Double-sided heat dissipation device and exposure machine

Abstract

The utility model provides a double-sided heat dissipation device and an exposure machine, the double-sided heat dissipation device comprises a supporting piece, a light-transmitting element and a gas cooling unit, the supporting piece is of a hollow structure with openings at two ends, and the supporting piece is arranged close to a light outlet of a light source chamber; the light-transmitting element is provided with a first surface and a second surface, the first surface and the second surface are both provided with coating films, and the coating films are configured to reflect non-exposure wavelength light in emergent light of the light source and transmit exposure wavelength light in the emergent light; the gas cooling unit comprises a first gas cooling pipeline and a second gas cooling pipeline, the first gas cooling pipeline is configured to output cooling gas towards the first surface, and the second gas cooling pipeline is configured to output cooling gas towards the second surface. The light source chamber and the follow-up light beam transmission and shaping unit can be spatially isolated, heat generated by the light source chamber is prevented from influencing a follow-up light path, and the exposure precision is effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a double-sided heat dissipation device and an exposure machine. Background Technology

[0002] In the semiconductor manufacturing industry, the exposure machine is one of the core pieces of equipment, and its performance directly determines the production efficiency and product yield of semiconductor products. With the increasing demand for higher yields in exposure machines, the use of high-power mercury lamps is becoming more and more common. However, as the light source's luminous power increases, more heat is generated. If this heat cannot be dissipated in time, it may damage components within the exposure machine and also reduce exposure accuracy.

[0003] It should be noted that the information disclosed in the background section of this utility model is intended only to enhance the understanding of the general background of this utility model, and should not be regarded as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide a double-sided heat dissipation device and an exposure machine, which can achieve spatial isolation between the light source chamber and the subsequent beam transmission and shaping unit, prevent the heat generated in the light source chamber from affecting the subsequent optical path, and effectively improve the exposure accuracy.

[0005] To achieve the above objectives, this utility model provides a double-sided heat dissipation device, including a support member, a light-transmitting element, and a gas cooling unit. The support member is a hollow structure with openings at both ends, and is configured to be disposed within a light source chamber and close to the light outlet of the light source chamber. The light-transmitting element has a first surface and a second surface arranged opposite to each other. The first surface is connected to the top end of the support member. Both the first surface and the second surface are coated with a film, which is configured to reflect non-exposure wavelength light in the emitted light of the light source and transmit exposure wavelength light in the emitted light. The gas cooling unit includes a first gas cooling pipe and a second gas cooling pipe. The first gas cooling pipe is configured to output cooling gas toward the first surface, and the second gas cooling pipe is configured to output cooling gas toward the second surface.

[0006] Optionally, the first gas cooling pipeline includes a first gas supply pipe and a first nozzle connected together, the first nozzle being configured to spray cooling gas from the first gas supply pipe onto the first surface; the second gas cooling pipeline includes a second gas supply pipe and a second nozzle connected together, the second nozzle being configured to spray cooling gas from the second gas supply pipe onto the second surface.

[0007] Optionally, both the first nozzle and the second nozzle include a connected interface portion and a fan-shaped portion, wherein the interface portion and the fan-shaped portion are arranged at an angle. The first nozzle is configured to spray the cooling gas in the first gas supply pipe directly onto the first surface in a fan shape, and the second nozzle is configured to spray the cooling gas in the second gas supply pipe directly onto the second surface in a fan shape.

[0008] Optionally, the double-sided heat dissipation device provided by this utility model further includes a temperature monitoring unit, which includes at least one first temperature sensor and at least one second temperature sensor. The first temperature sensor is disposed close to the first surface to collect temperature data of the first surface, and the second temperature sensor is disposed close to the second surface to collect temperature data of the second surface. The gas cooling unit further includes a cooling gas controller communicatively connected to the first temperature sensor and the second temperature sensor. The cooling gas controller is configured to adjust the flow rate of the cooling gas output from the first gas cooling pipe and the second gas cooling pipe according to the temperature data of the first surface and the temperature data of the second surface, so that the temperature difference between the first surface and the second surface is within a preset temperature difference range, and that the temperature of the first surface and the temperature of the second surface are both lower than or equal to a preset allowable temperature.

[0009] Optionally, the double-sided heat dissipation device provided by this utility model further includes a water cooling unit, which is configured to water cool the support member and the light-transmitting element.

[0010] Optionally, the support member is provided with a flow channel and an inlet and an outlet connected to the flow channel, and both the inlet and the outlet are connected to the water cooling unit.

[0011] Optionally, the inner diameter of the support member gradually decreases from its bottom end to its top end.

[0012] Optionally, the outer periphery of the bottom end of the support member is provided with an outwardly extending overlapping portion.

[0013] To achieve the above objectives, this utility model also provides an exposure machine, including a light source chamber and a double-sided heat dissipation device as described in any of the above claims, wherein the double-sided heat dissipation device is disposed in the light source chamber.

