Auxiliary device for installing machine table lining

Abstract

The utility model provides an auxiliary device for installing a machine table lining. The auxiliary device for installing the machine table lining comprises a connecting frame, a supporting column and a contact pad. Grabbing is achieved through the connecting frame. The linings are matched with and support the machine tables of different sizes through the supporting columns which are fixedly connected with the connecting frame and can stretch and retract in the axial direction; the contact pad connected with one end of the supporting column is attached to the inner surface of the lining so as to be in contact and fixed, damage to the inner surface of the lining is avoided, an engineer can move the lining without directly making contact with the lining and without auxiliary personnel, the lining installation time is shortened, manpower is saved, and the production efficiency is improved. Risks caused by human factors are reduced, the installation efficiency is improved, and the productivity is increased.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to an auxiliary device for installing the inner lining of a machine tool. Background Technology

[0002] In existing technologies, the liner installation of the process cavity in a semiconductor epitaxy machine is primarily performed directly by engineers. Because the liner is made of quartz and is relatively large, engineers cannot fully observe the area around it, thus requiring assistance from additional engineers during installation. Consequently, the entire liner installation process is slow, and the liner is at risk of breakage.

[0003] Providing a device for installing machine linings that can reduce lining installation time and mitigate risks caused by human factors is of great significance for improving installation efficiency and increasing production capacity. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide an auxiliary device for installing machine linings, which reduces the installation time of the linings and reduces the risks caused by human factors.

[0005] To address the aforementioned problems, this utility model provides an auxiliary device for installing a machine tool liner, comprising: a connecting frame; at least three support pillars, the first end of all the support pillars being fixedly connected to the connecting frame, and the second end of all the support pillars being extendable and retractable, the support pillars being used to support the liner; and a contact pad, one end of the contact pad being connected to the second end of the support pillar, and the other end of the contact pad being in contact with the inner surface of the liner, the contact pad being used to contact and fix the liner.

[0006] In some embodiments, the connecting frame is disc-shaped, and all the supports are evenly distributed along the circumference of the connecting frame.

[0007] In some embodiments, the number of pillars is four.

[0008] In some embodiments, the support includes a first column and a second column. The first column is a tube, one end of which is fixedly connected to the connecting frame, and the other end of which is sleeved on the second column. The second column is capable of moving along the axial direction of the tube.

[0009] In some embodiments, the first column and the connecting frame are integrally formed.

[0010] In some embodiments, the first column and the second column are each provided with a plurality of pin holes. Inserting a pin into the pin holes that overlap the first column and the second column can fix the relative position of the first column and the second column.

[0011] In some embodiments, the inner wall of the first column and the outer wall of the second column are both threaded, or the outer wall of the first column and the inner wall of the second column are both threaded. Rotating the second column can adjust the relative position of the second column and the first column.

[0012] In some embodiments, the contact area between the contact pad and the inner surface of the liner is greater than the contact area between the contact pad and the support.

[0013] In some embodiments, the contact surface between the contact pad and the inner surface of the liner is circular.

[0014] In some embodiments, the connecting frame and the support column are made of rigid materials, and the contact pad is made of soft rubber material.

[0015] The above technical solution provides an auxiliary device for installing machine tool liners. The auxiliary device includes a connecting frame, a support column, and a contact pad. The connecting frame provides gripping; the support column, which is fixedly connected to the connecting frame and capable of axial extension, adapts to and supports liners of different sizes; the contact pad, connected to one end of the support column, contacts and fixes the liner to its inner surface, thus avoiding damage to the inner surface of the liner. Engineers can move the liner without direct contact or assistance personnel, reducing installation time, saving manpower, reducing risks caused by human factors, improving installation efficiency, and increasing production capacity.

[0016] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the present invention. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the auxiliary device for installing the inner lining of the machine platform provided in the first embodiment of this utility model;

[0019] Figure 2 This is a schematic diagram of the support column provided in the first embodiment of the present utility model;

[0020] Figure 3 This is a schematic diagram of the support column provided in the second embodiment of this utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 10. Lining;

[0023] 11. Connecting frame;

[0024] 12, 22 pillars;

[0025] 121, 221 First column;

[0026] 122, 222 Second column;

[0027] 223 Rotating component;

[0028] 13, 23 Contact pads;

[0029] 14. Pins;

[0030] 15, 25 Connectors. Detailed Implementation

[0031] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0032] Please refer to this as well. Figures 1-2 , Figure 1 This is a schematic diagram of the auxiliary device for installing the inner lining of the machine platform provided in the first embodiment of this utility model; Figure 2 This is a schematic diagram of the support column provided in the first embodiment of this utility model.

