PVD (Physical Vapor Deposition) equipment gas supply device

Abstract

The utility model provides a PVD (Physical Vapor Deposition) equipment air supply device, which comprises a PVD coating machine and a vacuum coating bin, a constant temperature bin used for temperature regulation is arranged in the PVD coating machine, the constant temperature bin comprises a heating pipe fixedly arranged at the upper part in the constant temperature bin, a temperature guide plate fixedly arranged on the constant temperature bin is arranged below the heating pipe, and the vacuum coating bin is arranged below the temperature guide plate. And a temperature guide sleeve which is fixedly mounted in the constant-temperature bin and is used for conducting temperature is arranged between the heating pipe and the temperature guide plate. The heating pipe is electrified to generate heat, the heat is conducted to the gas supply pipe through the temperature guide sleeve to heat the gas in the pipe, the temperature guide plate enables the gas supply pipe to be heated more uniformly, the stable gas temperature rising effect is guaranteed, when the gas needs to be cooled, the cooling fan is started to cool the temperature guide plate, and then the gas in the gas supply pipe is cooled. Furthermore, the crystallinity, compactness and other properties of the film are improved, the growth rate and quality of the film are improved, and the stability and reliability of the PVD coating process are enhanced.

Description

Technical Field

[0001] This utility model relates to the field of gas supply for PVD equipment, specifically a gas supply device for PVD equipment. Background Technology

[0002] With the rapid development of modern industry, physical vapor deposition (PVD) technology has been widely used in many fields such as electronics, optics, and mechanical manufacturing. As a key component in the PVD technology process, the gas supply device of PVD equipment directly affects the stability of the PVD process and the quality of thin film products. The gas supply device of PVD equipment is mainly used to provide specific types and flow rates of gas to the vacuum chamber of PVD equipment to meet process requirements. In the PVD coating process, inert gases such as argon are usually used as sputtering gases. Specific types and flow rates of gas are introduced into the vacuum chamber through the gas supply system to prevent oxidation reactions from affecting the coating quality, thereby affecting the deposition behavior of the coating material atoms on the substrate surface and influencing the composition, structure, and properties of the thin film.

[0003] Because certain special gases are required to meet specific process requirements when coating products, the unused gas in the vacuum environment is also discharged when the finished product is removed after coating, resulting in a waste of special gas resources and an increase in gas consumption costs. At the same time, the temperature of the special gas provided directly affects the chemical reaction rate and thus the coating effect when coating different products to meet specific process requirements. However, the existing gas supply device of PVD equipment cannot regulate the temperature of the provided special gas during evaporation coating, which reduces the growth rate and quality of the film.

[0004] Therefore, we provide a gas supply device for PVD equipment. Utility Model Content

[0005] The main objective of this invention is to provide a gas supply device for PVD equipment, which can effectively solve the problems mentioned in the background art, such as the waste of special gas resources caused by the discharge of unused special gas, and the inability to regulate the temperature of the supplied special gas, thereby reducing the growth rate and quality of the film.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A gas supply device for PVD equipment includes a PVD coating machine and a vacuum coating chamber. The PVD coating machine has a constant temperature chamber for temperature regulation inside. The constant temperature chamber includes a heating pipe fixedly installed at the top inside, a temperature-conducting plate fixedly installed on the constant temperature chamber below the heating pipe, a temperature-conducting sleeve fixedly installed inside the constant temperature chamber for temperature conduction between the heating pipe and the temperature-conducting plate, and a gas supply pipe for gas delivery fitted inside the temperature-conducting sleeve. A cooling fan for cooling is fixedly installed at the bottom of the constant temperature chamber. Two gas storage tanks are provided on one side of the constant temperature chamber, and one of the gas storage tanks is connected to the gas supply pipe. A gas pipe for gas transmission is connected between the two gas storage tanks, and an electrically controlled valve is provided on both sides of each of the two gas storage tanks. An air pump is connected to the bottom of the vacuum coating chamber, and a three-way device is fixedly connected to one side of the air pump. Electrically controlled valves are fixedly installed on both sides of the three-way device, and one of the electrically controlled valves is connected to the other gas storage tank through a gas pipe.

