Device for preparing large-size film
By using a centrifugal film-forming device with adjustable roller radius and height, combined with a fan-shaped or hollow cone nozzle and motor drive, the problems of uniformity and high cost in the preparation of large-size films have been solved, realizing efficient and low-cost production of large-size films.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHAOXING XINLIAN SEMICON TECH CO LTD
- Filing Date
- 2025-05-07
- Publication Date
- 2026-05-19
AI Technical Summary
Existing technologies suffer from poor uniformity, complex equipment structures, and high costs when preparing large-size films, making it difficult to meet the needs of high-precision, large-scale production.
A centrifugal membrane-forming apparatus for preparing large-size membranes is provided. The centrifugal membrane-forming apparatus, which has adjustable roller radius and height, combined with fan-shaped or hollow cone nozzles and motor drive, achieves uniform coating and forming of membranes. An elastic frame is used to provide fixed boundaries, reducing the difficulty and cost of preparation.
It improves membrane uniformity and quality, reduces preparation costs, and increases production efficiency, and is suitable for preparing membranes of various sizes.
Smart Images

Figure CN224255879U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of Pellicle large-size membrane preparation technology, and to an apparatus for preparing large-size membranes, specifically to a centrifugal membrane preparation apparatus for preparing Pellicle large-size membranes. Background Technology
[0002] Currently, the common method for preparing large-size films such as Pellicle films involves spraying polymers onto glass, centrifuging at high speed, baking, and then removing the film with adhesive. However, when preparing large-size films, as the glass size increases, the uniformity of the film decreases significantly during centrifugation due to the large area. This reduced uniformity severely affects the quality of large-size films, making existing technologies significantly limited in their application and unable to meet the growing market demand for high-precision large-size films. Patent CN209191117U discloses a rotary spray film-forming device that can prepare films of two-dimensional materials and organic polymer materials through the coordinated work of components such as roller molds, nozzles, and heating jackets. It utilizes a liquid containing film-forming substances, atomized under pressure through a nozzle, falling onto the surface of a rotating substrate material. The shear force generated by the substrate movement causes the droplets to spread and form a film. However, this device has certain limitations. On the one hand, the size of its roller mold may be limited, resulting in insufficient capacity for preparing ultra-large area films and making it difficult to meet the demands of large-scale industrial production for large-size films. On the other hand, the equipment structure is relatively complex, and the component combinations and connections in multiple embodiments are cumbersome, which may lead to higher equipment costs, greater maintenance difficulties, and reduced production efficiency. Patent CN211917461 U discloses a high-speed rotating roller mechanism for centrifugal film formation. This mechanism, through multiple sets of support and fixing devices, can achieve high-speed and stable rotation of a large-size roller, facilitating the injection of the film-forming solution and solvent evaporation, meeting the needs of large-area, high-efficiency centrifugal film formation. However, it mainly focuses on the roller's rotating support structure and transmission mechanism, with less attention paid to the spraying process during film formation, which may affect the uniformity of the film and the precise control of its microstructure. Utility Model Content
[0003] To address at least some of the aforementioned problems in the prior art, this invention provides an apparatus for preparing large-size membranes, specifically a centrifugal membrane-forming apparatus for preparing pellicle large-size membranes. This invention is applicable to the preparation of membranes of various sizes, including even larger ones. The membrane size can be controlled by adjusting the roller radius R and the roller height, thereby improving membrane uniformity and quality, while simultaneously reducing preparation costs, simplifying the preparation process, and increasing production efficiency.
[0004] This invention provides an apparatus for preparing large-size membranes, comprising:
[0005] A roller, which provides a carrier for the preparation and molding of large-size films, the roller includes a roller body and a roller connected to the roller body;
[0006] A fixing component that provides a fixing boundary for a large-size film is disposed on the roller body;
[0007] A feeding module for conveying materials includes a feeding pipe and a plurality of nozzles disposed on the feeding pipe, wherein the nozzles are connected to the feeding pipe.
