Adjusting mechanism for target material polishing

Abstract

The utility model discloses an adjusting mechanism for target material polishing, and relates to the technical field of target material polishing, the adjusting mechanism comprises an assembling frame, a clamping driving piece, an overturning assembly and two groups of clamping assemblies, the front end of the assembling frame is provided with the two groups of clamping assemblies in a bilateral symmetry manner; a clamping driving part used for driving the clamping assembly to conduct clamping and loosening operation is installed in the middle of the clamping assembly, an overturning assembly used for driving the clamping driving part to rotate is installed at the rear end of the clamping driving part, the clamping driving part comprises a driving base, an electric cylinder is installed in the driving base, the electric cylinder comprises a telescopic rod, and the telescopic rod is fixedly connected with the clamping assembly. And an assembling head is mounted at the end of the telescopic rod. The problems that in the using process of an existing target material polishing device, clamping and overturning need to be conducted through an overturning assembly, the clamping and overturning device is of a hand wheel rotating type, time and labor are consumed in the rotating process, a target material needs to be manually lifted to the clamping position before clamping, and overall operation is inconvenient are solved.

Description

Technical Field

[0001] This utility model relates to the field of target polishing technology, specifically to an adjustment mechanism for target polishing. Background Technology

[0002] Sputtering targets are key materials used in physical vapor deposition processes (such as magnetron sputtering and multi-arc ion plating). Targeted by high-energy particles (such as ions or lasers), they form functional thin films on a substrate through sputtering. Active metal targets, due to long-term exposure to the atmosphere, are prone to oxide scale formation on their surfaces. This oxide scale is difficult to remove during sputtering and therefore requires polishing before mounting.

[0003] Announcement No.: CN218312764U, entitled "A Target Polishing Mechanism," includes a work box, a target, a transmission assembly, a grinding assembly, and a flipping assembly. The transmission assembly is located inside the work box, the grinding assembly is located at the bottom of the transmission assembly, and the flipping assembly is located inside the work box and above the grinding assembly. The transmission assembly is used to move the grinding assembly. By driving the transmission assembly to move the grinding assembly, multiple positions of the target can be ground simultaneously. Then, the flipping assembly can be manually rotated to clamp and grind the other side of the target. This avoids burns to the operator from holding the target and flipping it, and also avoids manual operation with pliers, preventing the target from slipping during flipping. This further improves the efficiency of target grinding, increases practicality, and is beneficial for practical application and operation.

[0004] The existing target polishing device mentioned above requires clamping and flipping through a flipping component during use. This clamping and flipping device is a handwheel type, which is time-consuming and labor-intensive to rotate. In addition, before clamping, the target needs to be manually lifted to the clamping position, making the overall operation inconvenient. Therefore, it does not meet the current needs. In response, an adjustment mechanism for target polishing is proposed. Utility Model Content

[0005] The purpose of this utility model is to provide an adjustment mechanism for target polishing, so as to solve the problem that the existing target polishing device mentioned in the background art needs to be clamped and flipped by a flipping component during use. This clamping and flipping device is a handwheel type, which is time-consuming and labor-intensive to rotate. In addition, before clamping, the target needs to be manually lifted to the clamping position, which is inconvenient to operate.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an adjustment mechanism for target polishing, comprising: an assembly frame, a clamping drive, a flipping assembly, and a clamping assembly. Two sets of clamping assemblies are symmetrically installed on the front end of the assembly frame. A clamping drive for driving the clamping assembly to perform clamping and releasing operations is installed at the middle position of the clamping assembly. A flipping assembly for driving the clamping drive to rotate is installed at the rear end of the clamping drive.

[0007] Preferably, the clamping drive component includes a drive base, an electric cylinder is installed inside the drive base, the electric cylinder includes a telescopic rod, and an assembly head is installed at the end of the telescopic rod.

[0008] Preferably, a mesh cover is bolted to the front end of the drive seat, and the telescopic rod moves through the central through hole of the mesh cover.

