Absorption tower for electronic grade sulfuric acid production

Abstract

The utility model discloses an absorption tower for electronic-grade sulfuric acid production, which relates to the technical field of electronic-grade sulfuric acid production and comprises a gas filtering component, the gas filtering component comprises an absorption tower main body, the top of the absorption tower main body is connected with a liquid inlet pipe, one side of the absorption tower main body is connected with a gas inlet pipe, and one end of the gas inlet pipe is connected with a connector. The top of the absorption tower body is connected with an exhaust pipe, one side of the exhaust pipe is detachably provided with a cover plate, one end of the exhaust pipe is detachably provided with a filter element, the inner wall of the exhaust pipe is provided with a motor frame, and the top of the motor frame is provided with an adjustable-speed motor. By arranging the gas filtering assembly, gas can be filtered and purified through the filter element during exhausting, so that harmful substances in the filter element are removed, the exhausting speed of the purified gas can be increased through rotation of the fan blades, the exhausting efficiency is improved, the harmful substances can be prevented from being exhausted together by filtering and purifying the gas, and the environment is protected. The surrounding environment is prevented from being polluted, and the health of workers is prevented from being influenced.

Description

Technical Field

[0001] This utility model relates to the field of electronic-grade sulfuric acid production technology, and in particular to an absorption tower for electronic-grade sulfuric acid production. Background Technology

[0002] Electronic-grade sulfuric acid is a high-purity sulfuric acid, also known as ultrapure sulfuric acid or high-purity sulfuric acid. It is one of the eight commonly used chemical reagents in the semiconductor industry and is mainly used in the semiconductor and electronics industries, especially in the silicon wafer cleaning, etching and photolithography processes in chip manufacturing. Its ultra-high purity and strict impurity control (especially metal ions) are the key to ensuring the performance of semiconductor devices. An absorption tower is required for the production of electronic-grade sulfuric acid.

[0003] The existing absorption towers used in the production of electronic-grade sulfuric acid are not equipped with gas filtration devices during operation. When the absorption tower is in use, a certain amount of gas will be discharged. Without filtration, harmful substances in the gas may be discharged along with it, thereby polluting the surrounding environment and indirectly affecting the health of the operators. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing an absorption tower for the production of electronic-grade sulfuric acid.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An absorption tower for electronic-grade sulfuric acid production includes a gas filtration assembly. The gas filtration assembly includes an absorption tower body. A liquid inlet pipe is connected to the top of the absorption tower body, and an air inlet pipe is connected to one side of the absorption tower body. One end of the air inlet pipe is connected to a connector. An exhaust pipe is connected to the top of the absorption tower body. A cover plate is detachably installed on one side of the exhaust pipe, and a filter element is detachably installed at one end of the exhaust pipe. A motor frame is installed on the inner wall of the exhaust pipe, and a speed-regulating motor is installed on the top of the motor frame. A drive shaft is connected to the output end of the speed-regulating motor, and fan blades are installed on the drive shaft. A disassembly assembly for disassembly and assembly and a sealing assembly to prevent leakage are provided on one side of the absorption tower body. A liquid drain port is opened at the bottom of the absorption tower body.

[0007] As a further embodiment of this utility model: the disassembly assembly includes an installation groove, and several sets of installation grooves are provided, which are symmetrically opened on both sides of the inner wall of the absorption tower body. Two sets of openings are opened on one side of the absorption tower body. A slider is slidably installed through the installation groove. A packing is installed on one side of the slider. The size and position of the packing are adapted to the openings of the absorption tower body.

[0008] As a further embodiment of this utility model: the enclosed component includes a mounting frame, which is installed on one side of the absorption tower body. A control motor is installed on one side of the mounting frame, and the output end of the control motor is connected to a mounting shaft. One end of the mounting shaft is rotatably installed through the mounting frame, and a sealing baffle is installed on the mounting shaft. The position and size of the sealing baffle are adapted to the opening of the absorption tower body.

[0009] As a further improvement of this utility model: a fixed frame is installed on one side of the main body of the absorption tower. Two sets of fixed frames are provided. A hydraulic push rod is installed on one side of the fixed frame. The telescopic end of the hydraulic push rod can slide through the fixed frame. A positioning hole is opened on one side of the sealing baffle. The position and size of the positioning hole are adapted to the telescopic end of the hydraulic push rod.

[0010] As a further improvement of this utility model: the bottom of the absorption tower body is equipped with several sets of support legs, and the bottom of the support legs is equipped with casters.

