Thermal resistance structure of heating cavity

Abstract

The thermal resistance structure of the heating cavity comprises a thermal resistance electrode column body, a cooling water flow channel is arranged in the thermal resistance electrode column body, a water inlet pipe is connected in the cooling water flow channel, the water inlet pipe and the top of the cooling water flow channel form a containing cavity, the top of the water inlet pipe is arranged in an inclined mode, and the top of the water inlet pipe is connected with the water inlet pipe. The cooling water flow channel is directly integrated in the thermal resistance electrode body, extends to a high-temperature area close to the thermal resistance tungsten boat fixing block and flows back to the interlayer through gravity to achieve rapid heat exchange, the working temperature of the electrode is remarkably reduced, cooling water flows through the sealed water inlet pipe and the interlayer, direct contact with an evaporation cavity is avoided, and the cooling efficiency is improved. The ceramic connecting device further isolates the external environment, the leakage risk is thoroughly eliminated, meanwhile, dependence of an external cooling pipeline is reduced, the overall structure is simplified, modular design is compatible with an existing evaporator shell, adaptation can be achieved without equipment modification, the cooling system operates in a self-maintaining mode, the shutdown maintenance frequency is reduced, and the production continuity is improved.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum evaporation deposition technology, and more specifically, relates to a thermal resistance structure of a heating chamber. Background Technology

[0002] In the vacuum evaporation coating industry, resistance thermal evaporation is the most widely used evaporation method to date. Its working principle involves shaping tungsten, tantalum, or molybdenum into a boat and sandwiching it between positive and negative electrode pillars. The material to be evaporated, including metallic and organic materials, is placed in the middle of the evaporation boat. A current is then slowly passed through the two electrodes. As the current passes through the evaporation boat, the resistance heats up, using a low-voltage, high-current power method to generate a large amount of heat energy. This heat energy is transferred to the material to be evaporated, causing it to melt and change from a solid to a gaseous state. The material vapor molecules adhere to the substrate above in a vacuum environment. This method is relatively stable and simple to operate. Its limitation is that it cannot evaporate metals with high melting points. During numerous experiments, the applicant discovered that when evaporating high-melting-point metal materials, a portion is always melted at the cathode and anode clamping points, resulting in the material vapor containing stainless steel or copper molecules, which severely affects the performance of the thin film. Most metals have melting points above copper. Therefore, to use copper as an electrode for thermal evaporation of these metal materials, the copper electrode must be sufficiently water-cooled to ensure that the material is evaporated without melting the copper electrode.

[0003] In common resistive thermal evaporation equipment on the market, electrode water cooling typically utilizes cold wells. This method has the drawback of significantly occupying space at the bottom of the vacuum chamber, making it difficult to achieve dense placement of evaporation sources. Furthermore, current water-cooled electrode methods either only cool the anode, leaving the common cathode section uncooled, or enlarge the circumference of the electrode column, thus limiting the placement of as many evaporation electrodes as possible within a limited space. Achieving sufficient cooling of the electrode column by cooling water within the confined space inside the electrode is a key technical challenge that needs to be overcome.

[0004] The existing patent, publication number CN213388865U, describes a cooling water flow within the electrode column at a right-angle turn, creating a cooling water circulation system. This more efficiently removes heat from the copper electrode, achieving thorough cooling and extending its lifespan. It also effectively evaporates high-melting-point metals, ensuring the performance of subsequent thin-film devices.

[0005] However, the cooling water flow rate is relatively small when it reaches the top of the structure, which can easily affect the cooling effect.

[0006] Therefore, there is an urgent need for an integrated, efficient and reliable thermal resistance electrode cooling solution to address the core pain points of existing technologies. Utility Model Content

