Blue film tensioning device

Abstract

The utility model discloses a blue film tensioning device. The blue film tensioning device comprises a mounting table; the adsorption fixing assembly comprises an adsorption table and a negative pressure part, and the adsorption table adsorbs and fixes the wafer; the tensioning assembly comprises a first fixing plate and a second fixing plate which are arranged on the two sides of the adsorption table correspondingly, an adjusting piece and an elastic piece connected between the adjusting piece and the adsorption fixing assembly, and the first fixing plate and the second fixing plate are used for fixing the two edges of the blue film correspondingly; the adjusting part can drive the second fixing plate to move close to or away from the adsorption fixing assembly under the action of external force so as to have a compression position and a tensioning position. At the compression position, the distance between the first fixing plate and the second fixing plate is smaller than the width of the blue film; when the first fixing plate and the second fixing plate are located at the tensioning position, the distance between the first fixing plate and the second fixing plate tends to be consistent with the width of the blue film, so that the blue film in a non-flattened state is flattened, the blue film is effectively tensioned, looseness is avoided, the wafer processing quality is improved, the structure is simple, and operation is convenient.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, and in particular to a blue film tensioning device. Background Technology

[0002] In semiconductor manufacturing and packaging, blue tape is widely used for wafer dicing, transport, and temporary fixation. To ensure wafer stability during processing, the blue tape needs appropriate tension to prevent wafer displacement or damage due to slack, or uneven adhesion between the blue tape and the wafer, resulting in air bubbles. However, existing blue tape fixing devices are complex to operate, typically rely on manual adjustment, are inefficient, and struggle to guarantee consistency. Utility Model Content

[0003] In view of the above, this application provides an embodiment to solve at least one problem existing in the background art. The purpose of this application is achieved through the following technical solution: a blue film tensioning device, comprising:

[0004] Installation platform;

[0005] An adsorption and fixation assembly includes an adsorption stage and a negative pressure component. The adsorption stage is provided with a plurality of adsorption holes communicating with the negative pressure component. The plurality of adsorption holes adsorb and fix the wafer under the action of the negative pressure component.

[0006] The tensioning assembly includes a first fixing plate and a second fixing plate respectively disposed on both sides of the adsorption platform, an adjusting member disposed on the outside of the second fixing plate and connected to the second fixing plate, and an elastic member connected between the adjusting member and the adsorption fixing assembly. The first fixing plate and the second fixing plate are respectively used to fix the two edges of the blue film. Under the action of external force, the adjusting member can drive the second fixing plate to move closer to or away from the adsorption fixing assembly to have a compressed position and a tensioned position.

[0007] When in the compressed position, the distance between the first fixing plate and the second fixing plate is less than the width of the blue film;

[0008] When in the tensioned position, the distance between the first fixing plate and the second fixing plate tends to be consistent with the width of the blue film.

[0009] Optionally, in the above-mentioned blue film tensioning device, the tensioning component further includes a support rod and a support block disposed on the outside of the adjusting member. There is a gap between the support rod and the adjusting member. The width of the support block is adapted to the width of the gap. The support block is used to insert into the gap to squeeze the adjusting member and drive the second fixing plate to move from the tensioning position to the compression position.

[0010] Optionally, in the above-mentioned blue film tensioning device, the tensioning component further includes a limiting member disposed on the abutment rod;

[0011] When the second fixing plate is in the tensioned position, the limiting member abuts against the adjusting member.

[0012] Optionally, in the above-mentioned blue film tensioning device, both the first fixing plate and the second fixing plate include a connecting part and a fixing part, wherein the fixing part is used to fix the edge of the blue film;

[0013] The fixing part is provided with a strip-shaped groove.

[0014] Optionally, in the above-mentioned blue film tensioning device, the strip groove is provided with a plurality of through holes, which are used to communicate with a vacuum component.

[0015] Optionally, the above-mentioned blue film tensioning device further includes a magnetic suction element for fixing the blue film to the first fixing plate / second fixing plate.

[0016] Optionally, the above-mentioned blue film tensioning device further includes a driving assembly, which includes a first driving member connected to the first fixed plate and a second driving member connected to the second fixed plate. The first driving member and the second driving member are respectively used to drive the first fixed plate and the second fixed plate to move up and down together to have a first position and a second position.