[0008] In the above scheme, preferably, one side of the vacuum coating chamber is provided with an observation window that can be used to penetrate the interior, and a chamber cover is fitted and movably connected to the top of the vacuum coating chamber, and a hinge is provided between the chamber cover and the vacuum coating chamber to connect the two.

[0009] In the above scheme, preferably, the upper side of the vacuum coating chamber is provided with a latch for closing the chamber cover above it, and a resistance coating stage is fixedly installed inside the vacuum coating chamber, and an air hole is provided below the resistance coating stage.

[0010] In the above scheme, preferably, a connecting pipe is fixedly installed below the vacuum coating chamber, and the air hole is connected to the connecting pipe. The connecting pipe is located above the air pump and is connected to it. The air pump is connected to the inside of the vacuum coating chamber through the connecting pipe and the air hole.

[0011] In the above scheme, preferably, handles for opening and closing are fixedly installed on both sides of the upper part of the chamber cover, and a mounting frame for fixing on the PVD coating machine is provided below the vacuum coating chamber, and the mounting frame is used to install the air pump.

[0012] In the above scheme, preferably, an installation base for supporting and fixing the gas storage tank is fixedly installed on one side of the PVD coating machine, and a support rod for supporting and fixing the constant temperature chamber to provide heat dissipation space is fixedly installed on one side of the PVD coating machine.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] This type of PVD equipment's gas supply device, through the installation of a constant temperature chamber, heating pipes, and a temperature-conducting plate, achieves the function of regulating the gas supply temperature. Inside the constant temperature chamber, the heating pipes are energized to generate heat, which is conducted to the gas supply pipe through the temperature-conducting sleeve, heating the gas inside the pipe. The temperature-conducting plate ensures more uniform heating of the gas supply pipe, guaranteeing a stable gas heating effect. When it is necessary to cool the gas, the cooling fan is activated to cool the temperature-conducting plate, thereby cooling the gas inside the gas supply pipe. This helps to improve the crystallinity and density of the film, increasing the film growth rate and quality, and enhancing the stability and reliability of the PVD coating process.

[0015] This type of PVD equipment gas supply device, through the installation of a gas storage tank, a three-way device, and an electrically controlled valve, achieves the function of efficient recovery and reuse of special gases. After the coating is completed, the gas pump is started, and the unused special gas in the vacuum coating chamber is drawn in through the gas hole and connecting pipe, and then transported back to another gas storage tank through the three-way device and the electrically controlled valve. This effectively avoids the waste of special gases and reduces gas consumption costs. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0018] Figure 2 This is a schematic diagram of the internal structure of the PVD coating machine in this utility model.

[0019] Figure 3 This is a schematic diagram of the bottom structure of the vacuum coating chamber in this utility model.

[0020] Figure 4 This is a schematic diagram of the internal structure of the constant temperature chamber in this utility model.

[0021] Figure 5 This is a partial structural diagram of the heat sink in this utility model.

[0022] Figure 6 This is a schematic diagram of the connection structure between the vacuum coating chamber and the air pump in this utility model.

[0023] Figures 1-6Components: 1. PVD coating machine; 101. Mounting frame; 2. Vacuum coating chamber; 201. Observation window; 202. Hinge; 203. Connecting pipe; 204. Resistance coating stage; 205. Air vent; 3. Chamber cover; 301. Handle; 4. Lock; 5. Air tank; 501. Electrically controlled valve one; 6. Mounting base; 7. Air pipe; 8. Constant temperature chamber; 801. Heating tube; 802. Cooling fan; 803. Temperature guide plate; 804. Air supply pipe; 805. Temperature guide sleeve; 9. Air pump; 901. T-junction device; 902. Electrically controlled valve two; 10. Support rod. Detailed Implementation