[0008] An electric motor is used to drive the roller to rotate. The motor is detachably connected to the roller shaft so that the roller can be replaced when the roller radius R and the roller height need to be adjusted.
[0009] The radius R and height of the roller can be adjusted. The final membrane size is controlled by adjusting the radius R and height of the roller. The surface area of the roller and the size of the frame are determined by the desired membrane size. When a larger membrane needs to be prepared, a roller with a larger radius or a taller roller is used, which increases the surface area of the roller to form a larger membrane.
[0010] Furthermore, the nozzle includes a fan-shaped nozzle or a hollow cone-shaped nozzle. The nozzle can also be other conventional nozzles. The nozzle sprays linearly in a fan shape or sprays in a cone pattern.
[0011] Furthermore, the material is a polymer material such as a polymer coating.
[0012] Furthermore, the polymer coating comprises a perfluoropolymer. Preferably, the polymer coating comprises polytetrafluoroethylene.
[0013] Furthermore, the motor is rotatably connected to the roller; and / or
[0014] The bottom of the roller is equipped with a brush. The roller drives the roller to rotate. During the process of spraying material from the nozzle, the roller rotates at a fixed speed, and the roller, in conjunction with the nozzle, achieves uniform spraying of material onto its surface. The brush can optimize the uniformity of the film.
[0015] Furthermore, the motor is electrically connected to the roller.
[0016] Furthermore, the shape of the motor housing can be flexibly designed according to its function in the overall device and its connection structure with other components. For example, if the motor needs to be closely fitted with components such as rollers, its housing shape can be designed as an arc or curve that conforms to the shape of the rollers, so as to reduce the overall volume and weight of the equipment and improve space utilization.
[0017] Furthermore, the roller includes a cylindrical roller or other irregularly shaped roller.
[0018] Furthermore, the irregularly shaped roller includes a cylindrical section and a protruding section connected to the cylindrical section.
[0019] Furthermore, the fixing assembly includes an elastic frame, multiple fasteners for fixing the elastic frame, and a fixing strap connected to the elastic frame. The elastic frame is placed on the side wall of the roller body, the fasteners are located on the side wall of the roller body, and the fixing strap is movably connected to the fasteners. The fasteners and fixing strap are responsible for securely installing the elastic frame on the side wall of the roller, ensuring that the position of the elastic frame remains stable during the spraying and molding process, and that it does not shift or loosen.
[0020] Furthermore, the elastic frame includes any one of a rubber frame, a resin frame, or a plastic frame. The elastic frame is flexible and deformable, capable of conforming to the side of the roller. During the preparation of large-size films, the elastic frame provides support and fixes the boundaries of the subsequently formed film, and facilitates the removal and flattening of the large-size film after film formation.
[0021] Furthermore, the fastener has mounting holes, and the fastening strap passes through the mounting holes so that the elastic frame is mounted on the side wall of the roller.
[0022] Furthermore, the fasteners include conventional fasteners such as clips.
[0023] Furthermore, the fastener includes a fastener body and a latch on the fastener body, the latch engaging with the fastening strap. The latch is used to limit the fastening strap. By pressing the latch, the fastening strap can be released, thereby facilitating the removal of the elastic frame for subsequent processing of the membrane, such as cutting the membrane to fit different sizes of pellicle aluminum frames.
[0024] Furthermore, the fixing belt includes a fixing belt body and serrations provided on the fixing belt body, and the latch engages with the serrations. By utilizing the serrations in conjunction with the fixing belt, the elastic frame can be tightly fitted to the roller surface, ensuring effective spraying and forming.