[0017] When in the first position, the first fixing plate and the second fixing plate are flush with the adsorption stage;

[0018] When in the second position, the first fixing plate and the second fixing plate are higher than the adsorption stage.

[0019] Optionally, when the blue film tensioning device described above is located in the second position, the distance between the blue film on the first fixing plate and the second fixing plate and the adsorption stage is 0.8-1.2cm.

[0020] Optionally, the above-mentioned blue film tensioning device further includes a guide assembly, which includes a guide rod disposed on one of the tensioning assembly and the mounting platform and a linear bearing mounted on the other. The drive assembly is capable of driving the tensioning assembly to move up and down via the guide rod and the linear bearing.

[0021] Optionally, in the above-mentioned blue film tensioning device, the elastic element includes a first end and a second end, the first end being connected to the adjusting element, and the second end being provided with a gasket.

[0022] The beneficial effects of the above-described structure of this utility model are as follows: By providing an adsorption fixing component and a tensioning component, the adsorption fixing component can fix the wafer, while the tensioning component can tension the blue film to facilitate its attachment to the wafer. The tensioning component includes a first fixing plate and a second fixing plate respectively disposed on both sides of the adsorption stage, an adjusting member disposed outside the second fixing plate and connected to the second fixing plate, and an elastic member connected between the adjusting member and the adsorption fixing component. The first fixing plate and the second fixing plate are respectively used to fix the two edges of the blue film. Under the action of external force, the adjusting member can drive the second fixing plate to move closer to or away from the adsorption fixing component to have a compression position and a tension position. When in the compression position, the distance between the first fixing plate and the second fixing plate is less than the width of the blue film, so that the edges of the blue film can be fixed to the first fixing plate and the second fixing plate in sequence. At this time, the blue film is in a non-flattened state. When in the tension position, the distance between the first fixing plate and the second fixing plate tends to be consistent with the width of the blue film, so as to flatten the non-flattened blue film, effectively tension the blue film, avoid slack, improve the wafer processing quality, and the structure is simple and easy to operate. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the wafer lamination equipment shown in the embodiments of this application;

[0024] Figure 2 for Figure 1 A diagram from another direction;

[0025] Figure 3 This is a schematic diagram of the blue film tensioning device shown in the embodiment of this application;

[0026] Figure 4 for Figure 3 A diagram from another direction;

[0027] Figure 5 for Figure 3 A diagram showing another direction.

[0028] Figure label:

[0029] Blue film tensioning device-100, upper housing-101, lower housing-102, guide slider-105, guide rail-106, adsorption fixing assembly-108, tensioning assembly-109, adsorption platform-110, adsorption hole-112, first fixing plate-113, second fixing plate-114, adjusting component-115, elastic component-116, first end-116a, second end-116b, gasket-117, supporting rod-118, gap-120, limiting component-121, connecting part-122, fixing part-123, strip groove-124, through hole-125, magnetic suction component-126, driving assembly-127, first driving component-128, second driving component-129, guide assembly-130, guide rod-131, linear bearing-132. Detailed Implementation

[0030] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0032] like Figure 1 and Figure 2As shown in the preferred embodiment of this utility model, a blue film tensioning device 100 is suitable for installation on a wafer lamination equipment. The wafer lamination equipment includes an upper housing 101, a lower housing 102 movable relative to the upper housing 101, a pressing device disposed in the upper housing 101, and a blue film tensioning device 100 disposed in the lower housing 102. The upper housing 101 and the lower housing 102 can dock to form a sealed accommodating space (not labeled), and this accommodating space is in a vacuum environment. The blue film tensioning device 100 can tension the blue film above the wafer. The pressing device can move relative to the blue film to bond the blue film to the wafer. Wafer-blue film bonding is performed in a vacuum environment, and the pressing device presses the blue film and wafer together, preventing air bubbles between the wafer and the blue film or avoiding wafer displacement or damage due to loosening.

[0033] It is worth noting that in this embodiment, the lower housing 102 has a film-applying position and a docking position. When the blue film needs to be flattened above the wafer, the lower housing 102 is located at the film-applying position. At this time, the orthographic projection of the upper housing 101 and the orthographic projection of the lower housing 102 do not overlap, so that the operator can place the blue film on the blue film tensioning device 100 of the lower housing 102. When the blue film needs to be applied to the wafer, the lower housing 102 moves relative to the upper housing 101 to the docking position under the action of external force. At this time, the lower housing 102 is located directly below the upper housing 101, so as to dock with the upper housing 101 and realize the subsequent pressing device to press the wafer and the blue film together.

