Tray circulation mechanism and semiconductor sorting device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a tray circulation mechanism and a semiconductor sorting device. The tray circulation mechanism comprises an empty tray circulation module and a material supplying and receiving module, the material supplying and receiving module is provided with a conveying space extending in the first direction, the empty tray circulation module is arranged below the material supplying and receiving module, the empty tray circulation module at least comprises a bearing table, and the bearing table can ascend and descend in the vertical direction so as to be moved into or out of the conveying space. According to the tray circulation mechanism, on the basis that empty tray circulation is met, interference with the mechanical arm is reduced, it is guaranteed that the empty tray circulation space and the circulation space of the mechanical arm cannot be overlapped as much as possible, and then the circulation efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a material tray transfer mechanism and a semiconductor sorting device. Background Technology

[0002] In semiconductor manufacturing, trays typically carry multiple chips for transfer and testing. A full tray is conveyed from the feed station to the loading station, where a robotic arm picks up the chips and transfers them to a testing machine. After testing, the chips are transferred to the unloading station's tray and then conveyed to the receiving station. During this process, empty trays after the chips are picked up at the loading station need to be returned to the feed station for collection, and empty trays need to be provided at the receiving station for the collection of tested chips.

[0003] In related technologies, to improve modularity and high integration, the feeding and receiving points are often located in the same position. This leads to overlap between the empty tray's rotation and the robot's rotation path, resulting in collisions between the empty tray and the robot. To address this, the robot typically needs to move to a safe position to avoid collisions during empty tray operation. If the empty tray cannot reach its target position in time, the robot's waiting time will be too long, affecting rotation efficiency. Utility Model Content

[0004] Therefore, it is necessary to provide a material tray transfer mechanism that, while satisfying the empty tray transfer requirement, reduces interference with the robot arm and ensures that the empty tray transfer space and the robot arm transfer space do not overlap as much as possible, thereby improving transfer efficiency.

[0005] A material tray transfer mechanism includes an empty tray transfer module and a material feeding and receiving module. The material feeding and receiving module has a conveying space extending along a first direction. The empty tray transfer module is located below the material feeding and receiving module. The empty tray transfer module includes at least a support platform. The support platform is capable of vertically lifting and lowering to move into or out of the conveying space.

[0006] Understandably, utilizing the vertical lifting and lowering of the support platform to achieve empty tray circulation reduces the space occupied by empty trays on the horizontal plane. Furthermore, because the empty tray circulation module is located below the feeding and receiving modules, empty tray circulation does not occupy the space above the feeding and receiving modules. This arrangement effectively separates the empty tray circulation space and the robot's circulation space on opposite sides of the feeding and receiving modules along the vertical direction, ensuring that their circulation spaces do not interfere with each other and thus avoiding overlap. The robot does not need to move to other positions to avoid empty tray circulation during handling, thereby improving circulation efficiency.

[0007] In some embodiments, the conveying space of the material receiving module is divided into a conveying area and a transfer area arranged along a first direction, and a support base plate for supporting the material tray is provided in the transfer area, and the carrier platform is provided corresponding to the transfer area.

[0008] In some embodiments, the empty disk transfer module further includes a transfer track, and the support platform is slidably connected to the transfer track.

[0009] In some embodiments, the feeding and receiving module includes a plurality of conveying tracks spaced apart along a second direction, the conveying tracks having the conveying space;

[0010] The transfer tracks are arranged vertically at intervals below the conveying tracks and intersect the conveying tracks three-dimensionally.

[0011] In some embodiments, the conveying track has a conveying area and a transfer area arranged along its own conveying direction. The transfer track has a plurality of spaced-apart mating positions along its own conveying direction. Each mating position corresponds one-to-one with a transfer area on each conveying track. The support platform can move vertically between the mating positions and the transfer areas.

[0012] In some embodiments, the empty disk transfer module further includes a sliding support base and a lifting structure. The sliding support base is slidably connected to the transfer track, and the lifting structure is disposed on the sliding support base and connected to the support platform. The lifting structure is used to drive the support platform to move up and down in the vertical direction.

[0013] In some embodiments, the feeding and receiving module includes a conveyor belt assembly and a pressing structure disposed in the conveying area. The pressing structure is disposed at one end of the conveyor belt assembly near the flow area and above the conveyor belt assembly.

