Efficient nanoimprint device

Abstract

The utility model provides efficient nanoimprint equipment. The efficient nanoimprint equipment comprises a first conveying mechanism, a second conveying mechanism, a glue spraying mechanism and a feeding mechanism. The first conveying mechanism is arranged above the second conveying mechanism, has the functions of impressing, curing and demolding, and conveys the first conveying component. The glue spraying mechanism is arranged above the second conveying mechanism and is close to the feeding end of the second conveying mechanism. The feeding mechanism is used for placing a second conveying component at the feeding end of the second conveying mechanism, and the second conveying component conveyed by the second conveying mechanism is in contact with the first conveying component conveyed by the first conveying mechanism through glue sprayed by the glue spraying mechanism to achieve nanoimprint operation. The high-efficiency nanoimprint equipment provided by the utility model can realize sequential continuous operation and simultaneous operation of imprint, curing and demoulding in a diffraction optical waveguide nanoimprint process, improves the volume production rate of diffraction optical waveguide nanoimprint preparation, and adopts a spraying process to spray glue to improve the utilization rate of the glue.

Description

Technical Field

[0001] This invention belongs to the field of diffractive waveguide nanoimprint technology, specifically relating to a high-efficiency nanoimprint device. Background Technology

[0002] The existing methods for fabricating diffractive optical waveguides are generally as follows:

[0003] 1. Prepare an imprint master with a preset grating structure.

[0004] 2. The grating structure of the embossing master is transferred to the soft film substrate through a nanoimprinting process to obtain a soft film with an inverse grating structure.

[0005] Specifically, an imprinting adhesive is uniformly spin-coated onto an imprinting master, a soft film substrate is bonded to the imprinting master, and pressure is applied to fill the grating structure of the imprinting master with the imprinting adhesive, resulting in an inverse structure of the grating structure on the imprinting adhesive. The imprinting adhesive with the inverse structure of the grating structure is then cured and demolded using ultraviolet light, and transferred to the soft film substrate to obtain a soft film with the inverse structure of the grating structure.

[0006] 3. The inverse structure of the grating structure on the soft film is transferred onto the optical wafer using a nanoimprinting process to obtain an optical wafer with a grating structure, thereby obtaining a diffractive waveguide.

[0007] Specifically, a mold adhesive is spin-coated onto an optical wafer, and a soft film with an inverse grating structure is bonded to the mold adhesive on the optical wafer. Pressure is applied to fill the inverse grating structure of the soft film with the mold adhesive, thus obtaining a grating structure on the mold adhesive. Ultraviolet light is used for curing and demolding, separating the soft film with the inverse grating structure from the mold adhesive with the grating structure, resulting in an optical wafer with a grating structure, thereby obtaining a diffractive waveguide.

[0008] The existing nanoimprinting process for diffractive waveguides has the following problems:

[0009] 1. When using a spin coating process to apply adhesive, most of the adhesive is spun off during the spin coating process, resulting in low adhesive utilization.

[0010] 2. A nanoimprinting device needs to perform imprinting, curing and demolding operations in sequence, and imprinting, curing and demolding operations cannot be performed simultaneously, resulting in low mass production efficiency. Utility Model Content

[0011] In order to overcome the shortcomings of the existing technology, this utility model provides a high-efficiency nanoimprinting device.

[0012] This utility model is achieved through the following technical solution:

[0013] This utility model provides a high-efficiency nanoimprinting device, including a first conveying mechanism, a second conveying mechanism, an adhesive spraying mechanism, and a feeding mechanism;

[0014] The first conveying mechanism is located above the second conveying mechanism. The first conveying mechanism has pressing, curing and demolding functions. The first conveying mechanism is used to transport the first conveying component.

[0015] The feeding mechanism is located near the feeding end of the second conveying mechanism and is used to place the second conveying component onto the feeding end of the second conveying mechanism.