[0033] like Figure 1 As shown, the auxiliary device for installing the inner lining of the machine tool includes: a connecting frame 11, a support column 12, and a contact pad 13.

[0034] The number of the support pillars 12 is at least three, ensuring a stable and balanced support structure for the inner lining 10. The first end of all the support pillars 12 is fixedly connected to the connecting frame 11, and the second end of all the support pillars 12 is telescopic. The support pillars 12 are used to support the inner lining 10. One end of the contact pad 13 is connected to the second end of the support pillar 12, and the other end of the contact pad 13 is in contact with the inner surface of the inner lining 10. The contact pad 13 is used to contact and fix the inner lining 10.

[0035] The connecting frame 11 is disc-shaped, and all the support columns 12 are evenly distributed along the circumference of the connecting frame 11 to correspond to the cylindrical inner liner 10. There are four support columns 12, and correspondingly, the included angle between any two support columns 12 is 90°. In some embodiments, there are six support columns 12, which are evenly distributed along the circumference of the connecting frame 11, so that the auxiliary device for installing the inner liner of the mounting platform has sufficient strength to support the inner liner 10.

[0036] In one embodiment, the connecting frame 11 is an equilateral triangle, and there are three support pillars 12, which are fixedly connected to the three corners of the connecting frame 11 respectively.

[0037] The first end of the support column 12 can be firmly fixed to the connecting frame 11 by welding, bolting or other means to ensure the stability and reliability of the overall structure.

[0038] like Figure 2 As shown, the support column 12 includes a first column 121 and a second column 122. The first column 121 is a tube, one end of which is fixedly connected to the connecting frame 11, and the other end is sleeved on the second column 122. The second column 122 can move axially along the tube, so that the auxiliary device for installing the machine liner can be adapted to liners of different sizes. The contact pad 13 is fixedly connected to the end of the second column 122 away from the connecting frame 11. The end of the second column 122 away from the connecting frame 11 is the second end of the support column 12. In this embodiment, the auxiliary device for installing the machine liner also includes a connector 15, and the contact pad 13 is fixed to the end of the second column 122 away from the connecting frame 11 through the connector 15.

[0039] In one embodiment, the contact pad 13 is directly fixed to the second column 122. In another embodiment, the auxiliary device for installing the machine liner further includes multiple connecting components, through which the contact pad 13 is connected to the second column 122.

[0040] In some embodiments, the contact pad 13 is rotatable about the second end of the support column 12, that is, the contact pad 13 is rotatable about the end of the second column 122 away from the connecting frame 11.

[0041] In some embodiments, the interior of the second column 122 is hollow.

[0042] In this embodiment, the first column 121 and the connecting frame 11 are integrally formed. The first column 121 and the connecting frame 11 are made of rigid materials, such as high-strength plastic.

[0043] In some embodiments, the first column 121 and the connecting frame 11 are separate components, fixed by other means, such as by fasteners.

[0044] Continue to refer to Figure 2 The first column 121 and the second column 122 are each provided with a plurality of pin holes 123. In this embodiment, each of the first column 121 and the second column 122 has four pin holes 123, and the distance between any two adjacent pin holes 123 is the same. When the pin 14 is inserted into the overlapping pin holes 123 of the first column 121 and the second column 122, the relative position of the first column 121 and the second column 122 can be fixed. The first column 121 and the second column 122 can move relative to each other, and the length of the support column 12 can be adjusted by inserting the pin 14 into different pin holes 123. In this embodiment, the lengths of the four support columns 12 are adjusted synchronously so that the auxiliary device for installing the machine tool liner can be used with 8-inch or 12-inch machines.