[0025] Furthermore, the latch includes a latch head and a rotating shaft rotatably connected to the latch head. The latch head is adapted to the serrated gap, and the rotating shaft is fixedly connected to the fixing body. The elastic frame is fixed by moving the latch head. When fixing, the fixing strap is inserted into the mounting hole, and the latch head is pushed so that the latch head is embedded in the serrated gap of the fixing strap to fix the elastic frame to the side wall of the roller. At this time, the latch head is not open. When the fixing strap is pulled out, the friction between the latch head and the serrated teeth is large, making it difficult to pull out. When unfixing (when the elastic frame attached to the side wall of the roller needs to be removed): press the latch head, the latch head is raised, and the latch head is disengaged from the serrated gap of the fixing strap, thereby releasing the restriction on the fixing strap and making it easy to remove the elastic frame.
[0026] Furthermore, the feed tube is arranged parallel to the axis of the roller, and the nozzles are arranged along the axis of the feed tube. The feed tube is the source of material supply in the large-size film preparation process. The above arrangement ensures that when the nozzles spray material, it can fall evenly onto the roller surface to achieve uniform coating.
[0027] Furthermore, the number of nozzles is determined by the height of the roller, which can be adjusted as needed. That is, when a larger film size needs to be prepared, a roller with a larger radius or a roller with a greater height can be used, thereby increasing the surface area of the roller to form a larger film size.
[0028] Furthermore, the feeding module also includes a controller, which is electrically connected to the feeding pipe and the nozzle. The controller controls the feeding of the feeding pipe and the nozzle, including the feeding speed and the feeding flow rate.
[0029] Furthermore, the controller is a PCL controller.
[0030] Furthermore, the controller can be replaced by a drive motor.
[0031] The usage process of this utility model is as follows:
[0032] First, a surface modifier, such as a fluorocarbon compound, is sprayed onto the roller sidewall area (including the fasteners connected thereto) within the elastic frame to reduce tack and prepare for the formation of a large-size film by subsequent sprayed materials (such as polymer coatings) and the separation of the large-size film.
[0033] The elastic frame is installed on the side wall of a roller with a radius of R. The fixing strap connected to the elastic frame is passed through the fixing member on the roller. The elastic frame is tightly attached to the roller surface by the cooperation of the saw teeth and the tenon. The required frame size can be selected according to actual needs. The surface area of the roller can be controlled by adjusting the size of the roller radius R and the height of the roller.
[0034] The polymer coating is sprayed onto the side wall of the roller through a nozzle at a certain speed. At the same time, the roller rotates at a fixed speed, so that the polymer coating is evenly sprayed onto the side wall of the roller during the rotation.
[0035] After spraying, the roller with the paint is carefully transferred to the drying equipment to dry the roller coated with polymer paint, so that the paint dries and forms a film.
[0036] Press the latch to release the limiting position of the fixing belt, remove the elastic frame from the roller, and then flatten the elastic frame to obtain a large-size film with uniformity.
[0037] This invention has at least the following beneficial effects: It can be used to prepare membranes of various sizes, and is also suitable for preparing larger membranes. The membrane size can be controlled by controlling the size of the roller radius R and the height of the roller, thereby improving the uniformity and quality of the membrane, while reducing the preparation cost, reducing the preparation difficulty, and improving production efficiency. Attached Figure Description
[0038] To further illustrate the above and other advantages and features of the various embodiments of the present invention, a more specific description of the various embodiments of the present invention will be presented with reference to the accompanying drawings. It is understood that these drawings depict only typical embodiments of the present invention and are therefore not intended to limit its scope. In the drawings, for clarity, the same or corresponding parts will be indicated by the same or similar reference numerals.
[0039] Figure 1 A schematic diagram of the apparatus for preparing large-size membranes in some embodiments of the present invention is shown;
[0040] Figure 2 It shows Figure 1 Cross-sectional view of the fastener at point A;
[0041] Figure 3 This invention provides a schematic diagram showing the structure of the latch when it is opened in some embodiments.