[0007] Therefore, in order to solve the above-mentioned technical problems, this utility model proposes a thermal resistance structure for a heating cavity, including a thermal resistance electrode post body 10, a cooling water channel 18 provided inside the thermal resistance electrode post body 10, the cooling water channel 18 extending along the thermal resistance electrode post body 10 to near the thermal resistance tungsten boat fixing block 12, an inlet pipe 19 connected inside the cooling water channel 18, the inlet pipe 19 extending along the cooling water channel 18 and a sandwich 20 provided between the inlet pipe 19 and the cooling water channel 18, the top of the inlet pipe 19 and the top of the cooling water channel 18 forming a receiving chamber, and the top of the inlet pipe 19 being inclined. The cooling water channel 18 is directly integrated into the thermal resistance electrode body and extends to the high-temperature area near the thermal resistance tungsten boat fixing block 12. It flows back to the interlayer 20 by gravity to achieve rapid heat exchange, which significantly reduces the electrode operating temperature. The cooling water flows with the interlayer 20 through the sealed water inlet pipe 19 to avoid direct contact with the vapor deposition chamber. The ceramic connection device 24 further isolates the external environment, completely eliminating the risk of leakage. At the same time, it reduces the dependence on external cooling pipes, simplifies the overall structure, and the modular design is compatible with the existing vapor deposition machine housing. It can be adapted without modifying the equipment. Moreover, the cooling system is self-sustaining, reducing the frequency of downtime maintenance and improving production continuity.

[0008] A thermal resistance structure for a heating cavity includes a thermal resistance electrode post body 10. The lower part of the thermal resistance electrode post body 10 is connected to an external power source via a thermal resistance conductive fixing block 11. The upper part of the thermal resistance electrode post body 10 is connected to a thermal resistance tungsten boat fixing block 12, which is used to connect a tungsten boat. A ceramic connecting device 24 is sleeved between the thermal resistance tungsten boat fixing block 12 and the thermal resistance conductive fixing block 11 for connection to the vapor deposition machine housing. The thermal resistance tungsten boat fixing block 12 is located inside the vapor deposition machine housing, and the thermal resistance conductive fixing block 11 is located outside the vapor deposition machine housing. The thermal resistance electrode post body 10... The thermal resistance electrode post body 10 is provided with a cooling water channel 18, which extends along the thermal resistance electrode post body 10 to near the thermal resistance tungsten boat fixing block 12. A water inlet pipe 19 is connected to the cooling water channel 18. The water inlet pipe 19 extends along the cooling water channel 18 and a sandwich 20 is provided between the water inlet pipe 19 and the cooling water channel 18. The top of the water inlet pipe 19 and the cooling water channel 18 form a receiving chamber. The top of the water inlet pipe 19 is inclined. Cooling water enters from the water inlet pipe 19 and is temporarily stored in the receiving chamber. Subsequently, the cooling water flows out from the sandwich 20 due to gravity, cooling the thermal resistance electrode post body 10.

[0009] Furthermore, the inlet end of the water inlet pipe 19 is provided with a cooling water inlet adapter 21 for connecting to an external cooling water supply device.

[0010] Furthermore, an equal-diameter three-way valve 22 is sleeved at the input end of the water inlet pipe 19. The first end of the equal-diameter three-way valve 22 is sleeved with the thermal resistance electrode post body 10 and communicates with the interlayer 20. The second end of the equal-diameter three-way valve 22 is sleeved with the cooling water inlet adapter 21 but is not communicated with the cooling water inlet adapter 21. The third end of the equal-diameter three-way valve 22 is connected to the cooling water outlet adapter 23 for discharging cooling water.

[0011] In some embodiments, the thermal resistance electrode post body 10 is a cylindrical structure, and the thermal resistance tungsten boat fixing block 12 and the locking block 14 are locked to both sides of the thermal resistance electrode post body 10. The position of the thermal resistance tungsten boat fixing block 12 relative to the thermal resistance electrode post body 10 is adjusted by adjusting the tightness of the thermal resistance tungsten boat fixing block 12 and the locking block 14 and moving them up and down.

[0012] Furthermore, the thermal resistance tungsten boat fixing block 12 and the thermal resistance electrode post body 10 are provided with a first arc-shaped structure 13, and the locking block 14 and the thermal resistance electrode post body 10 are provided with a second arc-shaped structure 15. The first arc-shaped structure 13 and the second arc-shaped structure 15 wrap around the thermal resistance electrode post body 10 and are locked together by a first screw. The tightness of the wrapping between the first arc-shaped structure 13 and the second arc-shaped structure 15 and the thermal resistance electrode post body 10 is adjusted by operating the rotation direction of the first screw, and the position of the thermal resistance tungsten boat fixing block 12 relative to the thermal resistance electrode post body 10 is adjusted by moving it up and down.