[0011] As a further improvement of this utility model: a connecting frame is installed on the supporting leg, a hydraulic cylinder is installed on the top of the connecting frame, the output end of the hydraulic cylinder at the bottom can slide through the connecting frame, and a rubber foot pad is installed at the bottom of the hydraulic cylinder.

[0012] As a further improvement of this utility model: a connecting flange is installed at the end of the connector, and a groove is provided on one side of the connecting flange, through which a rubber gasket is installed.

[0013] The beneficial effects of this utility model are as follows:

[0014] 1. By setting up a gas filtration component, the gas can be filtered and purified during exhaust by the filter element, thereby removing harmful substances from the filter element. The rotation of the fan blades can speed up the exhaust speed of the purified gas, thereby increasing the exhaust efficiency. By filtering and purifying the gas, harmful substances can be prevented from being discharged along with it, thus preventing pollution to the surrounding environment and affecting the health of the staff.

[0015] 2. The hydraulic push rod can be activated to control its telescopic end to engage in the positioning hole of the sealing baffle. This serves as a limit and fixation function when the sealing baffle rotates to close the opening of the absorption tower body, preventing the sealing baffle from opening accidentally. When it is necessary to rotate the sealing baffle, the hydraulic push rod is controlled to move out of the positioning hole, thereby releasing the limit.

[0016] 3. The connection flange can be used to reinforce the connection when connecting the gas transmission device, thereby preventing the connection from breaking during gas transmission. The rubber gasket can increase the sealing of the connection and prevent gaps from causing air leakage. Attached Figure Description

[0017] Figure 1This is a schematic diagram of the absorption tower for electronic-grade sulfuric acid production from a main perspective, as proposed in this utility model.

[0018] Figure 2 This is a schematic diagram of the installation part of an absorption tower for the production of electronic-grade sulfuric acid according to this utility model;

[0019] Figure 3 This is a schematic diagram of the exhaust section of an absorption tower for electronic-grade sulfuric acid production according to the present invention;

[0020] Figure 4 This is a schematic diagram of the support structure of an absorption tower for electronic-grade sulfuric acid production proposed in this utility model.

[0021] In the diagram: 1. Absorption tower body; 2. Exhaust pipe; 3. Liquid inlet pipe; 4. Control motor; 5. Mounting frame; 6. Sealing baffle; 7. Connecting flange; 8. Connector; 9. Air inlet pipe; 10. Support leg; 11. Casters; 12. Foot pads; 13. Connecting frame; 14. Hydraulic cylinder; 15. Hydraulic push rod; 16. Fixing frame; 17. Fan blade; 18. Drive shaft; 19. Mounting groove; 20. Mounting shaft; 21. Slider; 22. Packing; 23. Filter element; 24. Motor frame; 25. Speed-regulating motor. Detailed Implementation

[0022] The technical solution of this utility model will be further described in detail below with reference to specific embodiments.

[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0024] Example 1

[0025] An absorption tower for the production of electronic-grade sulfuric acid, such as Figure 1-4 As shown, the gas filtration assembly includes an absorption tower body 1. The top of the absorption tower body 1 is connected to a liquid inlet pipe 3, and one side of the absorption tower body 1 is connected to an air inlet pipe 9. One end of the air inlet pipe 9 is connected to a connector 8. The top of the absorption tower body 1 is connected to an exhaust pipe 2. One side of the exhaust pipe 2 is detachably equipped with a cover plate. One end of the exhaust pipe 2 is detachably equipped with a filter element 23. A motor frame 24 is installed on the inner wall of the exhaust pipe 2. A speed-regulating motor 25 is installed on the top of the motor frame 24. The output end of the speed-regulating motor 25 is connected to a drive shaft 18. A fan blade 17 is installed on the drive shaft 18. One side of the absorption tower body 1 is provided with a disassembly assembly for disassembly and a sealing assembly to prevent leakage. The bottom of the absorption tower body 1 is provided with a drain port.

