Full-automatic liquid preparation device for preparing liquid through flow metering method
By using a flow metering method and a PLC-controlled fully automatic liquid preparation device, the problems of inaccurate liquid ratio and inconvenient operation in traditional semiconductor cleaning have been solved, achieving safe and accurate liquid preparation and reducing production costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU PANSHI INNOVATION ELECTRONIC EQUIP CO LTD
- Filing Date
- 2023-09-15
- Publication Date
- 2026-05-12
AI Technical Summary
In traditional semiconductor cleaning processes, manual solution preparation is inaccurate, prone to contamination and dangerous, while automatic solution preparation by volume is inconvenient, cannot quantitatively replenish solution, and poses safety hazards.
The flow metering method is adopted, combined with a PLC programmable controller and a pneumatic diaphragm valve. The flow meter detects the flow rate of the medicine solution, and the PLC controls the opening and closing of the pneumatic diaphragm valve to achieve accurate medicine solution ratio. A liquid level sensor is also equipped to ensure accurate solution preparation.
It achieves precise drug solution ratios, improves operational safety, reduces the risk of solution contamination, simplifies the operation process, and reduces production costs.
Smart Images
Figure CN224234117U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and more specifically to a fully automated liquid dispensing device that dispenses liquids using a flow metering method. Background Technology
[0002] The cleaning process in semiconductors requires the use of various chemical solutions. During the cleaning process, the materials to be cleaned need to be placed in tanks containing different solutions to perform the cleaning operation. Since various cleaning solutions usually require multiple chemical concentrates to be prepared in corresponding proportions based on their different chemical properties, the traditional solution preparation methods are mainly manual solution preparation and automatic solution preparation by volume. However, manual solution preparation has poor accuracy, the solution is easily contaminated by the external environment when prepared outside the environment, and because it involves hazardous chemicals, there is a possibility of personal safety accidents due to improper operation. Automatic solution preparation by volume mainly calculates the volume of each chemical solution according to the proportion of the container and attaches a sensor to the scale for measurement. This solution preparation method is inconvenient to operate when changing the chemical solution ratio, and it requires hardware (sensor) adjustment. Moreover, it mostly requires a special solution preparation tank to operate, which has poor operation convenience and cannot perform targeted quantitative replenishment of solution. Utility Model Content
[0003] To overcome the above-mentioned technical defects, this application provides a fully automatic liquid preparation device that uses flow metering to prepare the liquid.
[0004] According to this application, a fully automatic liquid preparation device for liquid preparation by flow metering includes a PLC programmable controller and a preparation mechanism.
[0005] The preparation mechanism includes a cleaning tank and several liquid pipes disposed above the cleaning tank. Each liquid pipe is equipped with a flow meter and a pneumatic diaphragm valve located at the rear end of the flow meter. The flow meter is used to detect the flow rate of the liquid in the liquid pipe. The PLC programmable controller is used to set the ratio and formula of the solution, and the PLC programmable controller controls the opening and closing of the pneumatic diaphragm valve according to the liquid flow signal detected by the flow meter and the set ratio.
[0006] Preferably, the cleaning tank is also equipped with a liquid level sensor.
[0007] Preferably, the liquid medicine tube is also provided with a manual diaphragm valve located at the rear end of the pneumatic diaphragm valve.
[0008] Preferably, the flow meter is a non-contact electronic flow meter.
[0009] Compared with traditional technologies, this application presents a fully automated solution preparation device using flow metering. This device accurately detects the flow rate of the solution using a flow meter, and, in conjunction with a PLC programmable controller, automatically controls the opening and closing of a pneumatic diaphragm valve according to the set ratio and formula, achieving precise solution preparation and avoiding the accuracy problems of traditional manual preparation. Furthermore, the automated control reduces the operator's exposure to hazardous chemicals, improving operational safety. In addition, the entire device has a simple structure, low cost, is easy to operate, has a fast response speed, occupies little space, and effectively prevents solution contamination, saving production costs. Attached Figure Description
[0010] Figure 1 This is a schematic diagram of a fully automatic liquid dispensing device that uses flow metering to dispense liquids according to this application.
[0011] Reference numerals in the attached diagram: 1. Manual diaphragm valve, 2. Pneumatic diaphragm valve, 3. Flow meter, 4. Liquid pipe, 5. Cleaning tank body, 6. PLC programmable controller, 7. Liquid level sensor. Detailed Implementation
[0012] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0013] Combined with appendix Figure 1 A fully automatic liquid preparation device that uses flow metering to prepare liquids includes a PLC programmable controller 6 and a preparation mechanism.
