Self-adaptive cleaning mechanism for integrated circuit test probe

Abstract

The utility model relates to the technical field of integrated circuits, in particular to an integrated circuit test probe self-adaptive cleaning mechanism which comprises an electric sliding rail fixedly connected to an integrated circuit test device. The movable frame is connected to the electric sliding rail in a sliding mode and fixed to the control end of the electric sliding rail; the mounting plate is fixedly connected to the movable frame in an assembled manner; the clamping plate is slidably connected to the side edge of the mounting plate; the reset spring is fixedly connected between the clamping plate and the mounting plate; and the dust-free paper is clamped between the clamping plate and the mounting plate and is arranged at the bottom of the mounting plate. According to the utility model, the mounting plate which moves in a reciprocating manner is matched with the dust-free paper fixed on the mounting plate to clean the probe disc, and the cleaning treatment is completed in the closed space, so that the probe disc can be kept in a clean state when a chip is tested every time, and the accuracy of a test result of the integrated circuit test device is ensured.

Description

Technical Field

[0001] This utility model relates to the field of integrated circuit technology, and in particular to an adaptive cleaning mechanism for integrated circuit test probes. Background Technology

[0002] Integrated circuit testing equipment is an important part of semiconductor manufacturing. It is mainly used to test the electrical performance, function and stability of chips. When using integrated circuit testing equipment, the chip under test establishes an electrical connection with the tester through test probes. The tester applies excitation signals and collects response data to determine whether the chip performance meets the design specifications.

[0003] As a core component for electrical interconnection between chips and testing machines, the conductivity of the test probe's contact surface directly affects the accuracy of test data. However, during long-term, high-frequency testing operations, the surface of the test probe can accumulate a contamination layer due to environmental dust deposits and flux residues. This leads to increased contact impedance and degraded signal transmission quality, causing systematic biases in chip quality assessment. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by proposing an adaptive cleaning mechanism for integrated circuit test probes capable of cleaning contamination layers from test probes.

[0005] The technical implementation scheme of this utility model is as follows: an adaptive cleaning mechanism for integrated circuit test probes, comprising: an electric slide rail fixedly connected to an integrated circuit testing device, the integrated circuit testing device consisting of a tester, a probe disk, and a cover plate, the electric slide rail being fixedly connected to the cover plate; a movable frame slidably connected to the electric slide rail, the movable frame being fixed to the control end of the electric slide rail; an assembly-type fixedly connected mounting plate to the movable frame; a clamping plate slidably connected to the side of the mounting plate; a return spring fixedly connected between the clamping plate and the mounting plate; and lint-free paper clamped between the clamping plate and the mounting plate, the lint-free paper being disposed at the bottom of the mounting plate.

[0006] Furthermore, it also includes: a container fixedly connected to the cover plate; a delivery pipe fixedly connected between the container and the cover plate; a pump body fixedly connected to the delivery pipe, the pump body being located inside the container; and a spray head fixedly connected to the bottom of the cover plate, the spray head facing the probe plate, the spray head being connected and communicating with the delivery pipe.

[0007] Furthermore, it also includes a baffle plate that is fixedly connected inside the container.

[0008] Furthermore, it also includes a level gauge that is fixedly connected to the outer wall of the container.

[0009] Furthermore, it also includes: a card pin fixedly connected to the clamp plate, and a card slot adapted to the card pin is provided on the mounting plate.

[0010] Furthermore, it also includes a control block that is slidably connected to the mounting plate, and the control plate cooperates with the clamps on both sides.

[0011] This invention has the following advantages: It employs a reciprocating mounting plate with lint-free paper fixed to it to clean the probe pad, completing the cleaning process within a closed space. This ensures the probe pad remains clean during each chip test, thereby guaranteeing the accuracy of the integrated circuit testing results. Furthermore, the lint-free paper is designed to be detachable, allowing for periodic replacement and maintaining its cleanliness. An alcohol spray function is also added, making it easier for the lint-free paper to absorb and remove dust, further enhancing the cleaning effect on the probe pad. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of the present invention on an integrated circuit testing machine in the open state.

[0013] Figure 2 This is a schematic diagram of the structure of the present invention on an integrated circuit testing machine in a closed state.

[0014] Figure 3 This is a cross-sectional view showing the connection relationship between the electric slide rail, the moving frame, and the clamping plate of this utility model.

[0015] Figure 4 This is a diagram showing the connection relationship between the movable frame, mounting plate, dust-free paper, and control block of this utility model.

