greater than the number of inductor lines 22 in the inductor bundle 20. For example, if there are six groups of inductor lines 22 in each group of inductor bundle 20, then the number of differential-mode filter topologies 1 is no greater than six groups.

[0059] See also Figure 1 , Figure 8 and Figure 9In one embodiment, the filtering circuit further includes a bypass common-mode filter topology 3. The bypass common-mode filter topology 3 is connected to a differential-mode filter topology 1. The bypass common-mode filter topology 3 mainly consists of a single-channel common-mode inductor and four sets of filter capacitors connected to the two ends of the two sets of inductance lines of the single-channel common-mode inductor. In practical applications, the bypass common-mode filter topology 3 is independent of the common-mode inductor. The filtering circuit is connected to an external AC source 2 and receives the AC signal output from the AC source 2. The received AC signal is sequentially passed through the common-mode inductor to suppress or eliminate common-mode noise in the signal, and then through the differential-mode filter topology 1 to suppress or eliminate differential-mode noise in the signal, before outputting a filtered AC signal to improve the signal quality of the AC signal and the performance of the circuit system.

[0060] See also Figure 1 , Figure 8 and Figure 10 In one embodiment, the semiconductor process equipment includes an AC load 4 and the filtering circuit provided in the above embodiment. The AC load 4 is a device within the semiconductor process equipment that requires AC power, such as a spray head and a heating plate. The filtering circuit is connected to the AC load 4 and is used to connect to an external AC source 2 and output a filtered AC signal to the AC load 4. The semiconductor process equipment also includes a radio frequency (RF) power supply 5 and a matching network 6. The RF power supply 5 provides power directly or through the matching network 6 to the plasma excitation within the reaction chamber. In practical applications, the output terminal of the AC source 2 is connected to the first end of the inductor 22 in two sets of inductor bundles 20, and the input terminal of the AC load 4 is connected to the differential mode filter topology 1 connected to the second end of the inductor 22 in the two sets of inductor bundles 20. The AC signal generated by the AC source 2 is filtered by the filtering circuit and then output to the AC load 4. In this way, a noise-filtered AC signal can be provided to the AC load 4, reducing the input interference noise of the AC load 4 and reducing interference to the RF power.

[0061] See also Figure 1 , Figure 8 and Figure 11In one embodiment, the number of AC sources 2 is the same as the number of AC loads 4, and the AC sources 2 and AC loads 4 are connected in pairs via a filter circuit. Specifically, depending on the number of inductor wires 22 configured in the inductor harness 20, a common-mode inductor can simultaneously connect at least two sets of AC sources 2. Two sets of inductor wires 22 connected to the same AC source 2 in two sets of inductor harnesses 20 are connected to one set of AC loads 4, so that the AC sources 2 and AC loads 4 are connected in pairs via common-mode inductors in the filter circuit. For example, if the number of inductor wires 22 configured in the inductor harness 20 is six, the common-mode inductor can simultaneously connect six sets of AC sources 2. The semiconductor process equipment is configured with two reaction chambers, each of which can be provided with radio frequency signals by a corresponding RF power supply 5 and a matching network 6. The two reaction chambers can also be provided with RF signals by the same set of RF power supply 5 and matching network 6 via a power divider / power distribution device, etc. The first reaction chamber contains a first group of AC loads 4, and the second reaction chamber contains a second to a sixth group of AC loads 4. The first end of the first inductor 22 in the first group of inductor harnesses 20 and the first end of the first inductor 22 in the second group of inductor harnesses 20 are connected to the output terminal of the first group of AC sources 2. The second end of the first inductor 22 in the first group of inductor harnesses 20 and the second end of the first inductor 22 in the second group of inductor harnesses 20 are sequentially connected to the input terminals of the first differential-mode filter topology 1 and the first group of AC loads 4. The first end of the second inductor 22 in the first group of inductor harnesses 20 and the first end of the second inductor 22 in the second group of inductor harnesses 20 are connected to... The output terminal of the second group of AC source 2, the second end of the second group of inductor wires 22 in the first group of inductor harness 20 and the second end of the second group of inductor wires 22 in the first group of inductor harness 20 are sequentially connected to the input terminals of the second group of differential mode filter topology 1 and the second group of AC load 4, and so on. The first end of the sixth group of inductor wires 22 in the first group of inductor harness 20 and the first end of the sixth group of inductor wires 22 in the first group of inductor harness 20 are connected to the output terminal of the sixth group of AC source 2, and the second end of the sixth group of inductor wires 22 in the first group of inductor harness 20 and the second end of the sixth group of inductor wires 22 in the first group of inductor harness 20 are sequentially connected to the input terminals of the sixth group of differential mode filter topology 1 and the sixth group of AC load 4.

