Indium phosphide single crystal growth furnace

Abstract

The utility model discloses an indium phosphide single crystal growth furnace, which belongs to the technical field of single crystal growth furnaces and comprises a base, a support frame erected outside the base, a furnace body fixedly connected to the surface of the base, a furnace door hinged to an opening of the furnace body and an observation window embedded in the surface of the furnace door. The machine frame is erected on the surface of the machine base, the driving frame is fixedly connected to the bottom of the machine frame, and a protection assembly is installed on the outer surface of the supporting frame; the protection assembly comprises a guide plate fixedly connected to the surface of the supporting frame. A guide block on the inner wall of the protection frame is slidably inserted into a guide groove, a bolt penetrates through a mounting hole and is fixed to the surface of a guide plate, the good isolation and mistaken touch prevention protection effect is achieved, and the stability in the production process is improved; according to the protection requirement, the protection frame can be pushed and pulled in the longitudinal position, the guide blocks slide relative to the guide grooves, after adjustment is completed, bolts are used for locking and fixing, and the application range is wide.

Description

Technical Field

[0001] This utility model relates to the field of single crystal growth furnace technology, and more specifically, to an indium phosphide single crystal growth furnace. Background Technology

[0002] Indium phosphide is an inorganic compound, a silvery-gray single crystal, extremely slightly soluble in inorganic acids, and primarily used as a semiconductor material in fiber optic communication technology. A single-crystal silicon growth furnace is a manufacturing device that produces single-crystal silicon using the Czochralski method. It mainly consists of three parts: the main unit, the heating power supply, and the computer control system.

[0003] A search revealed an indium phosphide high-pressure single crystal growth furnace with publication number CN213013163U. This furnace includes a furnace body, a cooling system, a heating system, and a constant pressure system. The furnace body comprises a cylinder, an upper end cover at the top, a lower end cover at the bottom, and a mounting frame on the cylinder. The constant pressure system includes an air inlet on the lower end cover and an air outlet on the upper end cover. The air inlet penetrates the lower end cover and connects to the interior of the cylinder. The air outlet includes an air outlet on the upper end cover, a three-way pipe with its first end connected to the air outlet, a pressure relief valve connected to the second end of the three-way pipe, and an exhaust pipe connected to the third end of the three-way pipe. The exhaust pipe is connected to external industrial waste gas recovery equipment. The pressure relief valve's relief port is connected to the outside air. The air outlet penetrates the upper end cover and connects to the interior of the cylinder. This furnace can improve the single crystal yield of indium phosphide and ensure the quality of indium phosphide single crystal growth.

[0004] For common indium phosphide single crystal growth furnaces, the external location does not have an isolation and protection structure. If workers in the production workshop accidentally touch it, it will directly affect the growth of indium phosphide single crystals by the Czochralski method, thereby reducing product quality. Therefore, we propose an indium phosphide single crystal growth furnace to solve the above-mentioned problems. Utility Model Content

[0005] 1. Technical problems to be solved

[0006] To address the problems existing in the prior art, the purpose of this utility model is to provide an indium phosphide single crystal growth furnace. A protective component is installed on the outer surface of the support frame. The protective frame is located outside the guide plate, and the guide block on the inner wall of the protective frame is slidably inserted into the guide groove. Bolts are used to pass through the mounting holes and fix the furnace to the surface of the guide plate, providing excellent isolation and protection against accidental contact, and improving stability during production. Depending on the protection requirements, the protective frame can be pushed or pulled longitudinally, and the guide block slides relative to the guide groove. After adjustment, it can be locked in place with bolts, making it widely applicable.

[0007] 2. Technical Solution

[0008] To solve the above problems, the present invention adopts the following technical solution.

[0009] An indium phosphide single crystal growth furnace includes a base, a support frame mounted on the outside of the base, a furnace body fixedly connected to the surface of the base, a furnace door hinged to the opening of the furnace body, an observation window embedded in the surface of the furnace door, a frame mounted on the surface of the base, and a drive frame fixedly connected to the bottom of the frame. The support frame is equipped with protective components on its outer surface.

[0010] The protective assembly includes a guide plate fixedly connected to the surface of the support frame, and a guide groove formed on the surface of the guide plate;

[0011] The protective assembly also includes a protective frame fitted over the outside of the guide plate, guide blocks symmetrically installed on the inner wall of the protective frame, and a protective rubber ring adhered to the outside of the protective frame.

