A circulating mechanism for an external carrier of a formic acid furnace
By designing an external carrier circulation mechanism for the formic acid furnace, automatic circulation and cooling of the carrier were achieved, solving the problems of low efficiency and increased labor caused by manual operation, and improving work efficiency and cooling effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 芯朋半导体科技(如东)有限公司
- Filing Date
- 2025-04-28
- Publication Date
- 2026-05-26
AI Technical Summary
The existing external carriers for formic acid furnaces require manual operation, which leads to low work efficiency, increases labor costs, and reduces the effectiveness of the carriers.
An external carrier circulation mechanism for a formic acid furnace was designed, including a circulation mechanism, a positioning mechanism, and a cooling mechanism. The automatic circulation movement of the carrier is achieved through a motor drive and a rotation mechanism, and the positioning mechanism prevents deviation. At the same time, the cooling mechanism cools the workpiece during the movement.
It improves the working efficiency of the carrier and formic acid furnace, reduces the labor intensity of the workers, and improves the cooling efficiency of the workpiece, making the workpiece loading and unloading operations easier.
Smart Images

Figure CN224285443U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of formic acid furnace technology, and specifically to a circulating mechanism for an external carrier of a formic acid furnace. Background Technology
[0002] A formic acid furnace is a device used to process formic acid-related reactions or processes. Formic acid is a weak organic acid. In chemical production and other processes, formic acid furnaces can be used for various reactions such as the decomposition and synthesis of formic acid. Formic acid furnaces can also be used in semiconductor manufacturing processes such as chip welding. In a vacuum environment, the reducing properties of formic acid are used to prevent metal oxidation, achieve high-quality chip welding, and improve the connection performance between the chip and the packaging substrate.
[0003] In existing formic acid furnaces, workers typically install the workpieces to be processed onto a carrier outside the furnace, then feed them into the furnace through the furnace inlet for processing, and finally send them out through the furnace outlet. Once the processed workpieces have cooled down, they are manually removed from the carrier, and the empty carrier is then transported back to the furnace inlet for the installation of the next workpiece.
[0004] Considering that the existing external carriers for formic acid furnaces are operated manually, the working efficiency of the carriers and formic acid furnaces is reduced, the labor force of the workers is increased, and the effectiveness of the carriers is reduced. Utility Model Content
[0005] The purpose of this utility model is to provide a circulating mechanism for an external carrier of a formic acid furnace.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] A circulating mechanism for an external carrier of a formic acid furnace is provided, comprising a furnace body, a circulating mechanism, a positioning mechanism, and a cooling mechanism. The circulating mechanism is fixedly installed on the outer wall of the furnace body and is used to drive the external carrier of the formic acid furnace to circulate. The positioning mechanism is fixedly installed on the circulating mechanism and is used to position the circulating mechanism. The cooling mechanism is fixedly installed on the inner side of the circulating mechanism and is used to cool the processed parts placed on the external carrier of the formic acid furnace. The circulating mechanism includes a housing, a mounting plate, and a rotating mechanism. The housing is fixedly installed on the outer wall of the furnace body, the mounting plate is fixedly installed on the inner side of the housing, and the rotating mechanism is rotatably installed on the inner side of the mounting plate and is used to adjust the moving direction of the external carrier of the formic acid furnace.
[0008] Furthermore, the circulation mechanism also includes a ring gear, a support platform, a motor, gears, rollers, and a ring guide rail. The ring gear is fixedly installed on the top of the mounting plate, the ring guide rail is fixedly installed on the top of the mounting plate, the motor is fixedly installed on the inner side of the support platform, the top of the gear is fixedly connected to the output shaft of the motor, the rollers are rotatably installed on the bottom of the support platform, the gears mesh with the ring gear, and the rollers are slidably installed on the inner side of the ring guide rail.
[0009] Furthermore, the rotating mechanism includes a drive motor, a rotating disk, a rack, and a linear guide. The drive motor is fixedly installed on the bottom left side of the inner side of the housing. The bottom of the rotating disk is fixedly connected to the output shaft of the drive motor. The rack is fixedly installed on the top of the rotating disk. The linear guide is fixedly installed on the top of the rotating disk. The rotating disk is rotatably connected to the inner side of the mounting plate. The rack meshes with a gear. The inner side of the linear guide is slidably connected to the outer wall of the roller.
[0010] Furthermore, the positioning mechanism includes a plug rod, an electric telescopic rod, a plug block, and an inclined block. The plug rod is fixedly installed at the bottom of the rotating disk, the electric telescopic rod is fixedly installed at the bottom of the rotating disk, the plug block is fixedly installed at the output end of the electric telescopic rod, and the inclined block is fixedly installed at the bottom of the support platform.