[0013] Furthermore, the free end of the thermal resistance tungsten boat fixing block 12 is connected to the tungsten boat support block 16. The thermal resistance tungsten boat fixing block 12 and the tungsten boat support block 16 cooperate to press down one side edge of the tungsten boat. The bearing surface of the tungsten boat support block 16 is an inclined surface that slopes towards the tungsten boat. The inclined surface abuts against the corresponding body of the tungsten boat. The inclined surface structure can decompose the vertical load of the body of the tungsten boat into normal force and tangential force, reduce local stress concentration in the tungsten boat support block 16, and avoid material fatigue or cracking at high temperatures.

[0014] Furthermore, a first recessed structure 17 is provided on the side of the bearing surface near the tungsten boat, for observing the compression of one side of the tungsten boat that it presses down.

[0015] In some embodiments, the ceramic connecting device 24 includes a first ceramic block 25 and a second ceramic block 27, which are symmetrically spaced apart. A vapor deposition machine housing is provided between the first ceramic block 25 and the second ceramic block 27. The second ceramic block 27 is fixedly sleeved on the outer periphery of the thermal resistance electrode post body 10. The first ceramic block 25 is threadedly connected to the outer periphery of the thermal resistance electrode post body 10. A locking nut 26 is also sleeved on the upper part of the first ceramic block 25. The distance between the first ceramic block 25 and the second ceramic block 27 is adjusted by the cooperation between the locking nut 26 and the first ceramic block 25, thereby locking the thermal resistance structure of the heating cavity onto the thermal resistance structure of the heating cavity.

[0016] Furthermore, a protective sleeve 28 is provided at the connection between the first ceramic block 25, the locking nut 26 and the thermal resistance electrode post body 10 to prevent the evaporation of the evaporation material at the connection between the first ceramic block 25, the locking nut 26 and the thermal resistance electrode post body 10 from affecting the fit of the outer circumferential threads of the first ceramic block 25, the locking nut 26 and the thermal resistance electrode post body 10.

[0017] Furthermore, a sealing ring 29 is provided at the connection between the second ceramic block 27 and the vapor deposition machine housing to ensure the seal at the connection.

[0018] The beneficial effects of this utility model are as follows: This utility model proposes a thermal resistance structure for a heating cavity, including a thermal resistance electrode post body 10. A cooling water channel 18 is provided within the thermal resistance electrode post body 10. The cooling water channel 18 extends along the thermal resistance electrode post body 10 to a position near the thermal resistance tungsten boat fixing block 12. A water inlet pipe 19 is connected within the cooling water channel 18. The water inlet pipe 19 extends along the cooling water channel 18, and a sandwich layer 20 is provided between the water inlet pipe 19 and the cooling water channel 18. The top of the water inlet pipe 19 and the top of the cooling water channel 18 form a receiving chamber. The top of the water inlet pipe 19 is inclined. Cooling water channels 18 are directly integrated into the thermal resistance electrode body and extend to the high-temperature area near the thermal resistance tungsten boat fixing block 12. They flow back to the interlayer 20 by gravity to achieve rapid heat exchange, significantly reducing the electrode operating temperature. Cooling water flows with the interlayer 20 through the sealed water inlet pipe 19, avoiding direct contact with the vapor deposition chamber. The ceramic connection device 24 further isolates the external environment, completely eliminating the risk of leakage. At the same time, it reduces reliance on external cooling pipes, simplifies the overall structure, and the modular design is compatible with existing vapor deposition machine housings. It can be adapted without modifying the equipment. Moreover, the cooling system is self-sustaining, reducing the frequency of downtime maintenance and improving production continuity. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0020] Figure 2 This is a cross-sectional view of the present invention.

[0021] Explanation of key component symbols:

[0022] Thermoresistive electrode post body 10, thermoresistive conductive fixing block 11, thermoresistive tungsten boat fixing block 12, first arc-shaped structure 13, locking block 14, second arc-shaped structure 15, tungsten boat support block 16, first recessed structure 17, cooling water flow channel 18, water inlet pipe 19, interlayer 20, cooling water inlet adapter 21, equal diameter three-way valve 22, cooling water outlet adapter 23, ceramic connecting device 24, first ceramic block 25, locking nut 26, second ceramic block 27, anti-adhesion sleeve 28, sealing ring 29.

[0023] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0024] The following embodiments are described to aid in understanding this application. These embodiments are not, and should not be, construed in any way as limiting the scope of protection of this application.

