Driving mechanism of UV chamber and process chamber thereof

Abstract

The utility model discloses a driving mechanism of a UV chamber and a process chamber thereof. The driving mechanism comprises a driven gear rotationally connected to the UV chamber and a driving module used for driving the driven gear to rotate, the driving module comprises a driving motor and a driving gear connected to an output shaft of the driving motor, and the driving gear is meshed with the driven gear; the driven gear is used for driving the UV lamp, a light through hole is formed in the middle of the driven gear, and the driving motor drives the driving gear and synchronously drives the driven gear, so that ultraviolet light emitted by the UV lamp controlled by the driven gear rotatably irradiates into the ultraviolet cavity through the light through hole. The driving module adopts the driving motor and the driving gear, and the driven gear is meshed with the driving gear, so that the rotation driving of the UV lamp is improved into a gear transmission structure, and compared with the existing belt transmission, the service life is longer, the operation is more stable and reliable, the maintenance cost is reduced, the normal operation time of equipment is prolonged, and the processing efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of thin film deposition equipment technology, and in particular to a drive mechanism for a UV chamber and its process chamber. Background Technology

[0002] In semiconductor equipment, thin film deposition equipment is mainly used to deposit thin films on wafer surfaces. During the deposition process, a light source is needed to cure the film on the surface. UV lamps are generally used to cure the wafer surface film; however, existing UV lamps are typically tubes, emitting linear light that cannot evenly irradiate the wafer surface when stationary, resulting in uneven curing. To address this issue, existing technologies employ a drive mechanism to rotate the light source, thus achieving rotational irradiation of the wafer. Current drive mechanisms generally use a motor, belt, and pulley transmission structure. This transmission structure has the following drawbacks: the belt is prone to deformation, detachment, or breakage due to uneven stress, increasing consumable usage; frequent belt replacements lead to longer equipment downtime, affecting online operation time and increasing maintenance labor costs. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a driving mechanism for a UV chamber and its process chamber, so as to solve the technical problems of low efficiency and high cost of the existing UV lamp transmission method.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] In a first aspect, embodiments of the present invention provide a drive mechanism for a UV chamber, comprising: a driven gear rotatably connected to the UV chamber and a drive module for driving the driven gear to rotate.

[0006] The drive module includes a drive motor and a drive gear connected to the output shaft of the drive motor, the drive gear meshing with the driven gear;

[0007] The driven gear is used to drive the UV lamp, and a light-transmitting hole is provided in the middle of the driven gear. The drive motor drives the driving gear and synchronously drives the driven gear, so that the ultraviolet light emitted by the UV lamp controlled by the driven gear rotates through the light-transmitting hole and irradiates the ultraviolet chamber.

[0008] The driven gear is provided with a rotation guide groove, and the ultraviolet chamber is provided with a rotation positioning ring corresponding to the rotation guide groove. The rotation positioning ring is inserted into the rotation guide groove.

[0009] The driven gear includes an annular body, a toothed opening on the outer annular wall of the annular body, and an annular stepped portion on the inner annular wall of the annular body; the ultraviolet chamber is provided with a positioning annular portion corresponding to the annular stepped portion.

[0010] The drive module is provided in one set, and the ultraviolet chamber controlled by the drive module is provided in two sets, with the drive module located between the two sets of ultraviolet chambers.

[0011] The driving module is provided with at least two sets, and the number of ultraviolet chambers is the same as that of the driving module. Each set of driving modules drives one set of ultraviolet chambers respectively.

[0012] The driven gear and the driving gear are set at the same height on a horizontal plane.

[0013] Secondly, embodiments of the present invention provide a process chamber, wherein the process chamber includes a drive mechanism for a UV chamber as described in any of the above claims.

[0014] The process chamber also includes a UV lamp, which is connected to the driven gear.

[0015] The UV lamp is positioned above the drive mechanism of the UV chamber.

[0016] The light emitted by the UV lamp is directed toward the light-transmitting hole.