[0014] The preparation mechanism includes a cleaning tank body 5 and several medicine pipes 4 arranged above the cleaning tank body 5. The medicine pipes 4 are equipped with flow meters 3 and pneumatic diaphragm valves 2 located at the rear end of the flow meters 3. The flow meters 3 are used to detect the flow rate of the medicine in the medicine pipes 4. The PLC programmable controller 6 is used to set the ratio and formula of the solution. The PLC programmable controller 6 controls the opening and closing of the pneumatic diaphragm valves 2 according to the flow rate signal detected by the flow meters 3 and according to the set ratio.
[0015] In this embodiment, a liquid level sensor 7 is also provided on the cleaning tank body 5. The liquid level sensor 7 monitors the working liquid level in real time to ensure that the amount of prepared medicine solution is accurate and meets the process requirements. Once the working liquid level reaches the set value, the system can automatically stop adding liquid, thereby maintaining the stability of the working liquid level and ensuring the consistency and quality of the cleaning process.
[0016] In this embodiment, the liquid medicine pipe 4 is also equipped with a manual diaphragm valve 1 located at the rear end of the pneumatic diaphragm valve 2. The manual diaphragm valve 1 can play a role in stabilizing pressure and flow.
[0017] In this embodiment, a non-contact electronic flow meter is selected for flow meter 3, which prevents the problem of fluid contamination of the flow meter. This flow meter 3 can provide accurate and stable flow measurement without being affected by particles or chemicals in the fluid. This choice of flow meter helps to ensure the accurate proportioning of the drug solution, improving the reliability and stability of the system.
[0018] Working principle: This invention uses a manual diaphragm valve 1 at the front end of the drug solution pipe 4 to stabilize pressure and flow, a flow meter 3 to detect flow rate, and a PLC programmable controller 6 to control the conversion formula (volume = flow rate * time), editable formula instructions, and set drug concentration. Based on the formula and method for converting flow rate into solution volume, it achieves fully automatic solution preparation. The specific usage method is as follows: set the corresponding ratio and formula of the solution in the PLC programmable controller 6, and preset the solution volume corresponding to the working liquid level in the cleaning tank 5. Set a relatively stable flow rate through the manual diaphragm valve 1 during equipment installation and commissioning. When preparing the solution, the pneumatic diaphragm valve 2 automatically opens, and the flow meter 3 measures the amount of medicine passing through the medicine pipe 4 and communicates with the PLC programmable controller 6 in real time to calculate (volume = flow rate * time). After the set solution volume is reached, the pneumatic diaphragm valve 2 automatically closes, and then other solutions are added. The liquid addition and measurement methods are the same as above. The working liquid level sensor 7 in the cleaning tank 5 is set to check whether the liquid volume is accurate. The flow meter 3 is a non-contact electronic flow meter, which can effectively prevent the flow meter 3 from contaminating the solution.
[0019] The above embodiments are only used to illustrate the technical solutions of the embodiments of this application, and are not intended to limit them. Although the embodiments of this application have been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope defined by the claims of this application.
Claims
1. A fully automatic liquid dispensing device that dispenses liquids using a flow metering method, characterized in that, Includes a PLC programmable controller (6) and a configuration mechanism; The preparation mechanism includes a cleaning tank body (5) and several medicine pipes (4) arranged above the cleaning tank body (5). The medicine pipes (4) are equipped with flow meters (3) and pneumatic diaphragm valves (2) located at the rear end of the flow meters (3). The flow meters (3) are used to detect the flow rate of the medicine in the medicine pipes (4). The PLC programmable controller (6) is used to set the ratio and formula of the solution. The PLC programmable controller (6) controls the opening and closing of the pneumatic diaphragm valves (2) according to the flow rate signal detected by the flow meters (3) and the set ratio.
2. The fully automatic liquid dispensing device for dispensing liquid by flow metering according to claim 1, characterized in that, The cleaning tank (5) is also equipped with a liquid level sensor (7).
3. The fully automatic liquid dispensing device for dispensing liquid by flow metering according to claim 1, characterized in that, The liquid medicine tube (4) is also equipped with a manual diaphragm valve (1) located at the rear end of the pneumatic diaphragm valve (2).
4. The fully automatic liquid dispensing device for dispensing liquid by flow metering according to claim 1, characterized in that, The flow meter (3) is a non-contact electronic flow meter.