Tubular ALD equipment
By designing the relative motion between the gas equalization box and the inner cavity in the tubular ALD equipment, the problem of reaction gas escape caused by the gap between the gas equalization plate and the carrier is solved, achieving higher gas utilization and lower dust generation, and extending the equipment maintenance cycle.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NA SHE ZHI NENG ZHUANG BEI (JIANG SU) YOU XIAN GONG SI
- Filing Date
- 2025-04-09
- Publication Date
- 2026-05-15
AI Technical Summary
In existing tubular ALD equipment, the gap between the gas distribution plate and the carrier causes the reaction gas to escape, resulting in waste of precursors and dust generation, which affects the equipment's uptime and increases operating costs.
By achieving relative movement between the gas equalization box and the inner cavity, and utilizing a radial motion mechanism and a sealed connection design, the escape of reactive gases is reduced, gas utilization is improved, and dust generation is reduced.
To minimize the escape of reactive gases, improve gas utilization, reduce dust generation, and extend the maintenance cycle of the chamber and vacuum system.
Smart Images
Figure CN224243203U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of chemical vapor deposition technology, specifically to a tubular ALD device. Background Technology
[0002] Currently, the mainstream time-based ALD (Alternating Current Display) chambers on the market are all double-layered tubular chambers. The outer chamber is a vacuum chamber, subjected to atmospheric pressure, while the inner chamber is a process chamber for processing the workpiece (the carrier that holds the silicon wafer). A heating element is located between the inner and outer chambers to heat the carrier.
[0003] Currently, the mainstream tubular ALD equipment on the market uses a soft-landing feeding method, that is, the carrier enters and exits the cavity by moving along the axial and radial directions of the cavity. In order to ensure that the feeding line of the equipment does not interfere with the carrier, the gas distribution plate / spray plate of the mainstream equipment is fixedly connected and there is a certain gap between it and the carrier in the cavity during the process. Alternatively, the spray plate is located at the opening of the process cavity and is a certain distance away from the front end of the carrier along the axial direction of the cavity; or the gas distribution plate is located above the carrier in the cavity and is a certain distance away from the upper end of the carrier along the mirror image of the cavity. This distance often causes the sprayed gas to escape outside the carrier in the process cavity, resulting in the waste of precursors and relatively high operating costs for customers. It can also cause the "powder discharge" phenomenon in the process cavity, requiring regular maintenance to ensure heating efficiency and avoid the adverse effects of dust on the workpiece (silicon wafer / glass sheet in the carrier), affecting the equipment's uptime. Utility Model Content
[0004] In view of this, this application provides a tubular ALD device, which achieves relative movement between the gas distribution box and the inner cavity without damaging the relatively independent seal between the inner and outer cavities through structural design, thereby minimizing the escape of reaction gases, improving gas utilization, reducing dust generation efficiency, and extending the maintenance cycle of the cavity and vacuum system.
[0005] To achieve the above objectives, this application provides the following technical solution:
[0006] A tubular ALD device, comprising:
[0007] The outer tube and the inner tube are provided. The outer cavity formed between the outer tube and the inner tube is a vacuum cavity, and the inner cavity formed within the inner tube is a process cavity. The outer cavity and the inner cavity are isolated from each other. A first through hole is provided on the inner tube, and a second through hole is provided on the outer tube.
[0008] A sealing cap is provided on the second through hole, and a third through hole is provided on the sealing cap;
[0009] A radial motion mechanism is disposed on the outer periphery of the outer tube.
[0010] An air distribution box is disposed within the inner cavity;
[0011] A connecting shaft is provided, the upper end of which is connected to the radial motion mechanism; the lower end of which passes through the third through hole, the second through hole and the first through hole in sequence and is connected to the gas equalization box; the connecting shaft can move along the axial direction of the connecting shaft under the drive of the radial motion mechanism and drive the gas equalization box to move radially along the tubular ALD device.
[0012] An inner and outer cavity connecting tube is sleeved on the connecting shaft. The lower end of the inner and outer cavity connecting tube communicates with and is sealed to the first through hole, and the inner and outer cavity connecting tube is sealed to the sealing cover.
[0013] A single-sided vacuum bellows is sleeved on the connecting shaft. The upper end of the single-sided vacuum bellows is fixedly and sealed to the connecting shaft, and the lower end of the single-sided vacuum bellows is sealed to the inner and outer cavity connecting pipe.
