Large-size panel detection equipment based on precise air floating platform

Abstract

The utility model relates to the technical field of panel detection, in particular to large-size panel detection equipment based on a precise air floating platform, which comprises a rack, and adsorption transfer mechanisms are arranged on two sides of the rack; a marble platform is fixedly arranged on the machine frame, a conveying air bearing table assembly and a precise air bearing table assembly are arranged on the marble platform in parallel, a discharging roller assembly is arranged on the side, away from the conveying air bearing table assembly, of the precise air bearing table assembly, and a lifting feeding roller assembly is arranged on the marble platform. A panel detection assembly and a panel re-judgment assembly are arranged above the precise air floating table assembly, and the panel re-judgment assembly is arranged on the side, away from the conveying air floating table assembly, of the panel detection assembly. The marble platform and air vibration isolation are adopted, so that the influence of equipment vibration on detection is effectively reduced; the conveying air floating table assembly and the precision air floating table assembly are combined, so that a product can float to a certain height, and friction-free transmission is realized in detection motion.

Description

Technical Field

[0001] This utility model relates to the field of panel inspection technology, and in particular to a large-size panel inspection device based on a precision air flotation platform. Background Technology

[0002] As display panel technology matures, substrate sizes have upgraded from G6 to G8 and G10.5, and product thickness has also increased, placing extremely high demands on manufacturing processes and equipment. Some panel defects, such as microcracks, are only in the micrometer (µm) or even nanometer (nm) range. These are often undetectable by conventional optical systems and sometimes require high-magnification microscopes for observation.

[0003] Due to the increased detection accuracy, parameters such as the camera's field of view and depth of field are much smaller. The requirements for minimizing machine vibration and product undulation during inspection are very high. Conventional CV roller (CV stands for Continuous Variable, meaning a continuously variable transmission roller) and STAGE platform (robot simulation and testing platform) inspection methods cannot meet these requirements. CV rollers, due to structural limitations, struggle to control runout to below 0.05mm, and there is a risk of product damage during the process, making them unsuitable for inspection. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a large-size panel inspection device based on a precision air flotation platform, so as to overcome the shortcomings of the prior art.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A large-size panel inspection device based on a precision air flotation platform includes a frame. Both sides of the frame are provided with adsorption and transfer mechanisms for adsorbing the two sides of the panel to be inspected and driving the panel to be inspected to move in a straight line. A marble platform is fixed on the frame, positioned between the two adsorption and transfer mechanisms. A conveying air flotation platform assembly and a precision air flotation platform assembly are arranged side-by-side on the marble platform. A feeding roller assembly is provided on the side of the precision air flotation platform assembly away from the conveying air flotation platform assembly. A lifting feeding roller assembly is provided on the marble platform, positioned below the conveying air flotation platform assembly. The lifting feeding roller assembly can move vertically upwards so that its top extends beyond the conveying air flotation platform assembly. A panel inspection assembly and a panel re-judgment assembly are provided above the precision air flotation platform assembly, with the panel re-judgment assembly positioned on the side of the panel inspection assembly away from the conveying air flotation platform assembly.

[0006] The beneficial effects of this utility model are as follows: The use of a marble platform with air vibration isolation effectively reduces the impact of equipment vibration on testing; the combination of a conveyor air-float assembly and a precision air-float assembly, through adjusting parameters such as flatness and parallelism, and controlling air pressure and flow rate, allows the product to be floated to a certain height, achieving frictionless transmission during testing; the lifting and loading roller assembly can receive the conveyed panels to be tested and move them to the set position on the conveyor air-float assembly, then perform testing through the panel testing assembly and re-inspection through the panel re-judgment assembly, improving testing accuracy; the unloading roller assembly can accept and support the tested panels, providing space for unloading.

[0007] Based on the above technical solution, the present invention can be further improved as follows.