[0062] See also Figure 1 , Figure 8 and Figure 12In one embodiment, the number of AC sources 2 is less than the number of AC loads 4. The AC sources 2 are connected to one group of AC loads 4 via a filter circuit, or to several groups of AC loads 4 via a splitter 7 and a filter circuit. Specifically, depending on the number of inductor wires 22 configured in the inductor harness 20, the filter circuit can simultaneously connect to at least two groups of AC sources 2 and perform filtering. Two groups of inductor wires 22 connected to the same AC source 2 in two groups of inductor harnesses 20 can be connected to one group of AC loads 4 via a differential-mode filter topology 1, or to multiple groups of AC loads 4 via a differential-mode filter topology 1 and a splitter 7. For example, the number of inductor wires 22 configured in the inductor harness 20 is six, a common-mode inductor connects two groups of AC sources 2, and the semiconductor process equipment is configured with two reaction chambers. Each reaction chamber is provided with radio frequency signals by a corresponding RF power supply 5 and a matching network 6. The two reaction chambers can also be provided with RF signals by the same RF power supply 5 and matching network 6 via a power divider / power distribution device, etc. The first reaction chamber is equipped with a first group of AC loads 4, and the second reaction chamber is equipped with a second to a sixth group of AC loads 4. The first end of the first group of inductors 22 in the first group of inductor harnesses 20 and the first end of the first group of inductors 22 in the second group of inductor harnesses 20 are connected to the output terminal of the first group of AC sources 2. The second end of the first group of inductors 22 in the first group of inductor harnesses 20 and the second end of the first group of inductors 22 in the second group of inductor harnesses 20 are connected to the input terminal of the first group of splitters 7 through a differential mode filter topology 1. The three output terminals of the splitter 7 are respectively connected to the first... The output of the second AC source 2 is connected to the input of the second circuit breaker 7. The three outputs of the second circuit breaker 7 are respectively connected to the first ends of the fourth to sixth inductors 22 in the first inductor harness 20 and the first ends of the fourth to sixth inductors 22 in the second inductor harness 20. The second ends of the fourth to sixth inductors 22 in the first inductor harness 20 and the second ends of the fourth to sixth inductors 22 in the second inductor harness 20 are respectively connected to the fourth to sixth AC loads 4 through the differential mode filter topology 1.For example, the inductor harness 20 contains six sets of inductor wires 22. The common-mode inductor is connected to only two sets of AC sources 2. The first end of the first set of inductor wires 22 in the first set of inductor harness 20 and the first end of the first set of inductor wires 22 in the second set of inductor harness 20 are connected to the output terminal of the first set of AC sources 2. The second end of the first set of inductor wires 22 in the first set of inductor harness 20 and the second end of the first set of inductor wires 22 in the second set of inductor harness 20 are connected to the first set of AC sources 2 through differential-mode filter topology 1. The input terminal of AC load 4, the first end of the second group of inductors 22 in the first group of inductor harness 20 and the first end of the second group of inductors 22 in the second group of inductor harness 20 are connected to the output terminal of the second group of AC source 2. The second end of the second group of inductors 22 in the first group of inductor harness 20 and the second end of the second group of inductors 22 in the second group of inductor harness 20 are connected to the input terminal of the splitter 7 through the differential mode filter topology 1. The five output terminals of the splitter 7 are respectively connected to the other five groups of AC load 4.