[0014] Optionally, the inner periphery of the light source chamber is provided with a support portion located near the light outlet and extending toward the central axis of the light source chamber, and the bottom end of the support member is connected to the support portion.

[0015] Compared with the prior art, the double-sided heat dissipation device and exposure machine provided by this utility model have the following advantages:

[0016] Beneficial effects:

[0017] The double-sided heat dissipation device provided by this utility model includes a support member, a light-transmitting element, and a gas cooling unit. The support member is a hollow structure with openings at both ends, and is configured to be disposed within a light source chamber and close to the light outlet of the light source chamber. The light-transmitting element has a first surface and a second surface arranged opposite to each other. The first surface is connected to the top of the support member. Both the first surface and the second surface are coated with a film. The film is configured to reflect non-exposure wavelength light in the emitted light of the light source and transmit exposure wavelength light in the emitted light. The gas cooling unit includes a first gas cooling pipe and a second gas cooling pipe. The first gas cooling pipe is configured to output cooling gas toward the first surface, and the second gas cooling pipe is configured to output cooling gas toward the second surface. Because the coatings on the first and second surfaces of the light-transmitting element can reflect non-exposure wavelength light in the emitted light of the light source and transmit exposure wavelength light in the emitted light, non-exposure wavelength light can be blocked from entering the subsequent beam transmission and shaping unit, thereby isolating part of the energy. Furthermore, since the first gas cooling pipe can output cooling gas towards the first surface of the light-transmitting element, and the second gas cooling pipe can output cooling gas towards the second surface of the light-transmitting element, the light-transmitting element can be cooled and de-temperatured. This effectively dissipates the heat generated in the light source chamber, preventing it from affecting subsequent optical paths and thus improving exposure accuracy. Additionally, by placing the support member inside the light source chamber and near its light outlet, this invention achieves spatial isolation between the light source chamber and the beam transmission and shaping unit, effectively preventing heat from the light source chamber from affecting subsequent optical paths.

[0018] Since the exposure machine provided by this utility model includes the double-sided heat dissipation device provided by this utility model, the exposure machine provided by this utility model has at least all the beneficial effects of the double-sided heat dissipation device provided by this utility model. For details, please refer to the relevant description of the beneficial effects of the double-sided heat dissipation device provided by this utility model above. Therefore, the beneficial effects of the exposure machine provided by this utility model will not be described in detail here. Attached Figure Description

[0019] Figure 1 A schematic diagram of the overall structure of the double-sided heat dissipation device provided in the first embodiment of this utility model;

[0020] Figure 2 A schematic diagram of the overall structure of the double-sided heat dissipation device provided in the second embodiment of this utility model;

[0021] Figure 3A partial structural schematic diagram of the double-sided heat dissipation device provided in the third embodiment of this utility model;

[0022] Figure 4 A three-dimensional structural schematic diagram of the first nozzle in the double-sided heat dissipation device provided in the third embodiment of this utility model;

[0023] Figure 5 A three-dimensional structural schematic diagram of the second nozzle in the double-sided heat dissipation device provided in the third embodiment of this utility model;

[0024] Figure 6 A top view of the nozzle in the double-sided heat dissipation device provided in the third embodiment of this utility model;

[0025] Figure 7 A cross-sectional view of the nozzle in the double-sided heat dissipation device provided in the third embodiment of this utility model;

[0026] Figure 8 This is a schematic diagram of the overall structure of an exposure machine provided in one embodiment of the present invention.

[0027] The reference numerals in the attached figures are explained as follows:

[0028] Double-sided heat dissipation device - 100; Support component - 110; Overlapping part - 111; Flow channel - 112; Light-transmitting element - 120; First surface - 121; Second surface - 122; Gas cooling unit - 130; First gas cooling pipe - 131; First gas supply pipe - 1311; First nozzle - 1312; Second gas cooling pipe - 132; Second gas supply pipe - 1321; Second nozzle - 1322; Interface part - 1301; Fan-shaped part - 1302; Cooling gas controller - 133; Temperature monitoring unit - 140; First temperature sensor - 141; Second temperature sensor - 142; Water cooling unit - 150;

[0029] Light source chamber - 200; Support unit - 210; First chamber - 220; Second chamber - 230;

[0030] Light source - 300; Emitted light - 310; Non-exposure wavelength light - 311; Exposure wavelength light - 312;

[0031] Reflective ellipsoidal bowl-400;

[0032] Beam transmission and shaping unit-500;

[0033] Projection Unit-600;

[0034] Mask unit-700;