[0025] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as individual functional units (which may include subunits), but those skilled in the art will recognize that various components or portions thereof may be divided into individual components or may be integrated together (including integrated within a single system or component).

[0026] Furthermore, the connection between components or systems is not intended to be limited to a direct connection; on the contrary, data between these components may be modified, reformatted, or otherwise altered by intermediate components. Additionally, other or fewer connections may be used. It should also be noted that the terms "connection," "link," or "input" should be understood to include direct connections, indirect connections via one or more intermediate devices, and wireless connections. Example 1:

[0027] like Figure 1-2As shown, a thermal resistance structure for a heating cavity includes a thermal resistance electrode post body 10. The lower part of the thermal resistance electrode post body 10 is connected to an external power source via a thermal resistance conductive fixing block 11. The upper part of the thermal resistance electrode post body 10 is connected to a thermal resistance tungsten boat fixing block 12, which is used to connect a tungsten boat. A ceramic connecting device 24 is sleeved between the thermal resistance tungsten boat fixing block 12 and the thermal resistance conductive fixing block 11 for connecting to the vapor deposition machine housing. This arrangement ensures that the thermal resistance tungsten boat fixing block 12 is located inside the vapor deposition machine housing, while the thermal resistance conductive fixing block 11 is located outside the vapor deposition machine housing. The thermal resistance electrode post body 10 contains... A cooling water channel 18 is provided, which extends along the thermal resistance electrode post body 10 to near the thermal resistance tungsten boat fixing block 12. A water inlet pipe 19 is connected inside the cooling water channel 18. The water inlet pipe 19 extends along the cooling water channel 18 and a sandwich 20 is provided between the water inlet pipe 19 and the cooling water channel 18. The top of the water inlet pipe 19 and the cooling water channel 18 form a receiving chamber. The top of the water inlet pipe 19 is inclined. Cooling water enters from the water inlet pipe 19 and is temporarily stored in the receiving chamber. Subsequently, the cooling water flows out from the sandwich 20 due to gravity, cooling the thermal resistance electrode post body 10.

[0028] The inlet end of the water inlet pipe 19 is equipped with a cooling water inlet adapter 21 for connecting to an external cooling water supply device. An equal-diameter three-way valve 22 is sleeved on the inlet end of the water inlet pipe 19. The first end of the equal-diameter three-way valve 22 is sleeved on the thermal resistance electrode post body 10 and communicates with the interlayer 20. The second end of the equal-diameter three-way valve 22 is sleeved on the cooling water inlet adapter 21 but is not communicated with it. The third end of the equal-diameter three-way valve 22 is connected to a cooling water outlet adapter. Head 23 is used for cooling water discharge. The thermal resistance electrode post body 10 has a cylindrical structure. The thermal resistance tungsten boat fixing block 12 and the locking block 14 are locked to both sides of the thermal resistance electrode post body 10. The position of the thermal resistance tungsten boat fixing block 12 relative to the thermal resistance electrode post body 10 is adjusted by adjusting the tightness of the thermal resistance tungsten boat fixing block 12 and the locking block 14 and moving them up and down. The thermal resistance tungsten boat fixing block 12 and the thermal resistance electrode post body 10 are provided with a first arc shape. Structure 13, the locking block 14 and the thermal resistance electrode post body 10 are provided with a second arc-shaped structure 15. The first arc-shaped structure 13 and the second arc-shaped structure 15 wrap around the thermal resistance electrode post body 10 and are locked together by a first screw. The tightness of the wrapping between the first arc-shaped structure 13 and the second arc-shaped structure 15 and the thermal resistance electrode post body 10 is adjusted by operating the rotation direction of the first screw, and the position of the thermal resistance tungsten boat fixing block 12 relative to the thermal resistance electrode post body 10 is adjusted by moving it up and down. The free end of the thermal resistance tungsten boat fixing block 12 is connected to the tungsten boat support block 16. The thermal resistance tungsten boat fixing block 12 and the tungsten boat support block 16 cooperate to press down one edge of the tungsten boat. The bearing surface of the tungsten boat support block 16 is an inclined plane that slopes towards the tungsten boat. The inclined plane abuts against the corresponding body of the tungsten boat. The inclined plane structure can decompose the vertical load of the tungsten boat body into normal force and tangential force, reduce local stress concentration in the tungsten boat support block 16, and avoid material fatigue or cracking at high temperature. The bearing surface near the tungsten boat has a first recessed structure 17, which is used to observe the compression of one side of the tungsten boat that it presses down.