[0042] Figure 4 A schematic diagram of the apparatus for preparing large-size membranes in some embodiments of the present invention is shown;
[0043] Figure label:
[0044] 1-Roller, 101-Roller body, 102-Roller shaft, 1021-Columnar section, 1022-Protruding section, 2-Fixing component, 201-Elastic frame, 202-Fixing component, 2021-Fixing component body, 2022-Clamping tenon, 2022-1-Clamping head, 2022-2-Rotating shaft, 2023-Mounting hole, 203-Fixing belt, 2031-Fixing belt body, 2032-Sawtooth, 3-Feeding module, 301-Feeding pipe, 302-Nozzle, 4-Motor, 5-Brush;
[0045] a- The direction of movement of the latch. Detailed Implementation
[0046] It should be noted that the components in the accompanying drawings may be shown exaggerated for illustrative purposes and may not be to scale.
[0047] In this utility model, the various embodiments are merely intended to illustrate the solution of this utility model and should not be construed as limiting.
[0048] In this utility model, unless otherwise specified, the quantifiers “one” and “one” do not exclude scenarios involving multiple elements.
[0049] It should also be noted that in the embodiments of this utility model, only a portion of the parts or components may be shown for clarity and simplicity. However, those skilled in the art will understand that, under the teachings of this utility model, the required parts or components can be added according to the specific scenario.
[0050] It should also be noted that within the scope of this utility model, the terms "same", "equal", and "equal to" do not mean that the two values are absolutely equal, but allow for a certain reasonable error. In other words, the terms also cover "substantially the same", "substantially equal", and "substantially equal to".
[0051] It should also be noted that in the description of this utility model, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not explicitly or implicitly suggest that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0052] Furthermore, the embodiments of this utility model describe the process steps in a specific order. However, this is only for the convenience of distinguishing each step, and is not a limitation on the order of each step. In different embodiments of this utility model, the order of each step can be adjusted according to the process.
[0053] In the following embodiments, the nozzle 302 includes a fan-shaped nozzle or a hollow cone-shaped nozzle, and the nozzle 302 can also be other conventional nozzles; the material is a polymer coating such as polytetrafluoroethylene; the surface modifier is a fluorocarbon compound; the elastic frame 201 includes any one of a rubber frame, a resin frame or a plastic frame; the fastener 202 includes conventional fasteners such as buckles; and the controller is a PCL controller.
[0054] The following embodiments provide an apparatus for preparing large-size membranes. Figure 1 A schematic diagram of an apparatus for preparing large-size films is shown. The apparatus includes: a roller 1, a fixing component 2 mounted on the roller 1, a feeding module 3, and a motor 4. The roller 1 provides a carrier for the preparation and forming of the large-size film, including a roller body 101 and a roller 102 connected to the roller body 101. The roller 102 is a cylindrical roller. The fixing component 2 provides a fixed boundary for the large-size film. The feeding module 3 is used for conveying materials, including a feeding pipe 301, multiple nozzles 302 mounted on the feeding pipe 301, and a controller electrically connected to the feeding pipe 301 and the nozzles 302. The nozzles 302 communicate with the feeding pipe 301. The controller (not shown) controls the feeding of materials into the feeding pipe 301 and nozzles 302, including feeding speed and flow rate. The feeding pipe 301 is axially aligned with the roller 1. The nozzles 302 are arranged in a parallel direction along the axial direction of the feed pipe 301 to ensure that the material sprayed by the nozzles 302 falls evenly onto the surface of the roller 1 during operation, achieving uniform coating. The motor 4 drives the roller 1 to rotate. During the material spraying process by the nozzles 302, the roller 1 rotates at a fixed speed. The roller 1, in conjunction with the nozzles 302, achieves uniform coating of the material on its surface. The motor 4 is rotatably connected to the roller shaft 102, which drives the roller 1 to rotate. The motor 4 and the roller shaft 102 are detachably connected so that the roller 1 can be replaced when the radius R and height of the roller 1 need to be adjusted. The radius R and height of the roller 1 are adjustable. The final film size is controlled by adjusting the radius R and height of the roller 1. The surface area and frame size of the roller 1 are determined by the size of the film to be prepared. When a larger film size needs to be prepared, a roller 1 with a larger radius or a taller roller is replaced, thus increasing the surface area of the roller 1 to form a larger film size.