[0045] The contact area between the contact pad 13 and the inner surface of the liner 10 is greater than the contact area between the contact pad 13 and the support column 12, so that there is sufficient support area between the contact pad 13 and the liner 10. Furthermore, the contact area between the contact pad 13 and the inner surface of the liner 10 is greater than the maximum cross-sectional area of ​​the support column 12. In this embodiment, the contact surface between the contact pad 13 and the inner surface of the liner 10 is circular, which can form a uniform pressure distribution when in contact with the liner 10. The first column 121 and the second column 122 are also cylindrical in shape, correspondingly, as... Figure 2 As shown, the diameter D of the contact pad 13 is greater than the diameter of the first column 121 and also greater than the diameter of the second column 122.

[0046] In this embodiment, the contact pad 13 is a suction cup, the interior of the contact pad 13 is hollow, and the contact surface between the contact pad 13 and the inner surface of the liner 10 is smooth. The contact pad 13 is made of a soft rubber material, for example, a soft plastic pad, thereby providing sufficient strength for the auxiliary device for installing the liner of the mounting machine. Furthermore, the soft rubber material of the contact pad 13 will not damage the inner surface of the liner 10.

[0047] The connecting frame 11 can be used for gripping. In some embodiments, the connecting frame 11 can be gripped by a clamp, while in other embodiments, the connecting frame 11 can be gripped directly by a person's hand.

[0048] During the installation of the machine tool's inner liner 10, the engineer places the auxiliary device for installing the machine tool's inner liner within the space of the inner liner 10. By inserting the pins 14 into different pin holes 123, the engineer adjusts the telescopic length of the support column 12 to ensure that each contact pad 13 is tightly against the inner surface of the inner liner 10. By gripping the connecting frame 11, the engineer can move the inner liner 10 to the target position. After installation, the edges of the contact pads 13 are opened to allow air to enter between the contact pads 13 and the inner surface of the inner liner 10, and the telescopic length of the support column 12 is adjusted to separate each contact pad 13 from the inner surface of the inner liner 10.

[0049] This utility model also provides a second embodiment. The difference between the second embodiment and the first embodiment lies in the different support pillars.

[0050] Figure 3 This is a schematic diagram of the support column provided in the second embodiment of this utility model.

[0051] refer to Figure 3 The auxiliary device for installing the machine liner includes: a connecting frame, a support column 22, and a contact pad 23. The connecting frame can be referenced... Figure 1 The connecting bracket 11 shown.

[0052] The number of the support pillars 22 is at least three. The first end of all the support pillars 22 is fixedly connected to the connecting frame, and the second end of all the support pillars 22 is telescopic. The support pillars 22 are used to support the inner lining 10. One end of the contact pad 23 is connected to the second end of the support pillar 22, and the other end of the contact pad 23 is in contact with the inner surface of the inner lining 10. The contact pad 23 is used to contact and fix the inner lining 10.

[0053] and Figure 1 Similarly, the connecting frame is disc-shaped, and all the supports 22 are evenly distributed along the circumference of the connecting frame to correspond to the cylindrical inner liner 10. There are four supports 22, and correspondingly, the included angle between any two supports 22 is 90°.

[0054] like Figure 3 As shown, the support column 22 includes a first column 221 and a second column 222. The first column 221 is a tube, one end of which is fixedly connected to the connecting frame, and the other end is sleeved on the second column 221. The second column 221 can move along the axial direction of the tube. The contact pad 23 is fixedly connected to the end of the second column 222 away from the connecting frame. This end of the second column 222 away from the connecting frame is the second end of the support column 22. In this embodiment, 23 also includes a connector 25, through which the contact pad 23 is fixed to the second column 222.

[0055] exist Figure 3 In the first column 221, the inner wall (not shown) and the outer wall of the second column 222 are threaded. Rotating the second column 222 can adjust the relative position of the second column 222 and the first column 221.

[0056] like Figure 3 As shown, the support column 22 also includes a rotating component 223, which is fixed to the two columns 222. When the engineer rotates the rotating component 223, the second column 222 can be rotated, thereby causing the support column 22 to extend and retract axially. This allows the auxiliary device for installing the machine tool liner to be applicable to machine tools of different sizes.