[0014] In some embodiments, the pressing structure includes an assembly arm and pressing rollers rotatably connected to the assembly arm.

[0015] In some embodiments, the flow area is provided with support substrates on both sides along the second direction, and the support substrates on both sides can move closer to each other or move further away from each other along the first direction.

[0016] In some embodiments, the feeding and receiving module further includes a pushing structure, and the pushing structure is provided on both sides of the flow area along the first direction. One of the pushing structures is used to push the tray of the conveying area to the support substrate, and the other pushing structure is used to push the tray of the support substrate to the conveying area.

[0017] In some embodiments, the support platform includes a body and a clamping arm connected to the body, the clamping arm being able to move closer to or further away from the body to clamp or release the tray.

[0018] This application also provides a semiconductor sorting device, including a conveying mechanism and the above-mentioned tray transfer mechanism. The conveying mechanism is located above the tray transfer mechanism and is used to pick up chips from the tray on the tray transfer mechanism or to place chips into the tray on the tray transfer mechanism. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A top view schematic diagram of a material tray transfer mechanism provided in an embodiment of this application;

[0021] Figure 2 for Figure 1 A top view of the provided tray transfer mechanism;

[0022] Figure 3 A bottom view of a tray transfer mechanism provided in an embodiment of this application;

[0023] Figure 4 This is a first partial schematic diagram of a material tray transfer mechanism provided in an embodiment of this application;

[0024] Figure 5 This is a second partial schematic diagram of a material tray transfer mechanism provided in an embodiment of this application;

[0025] Figure 6 This is a partial schematic diagram of the lifting of the support platform in a material tray transfer mechanism provided in an embodiment of this application;

[0026] Figure 7 This is a partial schematic diagram of the lowering of the support platform in a material tray transfer mechanism provided in an embodiment of this application.

[0027] Reference numerals: 10. Empty tray transfer module; 11. Support platform; 12. Transfer track; 13. Sliding support seat; 14. Lifting structure; 20. Feeding and receiving module; 21. Conveying track; 22. Support base plate; 23. Conveyor belt assembly; 24. Pressing structure; 25. Pushing structure; 111. Body; 112. Clamping arm; 141. Lifting drive source; 142. Assembly base plate; 143. Sliding block; 144. Connecting rod; 145. First slider; 201. Conveying space; 211. Side enclosure; 212. Limiting baffle; 241. Assembly arm; 242. Pressing roller; 1201. Mating tray position; 2011. Conveying area; 2012. Transfer area. Detailed Implementation

[0028] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0029] It should be noted that when a component is referred to as being "fixed to" or "attached to" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0031] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application's specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0033] Please see Figures 1 to 4 One embodiment of this application provides a material tray transfer mechanism, including an empty tray transfer module 10 and a feeding and receiving module 20. The feeding and receiving module 20 is provided with a conveying space 201 extending along a first direction, and the empty tray transfer module 10 is located below the feeding and receiving module 20. The empty tray transfer module 10 includes at least a support platform 11, which is capable of vertically lifting and lowering to move into or out of the conveying space 201.

[0034] The first direction is the Y-axis, and the vertical direction is the Z-axis, which is the up-down direction. The feeding and receiving module 20 is used to transport full-loaded trays and collect empty trays. The conveying space 201 of the feeding and receiving module 20 extends along the Y-axis, facilitating the conveying of trays along the Y-axis. These trays can be full or empty. The empty tray transfer module 10 is used to transport empty trays. When the support platform 11 rises vertically, the empty trays on the support platform 11 can be sent into the conveying space 201 of the feeding and receiving module 20, facilitating their transport via the feeding and receiving module 20. Conversely, when the support platform 11 descends vertically, the empty trays located in the conveying space 201 can be removed and then transported to the target location using the empty tray transfer module 10.

[0035] In other words, the vertical lifting and lowering of the support platform 11 enables the empty tray to rotate, reducing the space occupied by the empty tray in the horizontal plane. Furthermore, because the empty tray rotation module 10 is located below the feeding and receiving module 20, the empty tray rotation does not occupy the space above the feeding and receiving module 20. This arrangement effectively separates the empty tray rotation space and the robot's rotation space on opposite sides of the feeding and receiving module 20 in the vertical direction, ensuring that their rotation spaces do not interfere with each other and thus avoiding overlap. The robot does not need to move to other positions to avoid the empty tray rotation during handling, thereby improving rotation efficiency.