[0026] In operation, sulfuric acid liquid can be introduced into the absorption tower body 1 via a pipeline connected to the liquid inlet pipe 3. A gas supply device can be connected to the gas inlet pipe 9 via the gas connector 8, injecting gas into the absorption tower body 1. The gas moves upward within the absorption tower body 1, while the sulfuric acid liquid moves downward. The gas reacts with the sulfuric acid liquid, completing the reaction and producing electronic-grade sulfuric acid. A pipeline can be connected to the liquid outlet at the bottom of the absorption tower body 1 to transport the electronic-grade sulfuric acid that has collected at the bottom of the absorption tower body 1 after the reaction. The gas, having completed the reaction, moves upward from... The exhaust pipe 2 discharges gas, which is filtered through filter element 23 during the discharge process. The filter element 23 can be used to filter and purify the gas, thereby removing harmful substances from the filter element 23. The speed control motor 25 can be started to control the rotation of the drive shaft 18 and the fan blade 17. The rotation of the fan blade 17 can accelerate the discharge speed of the purified gas, thereby increasing the exhaust efficiency. The filtered and purified gas can prevent harmful substances from being discharged along with the gas, thus preventing pollution to the surrounding environment and affecting the health of the staff. After a period of use, the cover plate of the exhaust pipe 2 can be removed to disassemble the filter element 23 for cleaning or replacement.

[0027] The disassembly assembly includes an installation groove 19, which is provided in several sets and is symmetrically opened on both sides of the inner wall of the absorption tower body 1. Two sets of openings are opened on one side of the absorption tower body 1. A slider 21 is slidably installed through the installation groove 19. A packing 22 is installed on one side of the slider 21. The size and position of the packing 22 are adapted to the opening of the absorption tower body 1.

[0028] In use, the installation of two sets of packing 22 can be completed quickly by sliding the slider 21 into the installation groove 19. After installation, gas and sulfuric acid liquid can pass through the packing 22, thereby accelerating its reaction speed and effect. A certain damping is provided between the slider 21 and the installation groove 19 to avoid unnecessary sliding of the slider 21. When it is necessary to clean or replace the packing 22, the packing 22 can be pulled to disassemble it conveniently, which can effectively increase the efficiency of disassembly and assembly.

[0029] The enclosed assembly includes a mounting frame 5, which is installed on one side of the absorption tower body 1. A control motor 4 is installed on one side of the mounting frame 5. The output end of the control motor 4 is connected to a mounting shaft 20. One end of the mounting shaft 20 is rotatably installed through the mounting frame 5. A sealing baffle 6 is installed on the mounting shaft 20. The position and size of the sealing baffle 6 are adapted to the opening of the absorption tower body 1.

[0030] During use, the installation shaft 20 and the sealing baffle 6 can be rotated by controlling the motor 4. The opening and closing of the absorption tower body 1 can be controlled by controlling the rotation of the sealing baffle 6 by controlling the forward and reverse rotation of the motor 4. The opening of the absorption tower body 1 can be sealed after the packing 22 is installed, thereby preventing the leakage of sulfuric acid liquid and gas. When it is necessary to disassemble the packing 22, the opening of the absorption tower body 1 can be opened by controlling the rotation of the sealing baffle 6.

[0031] In order to limit the position of the sealing baffle 6, such as Figure 1 , 2 As shown in Figure 3, a fixed frame 16 is installed on one side of the main body 1 of the absorption tower. The fixed frame 16 is provided in two sets. A hydraulic push rod 15 is installed on one side of the fixed frame 16. The telescopic end of the hydraulic push rod 15 can slide through the fixed frame 16. A positioning hole is opened on one side of the sealing baffle 6. The position and size of the positioning hole are adapted to the telescopic end of the hydraulic push rod 15.

[0032] In use, the positions of the two sets of fixing brackets 16 are adapted to the two sets of sealing baffles 6. When the sealing baffles 6 rotate to close the opening of the absorption tower body 1, the hydraulic push rod 15 can be activated to control its telescopic end to be inserted into the positioning hole of the sealing baffle 6, thereby playing a limiting and fixing role and preventing the sealing baffles 6 from being opened accidentally. When it is necessary to rotate the sealing baffles 6, the hydraulic push rod 15 is controlled to move out of the positioning hole, thereby releasing the limit.

[0033] For ease of use of mobile devices, such as Figure 4 As shown, the bottom of the absorption tower body 1 is equipped with several sets of support legs 10, and the bottom of the support legs 10 is equipped with casters 11.

[0034] When in use, the device can be supported by the support legs 10 and the casters 11. When it is necessary to move the position, the device can be pushed or pulled. The casters 11 rotate in contact with the ground to move the device, thus making it easy to adjust the position.

[0035] In order to provide support, such as Figure 1 , 4 As shown, a connecting frame 13 is installed on the support leg 10, a hydraulic cylinder 14 is installed on the top of the connecting frame 13, the output end of the bottom of the hydraulic cylinder 14 can slide through the connecting frame 13, and a rubber foot pad 12 is installed at the bottom of the hydraulic cylinder 14.