[0035] Silicon wafer unit-800. Detailed Implementation

[0036] The following detailed description of the double-sided heat dissipation device and exposure machine proposed in this utility model, in conjunction with the accompanying drawings and specific embodiments, will further clarify their features and advantages. The advantages and features of this utility model will become clearer from the following description. Please refer to the accompanying drawings for a clearer understanding of the purpose, features, and advantages of this utility model. It should be noted that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to enable those skilled in the art to understand and read the material. They are not intended to limit the implementation conditions of this utility model. Any modifications to the structure, changes in proportions, or adjustments to the size, provided they produce the same or similar effects and achieve the same purpose as this utility model, should still fall within the scope of the technical content disclosed in this utility model. Specific design features of this utility model disclosed herein, including, for example, specific dimensions, orientations, positions, and shapes, will be determined in part by the specific application and usage environment. Furthermore, in the embodiments described below, the same reference numerals are sometimes used across different drawings to denote the same parts or parts with the same function, omitting repeated descriptions. In this specification, similar reference numerals and letters are used to denote similar items, so once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor should they be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. The singular forms “a,” “one,” and “the” include plural objects. The term “or” is generally used to mean “and / or.” The term “several” is generally used to mean “at least one.” The term “at least two” is generally used to mean “two or more.” The term “multiple” is generally used to mean “at least two.”

[0038] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Moreover, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] The core idea of ​​this utility model is to provide a double-sided heat dissipation device and exposure machine, which can realize spatial isolation between the light source chamber and the subsequent beam transmission and shaping unit, prevent the heat generated in the light source chamber from affecting the subsequent optical path, and effectively improve the exposure accuracy.

[0040] Example 1

[0041] To achieve the above-mentioned goals, this utility model provides a double-sided heat dissipation device, please refer to... Figure 1 This is a schematic diagram of the overall structure of the double-sided heat dissipation device provided in the first embodiment of this utility model. Figure 1 As shown, the double-sided heat dissipation device 100 provided in this embodiment includes a support member 110, a light-transmitting element 120, and a gas cooling unit 130. The support member 110 is a hollow structure with openings at both ends. The support member 110 is configured to be disposed in the light source chamber 200 (see...). Figure 8The light-transmitting element 120 is disposed inside and near the light outlet of the light source chamber 200; the light-transmitting element 120 has a first surface 121 (lower surface) and a second surface 122 (upper surface) disposed opposite to each other, the first surface 121 is connected to the top end of the support member 110, and both the first surface 121 and the second surface 122 are coated (not shown in the figure), the coating is configured to reflect the emitted light 310 of the light source 300 (see Figure 8 The non-exposure wavelength light 311 in ) (see Figure 8 ), and transmits the exposure wavelength light 312 in the emitted light 310 (see Figure 8 The gas cooling unit 130 includes a first gas cooling pipe 131 and a second gas cooling pipe 132. The first gas cooling pipe 131 is configured to output cooling gas toward the first surface 121, and the second gas cooling pipe 132 is configured to output cooling gas toward the second surface 122.

[0042] Because the coatings on the first surface 121 and the second surface 122 of the light-transmitting element 120 can reflect the non-exposure wavelength light 311 in the emitted light 310 of the light source 300, and can transmit the exposure wavelength light 312 in the emitted light 310, the non-exposure wavelength light 311 can be prevented from entering the subsequent beam transmission and shaping unit 500 (see...). Figure 8 This design effectively isolates some energy. Furthermore, since the first gas cooling pipe 131 outputs cooling gas towards the first surface 121 of the light-transmitting element 120, and the second gas cooling pipe 132 outputs cooling gas towards the second surface 122 of the light-transmitting element 120, the light-transmitting element 120 is cooled, thus dissipating the heat generated in the light source chamber 200 and preventing it from affecting subsequent optical paths, thereby improving exposure accuracy. Additionally, by placing the support member 110 within the light source chamber 200 and close to its light outlet, this invention achieves spatial isolation between the light source chamber 200 and the beam transmission and shaping unit 500, effectively preventing the heat generated in the light source chamber 200 from affecting subsequent optical paths.

[0043] Specifically, the cooling gas introduced into the first gas cooling pipe 131 and the second gas cooling pipe 132 is pure and dry air that has been filtered by a filter (e.g., a three-stage filter) and purified by a purifier. Furthermore, both the first gas cooling pipe 131 and the second gas cooling pipe 132 use clean connectors, which can effectively ensure the cleanliness of the gas source and effectively avoid contamination of the light-transmitting element 120.

[0044] Furthermore, the light source 300 can use a mercury lamp with a power of 3500W, 4500W, 7500W, or higher. It should be noted that, as those skilled in the art will understand, light with wavelengths in the range of 220nm–330nm and 400nm–480nm can be used as the non-exposure wavelength light 311. In addition, it should be noted that, as those skilled in the art will understand, this invention does not limit the specific material of the coatings provided on the first surface 121 and the second surface 122 of the light-transmitting element 120, as long as the coating can transmit the exposure wavelength light 312 in the emitted light 310 of the light source 300 and reflect the non-exposure wavelength light 311 in the emitted light 310 of the light source 300.