[0036] It should be noted that both empty and full trays can be referred to as trays.

[0037] The upper surface of the support platform 11 is flat to stably support the material tray. The size of the support platform 11 can be slightly larger than the size of the material tray to ensure that the material tray is placed stably on the support platform 11. The support platform 11 can be made of lightweight, high-strength materials such as aluminum alloy or stainless steel, which ensures the load-bearing capacity of the support platform 11 while reducing the overall weight and facilitating lifting operations.

[0038] Please see Figures 1 to 3 In some embodiments, the conveying space 201 of the feeding and receiving module 20 is divided into a conveying area 2011 and a transfer area 2012 arranged along a first direction. A support base plate 22 for supporting the tray is provided in the transfer area 2012, and a support platform 11 is positioned corresponding to the transfer area 2012. It is understood that the conveying area 2011 is mainly used for conveying the tray along the Y-axis, while the transfer area 2012 is adapted to the empty tray transfer module 10 and is a specific area for empty tray transfer, improving the accuracy and stability of empty tray transfer. Therefore, by dividing the conveying space 201, the transfer of the tray becomes more orderly and efficient. The support platform 11 only needs to move to the position corresponding to the transfer area 2012 to rise and fall vertically to realize the transfer of empty trays between the feeding and receiving module 20 and the empty tray transfer module 10. When the support platform 11 rises, it can transport the tray to the flow area 2012 of the conveying space 201, and use the support base plate 22 of the flow area 2012 to support the tray, thereby improving the stability of the tray flow process.

[0039] In practical use, an empty tray from the receiving module 20 can be conveyed along the conveying area 2011 to the transfer area 2012 and supported on the support substrate 22. Then, the support platform 11 rises vertically and supports the bottom of the empty tray, thus conveying the empty tray to the lower part of the conveying space 201. The empty tray is then transferred via the empty tray transfer module 10, for example, to the receiving position. Alternatively, after being picked up at the loading position, the empty tray is transferred via the empty tray transfer module 10 to the lower part of the transfer area 2012. The support platform 11 rises vertically to move the empty tray into the conveying space 201 and support it on the support substrate 22. Then, it is transferred along the conveying area 2011 to the empty tray receiving area via the receiving module 20.

[0040] The support substrate 22 can move along the X-axis, reducing interference from the vertical conveying tray of the support platform 11. The movement of the support substrate 22 will be described in detail later.

[0041] Please see Figures 1 to 4 In some embodiments, the empty disc circulation module 10 further includes a circulation track 12, to which the support platform 11 is slidably connected. It is understood that the circulation track 12 facilitates the movement of the support platform 11 below the feeding and receiving module 20, aiding in the circulation of empty discs. Simultaneously, the cooperation between the support platform 11 and the circulation track 12 also guides the movement of the support platform 11, promoting smooth movement. The circulation track 12 and the support platform 11 can be slidably connected via a slider. The cross-section of the circulation track 12 can be dovetail-shaped, with the slider adapted to it, and the support platform 11 fixed to the slider by screws. Alternatively, the cross-section of the circulation track 12 can be I-shaped. This is merely an example.

[0042] In practical use, the empty disc circulation module 10 also includes a drive mechanism connected to the support platform 11 for driving the platform 11 to move. The drive mechanism includes a motor and a transmission belt assembly. The motor is connected to the drive pulley in the transmission belt assembly, and the transmission belt in the assembly is connected to an assembly block, which is connected to the support platform 11 to drive the platform 11. Alternatively, a screw drive mechanism can be used, as long as it can satisfy the movement of the support platform 11.

[0043] Please continue reading. Figures 1 to 4 In some embodiments, the material receiving module 20 includes a plurality of conveying tracks 21 spaced apart along a second direction, each conveying track 21 having a conveying space 201. Transfer tracks 12 are arranged vertically spaced below the conveying tracks 21 and intersect them three-dimensionally. The second direction is the X-axis direction.