[0016] The glue spraying mechanism is located above the second conveying mechanism and close to the loading end of the second conveying mechanism;

[0017] The second transmission mechanism is used to transmit multiple second transmission components with interval settings;

[0018] The second conveying component, transported by the second conveying mechanism, is coated with adhesive by the adhesive spraying mechanism and then comes into contact with the first conveying component transported by the first conveying mechanism to achieve nanoimprinting.

[0019] Furthermore, the first conveying mechanism includes a support base, a conveying assembly, and a UV curing mechanism;

[0020] The conveying assembly includes a first conveying roller assembly, a second conveying roller assembly, and a third conveying roller assembly; the first conveying roller assembly is disposed at the top of the support base, and the second conveying roller assembly and the third conveying roller assembly are disposed at a distance from the bottom of the support base.

[0021] The second conveyor roller assembly is located near the glue spraying mechanism and has an imprinting function. The third conveyor roller assembly is located near the unloading end of the second conveying mechanism and has a demolding function.

[0022] The first conveyor roller assembly, the second conveyor roller assembly, and the third conveyor roller assembly constitute a first conveyor support, and a first conveyor component is sleeved on the outer wall of the first conveyor support.

[0023] The UV curing mechanism is located on the support base, between the second conveyor roller assembly and the third conveyor roller assembly.

[0024] Furthermore, the conveying assembly also includes a fourth conveying roller assembly and a fifth conveying roller assembly;

[0025] The fourth conveyor roller assembly is mounted on the support base. The fourth conveyor roller assembly is close to the glue spraying mechanism. The height of the fourth conveyor roller assembly is higher than that of the second conveyor roller assembly, and the height of the fourth conveyor roller assembly is lower than that of the first conveyor roller assembly.

[0026] The fifth conveyor roller assembly is mounted on the support base. The fifth conveyor roller assembly is close to the unloading end of the second conveying mechanism. The height of the fifth conveyor roller assembly is higher than that of the third conveyor roller assembly and lower than that of the first conveyor roller assembly.

[0027] The first conveyor roller assembly, the second conveyor roller assembly, the third conveyor roller assembly, the fourth conveyor roller assembly, and the fifth conveyor roller assembly constitute the first conveyor support.

[0028] Furthermore, the second conveying mechanism includes a sixth conveying roller assembly, a seventh conveying roller assembly, and a conveyor belt;

[0029] The sixth conveyor roller assembly and the seventh conveyor roller assembly are arranged at intervals, and the sixth conveyor roller assembly and the seventh conveyor roller assembly form a second conveyor support, and the conveyor belt is sleeved on the outer wall of the second conveyor support;

[0030] The conveyor belt is used to transport multiple second conveying components with intervals.

[0031] Furthermore, the transmission speeds of the first and second transmission mechanisms are equal.

[0032] Furthermore, the UV curing mechanism includes a mounting plate, a UV lamp, a control circuit, and a first controller;

[0033] The mounting plate is mounted on the support base, and the UV lamps are arranged in an array on the mounting plate;

[0034] One end of the control circuit is connected to the UV lamp, and the other end of the control circuit is connected to the first controller.

[0035] Furthermore, the first conveying mechanism also includes an imprint alignment monitoring component, which includes a camera and a second controller.

[0036] The camera is mounted on the support base and is located above a local area between the first conveying component and the second conveying roller assembly on the first conveying bracket.

[0037] The camera is connected to the second controller, and the camera captures images of the positioning marks for imprinting alignment set on the first conveying component;

[0038] The second controller is connected to the first conveying mechanism, the second conveying mechanism, the glue spraying mechanism, and the feeding mechanism.