[0017] This invention discloses a drive mechanism for a UV chamber and its process chamber. The drive mechanism includes a driven gear and a drive module connected to the UV chamber. The drive module employs a drive motor and a driving gear, with the driven gear meshing with the driving gear. This improves the rotation drive of the UV lamp to a gear transmission structure, resulting in a longer lifespan, more stable and reliable operation compared to existing belt drives. It also reduces maintenance costs, increases equipment uptime, and improves processing efficiency. Furthermore, this drive structure can achieve one-to-one or one-to-many drive modes, and it possesses independent control or linkage characteristics.

[0018] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model, it can be implemented according to the contents of the specification. In order to make the above and other objects, features and advantages of this utility model more obvious and easy to understand, the following are preferred embodiments, which are described in detail below. Attached Figure Description

[0019] Figure 1 and Figure 2 These are three-dimensional structural schematic diagrams of the drive mechanism of the UV chamber in the first embodiment of this utility model from different perspectives.

[0020] Figure 3 This is a schematic diagram of the driven gear separation state of the drive mechanism of the UV chamber in the first embodiment of this utility model.

[0021] Figure 4 This is a schematic diagram of the driven gear portion of the drive mechanism of the UV chamber in the first embodiment of this utility model.

[0022] Figure 5 and Figure 6 A three-dimensional structural diagram of the driving mechanism of the UV chamber in the second embodiment of this utility model.

[0023] Figure 7 This is a schematic diagram of the driven gear separation state of the drive mechanism of the UV chamber in the second embodiment of the present invention.

[0024] Explanation of reference numerals in the attached figures:

[0025] The UV chamber includes a drive mechanism 100 (200), a process chamber assembly 11, a first process chamber 111, a second process chamber 112, a second driven gear 12, a first driven gear 13, a first drive motor 15, a first drive gear 14, a light-transmitting hole 1311, a rotating guide groove 1312, a rotating positioning ring 1112, a process cavity 1111, an annular body 131, a toothed edge 1313, a process chamber assembly 21, a first process chamber 211, a second process chamber 212, a third driven gear 22, a second drive motor 24, a second drive gear 25, a light-transmitting hole 221, a process cavity 2111, a fourth driven gear 23, a third drive motor 26, and a third drive gear 27. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0028] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral molding; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0033] In semiconductor equipment, thin film deposition equipment is mainly used to deposit thin films on wafer surfaces. During the thin film deposition process, a light source is needed to cure the film on the surface. UV lamps are generally used to cure the wafer surface film; however, existing UV lamps are typically tubes, which emit linear light that cannot evenly irradiate the wafer surface when stationary, resulting in uneven curing. To address this issue, existing technologies employ a drive mechanism to rotate the light source, thereby achieving rotational irradiation of the wafer. Existing drive mechanisms generally use a motor, belt, and pulley transmission structure. This transmission structure has the following drawbacks: the belt is prone to deformation, detachment, or breakage due to uneven stress, increasing consumable usage; frequent belt replacements lead to prolonged equipment downtime, affecting online operation time and increasing maintenance labor costs. To solve these problems, this embodiment discloses a drive mechanism for a UV chamber and its process chamber 100.

[0034] Please see Figures 1 to 4 This is a first embodiment of the drive mechanism for a UV chamber. The drive mechanism 100 for the UV chamber includes: a first driven gear 13 connected to the process chamber assembly 11, and a drive module for driving the first driven gear 13. In this embodiment, the process chamber assembly 11 includes two horizontally arranged first process chambers 111 and second process chambers 112. The first process chambers 111 and second process chambers 112 have the same structure and are fixed together on a base. The first driven gear 13 is connected to the first process chamber 111.

[0035] The drive module includes a first drive motor 15 and a first drive gear 14 connected to the output shaft of the first drive motor 15, wherein the first drive gear 14 meshes with the first driven gear 13.

[0036] The first driven gear 13 is used to drive the UV lamp (not shown in the figure), and the first driven gear 13 has a light-transmitting hole 1311 in the middle. The first drive motor 15 drives the first drive gear 14, which in turn drives the first driven gear 13, so that the ultraviolet light emitted by the UV lamp controlled by the first driven gear 13 rotates through the light-transmitting hole 1311 and irradiates the first ultraviolet chamber 111.