[0034] Understandably, a guide slider 105 is provided on the lower housing 102, and a guide rail 106 adapted to the guide slider 105 is provided on the wafer laminating equipment. The lower housing 102 can move through the guide rail 106 and the guide slider 105 under the action of external force to prevent the lower housing 102 from deviating during the movement.

[0035] For details, please refer to Figure 1 and Figure 3 As shown, the blue film tensioning device 100 includes a mounting platform (not shown) installed inside the lower housing 102, an adsorption and fixing assembly 108 mounted on the mounting platform, and a tensioning assembly 109. The adsorption and fixing assembly 108 includes an adsorption platform 110 and a negative pressure element (not shown). The adsorption platform 110 has several adsorption holes 112 communicating with the negative pressure element. Under the action of the negative pressure element, the adsorption holes 112 adsorb and fix the wafer. The tensioning assembly 109 is used to tension the blue film above the adsorption platform 110, aligning the blue film with the wafer for better adhesion. It should be noted that in this embodiment, the mounting platform is the bottom surface of the lower housing 102 to simplify the overall structure of the device.

[0036] For more specific details, please refer to Figures 3-5The tensioning assembly 109 includes a first fixing plate 113 and a second fixing plate 114 respectively disposed on both sides of the adsorption platform 110, an adjusting member 115 disposed outside the second fixing plate 114 and connected to the second fixing plate 114, and an elastic member 116 connected between the adjusting member 115 and the adsorption fixing assembly 108. The first fixing plate 113 and the second fixing plate 114 are respectively used to fix the two edges of the blue film. Under the action of external force, the adjusting member 115 can drive the second fixing plate 114 to move closer to or away from the adsorption fixing assembly 108 to have a compressed position and a tensioned position. When in the compressed position, the distance between the first fixing plate 113 and the second fixing plate 114 is less than the width of the blue film. When in the tensioned position, the distance between the first fixing plate 113 and the second fixing plate 114 tends to be consistent with the width of the blue film.

[0037] Understandably, by setting the adjusting member 115 and the elastic member 116, the adjusting member 115 can be subjected to external force to compress the elastic member 116, thereby driving the second fixing plate 114 to switch from the tensioned position to the compression position, which facilitates the rapid pre-fixation of the blue film. At this time, the distance between the first fixing plate 113 and the second fixing plate 114 is less than the width of the blue film, so as to prevent the blue film from being overstretched during the process of fixing the blue film to the first fixing plate 113 and the second fixing plate 114 respectively. After the force applied to the adjusting member 115 is removed, the elastic member 116 resets to drive the second fixing plate 114 to switch from the compression position to the tensioned position, so as to tension the blue film. The elastic force of the elastic member 116 has a certain buffer to prevent the blue film from being overstretched and damaged during the tensioning process.

[0038] In this embodiment, the elastic member 116 includes a first end 116a and a second end 116b. The first end 116a is connected to the adjusting member 115, and the second end 116b is provided with a gasket 117. The gasket 117 is made of a flexible material, such as silicone, to prevent the elastic member 116 from being over-compressed and rubbing against the adsorption and fixing component 108, which could cause damage.

[0039] Furthermore, the tensioning assembly 109 also includes a retaining rod 118 and a retaining block (not shown) disposed on the outside of the adjusting member 115. There is a gap 120 between the retaining rod 118 and the adjusting member 115. The width of the retaining block is adapted to the width of the gap 120. The retaining block is used to insert into the gap 120 to compress the adjusting member 115 and drive the second fixing plate 114 to move from the tensioned position to the compressed position.

[0040] In this embodiment, the width of the abutment block gradually increases from one end to the other. In other embodiments, the specific structure of the abutment block is not specifically limited and can be determined according to the actual situation.

[0041] Furthermore, the tensioning assembly 109 also includes a limiting member 121 disposed on the abutment rod 118; when the second fixing plate 114 is in the tensioned position, the limiting member 121 abuts against the adjusting member 115 to prevent the abutment rod 118 from dislodging or moving excessively under the action of the elastic member 116, which would cause the blue film to be overstretched.