[0039] Compared with the prior art, the technical solution of this utility model has the following beneficial effects:

[0040] This invention provides a high-efficiency nanoimprinting device, comprising a first conveying mechanism, a second conveying mechanism, an adhesive spraying mechanism, and a feeding mechanism. The first conveying mechanism is positioned above the second conveying mechanism and has imprinting, curing, and demolding functions; it is used to transport first conveying components. The adhesive spraying mechanism is positioned above the second conveying mechanism and close to its feeding end. The feeding mechanism, close to the feeding end of the second conveying mechanism, is used to place second conveying components onto the feeding end of the second conveying mechanism. The second conveying mechanism transports multiple second conveying components spaced apart. After being sprayed with adhesive by the adhesive spraying mechanism, the second conveying components contact the first conveying components transported by the first conveying mechanism to achieve the nanoimprinting operation. The high-efficiency nanoimprinting equipment provided by this utility model can, on the one hand, realize the sequential and continuous operation of imprinting, curing and demolding in the diffractive waveguide nanoimprinting process, and can also realize the simultaneous operation of imprinting, curing and demolding in the diffractive waveguide nanoimprinting process, thereby improving the mass production efficiency of diffractive waveguide nanoimprinting preparation. On the other hand, the use of spraying process to spray adhesive greatly improves the utilization rate of adhesive. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 A schematic diagram of the first overall structure of the high-efficiency nanoimprinting device provided by this utility model in operation;

[0043] Figure 2 A schematic diagram of the second overall structure of the high-efficiency nanoimprinting device provided by this utility model in operation;

[0044] Figure 3 A schematic diagram of a UV curing mechanism for example;

[0045] Figure 4 A partial structural diagram of a sample flexible membrane template;

[0046] Figure 5 This is a schematic diagram of the printing master as an example.

[0047] Among them, 1-first conveying mechanism, 1-1-support base, 1-2-UV curing mechanism, 1-2-1-mounting plate, 1-2-2-UV lamp, 1-3-first conveying roller assembly, 1-4-second conveying roller assembly, 1-5-third conveying roller assembly, 1-6-fourth conveying roller assembly, 1-7-fifth conveying roller assembly, 1-8-camera, 2-second conveying mechanism, 2-1-sixth conveying roller assembly, 2-2-seventh conveying roller assembly, 2-3-transmission belt, 3-adhesive spraying mechanism, 4-first conveying component, 5-second conveying component, 6-soft film template, 7-grating structure group, 8-grating structure, 9-imprinting master, 10-positioning mark. Detailed Implementation

[0048] The technical solution of this utility model will be clearly and completely described below with reference to its embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0049] In this document, the terms "first," "second," and other similar words are not intended to imply any order, quantity, or importance, but are merely used to distinguish different elements. The terms "one," "a," and other similar words are not intended to indicate the existence of only one of the stated things, but rather that the description refers only to one of the stated things, which may have one or more. The terms "comprising," "including," and other similar words are intended to indicate a logical relationship, not a spatial relationship. For example, "A includes B" means that logically B belongs to A, not that spatially B is located inside A. Furthermore, the meanings of the terms "comprising," "including," and other similar words should be considered open-ended, not closed. For example, "A includes B" means that B belongs to A, but B does not necessarily constitute all of A; A may also include other elements such as C, D, and E.

[0050] In this document, the terms "embodiment," "this embodiment," "preferred embodiment," and "one embodiment" do not imply that the description applies only to one specific embodiment, but rather that such description may also be applicable to one or more other embodiments. Those skilled in the art will understand that any description made herein relating to one embodiment can be substituted, combined, or otherwise incorporated with the descriptions in one or more other embodiments. Such substitutions, combinations, or other incorporations resulting in new embodiments are readily conceived by those skilled in the art and fall within the protection scope of this utility model.

[0051] In the context of this article, “multiple” means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0052] like Figure 1 As shown, this utility model provides a high-efficiency nanoimprinting device, including a first conveying mechanism 1, a second conveying mechanism 2, an adhesive spraying mechanism 3, and a feeding mechanism (not shown in the figure).