[0014] Optionally, the upper end of the inner and outer cavity connecting pipe is provided with an upper connecting flange, the lower end of the inner and outer cavity connecting pipe is provided with a lower connecting flange, and the lower end of the single-sided vacuum bellows is provided with a single-sided connecting flange.
[0015] Optionally, the lower connecting flange of the inner and outer cavity connecting pipe is sealed to the end face of the first through hole, and the upper connecting flange of the inner and outer cavity connecting pipe is sealed to the lower end face of the sealing cover.
[0016] Optionally, the single-sided connecting flange of the single-sided vacuum bellows is sealed to the upper end face of the sealing cover.
[0017] Optionally, the connecting pipe between the inner and outer cavities is a corrugated pipe.
[0018] Optionally, the lower end face of the sealing cover is provided with a groove to accommodate the upper connecting flange.
[0019] Optionally, the lower connecting flange of the inner and outer cavity connecting pipe is sealed to the end face of the first through hole, and the outer side wall of the inner and outer cavity connecting pipe abuts against the inner side wall of the third through hole of the sealing cover and is sealed to the sealing cover.
[0020] Optionally, a sealing ring is provided between the outer wall of the inner and outer cavity connecting tube and the inner wall of the third through hole, and a pressure plate is fitted on the inner and outer cavity connecting tube, the pressure plate pressing the sealing ring between the sealing cover and the inner and outer cavity connecting tube.
[0021] Optionally, the upper connecting flange of the inner and outer cavity connecting pipe is sealed to the single-sided connecting flange of the single-sided vacuum bellows.
[0022] Optionally, the radial motion mechanism includes a drive device, a mounting frame, a linear guide assembly, a linear guide mounting plate, and a fixed bracket. The fixed bracket is fixedly disposed on the outer periphery of the outer tube. The linear guide assembly is connected to the fixed bracket through the linear guide mounting plate and can slide relative to the linear guide mounting plate under the drive of the drive device. The connecting shaft is connected to the linear guide assembly through the mounting frame.
[0023] The tubular ALD device provided in this application achieves relative movement between the gas distribution box and the inner cavity without damaging the relatively independent seal between the inner and outer cavities through structural design. By moving the gas distribution box and fitting it with the carrier, the escape of reactive gases can be minimized, the gas utilization rate can be improved and the dust generation efficiency can be reduced, thereby extending the maintenance cycle of the cavity and vacuum system. Attached Figure Description
[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0025] Figure 1 This is a schematic diagram of one embodiment of the tubular ALD device of this application.
[0026] Figure 2 for Figure 1 Schematic diagram of the AA section.
[0027] Figure 3 for Figure 2 Enlarged diagram of the area within the Chinese square frame.
[0028] Figure 4 This is a schematic diagram of Embodiment 2 of this application.
[0029] Figure 5 for Figure 4 Enlarged image within the circle.
[0030] exist Figures 1-5 middle:
[0031] 1. Outer tube; 11. Outer cavity; 2. Inner tube; 21. Inner cavity; 31. Gas equalization fixing sheet metal; 32. Gas equalization box; 4. Inner and outer cavity connecting pipe; 41. Upper connecting flange; 42. Lower connecting flange; 5. Sealing cover; 51. Pressure plate; 52. Sealing ring; 6. Connecting shaft; 61. Single-sided vacuum bellows; 62. Single-sided connecting flange; 7. Radial motion mechanism; 71. Mounting frame; 72. Linear guide assembly; 73. Linear guide mounting plate; 74. Fixed bracket. Detailed Implementation
[0032] This application provides a tubular ALD device, which achieves relative movement between the gas distribution box and the inner cavity without damaging the relatively independent seal between the inner and outer cavities through structural design. This minimizes the escape of reactive gases, improves gas utilization, reduces dust generation efficiency, and extends the maintenance cycle of the cavity and vacuum system.
[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0034] like Figures 1-3 As shown, the tubular ALD device provided in this application includes:
[0035] The outer tube 1 and the inner tube 2 are connected. The outer cavity 11 formed between the outer tube 1 and the inner tube 2 is a vacuum cavity to withstand atmospheric pressure. The inner cavity 21 formed in the inner tube 2 is a process cavity to withstand the pressure difference between the inner and outer cavities 11. The outer cavity 11 and the inner cavity 21 are isolated from each other. The inner tube 2 is provided with a first through hole, and the outer tube 1 is provided with a second through hole.