[0024] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0025] like Figures 1-6 As shown, in this embodiment, a gas supply device for a PVD equipment includes a PVD coating machine 1 and a vacuum coating chamber 2. The PVD coating machine 1 has a constant temperature chamber 8 for temperature regulation inside. The constant temperature chamber 8 includes a heating pipe 801 fixedly installed at its upper part, and a temperature-conducting plate 803 fixedly installed on the constant temperature chamber 8 below the heating pipe 801. A temperature-conducting sleeve 805 fixedly installed inside the constant temperature chamber 8 for temperature conduction is provided between the heating pipe 801 and the temperature-conducting plate 803. A gas supply pipe 804 for gas delivery is fitted inside the temperature-conducting sleeve 805. The lower part of the constant temperature chamber 8 is fixedly installed... A cooling fan 802 for cooling and heat dissipation is fixedly installed. Two air storage tanks 5 are provided on one side of the constant temperature chamber 8, and one of the air storage tanks 5 is connected to the air supply pipe 804. An air pipe 7 for gas transmission is connected between the two air storage tanks 5. An electric control valve 501 is provided on both sides of the two air storage tanks 5. An air pump 9 is connected to the bottom of the vacuum coating chamber 2. A three-way device 901 is fixedly connected to one side of the air pump 9. An electric control valve 902 is fixedly installed on both sides of the three-way device 901. One of the electric control valves 902 is connected to the other air storage tank 5 through the air pipe 7.

[0026] Specifically, with this setup, one of the two gas storage tanks 5 is connected to the gas supply pipe 804 to deliver the stored special gas. A constant-temperature chamber 8 is provided, where the heating element 801 generates heat when energized. This heat is conducted through the temperature-conducting sleeve 805, heating the gas in the gas supply pipe 804 embedded within the sleeve, thus raising the gas temperature. The temperature-conducting plate 803 provides uniform heat conduction, ensuring more even heating of the gas supply pipe 804. Since the constant-temperature chamber 8 has air vents, when cooling is needed, the cooling fan 802 is activated to dissipate excess heat from the chamber. The cooling fan 802 is connected to the temperature-conducting plate 803, cooling the plate and thus the gas inside the temperature-conducting sleeve 805. The gas in the gas supply pipe 804 is cooled. Secondly, the two gas storage tanks 5 are connected by a gas pipe 7, and there are electric control valves 501 on both sides to control the flow and storage of gas from one gas storage tank 5 to the other gas storage tank 5 under pressure difference. If the gas is gradually used up, the other gas storage tank 5 on the mounting base 6 is replaced to replenish the gas. Since the air hole 205 is connected to the connecting pipe 203, the air pump 9 is connected to the inside of the vacuum coating chamber 2 through the connecting pipe 203 and the air hole 205. After the coating is completed, the air pump 9 is started to extract the unused special gas in the chamber. Through the three-way device 901 and one of the electric control valves 902, the gas is transported back to the other gas storage tank 5 through the gas pipe 7 for storage, realizing the recycling of special gas and reducing gas consumption costs.

[0027] like Figures 1-6 As shown, in this embodiment, a viewing window 201 that can be used to penetrate the interior is provided on one side of the vacuum coating chamber 2. A chamber cover 3 is movably connected to the top of the vacuum coating chamber 2, and a hinge 202 for connecting the two is provided between the chamber cover 3 and the vacuum coating chamber 2. A latch 4 for closing the chamber cover 3 is provided on the upper side of the vacuum coating chamber 2. A resistance coating stage 204 is fixedly installed inside the vacuum coating chamber 2, and an air hole 205 is provided below the resistance coating stage 204. A connecting pipe 203 is fixedly installed below the vacuum coating chamber 2, and the air hole 205 is connected to the connecting pipe 203. The connecting pipe 203 is located above the air pump 9 and is connected to it. The air pump 9 is connected to the interior of the vacuum coating chamber 2 through the connecting pipe 203 and the air hole 205.

[0028] Specifically, this setup allows operators to easily observe the inside of the vacuum coating chamber 2 during the coating process via the observation window 201 on one side. The chamber cover 3 is connected to the vacuum coating chamber 2 via a hinge 202, facilitating opening and closing for placing and removing products to be coated. The latch 4 securely closes the chamber cover 3 above the vacuum coating chamber 2, ensuring the chamber is airtight during the coating process. By starting the air pump 9, gas inside the vacuum coating chamber 2 is drawn out through the air hole 205 and the connecting pipe 203, and discharged through another electrically controlled valve 902 on the three-way device 901 to maintain a vacuum environment. The resistance coating stage 204 is used to place the products to be coated. By placing the products on resistance heating elements made of high-temperature resistant metal, when current passes through these resistance heating elements, according to Joule's law, electrical energy is converted into heat energy, causing the temperature of the heating elements to rise, thereby raising the temperature of the coating material on the products to its evaporation temperature, thus achieving evaporative coating of the products.