[0008] Furthermore, the adsorption and transfer mechanism includes a linear motion module fixed on the frame, a movable seat fixedly provided on the output end of the linear motion module, an adsorption seat fixedly provided on the side wall of the movable seat facing the marble platform, an adsorption cavity for communicating with the pneumatic components is provided inside the adsorption seat, and an adsorption hole communicating with the adsorption cavity is provided on the top of the adsorption seat.

[0009] The beneficial effect of adopting the above-mentioned further solution is that the adsorption hole at the top of the adsorption seat adsorbs the bottom side of the panel to be tested, and then the linear motion module drives the adsorption seat to move back and forth in a straight line, thereby realizing the movement of the panel to be tested.

[0010] Furthermore, the movable base is equipped with a panel alignment mechanism.

[0011] The beneficial effect of adopting the above-mentioned further solution is that the panel alignment mechanism can be used to clamp and align the panel to be tested, and achieve the centering alignment of the panel to be tested.

[0012] Furthermore, the movable base is equipped with a panel side pressing mechanism.

[0013] The beneficial effect of adopting the above-mentioned further solution is that the side pressing mechanism can press the side of the panel to be tested, avoiding poor adsorption when the side edge of the panel to be tested is warped.

[0014] Furthermore, the panel side pressing mechanism includes multiple pressing cylinders, which are fixedly mounted on the movable base. The multiple pressing cylinders are spaced apart along the length of the linear moving module. A pressing support frame is fixedly mounted on the side of the pressing cylinder facing the marble platform. The end of the pressing support frame away from the pressing cylinder is hinged to the middle of the pressing connecting frame via a horizontally mounted rotating shaft. One end of the pressing connecting frame is hinged to the output shaft of the pressing cylinder. A pressing roller is rotatably mounted on the other end of the pressing connecting frame. The extension and retraction of the pressing cylinder causes the pressing roller to rotate around the rotating shaft as its axis.

[0015] The beneficial effects of adopting the above-mentioned further solution are as follows: the pressing cylinder drives the pressing roller to rotate around the shaft. Before the panel to be tested is conveyed to the conveying air-float assembly, the pressing cylinder drives the pressing roller to rotate upward to provide feeding space for the panel to be tested. After the panel to be tested is conveyed to the conveying air-float assembly, the pressing cylinder drives the pressing roller to rotate downward until it presses against the side of the panel to be tested, thereby pressing the side of the panel to be tested.

[0016] Furthermore, the conveying air flotation platform assembly includes an air flotation platform mounting bracket and multiple elongated air flotation platforms. The multiple air flotation platform mounting brackets are fixedly installed on the marble platform, and the multiple air flotation platforms are fixedly disposed on the top of the air flotation platform mounting brackets. The length direction of the air flotation platforms is parallel to the moving direction of the adsorption and transfer mechanism, and the multiple air flotation platforms are spaced apart along the direction perpendicular to the moving direction of the adsorption and transfer mechanism. The air flotation platforms are connected to an external air source through pipes.

[0017] The beneficial effect of adopting the above-mentioned further solution is that the interval setting of the air flotation platform can provide lifting space for the lifting and feeding roller assembly, so that the top of the lifting and feeding roller assembly can be raised to protrude from the upper surface of the air flotation platform, which facilitates the support of the panel to be tested that is fed in.

[0018] Furthermore, the lifting and feeding roller assembly includes a lifting mechanism, which is fixed on the marble platform. A roller bracket is fixedly provided on the output shaft of the lifting mechanism. Multiple rollers are rotatably provided on the roller bracket. The multiple rollers are arranged parallel to each other and spaced apart. Multiple movable rollers are fixedly sleeved on each roller at intervals. Each movable roller is located vertically below the gap between two adjacent air flotation platforms.

[0019] The beneficial effect of adopting the above-mentioned further solution is that the moving rollers on the roller bracket are raised and lowered synchronously by the lifting mechanism, which ensures that the moving rollers can bear the load of the panel to be tested evenly, and avoids damage to some parts of the panel to be tested due to uneven support.