[0011] Furthermore, the positioning mechanism also includes a wedge, a pressing block, a trapezoidal block, a spring, and a connecting post. The pressing block is slidably installed on the inner top of the mounting plate. The wedge passes through and is slidably connected to the inner bottom of the mounting plate. The trapezoidal block is fixedly installed on the bottom of the wedge. The connecting post is fixedly installed on one side of the wedge. One end of the spring is fixedly connected to the inner side of the mounting plate, and the other end of the spring is fixedly installed on the end of the connecting post. The connecting post is slidably installed on the inner side of the mounting plate. The bottom of the pressing block contacts the top of the wedge. The inner side of the trapezoidal block engages with the outer wall of the insertion rod.
[0012] Furthermore, the cooling mechanism includes an inlet fan, an outlet fan, an impeller, an outlet duct 1, an outlet duct 2, and a splitter pipe. The inlet fan is fixedly installed at one end of the top of the housing, and the outlet fan is fixedly installed at the bottom of the housing away from the inlet fan. The impeller is rotatably installed on the inner side of the mounting plate. The outlet duct 1 is fixedly installed at the top of the splitter pipe, and the outlet duct 2 is fixedly installed at the bottom of the splitter pipe. The splitter pipe is fixedly installed at the output end of the inlet fan. The top of the outlet duct 1 is fixedly connected to the top inner side of the housing, and the outlet duct 2 is fixedly installed at the bottom inner side of the housing. Air outlets are provided at the bottom of the outlet duct 1 and the top of the outlet duct 2.
[0013] The beneficial effects of this utility model are as follows: The external carrier circulation mechanism of the formic acid furnace, through the setting of circulation mechanism, rotation mechanism and positioning mechanism, enables the carrier platform to move along the annular guide rail and annular toothed rail, thereby transporting the empty carrier platform from the outlet of the formic acid furnace to the inlet of the formic acid furnace to achieve the circulation effect of the carrier. At the same time, the positioning mechanism can limit the position of the rotating disk to prevent the carrier platform from deviating during the movement, thereby improving the working efficiency and use effect of the carrier and the formic acid furnace, and reducing the labor of the workers. In addition, the setting of cooling mechanism can dissipate heat from the workpieces processed on the carrier platform during the transport process, thereby improving the cooling efficiency of the workpieces and making it easier for the workers to remove the processed workpieces from the carrier platform. Attached Figure Description
[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments of this utility model will be briefly introduced below.
[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;
[0016] Figure 2 This is a schematic diagram of the main structure of the shell of this utility model;
[0017] Figure 3 This is a schematic diagram of the main structure of the circulation mechanism of this utility model;
[0018] Figure 4 This is a schematic diagram showing the disassembled structure of the support platform and rotating mechanism of this utility model;
[0019] Figure 5 This is a schematic diagram of the main structure of the mounting plate of this utility model;
[0020] Figure 6 For the present utility model Figure 5 Enlarged structural diagram of section A;
[0021] Figure 7 This is a schematic diagram of the main structure of the cooling mechanism of this utility model.
[0022] In the diagram: 1. Furnace body; 2. Circulation mechanism; 21. Shell; 22. Annular gear; 23. Support platform; 24. Motor; 25. Gear; 26. Roller; 27. Mounting plate; 28. Annular guide rail; 29. Rotation mechanism; 291. Drive motor; 292. Rotating disk; 293. Rack; 294. Linear guide rail; 3. Positioning mechanism; 31. Insert rod; 32. Electric telescopic rod; 33. Insert block; 34. Inclined block; 35. Wedge block; 36. Extrusion block; 37. Trapezoidal block; 38. Spring; 39. Connecting column; 4. Cooling mechanism; 41. Inlet fan; 42. Outlet fan; 43. Impeller; 44. Outlet duct one; 45. Outlet duct two; 46. Diverter pipe. Detailed Implementation
[0023] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.
[0024] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of this utility model, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.
[0025] Reference Figures 1 to 3The diagram illustrates a circulating mechanism for an external carrier of a formic acid furnace, comprising a furnace body 1, a circulating mechanism 2, a positioning mechanism 3, and a cooling mechanism 4. The circulating mechanism 2 is fixedly installed on the outer wall of the furnace body 1 and drives the external carrier of the formic acid furnace to circulate. Through the circulating mechanism 2, the support platform 23 can be transported from the outlet to the inlet of the furnace body 1 for workpiece loading and unloading, thereby improving the working efficiency of the support platform 23 and the furnace body 1. The positioning mechanism 3 is fixedly installed on the circulating mechanism 2 and is used to position the circulating mechanism 2. The positioning mechanism 3 limits the rotation disk 292, allowing the support platform 23 to move along the annular toothed track 22 and the annular guide rail 28, preventing the support platform 23 from shifting during movement. The cooling mechanism 4 is fixedly installed on the inner side of the circulating mechanism 2 and is used to cool the processed parts placed on the external carrier of the formic acid furnace. Cooling is achieved through cooling mechanism 4, which improves the cooling efficiency of the workpiece and further enhances the working efficiency of the support platform 23 and the furnace body 1. The circulation mechanism 2 includes a housing 21, a mounting plate 27, and a rotating mechanism 29. The housing 21 is fixedly installed on the outer wall of the furnace body 1. A cover plate is provided on the side of the housing 21 near the rotating mechanism 29 to open or close the opening of the housing 21, thereby facilitating the loading and unloading of workpieces on the support platform 23 by the operators. The mounting plate 27 is fixedly installed on the inner side of the housing 21, and it supports and fixes the annular toothed rail 22 and the annular guide rail 28. The rotating mechanism 29 is rotatably installed on the inner side of the mounting plate 27. The rotating mechanism 29 is used to adjust the moving direction of the external carrier of the formic acid furnace. Through the rotating mechanism 29, the rotating disk 292 drives the support platform 23 to rotate, thereby adjusting the moving direction of the support platform 23 and achieving the circulation effect.