[0042] Furthermore, both the first fixing plate 113 and the second fixing plate 114 include a connecting part 122 and a fixing part 123. The fixing part 123 is used to fix the edge of the blue film. A strip groove 124 is provided on the fixing part 123, and the edge of the blue film is fixed in the strip groove 124.

[0043] In this embodiment, the blue film is adhesive, and the fixing parts 123 of the first fixing plate 113 and the second fixing plate 114 both have smooth and clean surfaces. The blue film can be directly attached to the smooth and clean surfaces to achieve a stable connection between the two. By setting the strip groove 124, the contact area between the blue film and the fixing part 123 is increased, which further improves the connection stability between the two. In addition, the setting of the groove can also disperse the edge stress of the blue film and reduce the risk of tearing of the blue film due to stress concentration.

[0044] Furthermore, the strip-shaped groove 124 is provided with a plurality of through holes 125, which are used to communicate with the vacuum component to fix the edge of the blue film by negative pressure adsorption. Understandably, fixing the edge of the blue film by negative pressure adsorption further ensures the fixing effect between the blue film and the fixing part 123. When the adhesiveness of the blue film fails and it cannot be fixed to the fixing part 123, the edge of the blue film can still be fixed by negative pressure adsorption alone, which improves the fault tolerance of the tensioning device 100. Moreover, the method of fixing the blue film by negative pressure adsorption can adjust the adsorption force in real time according to the tension state of the blue film, so as to achieve flexible fixing of the blue film.

[0045] Furthermore, the blue film tensioning device 100 also includes a magnetic suction member 126 for fixing the blue film to the first fixing plate 113 / second fixing plate 114. In this embodiment, the fixing portions 123 of the first fixing plate 113 and the second fixing plate 114 are both made of metal that can be attracted to the magnetic suction member 126. Through the attraction between the magnetic suction member 126 and the metal material, the blue film can be fixed on the fixing portion 123, and the magnetic suction member 126 will not damage the edge of the blue film.

[0046] It should be noted that, in the above embodiments, at least one of negative pressure adsorption and magnetic adsorption can be selected according to specific needs to ensure the connection stability between the blue film and the fixing part 123.

[0047] Furthermore, the blue film tensioning device 100 also includes a drive assembly 127, which includes a first drive member 128 connected to the first fixed plate 113 and a second drive member 129 (not shown) connected to the second fixed plate 114. The first drive member 128 and the second drive member 129 are respectively used to drive the first fixed plate 113 and the second fixed plate 114 to move up and down together to have a first position and a second position. When in the first position, the first fixed plate 113 and the second fixed plate 114 are flush with the adsorption stage 110; when in the second position, the first fixed plate 113 and the second fixed plate 114 are higher than the adsorption stage 110.

[0048] Understandably, when it is necessary to pre-fix the blue film onto the first fixing plate 113 and the second fixing plate 114, the driving assembly 127 drives the first fixing plate 113 and the second fixing plate 114 to move together from the first position to the second position. At this time, the distance between the first fixing plate 113 and the second fixing plate 114 is less than the width of the blue film. The blue film hangs down naturally under the action of gravity. The first fixing plate 113 and the second fixing plate 114 are higher than the adsorption stage 110 to prevent the hanging blue film from contacting the wafer below.

[0049] In this embodiment, when in the second position, the distance between the blue film on the first fixing plate 113 and the second fixing plate 114 and the adsorption stage 110 is 0.8-1.2cm, which can prevent the drooping blue film from contacting the wafer below, and will not affect the bonding effect between the wafer and the blue film.

[0050] Furthermore, the tensioning device 100 also includes a guide assembly 130, which includes a guide rod 131 disposed on one of the tensioning assembly 109 and the mounting platform and a linear bearing 132 mounted on the other. The drive assembly 127 is capable of driving the tensioning assembly 109 to move up and down through the guide rod 131 and the linear bearing 132.

[0051] Understandably, the linear bearing 132 can reduce the frictional resistance during the up-and-down movement of the first fixed plate 113 and the second fixed plate 114, and extend the service life of the drive assembly 127, while the guide rod 131 can prevent the first fixed plate 113 and the second fixed plate 114 from shifting during the up-and-down movement.