[0020] Furthermore, the panel detection assembly includes a gantry frame, with both ends of the gantry frame fixed on the frame. The gantry frame is positioned vertically above the precision air flotation stage assembly, and the length direction of the gantry frame is perpendicular to the moving direction of the adsorption and transfer mechanism. A detection camera is mounted on the gantry frame via a detection moving module, and the detection camera reciprocates linearly along the length direction of the gantry frame under the drive of the detection moving module.

[0021] The beneficial effects of adopting the above-mentioned further solution are: using a gantry and the detection moving module on the gantry to set up the detection camera makes it convenient to place the detection camera above the precision air-bearing stage assembly, and enables back-and-forth scanning of the panel.

[0022] Furthermore, the detection camera is located on the side of the gantry away from the conveying air-bearing platform assembly. The panel re-judgment assembly includes a re-judgment moving mechanism mounted on the gantry. Multiple re-judgment cameras are fixedly mounted on the moving end of the re-judgment moving mechanism. The multiple re-judgment cameras are located on the side of the gantry facing the conveying air-bearing platform assembly. The re-judgment cameras reciprocate linearly along the length direction of the gantry under the drive of the re-judgment moving mechanism.

[0023] The beneficial effect of adopting the above-mentioned further solution is that the re-judgment camera, which can reciprocate linearly on the gantry, can re-inspect the defect locations detected by the inspection camera.

[0024] Furthermore, the feeding roller assembly includes a roller support plate, which is fixed on the frame. Multiple feeding brackets are evenly fixed on the roller support plate, and a feeding roller is rotatably mounted on each feeding bracket.

[0025] The beneficial effect of adopting the above-mentioned further solution is that the unloading rollers supported by the unloading bracket can support the panel after the inspection is completed, so that the unloading panel can be unloaded by the robot arm. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of this utility model;

[0027] Figure 2 This is a schematic diagram showing the arrangement of the conveying air flotation table assembly, the precision air flotation table assembly, and the unloading roller assembly in this utility model;

[0028] Figure 3 This is a schematic diagram of the adsorption and transfer mechanism in this utility model;

[0029] Figure 4 This is a schematic diagram of the panel alignment mechanism in this utility model;

[0030] Figure 5 This is a schematic diagram of the panel side pressing mechanism in this utility model;

[0031] Figure 6 This is a schematic diagram of the lifting and feeding roller assembly in this utility model;

[0032] Figure 7 This is a schematic diagram of the panel detection component in this utility model;

[0033] Figure 8 This is a schematic diagram of the detection light source in this utility model;

[0034] Figure 9 This is a schematic diagram of the panel verification component in this utility model;

[0035] Figure 10 This is a schematic diagram of the installation of the feeding roller assembly in this utility model;

[0036] The attached diagram lists the components represented by each number as follows:

[0037] 1. Frame; 101. Casters; 102. Load-bearing feet;

[0038] 2. Adsorption and transfer mechanism; 201. Linear movement module; 202. Moving seat; 203. Adsorption seat;

[0039] 3. Marble platform;

[0040] 4. Conveyor air flotation platform assembly; 401. Air flotation platform mounting bracket; 402. Air flotation platform;

[0041] 5. Precision air flotation platform assembly; 501. Precision air flotation support; 502. Precision air flotation platform;

[0042] 6. Feeding roller assembly; 601. Roller support plate; 602. Feeding bracket; 603. Feeding roller;

[0043] 7. Lifting and feeding roller assembly; 701. Lifting mechanism; 702. Roller bracket; 703. Roller; 704. Moving roller; 705. Synchronous lifting device;

[0044] 8. Panel inspection assembly; 801. Gantry crane; 802. Inspection moving module; 803. Inspection camera; 804. Inspection light source;

[0045] 9. Panel verification component; 901. Verification moving mechanism; 902. Verification camera;

[0046] 10. Panel alignment mechanism; 1001. Alignment linear cylinder; 1002. Alignment roller;