[0045] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the first gas cooling conduit 131 includes a first gas supply pipe 1311 and a first nozzle 1312 connected together, the first nozzle 1312 being configured to spray cooling gas from the first gas supply pipe 1311 onto the first surface 121; the second gas cooling conduit 132 includes a second gas supply pipe 1321 and a second nozzle 1322 connected together, the second nozzle 1322 being configured to spray cooling gas from the second gas supply pipe 1321 onto the second surface 122. Thus, pure cooling gas can be delivered to the first nozzle 1312 through the first gas supply pipe 1311, and then the cooling gas can be sprayed onto the first surface 121 of the light-transmitting element 120 through the first nozzle 1312 to cool the first surface 121 of the light-transmitting element 120. Similarly, pure cooling gas can be delivered to the second nozzle 1322 through the second gas supply pipe 1321, and then the cooling gas can be sprayed onto the second surface 122 of the light-transmitting element 120 through the second nozzle 1322 to cool the second surface 122 of the light-transmitting element 120.

[0046] Please continue to refer to this. Figure 1 ,like Figure 1As shown, in some exemplary embodiments, the first nozzle 1312 is inclined toward the first surface 121 of the light-transmitting element 120, and the second nozzle 1322 is inclined toward the second surface 122 of the light-transmitting element 120. Therefore, by setting the first nozzle 1312 to be inclined toward the first surface 121 of the light-transmitting element 120, the cooling gas ejected from the first nozzle 1312 can cover a larger area of ​​the first surface 121, thereby improving the cooling effect of the first gas cooling conduit 131 on the first surface 121 of the light-transmitting element 120. Similarly, by setting the second nozzle 1322 to be inclined toward the second surface 122 of the light-transmitting element 120, the cooling gas ejected from the second nozzle 1322 can cover a larger area of ​​the second surface 122, thereby improving the cooling effect of the second gas cooling conduit 132 on the second surface 122 of the light-transmitting element 120.

[0047] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the first nozzle 1312 is disposed near the edge of the first surface 121 of the light-transmitting element 120, and the second nozzle 1322 is disposed near the edge of the second surface 122 of the light-transmitting element 120. Therefore, by setting the first nozzle 1312 near the edge of the first surface 121 of the light-transmitting element 120, it is convenient to adjust the angle of the first nozzle 1312 so that the cooling gas directly ejected from the first nozzle 1312 is as close as possible to the center of the first surface 121 of the light-transmitting element 120 and diffuses outwards, thereby achieving cooling while making the temperature distribution of the first surface 121 of the light-transmitting element 120 more uniform. Similarly, by setting the second nozzle 1322 near the edge of the second surface 122 of the light-transmitting element 120, it is convenient to adjust the angle of the second nozzle 1322 so that the cooling gas directly ejected from the second nozzle 1322 is as close as possible to the center of the second surface 122 of the light-transmitting element 120 and diffuses outwards, thereby achieving cooling while making the temperature distribution of the second surface 122 of the light-transmitting element 120 more uniform.

[0048] Please continue to refer to this. Figure 1 ,like Figure 1As shown, in some exemplary embodiments, the double-sided heat dissipation device 100 provided by this utility model further includes a temperature monitoring unit 140. The temperature monitoring unit 140 includes at least one first temperature sensor 141 and at least one second temperature sensor 142. The first temperature sensor 141 is disposed close to the first surface 121 to collect temperature data of the first surface 121, and the second temperature sensor 142 is disposed close to the second surface 122 to collect temperature data of the second surface 122. The gas cooling unit 130 further includes a cooling gas controller 133 communicatively connected to the first temperature sensor 141 and the second temperature sensor 142. The cooling gas controller 133 is configured to adjust the flow rate of the cooling gas output from the first gas cooling pipe 131 and the second gas cooling pipe 132 according to the temperature data of the first surface 121 and the second surface 122, so that the temperature difference between the first surface 121 and the second surface 122 is within a preset temperature difference range, and that the temperature of the first surface 121 and the second surface 122 are both lower than or equal to a preset allowable temperature.

[0049] Therefore, by arranging at least one temperature sensor on each of the first surface 121 and the second surface 122 of the light-transmitting element 120, the temperatures of the first surface 121 and the second surface 122 of the light-transmitting element 120 can be collected in real time. This allows the gas cooling unit 130 to adjust the flow rates of the cooling gas output from the first gas cooling pipe 131 and the second gas cooling pipe 132 according to the temperatures of the first surface 121 and the second surface 122 of the light-transmitting element 120. This ensures that the temperature difference between the first surface 121 and the second surface 122 of the light-transmitting element 120 is within a preset temperature difference range, thereby preventing deformation or damage to the light-transmitting element 120 due to an excessive temperature difference between the first surface 121 and the second surface 122. By adjusting the flow rates of the cooling gas output from the first gas cooling pipe 131 and the second gas cooling pipe 132, the temperatures of the first surface 121 and the second surface 122 of the light-transmitting element 120 are both lower than or equal to the preset allowable temperature, effectively preventing damage to the light-transmitting element 120.