[0016] Figure 5 This is a cross-sectional view showing the connection relationship between the mounting plate, clamping plate, reset spring, and locking pin of this utility model.

[0017] Figure 6 This is a cross-sectional view showing the connection between the container and the delivery pipe of this utility model.

[0018] In the attached diagrams: 1: Testing machine, 2: Probe plate, 3: Support plate, 4: Motor, 5: Cover plate, 6: Electric slide rail, 7: Moving frame, 8: Mounting plate, 9: Clamping plate, 10: Return spring, 11: Dust-free paper, 12: Container, 13: Delivery pipe, 14: Pump body, 15: Spray head, 16: Guide plate, 17: Level gauge, 18: Pin, 19: Control block. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Example: Figures 1-2 As shown, the integrated circuit testing device includes: a tester 1; a probe disk 2 fixedly mounted on the tester 1, the probe disk 2 being used for electrical interconnection with the chip; a support plate 3 fixedly mounted on the tester 1; a cover plate 5 rotatably mounted on the support plate 3, the cover plate 5 being used to close the probe disk 2 and thus close the chip's testing environment, enabling stable chip testing; and a motor 4 fixedly mounted on the support plate 3, the output end of the motor 4 being fixed to the rotating shaft of the cover plate 5 to drive the cover plate 5 to open and close.

[0021] An adaptive cleaning mechanism for integrated circuit test probes, such as Figures 3-5 As shown, it includes: an electric slide rail 6 fixedly installed inside the cover plate 5; a movable frame 7 slidably installed on the electric slide rail 6, the movable frame 7 being fixed to the control end of the electric slide rail 6, and the electric slide rail 6 driving the movable frame 7 to move back and forth left and right; a mounting plate 8 plugged into and fixedly installed on the movable frame 7, the bottom of the mounting plate 8 being able to contact the probe disk 2 when the cover plate 5 closes the testing machine 1; clamping plates 9 slidably installed on the left and right sides of the mounting plate 8; a return spring 10 fixedly installed between the clamping plate 9 and the mounting plate 8, the return spring 10 keeping the clamping plate 9 and the mounting plate 8 in close contact; and a dust-free paper 11 clamped between the clamping plate 9 and the mounting plate 8, the dust-free paper 11 being located at the bottom of the mounting plate 8, the dust-free paper 11 being used to wipe and remove dust from the probe disk 2, and the dust-free paper 11 being replaceable after a certain number of uses.

[0022] When testing chips using an integrated circuit testing device, motor 4 starts and controls the cover plate 5 to rotate and open, placing the chip on and aligning it with the probe plate 2. Then, the cover plate 5 is reversed, and the testing machine 1 is operated to perform performance testing on the chip. After the test is completed, the cover plate 5 is rotated to open the testing machine 1, and the chip is removed. At this time, the cover plate 5 is reversed to close the testing machine 1, and then the electric slide rail 6 is run to control the mounting plate 8 to move back and forth, allowing the lint-free paper 11 to wipe the probe plate 2 clean. Until the next chip needs to be tested, motor 4 controls the cover plate 5 to open again. That is, after each chip test, this cleaning mechanism cleans the probe plate 2 once, and the cover plate 5 remains closed until the next round of chip testing. Therefore, using this cleaning mechanism can maintain the cleanliness of the probe plate 2, thereby ensuring the accuracy of the test results of the integrated circuit testing device.

[0023] After the lint-free paper 11 has been used a certain number of times, remove the mounting plate 8 from the moving frame 7, move the clamping plate 9, and the return spring 10 will deform, allowing the lint-free paper 11 to be easily removed. Then, place a new lint-free paper 11 between the clamping plate 9 and the mounting plate 8, and then release the clamping plate 9. The return spring 10 will return to its original position and clamp the lint-free paper 11 firmly onto the mounting plate 8, thus completing the replacement of the lint-free paper 11. Regularly replacing the lint-free paper 11 will ensure the cleaning performance of this cleaning mechanism.

[0024] like Figure 1 , Figure 2 and 6 As shown, it also includes: a container 12 fixedly installed on the top of the cover plate 5 for holding alcohol solution; a delivery pipe 13 fixedly installed between the container 12 and the cover plate 5; a pump body 14 fixedly installed on the delivery pipe 13, the pump body 14 being located inside the container 12; and a spray head 15 fixedly installed at the bottom of the cover plate 5, the spray head 15 facing the probe plate 2, the spray head 15 being connected to the delivery pipe 13, and the pump body 14 delivering the alcohol solution in the container 12 to the spray head 15 through the delivery pipe 13, thereby spraying the alcohol solution out in a mist.