[0012] Preferably, a limiting pad A is bonded to one end of the guide plate, and a limiting pad B is bonded to the other end of the guide plate.

[0013] Preferably, the limiting pad A and the limiting pad B are both located inside the guide groove of the guide plate, and the limiting pad A and the limiting pad B are located on the upper and lower sides of the guide block.

[0014] Preferably, the outer wall of the protective frame is provided with a stepped groove, and the stepped groove of the protective frame is provided with a mounting hole.

[0015] Preferably, the mounting hole penetrates the guide block, and the end of the mounting hole extends into the guide groove.

[0016] Preferably, an insulation pad is adhered to the outside of the furnace body, and a heat insulation pad is fixedly connected to the outer surface of the insulation pad.

[0017] Preferably, the heat insulation pad extends to the end face of the heat insulation pad, and the top of the heat insulation pad is flush with the surface of the furnace body.

[0018] 3. Beneficial effects

[0019] Compared with existing technologies, the advantages of this utility model are:

[0020] (1) The support frame of this solution is equipped with protective components. The protective frame is located outside the guide plate. The guide block on the inner wall of the protective frame is slidably inserted into the guide groove. Bolts are used to pass through the mounting holes and fix it to the surface of the guide plate. It has a good isolation and anti-accidental collision protection effect and improves the stability in the production process. According to the protection needs, the protective frame can be pushed and pulled in the longitudinal position. The guide block slides relative to the guide groove. After the adjustment is completed, it can be locked and fixed with bolts. It has a wide range of applications.

[0021] (2) The furnace body of this scheme is bonded with a heat insulation pad on the outside. The outer surface of the heat insulation pad is fixedly connected with a heat insulation pad. The heat insulation pad is used in conjunction with the heat insulation pad to keep the working environment inside the furnace body warm. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0023] Figure 2 This is a schematic diagram of the furnace body and furnace door structure of this utility model;

[0024] Figure 3 This is a schematic diagram of the base and support frame structure of this utility model;

[0025] Figure 4 This is a schematic diagram of the protective frame structure of this utility model.

[0026] Explanation of the labels in the diagram:

[0027] 1. Base; 2. Support frame; 3. Furnace body; 4. Furnace door; 401. Observation window; 5. Drive frame; 6. Frame; 7. Guide plate; 8. Protective frame; 9. Insulation pad; 10. Heat insulation pad; 11. Guide groove; 12. Limiting pad A; 13. Limiting pad B; 14. Mounting hole; 15. Guide block; 16. Protective rubber ring. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0029] Example 1:

[0030] Please see Figure 1-4 An indium phosphide single crystal growth furnace includes a base 1, a support frame 2 mounted on the outside of the base 1, a furnace body 3 fixedly connected to the surface of the base 1, a furnace door 4 hinged to the opening of the furnace body 3, an observation window 401 embedded in the surface of the furnace door 4, a frame 6 mounted on the surface of the base 1, and a drive frame 5 fixedly connected to the bottom of the frame 6. The support frame 2 is equipped with protective components on its outer surface.

[0031] The protective components include a guide plate 7 fixedly connected to the surface of the support frame 2, and a guide groove 11 formed on the surface of the guide plate 7;

[0032] The protective assembly also includes a protective frame 8 fitted over the outside of the guide plate 7, guide blocks 15 symmetrically installed on the inner wall of the protective frame 8, and a protective rubber ring 16 bonded to the outside of the protective frame 8.

[0033] A limiting pad A12 is bonded to one end of the guide plate 7, and a limiting pad B13 is bonded to the other end of the guide plate 7. Both the limiting pad A12 and the limiting pad B13 are located inside the guide groove 11 of the guide plate 7. The limiting pad A12 and the limiting pad B13 are located on the upper and lower sides of the guide block 15. A stepped groove is provided on the outer wall of the protective frame 8. An installation hole 14 is provided at the stepped groove position of the protective frame 8. The installation hole 14 penetrates the guide block 15, and the end of the installation hole 14 extends into the guide groove 11.