[0050] It should be noted that, as those skilled in the art will understand, the present invention does not limit the specific value of the preset allowable temperature, which can be set according to actual needs. For example, the preset allowable temperature can be set to 200℃. Furthermore, it should be noted that, as those skilled in the art will understand, the present invention does not limit the specific range of the preset temperature difference range, which can be set according to actual needs. It should also be noted that the specific details regarding how to adjust the flow rate of the cooling gas output from the first gas cooling pipe 131 and the second gas cooling pipe 132 can be adapted to existing knowledge and will not be elaborated upon here.

[0051] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the first temperature sensor 141 is disposed on the inner wall of the top end of the support member 110, and the second temperature sensor 142 is disposed on the outer wall of the top end of the support member 110. Therefore, by disposing of the first temperature sensor 141 on the inner wall of the top end of the support member 110, not only can the accuracy of the temperature data of the first surface 121 of the light-transmitting element 120 collected by the first temperature sensor 141 be guaranteed, but it can also effectively prevent the first temperature sensor 141 from obstructing the emitted light 310 of the light source 300; by disposing of the second temperature sensor 142 on the outer wall of the top end of the support member 110, the accuracy of the temperature data of the second surface 122 of the light-transmitting element 120 collected by the second temperature sensor 142 can be effectively guaranteed.

[0052] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the inner diameter of the support 110 gradually decreases from its bottom end to its top end. Therefore, by configuring the support 110 as a tapered structure with an inner diameter that gradually decreases from its bottom end to its top end, it is beneficial for the coolant to exchange heat more fully and evenly with the inner wall of the support 110, thereby not only improving cooling efficiency but also effectively reducing the temperature gradient of the support 110 and minimizing thermal deformation.

[0053] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the support member 110 has an outwardly extending overlapping portion 111 on the outer periphery of its bottom end. Therefore, by providing the outwardly extending overlapping portion 111 on the outer periphery of the bottom end of the support member 110, it is easier to install the support member 110 into the light source chamber 200.

[0054] Temperature simulation of the double-sided heat dissipation device 100 provided in this embodiment yielded the following results: Under the condition of a 3500W mercury lamp, without CDA (clean dry air) cooling, the surface temperature of the light-transmitting element 120 can reach a maximum of 363.15℃, far exceeding its allowable temperature. However, when CDA cooling units are arranged on the upper surface (second surface 122) and lower surface (first surface 121) of the light-transmitting element 120 for cooling, different CDA cooling gas flow rates result in different cooling effects. When the CDA cooling gas flow rates are set to 6.75L / min, 13.5L / min, and 27L / min, the surface temperatures of the light-transmitting element 120 are 197.54℃, 141.24℃, and 109.08℃, respectively. Therefore, the initial CDA cooling gas flow rate should be greater than 6.75L / min, preferably 13.5L / min. As the power of the mercury lamp increases, the CDA cooling gas flow rate can be increased proportionally.

[0055] Example 2

[0056] Please continue to refer to this. Figure 2 This is a schematic diagram of the overall structure of the double-sided heat dissipation device 100 provided in the second embodiment of this utility model. Figure 2 As shown, the difference between the double-sided heat dissipation device 100 provided in this embodiment and the double-sided heat dissipation device 100 provided in the first embodiment is that the double-sided heat dissipation device 100 provided in this embodiment further includes a water cooling unit 150, which is configured to water cool the support member 110 and the light-transmitting element 120. Therefore, by setting the water cooling unit 150 to cool the support member 110 and the light-transmitting element 120, the heat of the double-sided heat dissipation device 100 can be further removed, further improving the heat dissipation efficiency of the double-sided heat dissipation device 100. This effectively prevents the heat generated in the light source chamber 200 from affecting the subsequent optical path, allowing the exposure machine to use a higher-power mercury lamp.

[0057] Please continue to refer to this. Figure 2 ,like Figure 2 As shown, in some exemplary embodiments, the support member 110 is provided with a flow channel 112 and an inlet (not shown) and an outlet (not shown) connected to the flow channel 112. Both the inlet and the outlet are connected to the water-cooling unit 150. Thus, the cooling water output from the water-cooling unit 150 can flow into the flow channel 112 inside the support member 110 through the inlet, and then flow back to the water-cooling unit 150 from the outlet, thereby removing heat from the double-sided heat dissipation device 100.

[0058] Please continue to refer to this. Figure 2 ,like Figure 2 As shown, in some exemplary embodiments, the flow channel 112 is arranged in a spiral shape on the support member 110. This arrangement effectively increases the path length of the flow channel 112, thereby improving heat dissipation.