[0037] In this embodiment, the UV lamps located above the first process chamber 111 and the second process chamber 112 are driven by the meshing first driven gear 13 and the first driving gear 14. Compared with the existing belt and pulley drive method, the transmission is more reliable and has a longer service life. It can maintain relatively stable rotation even after long-term operation, thus significantly reducing the maintenance time and cost of the process equipment and improving the operating efficiency of the process equipment.

[0038] Please refer to it again. Figure 3 The first driven gear 13 is provided with a rotation guide groove 1312, and the first ultraviolet chamber 111 is provided with a rotation positioning ring 1112 corresponding to the rotation guide groove 1312. The rotation positioning ring 1112 is inserted into the rotation guide groove 1312. The rotation positioning ring 1112 can rotate relative to the rotation guide groove 1312, so that when the first driven gear 13 is rotated by the first drive motor 15, the first driven gear 13 always rotates coaxially relative to the first process chamber 111. At this time, the UV lamp (ultraviolet lamp) driven by the first driven gear 13 irradiates the process cavity 1111 of the first process chamber 111 in a rotating manner. When curing the wafer surface, the wafer exists in the process cavity 1111, making its curing illumination more uniform.

[0039] Please refer to it again. Figure 4 The first driven gear 13 includes an annular body 131, a toothed edge 1313 disposed on the outer annular wall of the annular body 131, and an annular stepped portion disposed on the inner annular wall of the annular body 131; the first ultraviolet chamber 111 is provided with a positioning annular portion corresponding to the annular stepped portion. In this embodiment, the structure of the rotation guide groove 1312 disposed on the first driven gear 13 is the annular stepped portion, and the rotation positioning ring 1112 disposed on the first process chamber 111 adopts the method of docking the annular stepped portion and the positioning annular portion, which not only simplifies the assembly of the first driven gear 13 and the first process chamber 111, but also provides a rotating shaft for the controlled rotation of the first driven gear 13.

[0040] Please refer to it again. Figure 1In this embodiment, the drive module comprises a set of components, including a first drive motor 15 and a first drive gear 14. Two sets of ultraviolet (UV) chambers controlled by the drive module are provided: a first process chamber 111 and a second process chamber 112. The drive module is located between the first UV chamber 111 and the second process chamber 112. Specifically, the first drive gear 14 simultaneously meshes with a first driven gear 13 on the first process chamber 111 and a second driven gear 12 on the second process chamber 112. The second driven gear 12 has the same structure as the first driven gear 13. With this structure, one drive module can synchronously drive the first driven gear 13 and the second driven gear 12, which are connected to it. Correspondingly, this drives the UV lamps connected to the first driven gear 13 and the second driven gear 12 to irradiate the first process chamber 111 and the second process chamber 112 in a rotating manner. This rotating irradiation method results in more uniform light output from the UV lamps, leading to better wafer surface curing.

[0041] Please refer to it again. Figures 5 to 7 This is a schematic diagram of a second embodiment of the drive mechanism of the UV chamber. In this second embodiment, the drive mechanism 200 of the UV chamber includes a third driven gear 22 connected to the first process chamber 211, and a drive module for driving the third driven gear 22 to rotate. The drive module includes a second drive motor 24 and a second drive gear 25 connected to the output shaft of the second drive motor 24. The second drive gear 25 meshes with the third driven gear 22. A UV lamp is also connected to the third driven gear 22. The second drive motor 24 is controlled to start, driving the second drive gear 25 to rotate, and synchronously driving the third driven gear 22 to rotate, thereby driving the UV lamp connected to the third driven gear 22 to rotate and irradiate the process chamber 2111 of the first process chamber 211.

[0042] Similarly, the third driven gear 22 is provided with a light-transmitting hole 221 in the middle. It is a ring gear. The bottom of the ring gear is provided with an annular guide groove near the inner wall edge. The first process chamber 211 is provided with a guide positioning ring corresponding to the annular guide groove. Its structure and function are the same as those of the first embodiment described above, and will not be described in detail here.