[0029] The ceramic connecting device 24 includes a first ceramic block 25 and a second ceramic block 27, which are symmetrically spaced apart. A vapor deposition machine housing is provided between the first ceramic block 25 and the second ceramic block 27. The second ceramic block 27 is fixedly sleeved on the outer periphery of the thermal resistance electrode post body 10. The first ceramic block 25 is threadedly connected to the outer periphery of the thermal resistance electrode post body 10. A locking nut 26 is also sleeved on the upper part of the first ceramic block 25. The first ceramic block 25 and the second ceramic block 27 are adjusted by the cooperation of the locking nut 26 with the first ceramic block 25. The distance between blocks 27 is used to lock the thermal resistance structure of the heating chamber onto the thermal resistance structure of the heating chamber. The connection between the first ceramic block 25, the locking nut 26 and the thermal resistance electrode post body 10 is covered with an anti-attachment sleeve 28 to prevent the evaporation material from affecting the fit of the outer circumferential threads of the first ceramic block 25, the locking nut 26 and the thermal resistance electrode post body 10 at the connection. The connection between the second ceramic block 27 and the evaporation machine housing is provided with a sealing ring 29 to ensure the sealing of the connection.

[0030] The beneficial effects of this utility model are as follows: This utility model proposes a thermal resistance structure for a heating cavity, including a thermal resistance electrode post body 10. A cooling water channel 18 is provided within the thermal resistance electrode post body 10. The cooling water channel 18 extends along the thermal resistance electrode post body 10 to a position near the thermal resistance tungsten boat fixing block 12. A water inlet pipe 19 is connected within the cooling water channel 18. The water inlet pipe 19 extends along the cooling water channel 18, and a sandwich layer 20 is provided between the water inlet pipe 19 and the cooling water channel 18. The top of the water inlet pipe 19 and the top of the cooling water channel 18 form a receiving chamber. The top of the water inlet pipe 19 is inclined. Cooling water channels 18 are directly integrated into the thermal resistance electrode body and extend to the high-temperature area near the thermal resistance tungsten boat fixing block 12. They flow back to the interlayer 20 by gravity to achieve rapid heat exchange, significantly reducing the electrode operating temperature. Cooling water flows with the interlayer 20 through the sealed water inlet pipe 19, avoiding direct contact with the vapor deposition chamber. The ceramic connection device 24 further isolates the external environment, completely eliminating the risk of leakage. At the same time, it reduces reliance on external cooling pipes, simplifies the overall structure, and the modular design is compatible with existing vapor deposition machine housings. It can be adapted without modifying the equipment. Moreover, the cooling system is self-sustaining, reducing the frequency of downtime maintenance and improving production continuity.

[0031] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A thermal resistance structure for a heating cavity, comprising a thermal resistance electrode post body (10), the lower part of which is connected to an external power source via a thermal resistance conductive fixing block (11), and the upper part of which is connected to a thermal resistance tungsten boat fixing block (12), the thermal resistance tungsten boat fixing block (12) being used to connect a tungsten boat, and a ceramic connecting device (24) sleeved between the thermal resistance tungsten boat fixing block (12) and the thermal resistance conductive fixing block (11) for connecting to a vapor deposition machine housing, such that the thermal resistance tungsten boat fixing block (12) is located inside the vapor deposition machine housing, and the thermal resistance conductive fixing block (11) is located outside the vapor deposition machine housing, characterized in that: The thermal resistance electrode post body (10) is provided with a cooling water channel (18). The cooling water channel (18) extends along the thermal resistance electrode post body (10) to a position close to the thermal resistance tungsten boat fixing block (12). A water inlet pipe (19) is connected to the cooling water channel (18). The water inlet pipe (19) extends along the cooling water channel (18) and a sandwich layer (20) is provided between the water inlet pipe (19) and the cooling water channel (18). The top of the water inlet pipe (19) and the cooling water channel (18) form a receiving chamber. The top of the water inlet pipe (19) is inclined. Cooling water enters from the water inlet pipe (19) and is temporarily stored in the receiving chamber. Subsequently, the cooling water flows out from the sandwich layer (20) due to gravity, cooling the thermal resistance electrode post body (10).