[0059] In some exemplary embodiments, the water-cooling unit 150 includes an inlet pipe (not shown), an outlet pipe (not shown), and a cooling water controller (not shown). The inlet pipe is connected to the inlet, and the outlet pipe is connected to the outlet. The cooling water controller is configured to adjust the temperature and / or flow rate of the cooling water output from the inlet pipe based on the temperature data of the first surface 121 and the temperature data of the second surface 122, so that the temperature difference between the first surface 121 and the second surface 122 is within a preset temperature difference range, and that the temperatures of both the first surface 121 and the second surface 122 are lower than or equal to a preset allowable temperature.

[0060] Therefore, by adjusting the temperature and / or flow rate of the cooling water output by the water-cooling unit 150 based on the temperature data of the first surface 121 and the second surface 122 of the light-transmitting element 120, precise control of the surface temperature of the light-transmitting element 120 can be further achieved, thereby enabling the exposure machine to use higher-power mercury lamps. Specifically, temperature simulation of the double-sided heat dissipation device 100 provided in this embodiment shows that the initial cooling water temperature of the water-cooling unit 150 can be set to 18°C, and the initial cooling water flow rate can be set to 2.4 m / s.

[0061] It should be noted that, to avoid redundancy, this article only focuses on the differences between the double-sided heat dissipation device 100 provided in the second embodiment and the double-sided heat dissipation device 100 provided in the first embodiment. For more details regarding the double-sided heat dissipation device 100 provided in the second embodiment, please refer to the relevant content above concerning the double-sided heat dissipation device 100 provided in the first embodiment for an adaptive understanding; it will not be elaborated upon here. It should also be noted that the specific details regarding how to adjust the temperature and flow rate of the cooling water output from the inlet pipe can be found in relevant content known to those skilled in the art; it will not be elaborated upon here.

[0062] Example 3

[0063] Please continue to refer to this. Figures 3 to 7 ,in, Figure 3 A partial structural schematic diagram of the double-sided heat dissipation device 100 provided in the third embodiment of this utility model; Figure 4A three-dimensional structural schematic diagram of the first nozzle 1312 in the double-sided heat dissipation device 100 provided in the third embodiment of this utility model; Figure 5 A three-dimensional structural schematic diagram of the second nozzle 1322 in the double-sided heat dissipation device 100 provided in the third embodiment of this utility model; Figure 6 A top view of the nozzle in the double-sided heat dissipation device 100 provided in the third embodiment of this utility model; Figure 7 This is a cross-sectional view of the nozzles in the double-sided heat dissipation device 100 provided in the third embodiment of this utility model. Figures 3 to 7 As shown, the main difference between the double-sided heat dissipation device 100 provided in this embodiment and the double-sided heat dissipation device 100 provided in the first and second embodiments is that both the first nozzle 1312 and the second nozzle 1322 include a connected interface portion 1301 and a fan-shaped portion 1302. The interface portion 1301 and the fan-shaped portion 1302 are arranged at an angle. The first nozzle 1312 is configured to spray the cooling gas in the first gas supply pipe 1311 directly onto the first surface 121 in a fan shape, and the second nozzle 1322 is configured to spray the cooling gas in the second gas supply pipe 1321 directly onto the second surface 122 in a fan shape. Therefore, by setting both the first nozzle 1312 and the second nozzle 1322 as irregularly shaped nozzles including a connected interface portion 1301 and a fan-shaped portion 1302, and with the interface portion 1301 and the fan-shaped portion 1302 arranged at an angle, higher heat dissipation efficiency can be achieved under the same cooling gas flow rate, thereby better supporting high-illuminance exposure.

[0064] Specifically, the first nozzle 1312 and the second nozzle 1322 of the irregular nozzle structure can ensure that the flow rate of the cooling gas directly sprayed onto the first surface 121 and the second surface 122 of the light-transmitting element 120 is high, and the cooling gas flow is fan-shaped. The fan shape covers a high coverage of the surface of the light-transmitting element 120, and the distance between the direct sprayed onto the surface of the light-transmitting element 120 is relatively close. Therefore, under the same cooling gas flow conditions, the irregular nozzle structure has a better heat dissipation effect than the ordinary nozzle structure.

[0065] Furthermore, such as Figure 6 and Figure 7 As shown, the main characteristic dimensions of the irregular nozzle are the nozzle sector angle θ1 and the nozzle guide angle θ2. By adjusting the nozzle sector angle θ1, the coverage area of ​​the cooling gas ejected from the nozzle on the light-transmitting element 120 can be adjusted. By adjusting the nozzle guide angle θ2, the nozzle can be controlled to spray directly onto the center position of the surface of the light-transmitting element 120. The characteristic dimensions of the irregular nozzle can be optimized by combining simulation results, thereby further improving the heat dissipation efficiency of the double-sided heat dissipation device 100.