[0063] In summary, the common-mode inductor provided in this application employs a winding structure with two sets of inductor bundles fixed with at least two sets of inductor wires wound around a magnetic core. This allows the common-mode inductor to be used as at least two inductors of the same specification, suitable for common-mode filtering of at least two sets of AC sources, and reduces the complexity of the manufacturing process and shortens the time required. The filtering circuit using the above-mentioned common-mode inductor can be used to construct a system topology that utilizes several sets of AC sources to provide noise-suppressed AC signals to several sets of loads, allowing for flexible configuration of the system topology. The semiconductor process equipment using the above-mentioned filtering circuit can be used to construct a system topology that utilizes several sets of AC sources to provide noise-suppressed AC signals to several sets of AC loads, reducing interference to the RF power supplied by the RF power supply.

[0064] It should be understood that in this application, "at least one (item)" means one or more, and "more than" means two or more. "And / or" is used to describe the relationship between related objects, indicating that three relationships can exist. For example, "A and / or B" can represent three cases: only A exists, only B exists, and both A and B exist simultaneously, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship. "At least one (item) of the following" or similar expressions refer to any combination of these items, including any combination of single or plural items. For example, at least one (item) of a, b, or c can represent: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, and c can be single or multiple.

[0065] The preferred embodiments of the present application have been described above with reference to the accompanying drawings, but this does not limit the scope of the claims of the present application. Any modifications, equivalent substitutions, and improvements made by those skilled in the art without departing from the scope and substance of the embodiments of the present application shall be within the scope of the claims of the present application.

Claims

1. A common-mode inductor, characterized in that, Includes a magnetic core and two sets of inductor harnesses; The two sets of inductor wires are wound together on the magnetic core; The inductor harness includes a sheath and at least two sets of inductor wires. The sheath wraps and fixes the inductor wires, and the two ends of the inductor wires extend out from the two ends of the sheath.

2. The common-mode inductor according to claim 1, characterized in that, The number of magnetic cores is at least two sets, and the magnetic cores are stacked together, with the two sets of inductor bundles wound around each magnetic core.

3. The common-mode inductor according to claim 1, characterized in that, Also includes: The assembly base has an assembly cavity; as well as An assembly column is disposed within the assembly cavity and nested with the magnetic core.

4. The common-mode inductor according to claim 3, characterized in that, The mounting base includes: Assembly components, including the opening of the assembly cavity; and A stop, detachably connected to the assembly, shields the end of the assembly column when connected to the assembly.

5. The common-mode inductor according to claim 3, characterized in that, The mounting base and / or the mounting column are made of Teflon material.

6. The common-mode inductor according to claim 1, characterized in that, The end of the inductor is connected to a terminal block.

7. The common-mode inductor according to any one of claims 1 to 6, characterized in that, Each group of the inductor harness includes six groups of inductors.

8. A filter circuit, characterized in that, include: The common-mode inductor according to any one of claims 1 to 7; as well as At least two differential-mode filter topologies are respectively connected to one set of inductors in one of the inductor bundles and one set of inductors in the other inductor bundle.

9. The filter circuit according to claim 8, characterized in that, Also includes: A bypass common-mode filter topology is connected to the differential-mode filter topology described above.

10. A semiconductor process apparatus, characterized in that, include: AC load; as well as The filtering circuit of claim 8 or 9 is connected to the AC load for connecting to an external AC source and outputting a filtered AC signal to the AC load.

11. The semiconductor process equipment according to claim 10, characterized in that, The semiconductor process equipment also includes a radio frequency power supply and a reaction chamber. The radio frequency power supply is used to provide power for plasma excitation in the reaction chamber. The number of AC sources is the same as the number of AC loads. The AC sources and AC loads are connected in pairs through the filter circuit.

12. The semiconductor process equipment according to claim 10, characterized in that, The semiconductor process equipment also includes a radio frequency power supply and a reaction chamber. The radio frequency power supply is used to provide power for plasma excitation in the reaction chamber. The number of AC sources is less than the number of AC loads. The AC sources are connected to a group of AC loads through the filter circuit or to several groups of AC loads through a splitter and the filter circuit.

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