[0044] In other words, the material receiving module 20 includes multiple conveying tracks 21 spaced apart along the X-axis, and the conveying direction of each conveying track 21 is along the Y-axis. Each conveying track 21 is correspondingly provided with a transfer area 2012 and a conveying area 2011. The transfer track 12 in the empty disc transfer module 10 is located below the multiple transfer areas 2012. The length direction of the transfer track 12 is along the X-axis. The support platform 11 moves along the length direction of the transfer track 12 to transfer between the various transfer areas 2012, thereby realizing the transfer of empty discs at each conveying track 21.

[0045] Understandably, this three-dimensional cross-configuration allows for flexible movement of empty disks in three-dimensional space. That is, empty disks can move along the X-axis, Z-axis, and Y-axis, greatly improving the efficiency and flexibility of empty disk movement and reducing interference between empty disk movement and robotic arm movement.

[0046] Each conveyor track 21 can be driven by a chain or belt, as long as it can allow the material tray to move along the Y-axis within the conveying space 201. This is just an example.

[0047] Please continue reading. Figures 1 to 4 In some embodiments, the conveying track 21 has a conveying area 2011 and a transfer area 2012 arranged along its own conveying direction. The transfer track 12 has a plurality of spaced-apart mating positions 1201 along its own conveying direction (i.e., along the X-axis direction), each mating position 1201 corresponding one-to-one with a transfer area 2012 on each conveying track 21. The support platform 11 can move vertically between the mating positions 1201 and the transfer areas 2012. It can be understood that by using a plurality of mating positions 1201 corresponding one-to-one with the transfer areas 2012 on each conveying track 21, it is ensured that when the support platform 11 moves along the transfer track 12 to a specific position (i.e., at the corresponding mating position 1201), it can move exactly below the transfer area 2012, which improves the accuracy of the support platform 11 in vertical lifting and lowering and reduces the risk of material tray collision damage caused by the offset of the support platform 11.

[0048] The mating plate 1201 can be set as a marker point on the transfer track 12 to indicate the precise stopping position of the carrier platform 11 along the X-axis. In some specific embodiments, multiple sets of detection components can be arranged along the transfer track 12, each set of detection components corresponding to one mating plate 1201. Each set of detection components includes two sensors arranged at intervals along the X-axis, the length between the two sensors being exactly adapted to the size of the transfer area 2012, thereby marking the moving position of the carrier platform 11 on the transfer track 12. Each sensor can be a through-beam sensor. When two sensors are triggered simultaneously, it indicates that the carrier platform 11 is located at the corresponding mating plate 1201, facilitating transfer along the Z-axis.

[0049] Please see Figure 1 , Figure 3 , Figure 6 and Figure 7 In some embodiments, the empty disk transfer module 10 further includes a sliding support 13 and a lifting structure 14. The sliding support 13 is slidably connected to the transfer track 12, and the lifting structure 14 is disposed on the sliding support 13 and connected to the support platform 11. The lifting structure 14 is used to drive the support platform 11 to move vertically. It is understood that the lifting structure 14 facilitates the movement of the support platform 11 vertically, enabling the transfer of empty disks between the empty disk transfer module 10 and the material feeding / receiving module 20. The lifting structure 14 can be a cylinder mechanism, a chain drive, a synchronous belt drive, or a combination of a cylinder and a connecting rod 144. It only needs to satisfy the requirement that the support platform 11 moves vertically along the Z-axis. Simultaneously, the sliding support 13 isolates the lifting structure 14 from the transfer track 12 in assembly, separating the lifting motion from the movement along the X-axis, thus improving the stability of each movement.

[0050] like Figure 6 and Figure 7 As shown, in some specific embodiments, the lifting structure 14 includes a lifting drive source 141, an assembly base plate 142, a sliding block 143, and a connecting rod 144. The sliding block 143 is slidably connected to the assembly base plate 142, and the assembly base plate 142 is fixed to the aforementioned sliding support seat 13; of course, the two can also be integrally formed. The lifting drive source 141 is connected to the sliding block 143, and the connecting rod 144 is hinged between the support platform 11 and the sliding block 143. The lifting drive source 141 can drive the sliding block 143 to move horizontally, so as to drive the support platform 11 to rise and fall through the connecting rod 144. There are two sliding blocks 143, which are spaced apart along the Y-axis. Each sliding block 143 is connected to at least two connecting rod groups spaced apart along the X-axis, and each connecting rod group includes two cross-arranged connecting rods 144.