[0029] like Figures 1-6 As shown, in this embodiment, handles 301 for opening and closing are fixedly installed on both sides of the upper part of the cover 3. A mounting bracket 101 fixedly installed on the PVD coating machine 1 is provided below the vacuum coating chamber 2. The mounting bracket 101 is used to install the air pump 9. A mounting base 6 for supporting and fixing the air storage tank 5 is fixedly installed on one side of the inside of the PVD coating machine 1. A support rod 10 for supporting and fixing the constant temperature chamber 8 to provide heat dissipation space is fixedly installed on one side of the inside of the PVD coating machine 1.

[0030] Specifically, with this design, the handles 301 on both sides above the cover 3 make it easy for operators to open and close the cover 3, improving operational convenience. The mounting bracket 101 is fixed on the PVD coating machine 1 to install the air pump 9, ensuring the stable operation of the air pump 9. The mounting base 6 is used to support and fix the air tank 5, making the air tank 5 stable. When the cooling fan 802 is working, the support rod 10 will not obstruct the airflow, allowing the cooling fan 802 to effectively expel the hot air in the constant temperature chamber 8. At the same time, the support rod 10 can also bear the weight of the constant temperature chamber 8, ensuring that the constant temperature chamber 8 maintains a stable position during equipment operation and maintaining the stable operation of the temperature regulation function of the constant temperature chamber 8.

[0031] Working principle: The air pump 9 is securely installed via the mounting bracket 101, while the mounting base 6 provides necessary support for the air tank 5. The support rod 10 not only bears the weight of the constant temperature chamber 8, but also does not obstruct airflow when the cooling fan 802 is operating, ensuring that the cooling fan 802 can effectively expel hot air from the constant temperature chamber 8. When placing or removing coated products, the handle 301 allows the operator to easily open and close the chamber cover 3. The hinge 202 connects the chamber cover 3 to the vacuum coating chamber 2, facilitating opening and closing for easy placement and removal of coated products. The latch 4 ensures that the cover 3 is securely closed above the vacuum coating chamber 2 during the coating process, guaranteeing a tight seal. After the air pump 9 is started, the gas inside the vacuum coating chamber 2 is drawn out through the air hole 205 and the connecting pipe 203, and discharged through the electrically controlled valve 902 on the three-way device 901 to maintain the required vacuum environment. The resistance coating stage 204 is used to place the product to be coated and to perform evaporation coating. During the coating process, the operator can observe the situation inside the chamber through the observation window 201 on one side of the vacuum coating chamber 2. After the coating is completed, the air pump 9 is started again. The system extracts any unused special gas and, through a three-way valve 901 and an electrically controlled valve 902, transports it back to another gas storage tank 5 via a gas pipe 7, thus achieving gas recycling. One of the two gas storage tanks 5 is connected to a gas supply pipe 804, through which the stored gas is transported. The heating element 801 inside the constant temperature chamber 8 generates heat when energized, which is conducted through a temperature-conducting sleeve 805 to heat the gas embedded in the gas supply pipe 804, thereby raising the gas temperature. When cooling is required, the cooling fan 8 is activated. 02. Excess heat in the constant temperature chamber 8 is dissipated, and the heat dissipation fan 802 is connected to the temperature guide plate 803 to cool the temperature guide plate 803. In turn, the temperature guide plate 803 cools the gas in the gas supply pipe 804 in the temperature guide sleeve 805. In addition, the two gas storage tanks 5 are connected by gas pipes 7, and both sides are equipped with electric control valves 501, which can control the flow of gas from one gas storage tank 5 to another gas storage tank 5 under the action of pressure difference for storage. If the gas is gradually consumed, the gas can be replenished by replacing the gas storage tank 5 on the mounting base 6.