[0036] A sealing cover 5 is provided on the second through hole of the outer cavity 11, and a third through hole is provided on the sealing cover 5.
[0037] Radial motion mechanism 7 is located on the outer periphery of the outer tube 1;
[0038] An air distribution box 32 is disposed inside the inner cavity 21;
[0039] The connecting shaft 6 is connected to the radial motion mechanism 7 at its upper end; the lower end of the connecting shaft 6 passes through the third through hole, the second through hole and the first through hole in sequence and is connected to the air distribution box 32 through the air distribution fixing sheet metal 31; in this way, the connecting shaft 6 can move along the axial direction of the connecting shaft 6 under the drive of the radial motion mechanism 7 and drive the air distribution box 32 to move radially along the tubular ALD device.
[0040] The inner and outer cavity connecting pipe 4 is sleeved on the connecting shaft 6. The lower end of the inner and outer cavity connecting pipe 4 is connected to the first through hole and sealed. The inner and outer cavity connecting pipe 4 is also sealed to the sealing cover 5, thereby isolating the outer cavity 11 from the inner cavity 21 and the atmosphere, and achieving independent sealing of the outer cavity 11. The sealing connection in this application includes, but is not limited to, common CF flange seals, O-ring seals, KF and ISO flange seals, etc.
[0041] A single-sided vacuum bellows is sleeved on the connecting shaft 6. Specifically, the upper end of the single-sided vacuum bellows is fixedly and sealed to the lower end face of the connecting shaft 6, and the lower end of the single-sided vacuum bellows is directly or indirectly sealed to the inner and outer cavity connecting pipe 4, thereby isolating the inner cavity 21 from the atmosphere and achieving independent sealing of the inner cavity 21.
[0042] The tubular ALD device provided in this application achieves relative movement between the gas equalization box 32 and the inner cavity 21 without damaging the relatively independent seal between the inner and outer cavities 11 through structural design. By moving the gas equalization box 32 and fitting it with the carrier, the escape of reactive gas can be minimized, the gas utilization rate can be improved and the dust generation efficiency can be reduced, thereby extending the maintenance cycle of the cavity and vacuum system.
[0043] In a preferred embodiment, such as Figure 3 and Figure 4 As shown, an upper connecting flange 41 is provided at the upper end of the inner and outer cavity connecting pipe 4. Similarly, a lower connecting flange 42 is provided at the lower end of the inner and outer cavity connecting pipe 4. A single-sided connecting flange 62 is provided at the lower end of the single-sided vacuum bellows. Such flat connecting flanges with a large end face area can reduce the difficulty of connecting the inner and outer cavity connecting pipe 4 and the single-sided vacuum bellows during sealing connection and improve the degree of sealing connection.
[0044] In a preferred embodiment, such as Figure 3 As shown, the lower connecting flange 42 of the inner and outer cavity connecting pipe 4 is sealed to the end face of the first through hole, and the upper connecting flange 41 of the inner and outer cavity connecting pipe 4 is sealed to the lower end face of the sealing cover 5.
[0045] The upper connecting flange 41 and the lower connecting flange 42 of the inner and outer cavity connecting pipe 4 are respectively sealed to the lower end face of the sealing cover 5 and the end face of the first through hole, thereby achieving the isolation and sealing between the outer cavity 11 and the atmosphere, and the isolation and sealing between the outer cavity 11 and the inner cavity 21, so that the outer cavity 11 is kept in a vacuum state.
[0046] In a preferred embodiment, such as Figure 3 As shown, the single-sided connecting flange 62 of the single-sided vacuum bellows 61 is sealed to the upper end face of the sealing cover 5.
[0047] By sealing the upper end face of the sealing cover 5 with the single-sided vacuum bellows 61, the single-sided vacuum bellows 61 and the inner and outer cavity connecting pipe 4 are indirectly sealed, thereby achieving the isolation and sealing of the inner cavity 21 from the atmosphere.
[0048] In a preferred embodiment, in order to reduce the difficulty of connecting the inner and outer cavity connecting pipe 4 to the first through hole provided on the inner cavity 21 and the lower end face of the sealing cover 5 respectively, and to improve the error tolerance, the inner and outer cavity connecting pipe 4 is preferably set as a corrugated pipe.