[0047] 11. Panel side pressing mechanism; 1101. Pressing cylinder; 1102. Pressing support frame; 1103. Pressing connecting frame; 1104. Rotating shaft; 1105. Pressing roller; 1106. Pressing linear cylinder. Detailed Implementation

[0048] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0049] like Figure 1 , Figure 2 As shown, an embodiment of the present invention includes a frame 1. Adsorption and transfer mechanisms 2 are provided on both sides of the frame 1 for adsorbing the two sides of the panel to be tested and driving the panel to be tested to move in a straight line. A marble platform 3 is fixedly mounted on the frame 1, positioned between the two adsorption and transfer mechanisms 2. A conveying air flotation table assembly 4 and a precision air flotation table assembly 5 are arranged side-by-side on the marble platform 3. A feeding roller assembly 6 is provided on the side of the precision air flotation table assembly 5 away from the conveying air flotation table assembly 4. A lifting feeding roller assembly 7 is provided on the conveying air flotation table assembly 4, and the lifting feeding roller assembly 7 can move upwards in the vertical direction so that its top extends beyond the conveying air flotation table assembly 4. A panel detection assembly 8 and a panel re-judgment assembly 9 are provided above the precision air flotation table assembly 5, with the panel re-judgment assembly 9 located on the side of the panel detection assembly 8 away from the conveying air flotation table assembly 4.

[0050] In an embodiment of the present invention, a plurality of casters 101 are uniformly fixed to the bottom end of the frame 1 to facilitate the movement of the entire frame 1. Simultaneously, a plurality of load-bearing feet 102 are uniformly fixed to the bottom end of the frame 1. These load-bearing feet 102 are height-adjustable feet; specifically, each load-bearing foot 102 can be connected to the bottom end of the frame 1 via a screw, and its bottom end can be raised or lowered by turning it. When the frame 1 needs to be moved, the load-bearing feet 102 are adjusted upwards so that the casters 101 touch the ground, and then pushed to move the frame 1. Once the frame 1 has moved to a fixed position, the load-bearing feet 102 are adjusted downwards so that they touch the ground and the casters 101 disengage from the bottom surface, thus fixing the frame 1 in place.

[0051] like Figure 3As shown, the adsorption and transfer mechanism 2 includes a linear motion module 201 fixed on the frame 1. A movable seat 202 is fixedly provided on the output end of the linear motion module 201. An adsorption seat 203 is fixedly provided on the side wall of the movable seat 202 facing the marble platform 3. The adsorption seat 203 has an adsorption cavity for communicating with the pneumatic components. The top of the adsorption seat 203 has an adsorption hole communicating with the adsorption cavity. The bottom side of the panel to be tested is adsorbed through the adsorption hole at the top of the adsorption seat 203. Then, the linear motion module 201 drives the adsorption seat 203 to reciprocate in a linear direction, thereby realizing the movement of the panel to be tested.

[0052] like Figure 4 As shown, the movable base 202 is provided with a panel alignment mechanism 10 and a panel side pressing mechanism 11. The panel alignment mechanism 10 is used to clamp and align the panel to be tested, achieving centered alignment of the panel to be tested. The side pressing mechanism can press the side of the panel to be tested, avoiding poor adhesion when the side edge of the panel to be tested is warped.

[0053] Specifically, each movable seat 202 has multiple panel alignment mechanisms 10, which are spaced apart along the length of the linear motion module 201. Each panel alignment mechanism 10 includes an alignment linear cylinder 1001, the output end of which faces the conveying air-float assembly 4. An alignment roller 1002 is rotatably mounted on the output end of the alignment linear cylinder 1001. The axis of the alignment roller 1002 is vertically arranged and can rotate axially along its axis. During the alignment process, the panel to be inspected is placed on the conveying air-float assembly 4. The alignment linear cylinders 1001 on both sides extend under the control of the controller, so that the alignment roller 1002 abuts against and pushes the side wall of the panel to be inspected, thus completing the alignment. Since the alignment roller 1002 can rotate, the friction with the side wall of the panel to be inspected during the alignment process is reduced.