2. The thermal resistance structure of the heating cavity according to claim 1, characterized in that: The inlet pipe (19) is equipped with a cooling water inlet adapter (21) at its input end for connecting to an external cooling water supply device.

3. The thermal resistance structure of the heating cavity according to claim 1, characterized in that: The inlet pipe (19) is fitted with an equal diameter three-way valve (22). The first end of the equal diameter three-way valve (22) is fitted with the thermal resistance electrode post body (10) and communicates with the interlayer (20). The second end of the equal diameter three-way valve (22) is fitted with the cooling water inlet adapter (21) but is not communicated with the cooling water inlet adapter (21). The third end of the equal diameter three-way valve (22) is connected to the cooling water outlet adapter (23) for the discharge of cooling water.

4. The thermal resistance structure of the heating cavity according to claim 1, characterized in that: The thermal resistance electrode post body (10) is a cylindrical structure. The thermal resistance tungsten boat fixing block (12) and the locking block (14) are locked together on both sides of the thermal resistance electrode post body (10). The position of the thermal resistance tungsten boat fixing block (12) relative to the thermal resistance electrode post body (10) can be adjusted by adjusting the tightness of the thermal resistance tungsten boat fixing block (12) and the locking block (14) and moving them up and down.

5. The thermal resistance structure of the heating cavity according to claim 4, characterized in that: The thermal resistance tungsten boat fixing block (12) and the thermal resistance electrode post body (10) are provided with a first arc-shaped structure (13), and the locking block (14) and the thermal resistance electrode post body (10) are provided with a second arc-shaped structure (15). The first arc-shaped structure (13) and the second arc-shaped structure (15) wrap around the thermal resistance electrode post body (10) and are locked together by a first screw. The tightness of the wrapping between the first arc-shaped structure (13) and the second arc-shaped structure (15) and the thermal resistance electrode post body (10) is adjusted by operating the rotation direction of the first screw, and the position of the thermal resistance tungsten boat fixing block (12) relative to the thermal resistance electrode post body (10) is adjusted by moving the first screw up and down.

6. The thermal resistance structure of the heating cavity according to claim 1, characterized in that: The free end of the thermal resistance tungsten boat fixing block (12) is connected to the tungsten boat support block (16). The thermal resistance tungsten boat fixing block (12) and the tungsten boat support block (16) cooperate to press down one side edge of the tungsten boat. The bearing surface of the tungsten boat support block (16) is an inclined surface that is inclined towards the tungsten boat. The inclined surface abuts against the corresponding body of the tungsten boat. The inclined surface structure can decompose the vertical load of the body of the tungsten boat into normal force and tangential force, reduce local stress concentration of the tungsten boat support block (16), and avoid material fatigue or cracking at high temperature.

7. The thermal resistance structure of the heating cavity according to claim 6, characterized in that: The bearing surface near the tungsten boat is provided with a first recessed structure (17) for observing the compression of one side of the tungsten boat that it presses down.

8. The thermal resistance structure of the heating cavity according to claim 1, characterized in that: The ceramic connecting device (24) includes a first ceramic block (25) and a second ceramic block (27). The first ceramic block (25) and the second ceramic block (27) are symmetrically spaced apart. A vapor deposition machine housing is provided between the first ceramic block (25) and the second ceramic block (27). The second ceramic block (27) is fixedly sleeved on the outer periphery of the thermal resistance electrode post body (10). The first ceramic block (25) is threadedly connected to the outer periphery of the thermal resistance electrode post body (10). A locking nut (26) is also sleeved on the upper part of the first ceramic block (25). The distance between the first ceramic block (25) and the second ceramic block (27) is adjusted by the cooperation of the locking nut (26) and the first ceramic block (25), thereby locking the thermal resistance structure of the heating cavity onto the thermal resistance structure of the heating cavity.

9. The thermal resistance structure of the heating cavity according to claim 8, characterized in that: The connection between the first ceramic block (25), the locking nut (26) and the thermal resistance electrode post body (10) is covered with an anti-attachment sleeve (28) to prevent the evaporation material from affecting the fit of the outer circumferential threads of the first ceramic block (25), the locking nut (26) and the thermal resistance electrode post body (10) at the connection.

10. The thermal resistance structure of the heating cavity according to claim 8, characterized in that: A sealing ring (29) is provided at the connection between the second ceramic block (27) and the housing of the vapor deposition machine to ensure the sealing of the connection.

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