[0049] In a preferred embodiment, such as Figure 3 As shown, the lower end face of the sealing cover 5 is provided with a groove to accommodate the upper connecting flange 41.
[0050] To facilitate the installation and positioning of the upper connecting flange 41 and the lower end face of the sealing cover 5 during sealing connection, an annular groove can be provided on the lower end face of the sealing cover 5. In this way, the upper end face of the upper connecting flange 41 can abut against the lower end face of the groove, and the outer periphery of the upper connecting flange 41 can abut against the inner side wall of the annular groove, thereby achieving positioning and installation.
[0051] Similarly, the upper surface of the sealing cover 5 can also be provided with a groove to accommodate the single-sided connecting flange 62.
[0052] In another embodiment, such as Figure 4 As shown, the lower connecting flange 42 of the inner and outer cavity connecting pipe 4 is also sealed to the end face of the first through hole. The difference from Embodiment 1 is that the outer side wall of the inner and outer cavity connecting pipe 4 abuts against the inner side wall of the third through hole of the sealing cover 5 and is sealed to the sealing cover 5.
[0053] In this embodiment, the outer wall of the inner and outer cavity connecting pipe 4 abuts against the inner wall of the third through hole to achieve a sealed connection between the inner and outer cavity connecting pipe 4 and the sealing cover 5, which can also achieve a sealed isolation between the outer cavity 11 and the inner cavity 21, and between the outer cavity 11 and the atmosphere.
[0054] Furthermore, such as Figure 4 and Figure 5 As shown, in order to enhance the sealing connection between the outer wall of the inner and outer cavity connecting pipe 4 and the inner wall of the third through hole, a sealing ring 52 is also provided between the outer wall of the inner and outer cavity connecting pipe 4 and the inner wall of the third through hole. A pressure plate 51 is sleeved on the inner and outer cavity connecting pipe 4, and the pressure plate 51 presses the sealing cover 5 between the sealing cover 5 and the inner and outer cavity connecting pipe 4.
[0055] Specifically, in order to increase the sealing degree, a sealing ring 52 is also provided between the inner wall of the third through hole of the sealing cover 5 and the outer wall of the inner and outer cavity connecting pipe 4. The diameter of the third through hole of the sealing cover 5 decreases from top to bottom. The lower part of the inner ring of the annular pressure plate 51 is connected to an insertion part. When the pressure plate 51 is pressed on the sealing cover 5, the insertion part can be inserted into the gap between the inner wall of the third through hole of the sealing cover 5 and the outer wall of the inner and outer cavity connecting pipe 4 and press the sealing ring 52 inward.
[0056] In a preferred embodiment, such as Figure 4 As shown, the upper connecting flange 41 of the inner and outer cavity connecting pipe 4 is sealed to the single-sided connecting flange 62 of the single-sided vacuum bellows 61.
[0057] In this embodiment, the inner cavity 21 is isolated from the atmosphere by directly connecting the upper connecting flange 41 of the inner and outer cavity connecting pipe 4 to the single-sided connecting flange 62 of the single-sided vacuum bellows 61.
[0058] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, the radial motion mechanism 7 includes a drive device, a mounting frame 71, a linear guide assembly 72, a linear guide mounting plate 73, and a fixed bracket 74. The drive device includes, but is not limited to, a cylinder, a lead screw, or a motor. The fixed bracket 74 is fixedly mounted on the outer periphery of the outer tube 1. The linear guide assembly 72 (including, but not limited to, a linear guide slider assembly) is connected to the fixed bracket 74 through the linear guide mounting plate 73. The linear guide assembly 72 can slide relative to the drive device. The connecting shaft 6 is connected to the linear guide assembly 72 through the mounting frame 71.
[0059] In this way, the linear guide assembly 72 can slide relative to each other under the drive of the drive device and can drive the mounting frame 71, the connecting shaft 6, the air distribution fixing sheet metal 31 and the air distribution box 32 to move along the ALD radial direction.
[0060] The steps for achieving the radial motion of the air distribution box 32 in this application are as follows:
[0061] 1. Under the action of the drive device, the linear guide assembly 72 drives the mounting frame 71 to move in the direction closer to the carrier;
[0062] 2. The mounting frame 71 moves downward, compressing the single-sided vacuum bellows 61, and at the same time driving the connecting shaft 6 inside it to move in the direction closer to the carrier, and driving the gas equalization fixing sheet metal 31 and the gas equalization box 32 connected to the gas equalization fixing sheet metal 31 (which can be bolted hard connection or gravity + slot connection to ensure quick replacement later).