[0051] Furthermore, a first slider 145 is slidably connected to the bottom of the support platform 11, and the end of the connecting rod 144 facing away from the sliding block 143 is hinged to the first slider 145. The support platform 11 and the first slider 145 can be slidably connected via a guide rail, and the sliding block 143 and the assembly base plate 142 can also be slidably connected via a guide rail.

[0052] like Figure 6 and Figure 7 As shown, in some embodiments, the support platform 11 includes a body 111 and a clamping arm 112 connected to the body 111. The clamping arm 112 can move closer to or further away from the body 111 to clamp or release the tray. It is understood that the clamping arm 112 is used to clamp and release the tray, thereby improving the fixation of the tray and preventing the support platform 11 from causing the tray to move and resulting in displacement. Two clamping arms 112 are provided, arranged opposite each other and spaced apart along the Y-axis. The two clamping arms 112 can move along the Y-axis to clamp and release the tray.

[0053] Of course, the two clamping arms 112 can also be arranged opposite each other and spaced apart along the X-axis, or clamping arms 112 can be provided in both the Y-axis and Z-axis directions to further enhance the fixing effect.

[0054] In some specific embodiments, the body 111 has a plate-like structure. Each clamping arm 112 is equipped with a corresponding cylinder, which is connected to the bottom of the body 111 to reduce interference with the material tray's load-bearing capacity. The cylinder drives the clamping arm 112 to move, achieving clamping and releasing. Each clamping arm 112 includes two spaced-apart arm bodies, increasing the force-bearing points relative to the material tray and facilitating uniform force distribution. Additionally, an elastic pad can be provided on the side of the clamping arm 112 facing the material tray to reduce clamping damage to the material tray.

[0055] In other embodiments, a protruding post for interlocking with the material tray can be provided on the support platform 11, as long as it can maintain the reliability and stability of the connection between the support platform 11 and the material tray.

[0056] Please see Figure 1 , Figure 4 and Figure 5 In some embodiments, the receiving module 20 includes a conveyor belt assembly 23 and a pressing structure 24 disposed in the conveying area 2011. The pressing structure 24 is disposed at one end of the conveyor belt assembly 23 near the flow area 2012 and is located above the conveyor belt assembly 23.

[0057] Understandably, the conveyor belt assembly 23 is positioned in the conveying area 2011 to drive the material tray to move along the Y-axis. The conveyor belt assembly 23 may include at least two parallel conveyor belts spaced apart along the X-axis, which operate synchronously to support and convey the material tray. For example, the corresponding drive wheels of these conveyor belts may be connected to the same drive rod to achieve synchronous operation. Meanwhile, the pressing structure 24 is positioned at one end of the conveyor belt assembly 23 near the flow area 2012 and above the conveyor belt assembly 23. When the material tray moves from the flow area 2012 to the conveyor belt assembly 23 in the conveying area 2011, or from the conveyor belt assembly 23 in the conveying area 2011 to the flow area 2012, the pressing structure 24 presses the material tray against the conveyor belt, ensuring a smooth transition and preventing jumping or tilting due to speed changes or height differences.

[0058] Furthermore, the pressing structure 24 includes an assembly arm 241 and a pressing roller 242 rotatably connected to the assembly arm 241.

[0059] In practical use, each conveyor track 21 includes side enclosures 211 arranged opposite to each other and spaced apart along the X-axis. The area between two side enclosures 211 serves as the conveying space 201. The aforementioned conveyor belt assembly 23 and support base plate 22 are both located on the side enclosures 211 to maintain assembly stability. The pressing structure 24 is also installed on the side enclosures 211. Specifically, the assembly arm 241 is rotatably connected to the side enclosure 211 via a rotating shaft, and a torsion spring is installed on the rotating shaft. One end of the torsion spring is connected to the side enclosure 211, and the other end is connected to the assembly arm 241, causing the assembly arm 241 to always have a downward swinging tendency. The pressing roller 242 is rotatably connected to the assembly arm 241 and can press the material tray downward under the action of the assembly arm 241. In this process, it is precisely because of the rotation of the pressing roller 242 that wear on the material tray can be reduced, and the conveying obstruction of the material tray can be reduced.