[0053] The first conveying mechanism 1 is located above the second conveying mechanism 2. The first conveying mechanism 1 has the functions of pressing, curing and demolding. The first conveying mechanism 1 is used to transport the first conveying component 4.

[0054] The glue spraying mechanism 3 is located above the second conveying mechanism 2 and close to the loading end of the second conveying mechanism 2.

[0055] The feeding mechanism is located near the feeding end of the second conveying mechanism and is used to place the second conveying component onto the feeding end of the second conveying mechanism.

[0056] The second transmission mechanism 2 is used for multiple second transmission components 5 for setting transmission intervals.

[0057] The transmission speeds of the first transmission mechanism 1 and the second transmission mechanism 2 are set to be equal. The second transmission component 5 transmitted by the second transmission mechanism 2 is coated with adhesive by the adhesive spraying mechanism 3 and then comes into contact with the first transmission component 4 transmitted by the first transmission mechanism 1 to achieve nanoimprinting.

[0058] For example, the above-mentioned glue spraying mechanism can use existing equipment. The glue spraying mechanism can change the glue dispensing amount, and at the same time, in conjunction with the transmission speed of the second conveying mechanism, it can control the glue spraying range and glue spraying thickness of the glue spraying mechanism on the second conveying component transmitted by the second conveying mechanism.

[0059] For example, the above-mentioned feeding mechanism can be achieved using an existing robotic arm.

[0060] For example, such as Figure 2 As shown, the first conveying mechanism includes a support base 1-1, a conveying component, and a UV curing mechanism 1-2.

[0061] The conveying assembly includes a first conveying roller assembly 1-3, a second conveying roller assembly 1-4, a third conveying roller assembly 1-5, a fourth conveying roller assembly 1-6, and a fifth conveying roller assembly 1-7.

[0062] A first conveyor roller assembly 1-3 is provided at the top of the support base 1-1, and a second conveyor roller assembly 1-4 and a third conveyor roller assembly 1-5 are provided at a distance from the bottom of the support base 1-1. The second conveyor roller assembly 1-4 is close to the glue spraying mechanism 3, and the third conveyor roller assembly 1-5 is close to the unloading end of the second conveying mechanism.

[0063] The fourth conveyor roller assembly 1-6 is located on the support base 1-1. The fourth conveyor roller assembly 1-6 is close to the glue spraying mechanism 3. The setting height of the fourth conveyor roller assembly 1-6 is higher than that of the second conveyor roller assembly 1-4, and the setting height of the fourth conveyor roller assembly 1-6 is lower than that of the first conveyor roller assembly 1-3.

[0064] The fifth conveyor roller assembly 1-7 is located on the support base 1-1. The fifth conveyor roller assembly 1-7 is close to the unloading end of the second conveying mechanism. The setting height of the fifth conveyor roller assembly 1-7 is higher than that of the third conveyor roller assembly 1-5, and lower than that of the first conveyor roller assembly 1-3.

[0065] The first conveying roller assembly 1-3, the second conveying roller assembly 1-4, the third conveying roller assembly 1-5, the fourth conveying roller assembly 1-6, and the fifth conveying roller assembly 1-7 constitute the first conveying support, and the first conveying component 4 is sleeved on the outer wall of the first conveying support.

[0066] For example, the first conveyor roller assembly includes a first lead screw motor and a first conveyor roller, with one end of the first conveyor roller connected to the first lead screw motor and the other end connected to a support base. The second conveyor roller assembly includes a second lead screw motor and a second conveyor roller, with one end of the second conveyor roller connected to the second lead screw motor and the other end connected to the support base. The third conveyor roller assembly includes a third lead screw motor and a third conveyor roller, with one end of the third conveyor roller connected to the third lead screw motor and the other end connected to the support base. The fourth conveyor roller assembly includes a fourth lead screw motor and a fourth conveyor roller, with one end of the fourth conveyor roller connected to the fourth lead screw motor and the other end connected to the support base. The fifth conveyor roller assembly includes a fifth lead screw motor and a fifth conveyor roller, with one end of the fifth conveyor roller connected to the fifth lead screw motor and the other end connected to the support base. The sixth conveyor roller assembly includes a sixth lead screw motor and a sixth conveyor roller, with one end of the sixth conveyor roller connected to the sixth lead screw motor and the other end connected to the support base. The seventh conveyor roller assembly includes a seventh lead screw motor and a seventh conveyor roller. One end of the seventh conveyor roller is connected to the seventh lead screw motor, and the other end of the seventh conveyor roller is connected to the support base.