[0054] like Figure 5As shown, the panel side pressing mechanism 11 includes multiple pressing cylinders 1101, which are fixedly mounted on the movable base 202. The multiple pressing cylinders 1101 are spaced apart along the length of the linear moving module 201. A pressing support frame 1102 is fixedly mounted on the side of each pressing cylinder 1101 facing the marble platform 3. One end of the pressing support frame 1102 away from the pressing cylinder 1101 is hinged to the middle of a pressing connecting frame 1103 via a horizontally arranged rotating shaft 1104. One end of the pressing connecting frame 1103 is hinged to the output shaft of the pressing cylinder 1101. The other end of 1103 is rotatably equipped with a pressing roller 1105. The extension and retraction of the pressing cylinder 1101 drives the pressing roller 1105 to rotate around the axis of the rotating shaft 1104. The pressing cylinder 1101 drives the pressing roller 1105 to rotate around the rotating shaft 1104. Before the panel to be tested is conveyed to the conveying air-float assembly 4, the pressing cylinder 1101 drives the pressing roller 1105 to rotate upward to provide feeding space for the panel to be tested. After the panel to be tested is conveyed to the conveying air-float assembly 4, the pressing cylinder 1101 drives the pressing roller 1105 to rotate downward until it presses against the side of the panel to be tested, thereby pressing the side of the panel to be tested.

[0055] In an embodiment of this utility model, the output shaft of the pressing cylinder 1101 and the rotating shaft 1104 are both horizontally arranged. The length direction of the output shaft of the pressing cylinder 1101 is perpendicular to the length direction of the rotating shaft 1104, and its horizontal height is lower than that of the rotating shaft 1104. One end of the pressing connecting frame 1103 connected to the output shaft of the pressing cylinder 1101 is provided with a downwardly curved arc-shaped part. The arc-shaped part is provided with an arc-shaped hole that matches the arc-shaped part. A connecting shaft is movably arranged in the arc-shaped hole. The end of the connecting shaft is fixedly connected to the output shaft of the pressing cylinder 1101, so that the linear motion of the output shaft of the pressing cylinder 1101 is converted into the flipping motion of the pressing connecting frame 1103.

[0056] In a preferred embodiment of the present invention, the panel side pressing mechanism 11 further includes a pressing linear cylinder 1106. The pressing cylinder 1101 is fixedly disposed on the output end of the pressing linear cylinder 1106 so that the distance between the pressing rollers 1105 on the two moving seats 202 can be adjusted as needed to adapt to pressing the side of the panel to be tested of different sizes.

[0057] The conveying air flotation platform assembly 4 includes an air flotation platform mounting bracket 401 and multiple elongated air flotation platforms 402. The multiple air flotation platform mounting brackets 401 are fixedly installed on the marble platform 3, and the multiple air flotation platforms 402 are fixedly installed on the top of the air flotation platform mounting brackets 401. The length direction of the air flotation platform 402 is parallel to the moving direction of the adsorption and transfer mechanism 2. The multiple air flotation platforms 402 are spaced apart along the moving direction perpendicular to the moving direction of the adsorption and transfer mechanism 2. The air flotation platforms 402 are connected to an external air source through pipes. The spaced air flotation platforms 402 can provide lifting space for the lifting and feeding roller assembly 7, so that the top of the lifting and feeding roller assembly 7 can be raised to protrude from the upper surface of the air flotation platform 402, which is convenient for supporting the panel to be tested that is fed in.

[0058] In an embodiment of this utility model, the precision air flotation platform assembly 5 includes a precision air flotation bracket 501 uniformly fixed on the marble platform 3, and a precision air flotation platform 503 fixedly disposed on the top of the precision air flotation bracket 501.