[0025] As the mounting plate 8 is moved, the lint-free paper 11 wipes the probe disk 2, while the spray head 15 sprays alcohol solution onto the probe disk 2. This allows the dust to adhere better to the lint-free paper 11 when wiping the probe disk 2, thus improving the dust removal effect of the lint-free paper 11.

[0026] like Figures 3-6 As shown, it also includes: a guide plate 16 fixedly installed inside the container 12, which guides the alcohol solution in the container 12 to the pump body 14, so that the pump body 14 can better draw the alcohol solution; a level gauge 17 fixedly installed on the outer wall of the container 12, which allows the level gauge 17 to clearly show the state of the alcohol solution in the container 12, so as to replenish the alcohol solution in time; and a locking pin 18 fixedly installed on the clamping plate 9. The mounting plate 8 has a locking groove that matches the locking pin 18. When the lint-free paper 11 is placed between the clamping plate 9 and the mounting plate 8, the locking pin will lock when the return spring 10 controls the clamping plate 9 to fix the lint-free paper 11. 18. Insert the lint-free paper 11 into the slot to improve the fixing effect of the clamp 9 on the lint-free paper 11, so as to prevent the lint-free paper 11 from falling off the clamp 9 during wiping and affecting the cleaning effect; the control block 19 is slidably installed on the mounting plate 8. The control block 19 has inclined surfaces on both sides. The two inclined surfaces contact the two clamps 9 respectively. When the control block 19 is pressed down, the inclined surfaces of the control block 19 will squeeze the two clamps 9 and separate them from the mounting plate 8 at the same time, so as to easily remove the lint-free paper 11; after replacing the lint-free paper 11, release the control block 19. At the same time, the return spring 10 will reset the clamps 9 and reset the control block 19 upward through the clamps 9.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit the scope of protection of this utility model. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the essence and scope of the technical solutions of this utility model.

Claims

1. An adaptive cleaning mechanism for integrated circuit test probes, characterized in that, include: An electric slide rail (6) is fixedly connected to the integrated circuit testing device, which consists of a tester (1), a probe plate (2), and a cover plate (5). The electric slide rail (6) is fixedly connected to the cover plate (5). A movable frame (7) is slidably connected to the electric slide rail (6). The movable frame (7) is fixed to the control end of the electric slide rail (6), and the electric slide rail (6) drives the movable frame (7) to move back and forth. An assembly plate (8) is fixedly connected to the movable frame (7). The cover plate (5) closes the test... During the trial run (1), the bottom of the mounting plate (8) can contact the probe disk (2); the clamping plate (9) is slidably connected to the side of the mounting plate (8); the reset spring (10) is fixedly connected between the clamping plate (9) and the mounting plate (8), and the reset spring (10) makes the clamping plate (9) and the mounting plate (8) fit tightly; the dust-free paper (11) is clamped between the clamping plate (9) and the mounting plate (8), and the dust-free paper (11) is set at the bottom of the mounting plate (8) and is used to wipe the probe disk (2) to remove dust.

2. The adaptive cleaning mechanism for integrated circuit test probes according to claim 1, characterized in that it further includes... include: A container (12) for holding alcohol solution is fixedly connected to the cover plate (5); a delivery pipe (13) is fixedly connected between the container (12) and the cover plate (5); a pump body (14) is fixedly connected to the delivery pipe (13) and is located inside the container (12); a spray head (15) is fixedly connected to the bottom of the cover plate (5) and faces the probe plate (2). The spray head (15) is connected and communicates with the delivery pipe (13).

3. The adaptive cleaning mechanism for integrated circuit test probes according to claim 2, characterized in that it further includes... include: A guide plate (16) is fixedly connected inside the container (12), and the guide plate (16) guides the alcohol solution inside the container (12) to the pump body (14).

4. The adaptive cleaning mechanism for integrated circuit test probes according to claim 3, characterized in that it further includes... include: A level gauge (17) is fixedly connected to the outer wall of the container (12). The level gauge (17) is used to display the liquid level of the alcohol solution inside.

5. An adaptive cleaning mechanism for integrated circuit test probes according to claim 4, characterized in that it further includes... include: A pin (18) is fixedly connected to the clamp plate (9), and a slot adapted to the pin (18) is provided on the mounting plate (8).

6. An adaptive cleaning mechanism for integrated circuit test probes according to claim 5, characterized in that it further includes... include: A control block (19) is slidably connected to the mounting plate (8). The control plate cooperates with the clamps (9) on both sides to control the movement of the clamps (9).

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