[0034] It should be noted that the support frame 2 is equipped with protective components. The protective frame 8 is mounted on the outside of the guide plate 7. The guide block 15 on the inner wall of the protective frame 8 is slidably inserted into the guide groove 11. Bolts are used to pass through the mounting hole 14 and fix it to the surface of the guide plate 7, which has a good isolation and anti-accidental collision protection effect and improves the stability of the production process. According to the protection needs, the protective frame 8 can be pushed and pulled in the longitudinal position, and the guide block 15 slides relative to the guide groove 11. After the adjustment is completed, it can be locked and fixed with bolts. It has a wide range of applications.

[0035] See Figure 1-4 A heat insulation pad 9 is bonded to the outside of the furnace body 3. A heat insulation pad 10 is fixedly connected to the outer surface of the heat insulation pad 9. The heat insulation pad 10 extends to the end face of the heat insulation pad 9, and the top of the heat insulation pad 9 is flush with the surface of the furnace body 3.

[0036] It should be noted that the furnace body 3 is covered with an insulation pad 9, and the outer surface of the insulation pad 9 is fixedly connected with a heat insulation pad 10. The insulation pad 9 is used in conjunction with the heat insulation pad 10 to provide insulation for the working environment inside the furnace body 3.

[0037] In use: The support frame 2 is equipped with protective components. The protective frame 8 is mounted on the outside of the guide plate 7. The guide block 15 on the inner wall of the protective frame 8 is slidably inserted into the guide groove 11. Bolts are used to pass through the mounting hole 14 and fix it to the surface of the guide plate 7, which has a good isolation and anti-accidental collision protection effect and improves the stability of the production process. According to the protection needs, the protective frame 8 can be pushed and pulled in the longitudinal position, and the guide block 15 slides relative to the guide groove 11. After the adjustment is completed, it can be locked and fixed with bolts. It has a wide range of applications. The furnace body 3 is bonded with a heat insulation pad 9. The outer surface of the heat insulation pad 9 is fixedly connected with a heat insulation pad 10. The heat insulation pad 9 is used in conjunction with the heat insulation pad 10 to heat the working environment inside the furnace body 3.

[0038] The above description is merely a preferred embodiment of this utility model; however, the protection scope of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and its improved concept, should be included within the protection scope of this utility model.

Claims

1. An indium phosphide single crystal growth furnace, characterized in that, include: The device includes a base (1), a support frame (2) mounted on the outside of the base (1), a furnace body (3) fixedly connected to the surface of the base (1), a furnace door (4) hinged to the opening of the furnace body (3), an observation window (401) embedded in the surface of the furnace door (4), a frame (6) mounted on the surface of the base (1), and a drive frame (5) fixedly connected to the bottom of the frame (6), characterized in that: the outer surface of the support frame (2) is equipped with protective components; The protective assembly includes a guide plate (7) fixedly connected to the surface of the support frame (2), and a guide groove (11) formed on the surface of the guide plate (7). The protective assembly also includes a protective frame (8) fitted outside the guide plate (7), guide blocks (15) symmetrically installed on the inner wall of the protective frame (8), and a protective rubber ring (16) bonded to the outside of the protective frame (8).

2. The indium phosphide single crystal growth furnace according to claim 1, characterized in that: One end of the guide plate (7) is bonded with a limiting pad A (12), and the other end of the guide plate (7) is bonded with a limiting pad B (13).

3. The indium phosphide single crystal growth furnace according to claim 2, characterized in that: The limiting pads A (12) and B (13) are both located inside the guide groove (11) of the guide plate (7), and the limiting pads A (12) and B (13) are located on the upper and lower sides of the guide block (15).

4. The indium phosphide single crystal growth furnace according to claim 1, characterized in that: The outer wall of the protective frame (8) is provided with a stepped groove, and the stepped groove of the protective frame (8) is provided with an installation hole (14).

5. An indium phosphide single crystal growth furnace according to claim 4, characterized in that: The mounting hole (14) penetrates the guide block (15), and the end of the mounting hole (14) extends into the guide groove (11).

6. The indium phosphide single crystal growth furnace according to claim 1, characterized in that: The furnace body (3) is bonded to the outside with a heat insulation pad (9), and a heat insulation pad (10) is fixedly connected to the outer surface of the heat insulation pad (9).

7. An indium phosphide single crystal growth furnace according to claim 6, characterized in that: The heat insulation pad (10) extends to the end face of the heat insulation pad (9), and the top of the heat insulation pad (9) is flush with the surface of the furnace body (3).

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