[0067] The first conveyor roller assembly has a control function for the supporting tension formed by the first conveyor component on the outer wall of the entire first conveyor bracket; the second conveyor roller assembly has an imprinting function and can adjust the imprinting pressure; the third conveyor roller assembly has a demolding function and can adjust the demolding pressure; the fourth conveyor roller assembly has an imprinting angle control function; and the fifth conveyor roller assembly has a demolding angle control function.

[0068] The UV curing mechanism is mounted on the support base and is located between the second and third conveyor roller assemblies. Existing equipment can be used for the UV curing mechanism.

[0069] For example, such as Figure 3 As shown, the UV curing mechanism includes a mounting plate 1-2-1, UV lamps 1-2-2, a control circuit (not shown in the figure), and a first controller (not shown in the figure). The mounting plate is mounted on a support base via a first conveyor roller assembly. The UV lamps are arranged in an array on the mounting plate. One end of the control circuit is connected to the UV lamps, and the other end is connected to the first controller. The first controller can control the illumination range of the UV lamps within the mounting plate through the control circuit. In conjunction with the moving speed of the second conveyor mechanism, it can control the irradiation time of the UV lamps, thereby controlling the curing time of the imprinted structure on the second conveying component transported by the second conveyor mechanism.

[0070] In a preferred embodiment, the first conveying mechanism may further include an imprint alignment monitoring component, which includes cameras 1-8 and a second controller.

[0071] like Figure 2 As shown, the camera 1-8 is mounted on the support 1-1, and the camera 1-8 is located above the first conveying component 4, which is sleeved on the first conveying bracket, in a local area between the first conveying roller assembly 1-3 and the second conveying roller assembly 1-4.

[0072] The camera is connected to the second controller and captures images of the positioning marks on the first conveying component used for imprinting alignment. By capturing the positioning marks on the first conveying component and combining them with the transmission speed of the second conveying mechanism, the camera ensures that the second conveying component, after being sprayed with adhesive by the adhesive spraying equipment, contacts the first conveying component at a set position to achieve the imprinting operation.

[0073] For example, such as Figure 2 As shown, the second conveying mechanism includes a sixth conveyor roller assembly 2-1, a seventh conveyor roller assembly 2-2, and a conveyor belt 2-3.

[0074] The sixth conveyor roller assembly 2-1 and the seventh conveyor roller assembly 2-2 are arranged at intervals. The sixth conveyor roller assembly 2-1 and the seventh conveyor roller assembly 2-2 form the second conveyor support. The outer wall of the second conveyor support is fitted with a conveyor belt 2-3.

[0075] Conveyor belts 2-3 are used for multiple second conveying components 5 for setting transmission intervals.

[0076] For example, the sixth conveyor roller assembly includes a sixth lead screw motor and a sixth conveyor roller, with one end of the sixth conveyor roller connected to the sixth lead screw motor. The seventh conveyor roller assembly includes a seventh lead screw motor and a seventh conveyor roller, with one end of the seventh conveyor roller connected to the seventh lead screw motor. By controlling the rotational speed of the sixth and seventh conveyor rollers, the moving speed of the second conveying component is changed, thereby changing the printing speed of subsequent printing operations.