[0060] Each of the two side enclosures 211 is equipped with a corresponding pressing structure 24 to apply pressure to both sides of the material tray along the X-axis, maintaining uniform force. Simultaneously, the downward force and displacement of the pressing structure 24 can be adjusted to accommodate material trays of different sizes, improving adaptability and flexibility. For example, the performance of the torsion spring can be adjusted to accommodate the downward displacement and force of the pressing structure 24. Alternatively, the assembly arm 241 can be connected to the side enclosure 211 via a base, and the base can move vertically relative to the side enclosure 211, locking it in place with screws or bolts. This is merely an example.

[0061] like Figure 5As shown, in some embodiments, the flow area 2012 is provided with support substrates 22 on both sides along the second direction, and the support substrates 22 on both sides can move closer to each other or move further away from each other along the first direction.

[0062] As mentioned above, the support base plates 22 are configured to support the tray in the transfer area 2012. Therefore, by moving the two support base plates 22 along the X-axis, the tray can be easily moved into or out of the conveying space 201, reducing interference with the vertical movement of the tray. Simultaneously, this configuration allows for adjustment of the spacing between the two support base plates 22 along the X-axis, making it suitable for trays of different widths.

[0063] In actual use, the support surfaces of the support base plate 22 and the conveyor belt assembly 23 are at the same height. When the tray is transferred from the feeding and receiving module 20 to the empty tray transfer module 10, the empty tray moves onto the support base plate 22 with the cooperation of the conveyor belt assembly 23 and the pressing structure 24. The support platform 11 rises to support the bottom of the empty tray. At this time, the two support base plates 22 move in opposite directions along the X-axis to move out of the range of the empty tray. The support platform 11 drives the empty tray to move down under the action of the lifting structure 14, and then moves and transfers along the X-axis via the empty tray transfer module 10. Conversely, when the support platform 11 drives the empty tray to move up, the two support base plates 22 are in a far apart state, that is, not on the path of the support platform 11 conveying along the Z-axis. When the empty tray is above the two support base plates 22, the support platform 11 stops lifting and lowering, and the two support base plates 22 move closer to each other along the X-axis and jointly support the bottom of the empty tray. After the two support base plates 22 are stably supported, the support platform 11 descends.

[0064] In some specific embodiments, the tops of the two side enclosures 211 that form the conveying space 201 are provided with notches, and limit baffles 212 are connected to the notches. The limit baffles 212 and the notches on the side enclosures 211 together form an assembly gap for the support substrate 22 to pass through, and guide the movement of the support substrate 22. One end of the limit baffle 212 along the Y-axis is rotatably connected to the side enclosure 211, and the other end is snap-fitted to the side enclosure 211 or locked with screws. This arrangement, while maintaining the assembly limit of the support substrate 22, facilitates the disassembly, assembly, and replacement of the support substrate 22.

[0065] like Figure 1 and Figure 5 As shown, in some embodiments, the material receiving module 20 further includes a push structure 25. The transfer area 2012 is provided with push structures 25 on both sides along the Y-axis direction. One push structure 25 is used to push the tray of the conveying area 2011 to the support substrate 22, and the other push structure 25 is used to push the tray of the support substrate 22 to the conveying area 2011.

[0066] A first pushing structure 25, positioned near the conveying area 2011, and a second pushing structure are used. The first pushing structure pushes the trays on the conveyor belt assembly 23 to the support base plate 22, while the second pushing structure pushes the trays on the support base plate 22 to the conveyor belt assembly 23. In other words, the use of the first and second pushing structures facilitates smoother flow and transition between the tray transfer area 2012 and the conveying area 2011, reduces manual intervention, and thus improves tray transfer efficiency, stability, and accuracy during the transfer process. Both the first and second pushing structures can be pneumatic cylinders, hydraulic cylinders, or electric push rods, and can be equipped with baffles or push blocks at their respective conveying ends to act on the trays. The first and second pushing structures can be positioned near the center to ensure uniform force distribution. Alternatively, they can be positioned near the edges, as long as they are sufficient to push the trays.