[0057] In another embodiment, the support column 22 includes a first column 221 and a second column 222. One end of the first column 221 is fixedly connected to the connecting frame, and the other end is sleeved onto the second column 222. The second column 222 includes a tubular portion, and both the outer wall of the first column 221 and the inner wall of the tubular portion of the second column 222 are threaded. Rotating the second column 222 can adjust the relative position of the second column 222 and the first column 221.

[0058] The contact area between the contact pad 23 and the inner surface of the liner 10 is greater than the contact area between the contact pad 23 and the support column 22. Furthermore, the contact area between the contact pad 23 and the inner surface of the liner 10 is greater than the maximum cross-sectional area of ​​the support column 22. The contact surface between the contact pad 23 and the inner surface of the liner 10 is circular, which enables a uniform pressure distribution when in contact with the liner 10.

[0059] The connecting frame and the support column 22 are made of rigid materials, such as high-strength plastic; the contact pad 23 is made of soft rubber materials, such as soft plastic pads.

[0060] During the installation of the machine tool's inner liner 10, the engineer places the auxiliary device for installing the machine tool's inner liner within the space of the inner liner 10. By rotating the rotating component 223, the telescopic length of the support column 22 is adjusted so that each of the contact pads 23 is tightly attached to the inner surface of the inner liner 10. By gripping the connecting frame, the inner liner 10 can be moved to the target position. After installation, the edges of the contact pads 23 are opened to allow air to enter between the contact pads 23 and the inner surface of the inner liner 10. The rotating component 223 is then rotated in the opposite direction, and the telescopic length of the support column 22 is adjusted to separate each of the contact pads 23 from the inner surface of the inner liner 10.

[0061] When the equipment needs maintenance and the inner liner 10 needs to be disassembled and reassembled, the auxiliary device for installing the inner liner of the machine can move the inner liner 10 to the target position more quickly, thereby shortening the disassembly and reassembly time and allowing the machine to return to the line earlier.

[0062] By using the auxiliary device for installing the liner, engineers can move the liner without direct contact or assistance personnel, reducing installation time, saving manpower, reducing risks caused by human factors, improving installation efficiency, and increasing production capacity.

[0063] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion. The various embodiments in this specification are described in a related manner, and similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0064] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of protection of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. An auxiliary device for installing a machine tool liner, characterized in that, include: Connector; At least three support pillars, the first end of all of the support pillars being fixedly connected to the connecting frame, and the second end of all of the support pillars being telescopic, the support pillars being used to support the lining; A contact pad, one end of which is connected to the second end of the support column, and the other end of which is in contact with the inner surface of the lining, the contact pad being used to contact and fix the lining.

2. The auxiliary device for installing the inner lining of the machine base according to claim 1, characterized in that, The connecting frame is disc-shaped, and all the supporting columns are evenly distributed along the circumference of the connecting frame.

3. The auxiliary device for installing the inner lining of the machine base according to claim 1, characterized in that, The number of pillars is four.

4. The auxiliary device for installing the inner lining of the machine base according to claim 1, characterized in that, The support includes a first column and a second column. The first column is a tube. One end of the tube is fixedly connected to the connecting frame, and the other end is sleeved with the second column. The second column can move along the axial direction of the tube.

5. The auxiliary device for installing the inner lining of the machine base according to claim 4, characterized in that, The first column and the connecting frame are integrally formed.

6. The auxiliary device for installing the inner lining of the machine base according to claim 4, characterized in that, The first column and the second column are each provided with a plurality of pin holes. Inserting a pin into the pin holes that overlap the first column and the second column can fix the relative position of the first column and the second column.

7. The auxiliary device for installing the inner lining of the machine base according to claim 4, characterized in that, The inner wall of the first column and the outer wall of the second column are both threaded, or the outer wall of the first column and the inner wall of the second column are both threaded. Rotating the second column can adjust the relative position of the second column and the first column.

8. The auxiliary device for installing the inner lining of the machine base according to claim 1, characterized in that, The contact area between the contact pad and the inner surface of the liner is greater than the contact area between the contact pad and the support column.

9. The auxiliary device for installing the inner lining of the machine base according to claim 1, characterized in that, The contact surface between the contact pad and the inner surface of the liner is circular.

10. The auxiliary device for installing the inner lining of the machine base according to claim 1, characterized in that, The connecting frame and the support column are made of rigid materials, while the contact pad is made of soft rubber.

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