[0066] Simulation verification of the double-sided heat dissipation device 100 provided by this utility model revealed that, under the same mercury lamp power, when the cooling gas flow rate is set to 13.5 L / min, the nozzle fan angle θ1 is set to 60°, and the nozzle guide angle θ2 is set to 1.5°, the surface temperature of the light-transmitting element 120 can be reduced by about 10°C compared to the nozzle before optimization.

[0067] It should be noted that this article only focuses on the differences between the double-sided heat dissipation device 100 provided in the third embodiment and the double-sided heat dissipation device 100 provided in the first and second embodiments. For more information about the double-sided heat dissipation device 100 provided in the third embodiment of this utility model, please refer to the relevant content on the double-sided heat dissipation device 100 provided in the first and second embodiments of this utility model above for adaptive understanding, and will not be repeated here.

[0068] To achieve the above-mentioned goals, this utility model also provides an exposure machine, please refer to... Figure 8 This is a schematic diagram of the overall structure of the exposure machine provided in one embodiment of this utility model. Figure 8 As shown, the exposure machine provided by this utility model includes a light source chamber 200 and the double-sided heat dissipation device 100 described above, wherein the double-sided heat dissipation device 100 is disposed within the light source chamber 200. Since the exposure machine provided by this utility model includes the double-sided heat dissipation device 100, it possesses at least all the beneficial effects of the double-sided heat dissipation device 100. For details, please refer to the relevant description above; therefore, the beneficial effects of the exposure machine provided by this utility model will not be elaborated upon here.

[0069] Please continue to refer to this. Figure 8 ,like Figure 8 As shown, in some exemplary embodiments, a support portion 210 is provided on the inner periphery of the light source chamber 200, located near the light outlet and extending toward the central axis of the light source chamber 200. The bottom end of the support member 110 is connected to the support portion 210. Thus, by providing the support portion 210 on the inner periphery of the light source chamber 200, the double-sided heat dissipation device 100 can be more securely fixed inside the light source chamber 200 by overlapping the bottom end of the support member 110 with the support portion 111.

[0070] Please continue to refer to this. Figure 8 ,like Figure 8As shown, the double-sided heat dissipation device 100 provided by this utility model also includes a light source 300 (e.g., a mercury lamp) and a reflective ellipsoidal bowl 400 disposed within the light source chamber 200. Thus, the emitted light 310 from the light source 300 is converged by the reflective ellipsoidal bowl 400 and incident on the light-transmitting element 120 of the double-sided heat dissipation device 100. The light-transmitting element 120, through a surface coating treatment, reflects the non-exposure wavelength light 311 back to the light source chamber 200, while the exposure wavelength light 312 is transmitted into the subsequent optical path to provide an illumination beam.

[0071] Please continue to refer to this. Figure 8 ,like Figure 8 As shown, the double-sided heat dissipation device 100 provided by this utility model also includes a beam transmission and shaping unit 500, a projection unit 600, a mask unit 700, and a silicon wafer unit 800. Thus, the beam transmission and shaping unit 500 can transmit exposure wavelength light 312 and uniformly irradiate it onto the mask unit 700, and then the projection unit 600 images the image containing the circuit on the mask unit 700 onto the silicon wafer surface of the silicon wafer unit 800.

[0072] Please continue to refer to this. Figure 8 ,like Figure 8 As shown, the carrier 210 can divide the light source chamber 200 into a first chamber 220 and a second chamber 230. The side of the double-sided heat dissipation device 100 closest to the light source 300 forms a relatively sealed space with the first chamber 220, and the side of the double-sided heat dissipation device 100 furthest from the light source 300 forms a relatively sealed space with the second chamber 230. This spatially isolates the light source chamber 200 and the beam transmission and shaping unit 500.

[0073] In summary, compared with the prior art, the double-sided heat dissipation device 100 and the exposure machine provided by this utility model have the following beneficial effects:

[0074] (1) Since the coatings provided on the first surface 121 and the second surface 122 of the light-transmitting element 120 in the double-sided heat dissipation device 100 provided by this utility model can reflect the non-exposure wavelength light 311 in the emitted light 310 of the light source 300 and can transmit the exposure wavelength light 312 in the emitted light 310, the non-exposure wavelength light 311 can be isolated from entering the subsequent beam transmission and shaping unit 500, thereby playing the role of isolating part of the energy.

[0075] (2) Since the first gas cooling pipe 131 in the double-sided heat dissipation device 100 provided by this utility model can output cooling gas toward the first surface 121 of the light-transmitting element 120, and the second gas cooling pipe 132 can output cooling gas toward the second surface 122 of the light-transmitting element 120, it can cool down the light-transmitting element 120, thereby dissipating the heat generated by the light source chamber 200 in a timely manner, effectively preventing the heat generated by the light source chamber 200 from affecting the subsequent light path, and thus effectively improving the exposure accuracy.