[0055] The fixing component 2 includes an elastic frame 201, a plurality of fixing members 202 for fixing the elastic frame 201, and a fixing strap 203 connected to the elastic frame 201. The elastic frame 201 has the characteristic of being flexible and deformable, and can conform to the side of the roller 1. In the process of preparing large-size film, the elastic frame 201 provides support and fixing boundary for the subsequently formed film, and facilitates the removal and flattening of the large-size film after film formation. The elastic frame 201 is placed on the side wall of the roller body 101, and the fixing members 202 are provided on the side wall of the roller body 101. The fixing members 202 have mounting holes 2023, and the fixing strap 203 passes through the mounting holes 2023 so that the elastic frame 201 is installed on the side wall of the roller 1. The fixing members 202 and the fixing strap 203 are responsible for firmly installing the elastic frame 201 on the side wall of the roller 1, ensuring that the position of the elastic frame 201 remains stable during the spraying and forming process, and that it will not be displaced or loosened. Figure 2 It shows Figure 1 The cross-sectional view of the fastener 202 at point A (when the latch 2022 is closed), i.e., the cross-sectional view of the fastener 202 when the elastic frame 201 is installed on the side wall of the roller 1, shows that the fastener 202 includes a fastener body 2021 and a latch 2022 provided on the fastener body 2021. The latch 2022 includes a latch head 2022-1 and a rotating shaft 2022-2 rotatably connected to the latch head 2022-1. The latch head 2022-1 is fitted with the serration 2032, and the rotating shaft 2022-2 is fixedly connected. On the fixing body 2021, the locking head 2022-1 can be moved back and forth around the rotating shaft 2022-2 along the threading direction of the fixing strap. The fixing strap 203 includes a fixing strap body 2031 and serrations 2032 provided on the fixing strap body 2031. The locking tenon 2022 engages with the serrations 2032. The locking tenon 2022 is used to limit the fixing strap 203. By pressing the locking tenon 2022, the limiting of the fixing strap 203 can be released, thereby facilitating the removal of the elastic frame 201 for subsequent drying of the film. The elastic frame 201 is fixed by moving the locking head 2022-1. When fixed ( Figure 2 Insert the fixing strap 203 into the mounting hole 2023, push the latch 2022, and make the clip head 2022-1 embed into the gap of the serration 2032 of the fixing strap 203 to fix the elastic frame 201 to the side wall of the roller 1; when releasing the fixation (when it is necessary to remove the elastic frame 201 that is close to the side wall of the roller 1): press the latch 2022, the clip head 2022-1 will lift up, and the clip head 2022-1 will disengage from the gap of the serration 2032 of the fixing strap 203, thereby releasing the restriction on the fixing strap 203 and making it easy to remove the elastic frame 201.
[0056] The usage process of this utility model is as follows:
[0057] First, a surface modifier is sprayed on the side wall area of the roller 1 (including the fastener 202 connected thereto) within the elastic frame 201 to reduce tackiness and prepare for the formation of a large-size film and the separation of the large-size film of the subsequent sprayed material.
[0058] The elastic frame 201 is installed on the side wall of the roller 1 with radius R. The fixing strap 203 connected to the elastic frame 201 is passed through the fixing member 202 on the roller 1. The elastic frame 201 is tightly attached to the surface of the roller 1 by the cooperation of the saw teeth 2032 and the tenon 2022. The surface area of the roller 1 can be controlled by adjusting the size of the radius R of the roller 1 and the height of the roller according to actual needs.
[0059] The material is sprayed onto the side wall of the roller 1 through the nozzle 302 at a certain speed. At the same time, the roller 1 rotates at a fixed speed, so that the material is evenly sprayed onto the side wall of the roller 1 during the rotation.