[0063] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.
[0064] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the word “or” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0065] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled or recombined. These disassemblies or recombinations should be considered as equivalent solutions of this application.
[0066] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.
[0067] It should be understood that the qualifiers “first,” “second,” “third,” “fourth,” “fifth,” and “sixth” used in the description of the embodiments of this application are only used to more clearly illustrate the technical solutions and are not intended to limit the scope of protection of this application.
[0068] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.
Claims
1. A tubular ALD device, characterized in that, include: The outer tube and the inner tube are provided. The outer cavity formed between the outer tube and the inner tube is a vacuum cavity, and the inner cavity formed within the inner tube is a process cavity. The outer cavity and the inner cavity are isolated from each other. A first through hole is provided on the inner tube, and a second through hole is provided on the outer tube. A sealing cap is provided on the second through hole, and a third through hole is provided on the sealing cap; A radial motion mechanism is disposed on the outer periphery of the outer tube. An air distribution box is disposed within the inner cavity; A connecting shaft is provided, the upper end of which is connected to the radial motion mechanism; the lower end of which passes through the third through hole, the second through hole and the first through hole in sequence and is connected to the gas equalization box; the connecting shaft can move along the axial direction of the connecting shaft under the drive of the radial motion mechanism and drive the gas equalization box to move radially along the tubular ALD device. An inner and outer cavity connecting tube is sleeved on the connecting shaft. The lower end of the inner and outer cavity connecting tube communicates with and is sealed to the first through hole, and the inner and outer cavity connecting tube is sealed to the sealing cover. A single-sided vacuum bellows is sleeved on the connecting shaft. The upper end of the single-sided vacuum bellows is fixedly and sealed to the connecting shaft, and the lower end of the single-sided vacuum bellows is sealed to the inner and outer cavity connecting pipe.
2. The tubular ALD device according to claim 1, characterized in that, The upper end of the inner and outer cavity connecting pipe is provided with an upper connecting flange, the lower end of the inner and outer cavity connecting pipe is provided with a lower connecting flange, and the lower end of the single-sided vacuum bellows is provided with a single-sided connecting flange.
3. The tubular ALD device according to claim 2, characterized in that, The lower connecting flange of the inner and outer cavity connecting pipe is sealed to the end face of the first through hole, and the upper connecting flange of the inner and outer cavity connecting pipe is sealed to the lower end face of the sealing cover.
4. The tubular ALD device according to claim 3, characterized in that, The single-sided connecting flange of the single-sided vacuum bellows is sealed to the upper end face of the sealing cover.
5. The tubular ALD device according to claim 3, characterized in that, The connecting tube between the inner and outer cavities is a corrugated pipe.
6. The tubular ALD device according to claim 3, characterized in that, The lower end face of the sealing cover is provided with a groove to accommodate the upper connecting flange.
7. The tubular ALD device according to claim 2, characterized in that, The lower connecting flange of the inner and outer cavity connecting pipe is sealed to the end face of the first through hole, and the outer side wall of the inner and outer cavity connecting pipe abuts against the inner side wall of the third through hole and is sealed to the sealing cover.
8. The tubular ALD device according to claim 7, characterized in that, A sealing ring is provided between the outer wall of the inner and outer cavity connecting tube and the inner wall of the third through hole. A pressure plate is fitted on the inner and outer cavity connecting tube, and the pressure plate presses the sealing ring between the sealing cover and the inner and outer cavity connecting tube.
9. The tubular ALD device according to claim 8, characterized in that, The upper connecting flange of the inner and outer cavity connecting pipe is sealed to the single-sided connecting flange of the single-sided vacuum bellows.
10. The tubular ALD device according to claim 1, characterized in that, The radial motion mechanism includes a drive device, a mounting frame, a linear guide assembly, a linear guide mounting plate, and a fixed bracket. The fixed bracket is fixedly disposed on the outer periphery of the outer tube. The linear guide assembly is connected to the fixed bracket through the linear guide mounting plate and can slide relative to the linear guide mounting plate under the drive device. The connecting shaft is connected to the linear guide assembly through the mounting frame.