[0052] The working process of the blue film tensioning device of this utility model is as follows: First, the wafer is fixed on the adsorption stage. The driving component drives the first fixing plate and the second fixing plate to move together to the second position, so that it is higher than the adsorption stage. Then, one edge of the blue film is fixed on the first fixing plate. Then, the abutment block is inserted into the gap between the abutment rod and the adjusting member. The abutment block squeezes the adjusting member and drives the second fixing plate from the tensioning position to the compression position, and fixes the other edge of the blue film on the second fixing plate in the compression position. At this time, the blue film deforms under the action of gravity, and the blue film in the middle part naturally droops. After the abutment block is removed, the adjusting member drives the second fixing plate from the compression position to the tensioning position under the action of elastic force, so as to straighten and flatten the naturally drooping blue film and tension it.

[0053] Compared with the prior art, the blue film tensioning device of this application has a simple structure, is easy to operate, and can achieve rapid positioning and precise tensioning of the blue film, which significantly improves the yield and efficiency of wafer lamination.

[0054] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A blue film tensioning device, characterized in that, include: Installation platform; An adsorption and fixation assembly includes an adsorption stage and a negative pressure component. The adsorption stage is provided with a plurality of adsorption holes communicating with the negative pressure component. The plurality of adsorption holes adsorb and fix the wafer under the action of the negative pressure component. The tensioning assembly includes a first fixing plate and a second fixing plate respectively disposed on both sides of the adsorption platform, an adjusting member disposed on the outside of the second fixing plate and connected to the second fixing plate, and an elastic member connected between the adjusting member and the adsorption fixing assembly. The first fixing plate and the second fixing plate are respectively used to fix the two edges of the blue film. Under the action of external force, the adjusting member can drive the second fixing plate to move closer to or away from the adsorption fixing assembly to have a compressed position and a tensioned position. When in the compressed position, the distance between the first fixing plate and the second fixing plate is less than the width of the blue film; When in the tensioned position, the distance between the first fixing plate and the second fixing plate tends to be consistent with the width of the blue film.

2. The blue film tensioning device according to claim 1, characterized in that, The tensioning assembly further includes a retaining rod and a retaining block disposed on the outside of the adjusting member. There is a gap between the retaining rod and the adjusting member. The width of the retaining block is adapted to the width of the gap. The retaining block is used to insert into the gap to squeeze the adjusting member and drive the second fixing plate to move from the tensioning position to the compression position.

3. The blue film tensioning device according to claim 2, characterized in that, The tensioning assembly also includes a limiting member disposed on the abutment rod; When the second fixing plate is in the tensioned position, the limiting member abuts against the adjusting member.

4. The blue film tensioning device according to claim 1, characterized in that, Both the first fixing plate and the second fixing plate include a connecting part and a fixing part, wherein the fixing part is used to fix the edge of the blue film; The fixing part is provided with a strip-shaped groove.

5. The blue film tensioning device according to claim 4, characterized in that, The grooved groove is provided with several through holes, which are used to communicate with the vacuum component.

6. The blue film tensioning device according to claim 4 or 5, characterized in that, The blue film tensioning device also includes a magnetic element for fixing the blue film to the first fixing plate / second fixing plate.

7. The blue film tensioning device according to claim 1, characterized in that, The blue film tensioning device further includes a driving assembly, which includes a first driving member connected to the first fixed plate and a second driving member connected to the second fixed plate. The first driving member and the second driving member are respectively used to drive the first fixed plate and the second fixed plate to move up and down together to have a first position and a second position. When in the first position, the first fixing plate and the second fixing plate are flush with the adsorption stage; When in the second position, the first fixing plate and the second fixing plate are higher than the adsorption stage.

8. The blue film tensioning device according to claim 7, characterized in that, When in the second position, the distance between the blue film on the first and second fixing plates and the adsorption stage is 0.8-1.2 cm.

9. The blue film tensioning device according to claim 7, characterized in that, The tensioning device further includes a guide assembly, which includes a guide rod disposed on one of the tensioning assembly and the mounting platform and a linear bearing mounted on the other. The drive assembly is capable of driving the tensioning assembly to move up and down via the guide rod and the linear bearing.

10. The blue film tensioning device according to claim 1, characterized in that, The elastic element includes a first end and a second end, the first end being connected to the adjusting element, and the second end being provided with a gasket.

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