[0036] When in use, after moving to a suitable position, the hydraulic cylinder 14 can control the foot pad 12 to fall and support the device. After supporting the device, it can maintain the stability of the device. While maintaining stability, it can also lift the casters 11 off the ground to avoid unnecessary displacement caused by the casters 11. The rubber foot pad 12 can increase the grip and avoid unnecessary sliding displacement.

[0037] Example 2

[0038] For ease of connection to gas transmission, refer to Figure 1 An absorption tower for the production of electronic-grade sulfuric acid is provided. Compared with embodiment 1, this embodiment has the following improvements: a connecting flange 7 is installed at the end of the connector 8, and a groove is provided on one side of the connecting flange 7, through which a rubber gasket is installed.

[0039] During use, the connection flange 7 can be used to reinforce the connection when connecting the gas supply device to the connector 8, thereby preventing the connection from breaking during gas supply. The rubber gasket can increase the sealing of the connection and prevent gaps from causing air leakage.

[0040] The above description is only a preferred embodiment of the present utility model. For parts that do not require creative effort in circuit control, signal control and transmission, please refer to the prior art. However, the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the scope of the technology disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An absorption tower for the production of electronic-grade sulfuric acid, characterized in that, The gas filtration assembly includes an absorption tower body (1), with an inlet pipe (3) connected to the top of the absorption tower body (1), an air inlet pipe (9) connected to one side of the absorption tower body (1), a connector (8) connected to one end of the air inlet pipe (9), an exhaust pipe (2) connected to the top of the absorption tower body (1), a cover plate detachably provided on one side of the exhaust pipe (2), a filter element (23) detachably installed at one end of the exhaust pipe (2), a motor frame (24) installed on the inner wall of the exhaust pipe (2), a speed-regulating motor (25) installed on the top of the motor frame (24), a drive shaft (18) connected to the output end of the top of the speed-regulating motor (25), a fan blade (17) installed on the drive shaft (18), a disassembly assembly for disassembly and assembly and a sealing assembly to prevent leakage provided on one side of the absorption tower body (1), and a drain port opened at the bottom of the absorption tower body (1).

2. The absorption tower for electronic-grade sulfuric acid production according to claim 1, characterized in that, The disassembly assembly includes an installation groove (19), which has several sets and is symmetrically opened on both sides of the inner wall of the absorption tower body (1). Two sets of openings are opened on one side of the absorption tower body (1), and a slider (21) is slidably installed through the installation groove (19). A packing (22) is installed on one side of the slider (21), and the size and position of the packing (22) are adapted to the opening of the absorption tower body (1).

3. The absorption tower for electronic-grade sulfuric acid production according to claim 1, characterized in that, The enclosed assembly includes a mounting frame (5), which is installed on one side of the absorption tower body (1). A control motor (4) is installed on one side of the mounting frame (5). The output end of the control motor (4) is connected to a mounting shaft (20). One end of the mounting shaft (20) is rotatably installed through the mounting frame (5). A sealing baffle (6) is installed on the mounting shaft (20). The position and size of the sealing baffle (6) are adapted to the opening of the absorption tower body (1).

4. The absorption tower for electronic-grade sulfuric acid production according to claim 3, characterized in that, The absorption tower body (1) is equipped with a fixed frame (16) on one side. The fixed frame (16) is provided in two sets. A hydraulic push rod (15) is installed on one side of the fixed frame (16). The telescopic end of the hydraulic push rod (15) can slide through the fixed frame (16). A positioning hole is provided on one side of the sealing baffle (6). The position and size of the positioning hole are adapted to the telescopic end of the hydraulic push rod (15).

5. The absorption tower for electronic-grade sulfuric acid production according to claim 1, characterized in that, The bottom of the absorption tower body (1) is equipped with several sets of support legs (10), and the bottom of the support legs (10) is equipped with casters (11).

6. The absorption tower for electronic-grade sulfuric acid production according to claim 5, characterized in that, A connecting frame (13) is installed on the supporting leg (10). A hydraulic cylinder (14) is installed on the top of the connecting frame (13). The output end of the hydraulic cylinder (14) can slide through the connecting frame (13). A rubber foot pad (12) is installed at the bottom of the hydraulic cylinder (14).

7. The absorption tower for electronic-grade sulfuric acid production according to claim 1, characterized in that, A connecting flange (7) is installed at the end of the connector (8). A groove is provided on one side of the connecting flange (7), and a rubber gasket is installed through the groove.

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