[0043] In this second embodiment, the process chamber assembly 21 further includes a second process chamber 212 with the same structure as the first process chamber 211. A fourth driven gear 23 is provided on the second process chamber 212, and a drive module that independently drives the fourth driven gear 23 is provided. The drive module includes a third drive motor 26 and a third drive gear 27 connected to the output shaft of the third drive motor 26.

[0044] Unlike Embodiment 1, in the second embodiment, each process chamber is provided with a separate set of gear transmission and drive modules, which facilitates independent control of the rotation of the UV lamps connected to them.

[0045] The third driven gear 22 and the second driving gear 25 are set at the same height on the horizontal plane.

[0046] It is understood that in other embodiments, the process chamber and its corresponding independent gear drive unit may be provided in three or more sets, and are not limited to the two sets in the second embodiment.

[0047] This embodiment provides a process chamber, which includes a drive mechanism 100 (200) for a UV chamber as described in either the first or second embodiment above.

[0048] The process chamber also includes a UV lamp (not shown in the figure), which is connected to the first driven gear 13 (22).

[0049] Specifically, the UV lamp is positioned above the drive mechanism 100 (200) of the UV chamber.

[0050] The light emitted by the UV lamp is directed toward the light-transmitting hole 1311 (221).

[0051] The process chamber adopts an existing conventional structure according to its function, such as the curing chamber in a thin film deposition equipment. Other conventional structures of the process chamber will not be described in detail in this embodiment.

[0052] The UV chamber drive mechanism and its process chamber in this embodiment include a first gear and a drive module connected to the UV chamber. The drive module employs a drive motor and a second gear, with the first gear meshing with the second gear. This improves the UV lamp rotation drive to a gear transmission structure, resulting in a longer lifespan, more stable and reliable operation compared to existing belt drives. This reduces maintenance costs, increases equipment uptime, and improves processing efficiency. Furthermore, this drive structure can achieve one-to-one or one-to-many drive modes, and it possesses independent control or linkage characteristics.

[0053] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A driving mechanism for a UV chamber, characterized in that, include: A driven gear rotatably connected to the ultraviolet chamber and a drive module for driving the driven gear to rotate; The drive module includes a drive motor and a drive gear connected to the output shaft of the drive motor, the drive gear meshing with the driven gear; The driven gear is used to drive the UV lamp, and a light-transmitting hole is provided in the middle of the driven gear. The drive motor drives the driving gear and synchronously drives the driven gear, so that the ultraviolet light emitted by the UV lamp controlled by the driven gear rotates through the light-transmitting hole and irradiates the ultraviolet chamber.

2. The driving mechanism for the UV chamber according to claim 1, characterized in that, The driven gear is provided with a rotation guide groove, and the ultraviolet chamber is provided with a rotation positioning ring corresponding to the rotation guide groove. The rotation positioning ring is inserted into the rotation guide groove.

3. The driving mechanism for the UV chamber according to claim 1, characterized in that, The driven gear includes an annular body, a toothed opening on the outer annular wall of the annular body, and an annular stepped portion on the inner annular wall of the annular body; the ultraviolet chamber is provided with a positioning annular portion corresponding to the annular stepped portion.

4. The driving mechanism for the UV chamber according to any one of claims 1 to 3, characterized in that, The drive module is provided in one set, and the ultraviolet chambers controlled by the drive module rotation are provided in two sets, with the drive module located between the two sets of ultraviolet chambers.

5. The driving mechanism for the UV chamber according to any one of claims 1 to 3, characterized in that, The drive module is provided with at least two sets, and the number of ultraviolet chambers is the same as that of the drive module. Each set of drive modules drives one set of ultraviolet chambers respectively.

6. The driving mechanism for the UV chamber according to claim 1, characterized in that, The driven gear and the driving gear are set at the same height on the horizontal plane.

7. A process chamber, characterized in that, The process chamber includes the drive mechanism for the UV chamber as described in any one of claims 1 to 6.

8. The process chamber according to claim 7, characterized in that, The process chamber also includes a UV lamp, which is connected to the driven gear.

9. The process chamber according to claim 8, characterized in that, The UV lamp is positioned above the drive mechanism of the UV chamber.

10. The process chamber according to claim 9, characterized in that, The light emitted by the UV lamp is directed toward the light-transmitting hole.

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