[0077] For the nanoimprint fabrication of diffractive waveguides, the first transport component can be a soft film template with multiple grating structure groups spaced apart, and the second transport component can be an optical wafer. Alternatively, the first transport component can be a blank soft film substrate, in which case the second transport component can be an imprinting master with grating structure groups. The grating structure groups mentioned here can consist of multiple grating structures, each including an input grating and an output grating.

[0078] Figure 4 The figure shows a partial structural diagram of the flexible film template. As shown, the flexible film template 6 has 5 grating structure groups 7 spaced apart. Each grating structure group consists of 12 grating structures 8. Two cross-shaped positioning marks 10 are set near each grating structure group. Figure 5 The diagram shows the structure of the printing master. As shown, the printing master 7 is equipped with a grating structure group, and two cross-shaped positioning marks 10 are set near the grating structure group.

[0079] The following example illustrates the nanoimprint fabrication process of a diffractive optical waveguide using the high-efficiency nanoimprint equipment provided by this invention:

[0080] 1. A blank soft film substrate is fitted onto the first conveying bracket of the first conveying mechanism.

[0081] 2. Start the first conveying mechanism to operate, and the soft film substrate moves in the conveying direction of the first conveying mechanism. Start the second conveying mechanism to operate, and control the second conveying mechanism to have the same conveying speed as the first conveying mechanism.

[0082] 3. The feeding mechanism performs the feeding operation of the printing master at the feeding position of the second conveying mechanism, so that multiple printing masters set at intervals move with the transmission direction of the second conveying mechanism.

[0083] When the first imprinting master moves to the bottom of the adhesive spraying mechanism, the adhesive spraying mechanism sprays imprinting adhesive onto the grating structure surface of the imprinting master.

[0084] When the first imprinting master moves to the bottom of the second conveyor roller assembly, the second conveyor roller presses down so that the current position of the soft film substrate comes into contact with the imprinting master with the imprinting adhesive sprayed on it. The imprinting angle is adjusted by the fourth conveyor roller so that the imprinting adhesive fills the transfer grating structure (the reverse structure of the grating structure of the imprinting master). At this time, the imprinting adhesive bonds the current position of the imprinting master and the soft film substrate.

[0085] When the first imprinting master moves to the bottom of the UV curing mechanism, since the transmission speeds of the first and second conveying mechanisms are equal, the imprinting master and the soft film substrate, bonded together by the imprinting adhesive, move together to the bottom of the UV curing mechanism. The first controller activates the UV lamp through the controller circuit, and the UV lamp shines downward to cure the imprinting adhesive.

[0086] When the first imprinting master moves below the third conveyor roller assembly, the imprinting master and the flexible film substrate, bonded together by the imprinting adhesive, move together to the third conveyor roller assembly for demolding. The third conveyor roller presses down, transferring the imprinting adhesive with a transfer grating structure to the current position of the flexible film substrate. The demolding angle is adjusted by the fifth conveyor roller to separate the imprinting adhesive from the first imprinting master, thus obtaining the transfer grating structure of the first imprinting adhesive on the flexible film substrate. The first imprinting master continues to move in the transmission direction of the second conveyor mechanism until it reaches the unloading position of the second conveyor mechanism for unloading the imprinting master. The flexible film substrate also continues to move in the transmission direction of the first conveyor mechanism.

[0087] During the above-mentioned operation of the first printing master, the other printing masters located after the first printing master also perform the above-mentioned operation of the first printing master in sequence. This can achieve continuous operation of printing, curing and demolding of one printing master, or simultaneous operation of printing, curing and demolding of multiple printing masters.

[0088] As the flexible film substrate continues to move along the transmission direction of the first conveying mechanism, when the camera captures and identifies the positioning mark (transferred from the positioning mark on the master plate) on the first transfer grating structure of the adhesive on the flexible film substrate, the camera sends identification information to the second controller. After receiving the identification information, the second controller controls the operating time of the adhesive spraying mechanism, the first conveying mechanism, the second conveying mechanism, and the feeding mechanism, so that the flexible film substrate has multiple sets of transfer grating structures of adhesive according to the spacing, thus obtaining the flexible film template.