[0032] It should be noted that when vacuum coating chamber 2 is evacuated after the coated product is placed inside, one side of the electronically controlled valve 2 902 remains closed while the other side of the electronically controlled valve 2 902 is open to discharge gas, and the electronically controlled valve 1 501 on the gas storage tank 5 remains closed at the same time; when recovering gas, the other electronically controlled valve 2 902 is closed, one side of the electronically controlled valve 2 902 remains open, and the other side of the electronically controlled valve 1 501 on the other gas storage tank 5 is open while the other side remains closed, so as to recover gas and fill the other gas storage tank 5, and the electronically controlled valve 1 501 on one of the gas storage tanks 5 remains closed; when supplying gas into vacuum coating chamber 2, the other side of the electronically controlled valve 1 501 on one of the gas storage tanks 5 is open while the other side is closed, and the electronically controlled valve 1 501 on the other gas storage tank 5 remains closed; when the gas in one of the gas storage tanks 5 is gradually used up, the recovered gas is replenished into one of the gas storage tanks 5 by opening the other gas storage tank 5 and the electronically controlled valve 1 501 on one side of one of the gas storage tanks 5.

[0033] The preferred embodiments of the present invention disclosed above are merely illustrative of the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to specific implementations. The present invention is not limited to the above embodiments; the embodiments and descriptions in the specification are merely outlining the principles of the present invention. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A gas supply device for PVD equipment, comprising a PVD coating machine (1) and a vacuum coating chamber (2), characterized in that: The PVD coating machine (1) has a constant temperature chamber (8) for temperature regulation inside. The constant temperature chamber (8) includes a heating tube (801) fixedly installed at the top inside. Below the heating tube (801) is a temperature-conducting plate (803) fixedly installed on the constant temperature chamber (8). Between the heating tube (801) and the temperature-conducting plate (803) is a temperature-conducting sleeve (805) fixedly installed inside the constant temperature chamber (8) for temperature conduction. A gas supply pipe (804) for gas delivery is fitted inside the temperature-conducting sleeve (805). A cooling fan (802) for cooling and heat dissipation is fixedly installed at the bottom of the constant temperature chamber (8). Two gas storage tanks (5) are provided on one side of the constant temperature chamber (8), and one of the gas storage tanks (5) is connected to the gas supply pipe (804). A gas pipe (7) for gas transmission is connected between the two gas storage tanks (5). An electric control valve (501) is provided on both sides of the two gas storage tanks (5). An air pump (9) is connected to the bottom of the vacuum coating chamber (2), and a three-way device (901) is fixedly connected to one side of the air pump (9). An electric control valve (902) is fixedly installed on both sides of the three-way device (901), and one side of the electric control valve (902) is connected to the other gas storage tank (5) through the gas pipe (7).

2. The gas supply device for PVD equipment according to claim 1, characterized in that, The vacuum coating chamber (2) has an observation window (201) on one side that can be used to penetrate the interior. The vacuum coating chamber (2) is fitted with a chamber cover (3) on the top, and a hinge (202) is provided between the chamber cover (3) and the vacuum coating chamber (2) to connect the two.

3. The gas supply device for PVD equipment according to claim 2, characterized in that, The vacuum coating chamber (2) has a latch (4) on one side above it for closing the chamber cover (3). A resistance coating stage (204) is fixedly installed inside the vacuum coating chamber (2), and an air hole (205) is provided below the resistance coating stage (204).

4. The gas supply device for PVD equipment according to claim 3, characterized in that, A connecting pipe (203) is fixedly installed below the vacuum coating chamber (2), and the air hole (205) is connected to the connecting pipe (203). The connecting pipe (203) is located above the air pump (9) and is connected to it. The air pump (9) is connected to the inside of the vacuum coating chamber (2) through the connecting pipe (203) and the air hole (205).

5. A gas supply device for PVD equipment according to claim 2, characterized in that, The upper sides of the chamber cover (3) are fixedly equipped with handles (301) for opening and closing. The vacuum coating chamber (2) is provided with a mounting bracket (101) fixedly installed on the PVD coating machine (1) below, and the mounting bracket (101) is used to install the air pump (9).

6. The gas supply device for PVD equipment according to claim 1, characterized in that, The PVD coating machine (1) has a mounting base (6) fixedly installed on one side inside for supporting and fixing the gas storage tank (5), and a support rod (10) fixedly installed on one side inside for supporting and fixing the constant temperature chamber (8) to provide heat dissipation space.

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