[0059] like Figure 6 As shown, in an embodiment of this utility model, the lifting and feeding roller assembly 7 includes a lifting mechanism 701. In this embodiment, the lifting mechanism 701 can be a lifting cylinder or a lifting motor. The lifting mechanism 701 is fixed on the marble platform 3. A roller bracket 702 is fixedly mounted on the output shaft of the lifting mechanism 701. Multiple rollers 703 are rotatably mounted on the roller bracket 702. The multiple rollers 703 are arranged parallel to each other and spaced apart. Multiple movable rollers 704 are fixedly mounted on each roller 703 at intervals. Each movable roller 704 is located vertically below the gap between two adjacent air-floating platforms 402. Furthermore, a synchronous lifter 705 is fixedly mounted on the marble platform 3. The synchronous lifter 705 is fixedly connected to the bottom of the roller bracket 702. The synchronous lifter 705 synchronously drives the roller bracket 702 to rise and fall with the lifting mechanism 701, ensuring the stability of the roller bracket 702's rise and fall. The roller bracket 702 is provided with a driving component for driving the roller 703 to rotate axially. The driving component can be a magnetic wheel drive mechanism (existing technology in the art).

[0060] like Figure 7As shown, the panel detection assembly 8 includes a gantry 801, with both ends of the gantry 801 fixed on the frame 1. The gantry 801 is positioned vertically above the precision air flotation stage assembly 5, and its length direction is perpendicular to the moving direction of the adsorption and transfer mechanism 2. A detection camera 803 is mounted on the gantry 801 via a detection moving module 802. The detection camera 803 moves back and forth linearly along the length direction of the gantry 801 under the drive of the detection moving module 802. The gantry 801 and the detection moving module 802 on the gantry 801 are used to set up the detection camera 803, which facilitates the placement of the detection camera 803 above the precision air flotation stage assembly 5 and enables back-and-forth scanning of the panel.

[0061] like Figure 8 As shown, the frame 1 is equipped with a detection light source 804, which is arranged vertically opposite to the detection camera 803. The detection light source 804 is set in the frame 1 through a moving mechanism, so that the detection light source 804 can move with the detection camera 803, ensuring the accuracy of image acquisition during detection.

[0062] The detection camera 803 is located on the side of the gantry 801 away from the conveying air-bearing platform assembly 4, such as... Figure 9 As shown, the panel re-judgment assembly 9 includes a re-judgment moving mechanism 901 mounted on the gantry 801. A plurality of re-judgment cameras 902 are fixedly mounted on the moving end of the re-judgment moving mechanism 901. The plurality of re-judgment cameras 902 are located on the side of the gantry 801 facing the conveying air-float assembly 4. The re-judgment cameras 902 move back and forth linearly along the length direction of the gantry 801 under the drive of the re-judgment moving mechanism 901. The re-judgment cameras 902, which can move back and forth linearly on the gantry 801, can re-inspect the defect positions detected by the detection camera 803.

[0063] like Figure 10 As shown, the unloading roller assembly 6 includes a roller support plate 601, which is fixed on the frame 1. A plurality of unloading brackets 602 are evenly fixed on the roller support plate 601, and an unloading roller 603 is rotatably mounted on each unloading bracket 602. The unloading roller 603 supported by the unloading bracket 602 can support the panel after inspection, so that the unloading of the panel after inspection can be carried out by the robotic arm.