[0009] Preferably, the clamping assembly includes brackets mounted on both sides of the motor base, one end of the bracket is fitted with a limiting sleeve, and a sliding sleeve rod is slidably mounted inside the limiting sleeve.

[0010] Preferably, a connecting rod is installed between the sliding sleeve and the assembly head, and both ends of the connecting rod are connected to the sliding sleeve and the assembly head respectively through a rotating shaft.

[0011] Preferably, a clamp is installed at the end of the sliding sleeve, and two limiting blocks are provided on the inner side wall of the clamp.

[0012] Preferably, a motor mount is installed at the rear end of the assembly frame, and the flipping assembly includes a flipping motor mounted on the motor mount. A rotating platform is installed at the output end of the flipping motor, and the rotating platform is connected to the drive seat by bolts.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] (1) In this utility model, the telescopic rod is driven by an electric cylinder to extend and retract. During the extension and retraction, the telescopic rod moves through the central through hole of the mesh cover. When it extends forward, the sliding sleeves on both sides slide forward in the limiting sleeve through the connection of the connecting rod and the rotating shaft, so that the clamps on both sides come together and clamp the target material placed between the clamps. During the clamping process, the limiting clamp can restrict the target material. Combined with the pressure applied on both sides, the target material is more stable during the polishing process. After polishing, the electric cylinder drives the telescopic rod to retract inward, so that the connecting rod and the rotating shaft change accordingly. The sliding sleeve moves backward in the limiting sleeve, so that the clamps move away from each other and the target material is no longer restricted. The above-mentioned clamping adjustment device can quickly perform clamping and separation operations during the polishing process of the target material. The entire clamping process is simple to operate and more stable. It solves the problem that the existing method of manually lifting the target material to the clamping position before clamping is inconvenient.

[0015] (2) In this utility model, after the clamping drive component drives the clamping assembly to clamp the target material, the rotating table can be driven to rotate by the rotating motor at the rotating assembly, thereby driving the clamping drive component, clamping assembly and target material in front to rotate, realizing the replacement of the polished surface of the target material, improving the flexibility and functionality of the device, and solving the problem that the existing clamping and rotating device is a handwheel type, which is time-consuming and labor-intensive to rotate. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the clamping drive component of this utility model;

[0018] Figure 3 This is a schematic diagram of the clamping component structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the flipping component structure of this utility model;

[0020] In the diagram: 1. Assembly frame; 101. Motor base; 2. Clamping drive component; 201. Drive base; 202. Mesh cover; 203. Electric cylinder; 204. Telescopic rod; 205. Assembly head; 3. Tilting assembly; 301. Tilting motor; 302. Rotating table; 4. Clamping assembly; 401. Bracket; 402. Limiting sleeve; 403. Sliding sleeve; 404. Connecting rod; 405. Rotating shaft; 406. Chuck; 407. Limiting clamp block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1 , Figure 2 , Figure 3 This utility model provides an embodiment of an adjustment mechanism for target polishing, comprising: an assembly frame 1, a clamping drive component 2, a flipping component 3, and a clamping component 4. Two sets of clamping components 4 are symmetrically installed on the front end of the assembly frame 1. A clamping drive component 2 for driving the clamping components 4 to perform clamping and releasing operations is installed at the middle position of the clamping components 4. A flipping component 3 for driving the rotation of the clamping drive component 2 is installed at the rear end of the clamping drive component 2. The clamping drive component 2 includes a drive base 201, an electric cylinder 203 is installed inside the drive base 201, the electric cylinder 203 includes a telescopic rod 204, and an assembly head 205 is installed at the end of the telescopic rod 204. The clamping component 4 includes brackets installed on both sides of the motor base 101. 401. A limiting sleeve 402 is installed at one end of the bracket 401. A sliding sleeve rod 403 is slidably installed inside the limiting sleeve 402. A connecting rod 404 is installed between the sliding sleeve rod 403 and the assembly head 205. Both ends of the connecting rod 404 are connected to the sliding sleeve rod 403 and the assembly head 205 respectively through a rotating shaft 405. A clamp 406 is installed at the end of the sliding sleeve rod 403. Two limiting clamps 407 are provided on the inner side wall of the clamp 406. A mesh cover 202 is installed at the front end of the drive seat 201 by bolts. The mesh cover 202 is set to block impurities. The aperture of the mesh cover 202 can be adjusted according to the needs. A through hole for the telescopic rod 204 to move is opened in the middle.