[0067] This application also provides a semiconductor sorting device, including a conveying mechanism and the aforementioned tray transfer mechanism. The conveying mechanism is located above the tray transfer mechanism and is used to pick up chips from the trays on the tray transfer mechanism or place chips into the trays on the tray transfer mechanism. Because the conveying mechanism is located above the tray transfer mechanism, it can be vertically separated from the empty tray transfer module 10, reducing interference between the empty tray transfer and the conveying mechanism and improving the overall transfer efficiency.

[0068] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A tray flow mechanism characterized by, It includes an empty disc circulation module (10) and a feeding and receiving module (20). The feeding and receiving module (20) is provided with a conveying space (201) extending in a first direction. The empty disc circulation module (10) is located below the feeding and receiving module (20). The empty disc circulation module (10) includes at least a support platform (11). The support platform (11) can be raised and lowered in the vertical direction to move into or out of the conveying space (201).

2. The tray flow-through mechanism of claim 1, wherein, The conveying space (201) of the material receiving module (20) is divided into a conveying area (2011) and a transfer area (2012) arranged along a first direction. A support base plate (22) for supporting the material tray is provided in the transfer area (2012), and the carrier platform (11) is provided corresponding to the transfer area (2012).

3. The tray flow-through mechanism of claim 1, wherein, The empty disk transfer module (10) also includes a transfer track (12), and the support platform (11) is slidably connected to the transfer track (12).

4. The tray flow-through mechanism of claim 3, wherein, The feeding and receiving module (20) includes a plurality of conveying tracks (21) arranged at intervals along a second direction, and the conveying tracks (21) have the conveying space (201); The transfer track (12) is arranged vertically at intervals below the conveying track (21) and intersects the conveying track (21) in three dimensions.

5. The tray flow-through mechanism of claim 4, wherein, The conveying track (21) has a conveying area (2011) and a transfer area (2012) arranged along its own conveying direction. The transfer track (12) has a plurality of spaced mating positions (1201) arranged along its own conveying direction. Each mating position (1201) corresponds one-to-one with the transfer area (2012) on each conveying track (21). The support platform (11) can move vertically between the mating position (1201) and the transfer area (2012).

6. The tray flow-through mechanism of claim 3, wherein, The empty disk transfer module (10) further includes a sliding support (13) and a lifting structure (14). The sliding support (13) is slidably connected to the transfer track (12). The lifting structure (14) is located on the sliding support (13) and connected to the support platform (11). The lifting structure (14) is used to drive the support platform (11) to move up and down in the vertical direction.

7. The tray flow-through mechanism of claim 2 or 5, wherein, The feeding and receiving module (20) includes a conveyor belt group (23) and a pressing structure (24) located in the conveying area (2011). The pressing structure (24) is located at one end of the conveyor belt group (23) near the flow area (2012) and above the conveyor belt group (23).

8. The tray flow-through mechanism of claim 7, wherein, The pressing structure (24) includes an assembly arm and a pressing roller rotatably connected to the assembly arm.

9. The tray flow-through mechanism of claim 2 or 5, wherein, The circulation area (2012) is provided with support substrates (22) on both sides along the second direction, and the support substrates (22) on both sides can move closer to each other or move further away from each other along the first direction.

10. The tray flow-through mechanism of claim 2, wherein, The feeding and receiving module (20) further includes a push structure (25). The transfer area (2012) is provided with the push structure (25) on both sides along the first direction. One of the push structures (25) is used to push the tray of the conveying area (2011) to the support substrate (22), and the other push structure (25) is used to push the tray of the support substrate (22) to the conveying area (2011).

11. The tray flow-through mechanism of claim 1, wherein, The support platform (11) includes a body (111) and a clamping arm (112) connected to the body (111). The clamping arm (112) can move closer to or further away from the body (111) to clamp or release the tray.

12. A semiconductor sorting device, characterized by It includes a conveying mechanism and a tray transfer mechanism as described in any one of claims 1 to 11, wherein the conveying mechanism is disposed above the tray transfer mechanism and is used to pick up chips from the tray on the tray transfer mechanism or to place chips into the tray on the tray transfer mechanism.

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