[0089] 4. Start the first conveyor mechanism to operate, and the soft film template moves with the transmission direction of the first conveyor mechanism. Start the second conveyor mechanism to operate, and control the transmission speed of the second conveyor mechanism to be equal to that of the first conveyor mechanism.

[0090] 5. When the soft film template moves along the transmission direction of the first conveying mechanism, when the camera captures and identifies the positioning mark on the transfer grating structure of the soft film template, the camera sends identification information to the second controller. After receiving the identification information, the second controller sends a feeding signal to the feeding mechanism.

[0091] 6. The loading mechanism loads optical wafers at the loading position of the second conveying mechanism according to the loading signal and the transmission speed of the second conveying mechanism, so that multiple spaced optical wafers move with the transmission direction of the second conveying mechanism.

[0092] When the first optical wafer moves below the adhesive spraying mechanism, the adhesive spraying mechanism sprays mold adhesive onto the optical wafer.

[0093] When the first optical wafer moves below the second conveyor roller assembly, the second conveyor roller presses down, causing the transfer grating structure of the flexible film template at the current position to contact the optical wafer at the set position of the mold adhesive. The imprinting angle is adjusted by the fourth conveyor roller, so that the mold adhesive fills the reverse structure of the transfer grating structure (i.e., the grating structure of the imprinting master). At this time, the mold adhesive bonds the optical wafer and the transfer grating structure of the flexible film template at the current position.

[0094] When the first optical wafer moves to the bottom of the UV curing mechanism, since the transmission speeds of the first and second conveying mechanisms are equal, the optical wafer and the transfer grating structure of the soft film template at the current position move together to the bottom of the UV curing mechanism through the overall structure bonded by the mold adhesive. The UV lamp is then activated, and the UV lamp shines downward to cure the mold adhesive.

[0095] When the first optical wafer moves below the third conveyor roller assembly, the transfer grating structure of the optical wafer and the flexible film template at their current positions moves together through the mold adhesive bonded as a whole to the third conveyor roller assembly for demolding. The third conveyor roller presses down, causing the mold adhesive with the inverse structure of the transfer grating structure (i.e., the grating structure) to transfer onto the optical wafer. The demolding angle is adjusted by the fifth conveyor roller to separate the mold adhesive from the flexible film template, thus obtaining the grating structure on the optical wafer. The first optical wafer with the imprinted grating structure continues to move along the transport direction of the second conveyor mechanism until it reaches the unloading position of the second conveyor mechanism for optical wafer unloading. The flexible film template also continues to move along the transport direction of the first conveyor mechanism.

[0096] During the aforementioned operation of the first optical wafer, other optical wafers following the first optical wafer also sequentially perform the aforementioned operation of the first optical wafer. This can achieve either sequential and continuous operation of imprinting, curing, and demolding of one optical wafer, or simultaneous operation of imprinting, curing, and demolding of multiple optical wafers.

[0097] During the above operation, when the optical wafer is loaded, the loading mechanism sends a loading stop signal to the second controller. After receiving the loading stop signal, the second controller controls the operation time of the glue spraying mechanism, the first conveying mechanism, the second conveying mechanism, the loading mechanism, and the camera. The operation stops when the operation time ends.

[0098] The above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art can still make modifications or equivalent substitutions to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model are within the protection scope of the claims of this utility model pending approval.