[0076] (3) By setting the support member 110 inside the light source chamber 200 and close to the light outlet of the light source chamber 200, the present invention can achieve spatial isolation between the light source chamber 200 and the beam transmission and shaping unit 500, effectively preventing the heat generated by the light source chamber 200 from affecting the subsequent optical path.

[0077] (4) By arranging at least one temperature sensor on each of the first surface 121 and the second surface 122 of the light-transmitting element 120 and adjusting the flow rate of the cooling gas according to the temperature data of the first surface 121 and the second surface 122 collected in real time, the present invention can effectively control the temperature difference between the first surface 121 and the second surface 122 of the light-transmitting element 120 and avoid deformation or damage to the light-transmitting element 120 due to excessive temperature difference.

[0078] (5) By setting the nozzle of the gas cooling unit 130 to an irregular nozzle structure including a connected interface portion 1301 and a fan-shaped portion 1302, and the interface portion 1301 and the fan-shaped portion 1302 are arranged at an angle, the present invention can achieve higher heat dissipation efficiency under the same cooling gas flow rate, thereby better supporting high illumination exposure.

[0079] It should be noted that in the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0080] The above description is merely a description of a preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model. Obviously, those skilled in the art can make various modifications and variations to the utility model without departing from the spirit and scope of the present utility model. Therefore, if these modifications and variations fall within the scope of the present utility model and its equivalents, the present utility model also intends to include these modifications and variations.

Claims

1. A double-sided heat dissipation device, characterized in that, It includes a support member, a light-transmitting element, and a gas cooling unit. The support member is a hollow structure with openings at both ends. The support member is configured to be located inside the light source chamber and close to the light outlet of the light source chamber. The light-transmitting element has a first surface and a second surface disposed opposite to each other. The first surface is connected to the top end of the support member. Both the first surface and the second surface are coated with a film. The film is configured to reflect non-exposure wavelength light in the emitted light of the light source and transmit exposure wavelength light in the emitted light. The gas cooling unit includes a first gas cooling pipe and a second gas cooling pipe. The first gas cooling pipe is configured to output cooling gas toward the first surface, and the second gas cooling pipe is configured to output cooling gas toward the second surface.

2. The double-sided heat dissipation device according to claim 1, characterized in that, The first gas cooling pipeline includes a first gas supply pipe and a first nozzle connected together, the first nozzle being configured to spray cooling gas from the first gas supply pipe onto the first surface; The second gas cooling pipeline includes a second gas supply pipe and a second nozzle connected together, the second nozzle being configured to spray cooling gas from the second gas supply pipe onto the second surface.

3. The double-sided heat dissipation device according to claim 2, characterized in that, Both the first nozzle and the second nozzle include a connected interface portion and a fan-shaped portion, with the interface portion and the fan-shaped portion arranged at an angle. The first nozzle is configured to spray the cooling gas in the first gas supply pipe directly onto the first surface in a fan shape, and the second nozzle is configured to spray the cooling gas in the second gas supply pipe directly onto the second surface in a fan shape.

4. The double-sided heat dissipation device according to claim 1, characterized in that, It also includes a temperature monitoring unit, which includes at least one first temperature sensor and at least one second temperature sensor. The first temperature sensor is disposed close to the first surface to collect temperature data of the first surface, and the second temperature sensor is disposed close to the second surface to collect temperature data of the second surface. The gas cooling unit further includes a cooling gas controller that is communicatively connected to the first temperature sensor and the second temperature sensor. The cooling gas controller is configured to adjust the flow rate of the cooling gas output from the first gas cooling pipeline and the second gas cooling pipeline according to the temperature data of the first surface and the temperature data of the second surface, so that the temperature difference between the first surface and the second surface is within a preset temperature difference range, and that the temperature of the first surface and the second surface are both lower than or equal to a preset allowable temperature.

5. The double-sided heat dissipation device according to claim 1, characterized in that, It also includes a water-cooling unit configured to water-cool the support and the light-transmitting element.

6. The double-sided heat dissipation device according to claim 5, characterized in that, The support member is provided with a flow channel and an inlet and an outlet connected to the flow channel. Both the inlet and the outlet are connected to the water cooling unit.

7. The double-sided heat dissipation device according to claim 1, characterized in that, The inner diameter of the support gradually decreases from its bottom end to its top end.

8. The double-sided heat dissipation device according to claim 1, characterized in that, The support member has an outwardly extending overlapping portion on the outer periphery of its bottom end.

9. An exposure machine, characterized in that, It includes a light source chamber and a double-sided heat dissipation device as described in any one of claims 1 to 8, wherein the double-sided heat dissipation device is disposed in the light source chamber.

10. The exposure machine according to claim 9, characterized in that, The inner periphery of the light source chamber is provided with a support portion that is located near the light outlet and extends toward the central axis of the light source chamber, and the bottom end of the support member is connected to the support portion.

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