[0023] The telescopic rod 204 is extended and retracted by the electric cylinder 203. During this extension and retraction, the telescopic rod 204 moves through the central through hole of the mesh cover 202. When extending forward, the connecting rod 404 and the rotating shaft 405 connect the two sliding sleeves 403, causing them to slide forward within the limiting sleeve 402. This brings the clamps 406 on both sides together, clamping and limiting the target material placed between the clamps 406. During clamping, the limiting clamp 407 restricts the target material. The clamping force applied from both sides makes the target material more stable during the polishing process. After polishing, the electric cylinder 203 drives the telescopic rod 204 to retract inward, causing corresponding changes at the connecting rod 404 and the rotating shaft 405. The sliding sleeve rod 403 moves backward within the limiting sleeve 402, causing the chucks 406 to move away from each other, so that the target material is no longer restricted. The above-mentioned clamping and adjustment device can quickly perform clamping and separation operations during the polishing process of the target material. The entire clamping process is simple to operate and more stable.

[0024] Please see Figure 1 , Figure 4 The rear end of the assembly frame 1 is equipped with a motor base 101. The flipping assembly 3 includes a flipping motor 301 mounted on the motor base 101. A rotating table 302 is mounted on the output end of the flipping motor 301. The rotating table 302 is connected to the drive base 201 by bolts.

[0025] After the clamping drive 2 drives the clamping assembly 4 to clamp the target material, the rotating table 302 can be rotated by the rotating motor 301 at the rotating assembly 3, thereby driving the clamping drive 2, the clamping assembly 4 and the target material to rotate, realizing the replacement of the polished surface of the target material, and improving the flexibility and functionality of the device.

[0026] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An adjustment mechanism for polishing a target material, comprising an assembly frame (1), a clamping drive component (2), a flipping assembly (3), and a clamping assembly (4), characterized in that: Two sets of clamping components (4) are symmetrically installed on the front end of the assembly frame (1). A clamping drive (2) for driving the clamping component (4) to perform clamping and releasing operations is installed at the middle position of the clamping component (4). A flipping component (3) for driving its rotation is installed at the rear end of the clamping drive (2). The clamping drive (2) includes a drive base (201), an electric cylinder (203) is installed in the drive base (201), the electric cylinder (203) includes a telescopic rod (204), and an assembly head (205) is installed at the end of the telescopic rod (204). The clamping assembly (4) includes brackets (401) installed on both sides of the motor base (101), a limiting sleeve (402) is installed at one end of the bracket (401), and a sliding sleeve rod (403) is slidably installed inside the limiting sleeve (402). A connecting rod (404) is installed between the sliding sleeve (403) and the assembly head (205). Both ends of the connecting rod (404) are connected to the sliding sleeve (403) and the assembly head (205) respectively through a rotating shaft (405).

2. The target polishing adjustment mechanism according to claim 1, characterized in that: The front end of the drive seat (201) is bolted with a mesh cover (202), and the telescopic rod (204) moves through the central through hole of the mesh cover (202).

3. The target polishing adjustment mechanism according to claim 2, characterized in that: A chuck (406) is installed at the end of the sliding sleeve (403), and two limiting blocks (407) are provided on the inner side wall of the chuck (406).

4. The target polishing adjustment mechanism according to claim 3, characterized in that: The assembly frame (1) has a motor base (101) installed at its rear end. The flipping assembly (3) includes a flipping motor (301) installed on the motor base (101). A rotating table (302) is installed at the output end of the flipping motor (301). The rotating table (302) is connected to the drive base (201) by bolts.

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