[0064] Working principle: When feeding, the lifting mechanism 701 drives the roller bracket 702 to rise, causing the top of the movable roller 704 to extend out of the gap between adjacent air-float platforms 402. The panel to be inspected on the conveyor belt is transported to the movable roller 704, which, driven by the drive component, moves the panel to be inspected to a set position. The lifting mechanism 701 drives the roller bracket 702 to fall, causing the panel to be inspected to land on the air-float platform 402. The alignment linear cylinders 1001 located on both sides of the panel to be inspected drive the alignment rollers 1002 to push the sides of the panel to be inspected, completing the alignment of the panel. Then, the air-float platform 402 is activated, and the adsorption seat 203 generates negative pressure through an external negative pressure pump to adsorb the bottom of both sides of the panel to be inspected. The pressing cylinder 1101 drives the pressing roller 1105 to rotate, and the panel to be inspected... The upper surfaces on both sides of the panel are pressed to prevent poor adsorption when the edges of the panel to be inspected are warped. The linear motion module 201 moves the panel to be inspected to the vertical position above the precision air-float assembly 5. The inspection camera 803 inspects the panel (it can be scanned in several steps, and the inspection camera 803 moves under the drive of the moving module 802). The processor connected to the inspection camera 803 uses image algorithm processing to locate the defect position of the panel to be inspected. Then, the re-inspection camera 902 re-inspects the panel and provides feedback on the re-inspection structure. After the inspection is completed, the linear motion module 201 moves the inspected panel to the vertical position above the unloading roller assembly 6. The air-float 402 stops generating air, and the pressing cylinder 1101 drives the pressing roller 1105 to flip upward. The panel falls onto the unloading roller 603 and is then adsorbed and unloaded by the robot arm.

[0065] This invention employs a marble platform 3 with an air vibration isolation system to effectively reduce the impact of machine vibration, achieving a vibration isolation level of VC-B, meeting the requirements for air flotation platform testing. It utilizes a conveyor air flotation platform assembly 4 and a precision air flotation platform assembly 5, with pressure and airflow regulated by a proportional valve to achieve frictionless conveying and testing, controlling runout within ±30µm to meet optical testing requirements. An optical camera and a limiting lens ensure sub-micron level precision, effectively identifying various minute defects while meeting the required testing time (TT). The algorithm processing also effectively filters out non-defect features, improving testing efficiency and accuracy. The panel re-judgment assembly 9 can effectively locate product defects based on machine movement and perform re-inspection; the re-inspection results are provided to humans for secondary comprehensive analysis and judgment.

[0066] In the description of this utility model, it should be understood that the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "inner", "outer", "circumferential", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the system or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0067] In the description of this utility model, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0068] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0069] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0070] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A large-size panel inspection device based on a precision air flotation platform, characterized in that, The system includes a frame (1), on both sides of which are adsorption and transfer mechanisms (2) for adsorbing the panel to be tested and moving the panel to be tested in a straight line; a marble platform (3) is fixed on the frame (1), the marble platform (3) is located between the two adsorption and transfer mechanisms (2), a conveying air flotation table assembly (4) and a precision air flotation table assembly (5) are arranged side by side on the marble platform (3), and a feeding roller assembly (6) is provided on the side of the precision air flotation table assembly (5) away from the conveying air flotation table assembly (4). The marble platform (3) is provided with a lifting and feeding roller assembly (7), which is located below the conveying air-float assembly (4). The lifting and feeding roller assembly (7) can move upward in the vertical direction so that its top extends out of the conveying air-float assembly (4). The precision air-float assembly (5) is provided with a panel detection assembly (8) and a panel re-judgment assembly (9) above it. The panel re-judgment assembly (9) is located on the side of the panel detection assembly (8) away from the conveying air-float assembly (4).

2. The large-size panel inspection equipment based on a precision air flotation platform according to claim 1, characterized in that, The adsorption and transfer mechanism (2) includes a linear motion module (201) fixed on the frame (1). A moving seat (202) is fixedly provided on the output end of the linear motion module (201). An adsorption seat (203) is fixedly provided on the side wall of the moving seat (202) facing the marble platform (3). An adsorption chamber for communicating with a pneumatic component is provided inside the adsorption seat (203). An adsorption hole communicating with the adsorption chamber is provided on the top of the adsorption seat (203).

3. The large-size panel inspection equipment based on a precision air flotation platform according to claim 2, characterized in that, The movable base (202) is provided with a panel alignment mechanism (10).