[0060] After the spraying is completed, the roller 1 with the paint is carefully transferred to the drying equipment to dry the roller 1 with the material so that the paint dries into a film.
[0061] Press the latch 2022; at this point, the latch 2022 opens, and the latch head lifts up. Figure 3 Release the limiting of the fixing belt 203, remove the elastic frame 201 from the roller 1, and then flatten the elastic frame 201 to obtain a large-size film with uniformity.
[0062] In some embodiments, the controller described above can be replaced by a drive motor.
[0063] In some embodiments, the bottom of the roller 1 is also provided with a brush 5, such as Figure 4 As shown, brush 5 can optimize the uniformity of the film.
[0064] In some embodiments, the housing shape of the motor 4 can be flexibly designed according to its function in the whole device and its connection structure with other components; the cylindrical roller can be replaced by other irregularly shaped rollers. Figure 4 A schematic diagram of the apparatus for preparing large-size films is shown. It can be seen that the housing shape of the motor 4 is designed to be arc-shaped or curved to match the shape of the roller 1. The irregularly shaped roller includes a cylindrical section 1021 and a protruding section 1022 connected to the cylindrical section 1021.
[0065] While some embodiments of this invention have been described in this application, those skilled in the art will understand that these embodiments are merely illustrative. Numerous variations, alternatives, and improvements will arise in those skilled in the art under the teachings of this invention without departing from its scope. The appended claims are intended to define the scope of this invention and thereby cover the methods and structures within the scope of the claims themselves and their equivalents.
Claims
1. An apparatus for preparing large-size membranes, characterized in that, include: A roller, which provides a carrier for the preparation and molding of large-size films, the roller includes a roller body and a roller connected to the roller body; A fixing component that provides a fixing boundary for a large-size film is disposed on the roller body; A feeding module for conveying materials includes a feeding pipe and a plurality of nozzles disposed on the feeding pipe, wherein the nozzles are connected to the feeding pipe. An electric motor is used to drive the roller to rotate, and the motor is detachably connected to the roller shaft.
2. The apparatus for preparing large-size membranes according to claim 1, characterized in that, The motor is rotatably connected to the roller; and / or The bottom of the roller is equipped with a brush.
3. The apparatus for preparing large-size membranes according to claim 1, characterized in that, The fixing component includes an elastic frame, a plurality of fixing members for fixing the elastic frame, and a fixing strap connected to the elastic frame. The elastic frame is placed on the side wall of the roller body, the fixing members are provided on the side wall of the roller body, and the fixing strap is movably connected to the fixing members.
4. The apparatus for preparing large-size membranes according to claim 3, characterized in that, The elastic frame includes any one of a rubber frame, a resin frame, or a plastic frame.
5. The apparatus for preparing large-size membranes according to claim 3, characterized in that, The fastener has mounting holes, and the fastening strap passes through the mounting holes so that the elastic frame is mounted on the side wall of the roller.
6. The apparatus for preparing large-size membranes according to claim 3, characterized in that, The fastener includes a fastener body and a latch provided on the fastener body, and the latch engages with the fastening strap.
7. The apparatus for preparing large-size membranes according to claim 6, characterized in that, The fixing strap includes a fixing strap body and serrations provided on the fixing strap body, and the tenon engages with the serrations.
8. The apparatus for preparing large-size membranes according to claim 7, characterized in that, The latch includes a latch head and a rotating shaft rotatably connected to the latch head. The latch head is adapted to the gap of the saw teeth, and the rotating shaft is fixedly connected to the body of the fixing component.
9. The apparatus for preparing large-size membranes according to claim 1, characterized in that, The feeding pipe is arranged in a direction parallel to the axial direction of the roller, and the nozzle is arranged along the axial direction of the feeding pipe.
10. The apparatus for preparing large-size membranes according to claim 1, characterized in that, The feeding module also includes a controller, which is electrically connected to the feeding pipe and the nozzle.