Claims

1. A high-efficiency nanoimprinting device, characterized in that, It includes a first conveying mechanism, a second conveying mechanism, an adhesive spraying mechanism, and a material feeding mechanism; The first conveying mechanism is located above the second conveying mechanism. The first conveying mechanism has pressing, curing and demolding functions. The first conveying mechanism is used to transport the first conveying component. The glue spraying mechanism is located above the second conveying mechanism and close to the loading end of the second conveying mechanism; The feeding mechanism is located near the feeding end of the second conveying mechanism and is used to place the second conveying component onto the feeding end of the second conveying mechanism. The second transmission mechanism is used to transmit multiple second transmission components with interval settings; The second conveying component, transported by the second conveying mechanism, is coated with adhesive by the adhesive spraying mechanism and then comes into contact with the first conveying component transported by the first conveying mechanism to achieve nanoimprinting.

2. The high-efficiency nanoimprinting equipment according to claim 1, characterized in that, The first conveying mechanism includes a support base, a conveying assembly, and a UV curing mechanism; The conveying assembly includes a first conveying roller assembly, a second conveying roller assembly, and a third conveying roller assembly; the first conveying roller assembly is disposed at the top of the support base, and the second conveying roller assembly and the third conveying roller assembly are disposed at a distance from the bottom of the support base. The second conveyor roller assembly is located near the glue spraying mechanism and has an imprinting function. The third conveyor roller assembly is located near the unloading end of the second conveying mechanism and has a demolding function. The first conveyor roller assembly, the second conveyor roller assembly, and the third conveyor roller assembly constitute a first conveyor support, and a first conveyor component is sleeved on the outer wall of the first conveyor support. The UV curing mechanism is located on the support base, between the second conveyor roller assembly and the third conveyor roller assembly.

3. The high-efficiency nanoimprinting equipment according to claim 2, characterized in that, The conveying assembly further includes a fourth conveying roller assembly and a fifth conveying roller assembly; The fourth conveyor roller assembly is mounted on the support base. The fourth conveyor roller assembly is close to the glue spraying mechanism. The height of the fourth conveyor roller assembly is higher than that of the second conveyor roller assembly, and the height of the fourth conveyor roller assembly is lower than that of the first conveyor roller assembly. The fifth conveyor roller assembly is mounted on the support base. The fifth conveyor roller assembly is close to the unloading end of the second conveying mechanism. The height of the fifth conveyor roller assembly is higher than that of the third conveyor roller assembly and lower than that of the first conveyor roller assembly. The first conveyor roller assembly, the second conveyor roller assembly, the third conveyor roller assembly, the fourth conveyor roller assembly, and the fifth conveyor roller assembly constitute the first conveyor support.

4. The high-efficiency nanoimprinting equipment according to claim 1, characterized in that, The second conveying mechanism includes a sixth conveyor roller assembly, a seventh conveyor roller assembly, and a conveyor belt; The sixth conveyor roller assembly and the seventh conveyor roller assembly are arranged at intervals, and the sixth conveyor roller assembly and the seventh conveyor roller assembly form a second conveyor support, and the conveyor belt is sleeved on the outer wall of the second conveyor support; The conveyor belt is used to transport multiple second conveying components with intervals.

5. The high-efficiency nanoimprinting equipment according to claim 1, characterized in that, The first transmission mechanism and the second transmission mechanism have the same transmission speed.

6. The high-efficiency nanoimprinting equipment according to claim 2, characterized in that, The UV curing mechanism includes a mounting plate, a UV lamp, a control circuit, and a first controller; The mounting plate is mounted on the support base, and the UV lamps are arranged in an array on the mounting plate; One end of the control circuit is connected to the UV lamp, and the other end of the control circuit is connected to the first controller.

7. The high-efficiency nanoimprinting equipment according to claim 2, characterized in that, The first conveying mechanism further includes an imprint alignment monitoring component, which includes a camera and a second controller. The camera is mounted on the support base and is located above a local area between the first conveying component and the second conveying roller assembly on the first conveying bracket. The camera is connected to the second controller, and the camera captures images of the positioning marks for imprinting alignment set on the first conveying component; The second controller is connected to the first conveying mechanism, the second conveying mechanism, the glue spraying mechanism, and the feeding mechanism.

Images