4. The large-size panel inspection equipment based on a precision air flotation platform according to claim 2, characterized in that, The movable base (202) is provided with a panel side pressing mechanism (11).

5. The large-size panel inspection device based on a precision air flotation platform according to claim 4, characterized in that, The panel side pressing mechanism (11) includes multiple pressing cylinders (1101), which are fixedly mounted on the movable base (202). The multiple pressing cylinders (1101) are spaced apart along the length of the linear moving module (201). A pressing support frame (1102) is fixedly mounted on the side of the pressing cylinder (1101) facing the marble platform (3). The pressing support frame (1102) is located away from the pressing cylinder. One end of the cylinder (1101) is hinged to the middle of the pressing connecting frame (1103) via a horizontally arranged rotating shaft (1104). One end of the pressing connecting frame (1103) is hinged to the output shaft of the pressing cylinder (1101). The other end of the pressing connecting frame (1103) is rotatably provided with a pressing roller (1105). The extension and retraction of the pressing cylinder (1101) drives the pressing roller (1105) to rotate around the rotating shaft (1104) as the axis.

6. The large-size panel inspection equipment based on a precision air flotation platform according to claim 1, characterized in that, The conveying air flotation platform assembly (4) includes an air flotation platform mounting bracket (401) and a plurality of elongated air flotation platforms (402). The plurality of air flotation platform mounting brackets (401) are fixedly installed on the marble platform (3), and the plurality of air flotation platforms (402) are fixedly installed on the top of the air flotation platform mounting brackets (401). The length direction of the air flotation platform (402) is parallel to the moving direction of the adsorption transfer mechanism (2). The plurality of air flotation platforms (402) are spaced apart along the direction perpendicular to the moving direction of the adsorption transfer mechanism (2). The air flotation platforms (402) are connected to an external air source through pipes.

7. The large-size panel inspection device based on a precision air flotation platform according to claim 6, characterized in that, The lifting and feeding roller assembly (7) includes a lifting mechanism (701), which is fixed on the marble platform (3). A roller bracket (702) is fixed on the output shaft of the lifting mechanism (701). Multiple rollers (703) are rotatably mounted on the roller bracket (702). The multiple rollers (703) are arranged parallel to each other and spaced apart. Multiple movable rollers (704) are fixedly mounted on each roller (703) at intervals. Each movable roller (704) is arranged vertically below the gap between two adjacent air-floating platforms (402).

8. A large-size panel inspection device based on a precision air flotation platform according to any one of claims 1 to 7, characterized in that, The panel detection assembly (8) includes a gantry (801), with both ends of the gantry (801) fixed on the frame (1). The gantry (801) is located vertically above the precision air flotation stage assembly (5). The length direction of the gantry (801) is perpendicular to the moving direction of the adsorption transfer mechanism (2). A detection camera (803) is mounted on the gantry (801) via a detection moving module (802). The detection camera (803) moves back and forth linearly along the length direction of the gantry (801) under the drive of the detection moving module (802).

9. A large-size panel inspection device based on a precision air flotation platform according to claim 8, characterized in that, The detection camera (803) is located on the side of the gantry (801) away from the conveying air-bearing platform assembly (4). The panel re-judgment assembly (9) includes a re-judgment moving mechanism (901) mounted on the gantry (801). Multiple re-judgment cameras (902) are fixedly mounted on the moving end of the re-judgment moving mechanism (901). The multiple re-judgment cameras (902) are located on the side of the gantry (801) facing the conveying air-bearing platform assembly (4). The re-judgment cameras (902) move back and forth in a straight line along the length direction of the gantry (801) under the drive of the re-judgment moving mechanism (901).

10. A large-size panel inspection device based on a precision air flotation platform according to any one of claims 1 to 7, characterized in that, The feeding roller assembly (6) includes a roller support plate (601), which is fixed on the frame (1). A plurality of feeding brackets (602) are uniformly fixed on the roller support plate (601), and each feeding bracket (602) is rotatably provided with a feeding roller (603).

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