[0026] Reference Figures 3 to 5 The circulation mechanism 2 also includes an annular gear 22, a support platform 23, a motor 24, a gear 25, a roller 26, and an annular guide rail 28. The annular gear 22 and the annular guide rail 28 are fixedly installed on the top of the mounting plate 27. The annular gear 22 and the annular guide rail 28 guide the support platform 23, enabling the support platform 23 to achieve a circulation effect. The motor 24 is fixedly installed on the inner side of the support platform 23. By starting the motor 24, the gear 25 can be driven to rotate. The top of the gear 25 is in contact with the motor. The output shaft of the machine 24 is fixedly connected. There are two gears 25 and two symmetrically distributed motors 24. Two rollers 26 are rotatably installed on the bottom of the support platform 23. The gears 25 mesh with the annular toothed track 22. Through the rotation of the gears 25, the support platform 23 can be moved along the annular toothed track 22. The rollers 26 are slidably installed on the inner side of the annular guide rail 28. The rollers 26 improve the smoothness of the movement of the support platform 23 and reduce the friction between the support platform 23 and the annular guide rail 28.
[0027] Reference Figure 4 and Figure 5 The rotating mechanism 29 includes a drive motor 291, a rotating disk 292, a rack 293, and a linear guide 294. The drive motor 291 is fixedly installed on the bottom left side of the inner side of the housing 21. By starting the drive motor 291, the rotating disk 292 rotates. The bottom of the rotating disk 292 is fixedly connected to the output shaft of the drive motor 291. The rotation of the rotating disk 292 adjusts the direction of the rack 293 and the linear guide 294 on the rotating disk 292. The rack 293 is fixedly installed on the top of the rotating disk 292, and the linear guide 294 is fixedly installed on the top of the rotating disk 292. Mounted on the top of the rotating disk 292, the rotating disk 292 supports and fixes the rack 293 and the linear guide 294. The rotating disk 292 is rotatably connected to the inner side of the mounting plate 27. The rack 293 meshes with the gear 25. The inner side of the linear guide 294 is slidably connected to the outer wall of the roller 26. When the support platform 23 moves onto the rotating disk 292, the rotation of the rotating disk 292 can drive the support platform 23 to rotate, thereby enabling the support platform 23 to move along the rack 293 and the linear guide 294 onto the annular toothed rail 22 and the annular guide rail 28.
[0028] Reference Figure 4 and Figure 6 The positioning mechanism 3 includes a rod 31, an electric telescopic rod 32, a block 33, and an inclined block 34. The rod 31 is fixedly installed at the bottom of the rotating disk 292. The angle between the rod 31 and the electric telescopic rod 32 is 90 degrees. The position of the rod 31 and the electric telescopic rod 32 can be adjusted by rotating the rotating disk 292. The electric telescopic rod 32 is fixedly installed at the bottom of the rotating disk 292. The block 33 is fixedly installed at the output end of the electric telescopic rod 32. The block 33 can be moved by starting the electric telescopic rod 32. The inclined block 34 is fixedly installed at the bottom of the support platform 23. The inclined block 34 is located at one end of the bottom of the support platform 23, and one side of the inclined block 34 is inclined, while the other side is straight.
[0029] Reference Figure 4 and Figure 6The positioning mechanism 3 also includes a wedge 35, a pressing block 36, a trapezoidal block 37, a spring 38, and a connecting post 39. The pressing block 36 is slidably installed on the top inner side of the mounting plate 27. The wedge 35 penetrates and is slidably connected to the bottom inner side of the mounting plate 27. Through the sliding effect of the wedge 35, the trapezoidal block 37 can be moved. The trapezoidal block 37 is fixedly installed on the bottom of the wedge 35. Both sides of the trapezoidal block 37 are inclined surfaces. Through the movement of the trapezoidal block 37, the trapezoidal block 37 can engage or disengage with the insertion rod 31 or the insertion block 33. The connecting post 39 is fixedly installed on one side of the wedge 35. One end of the spring 38 is connected to the mounting plate 27. The inner side of 7 is fixedly connected, and the other end of the spring 38 is fixedly installed at the end of the connecting post 39. Through the elastic force of the spring 38, the connecting post 39, without external force, always drives the wedge block 35 to move closer to the rotating disk 292. The connecting post 39 is slidably installed on the inner side of the mounting plate 27. Through the sliding effect of the connecting post 39, the wedge block 35 can be driven to move. The bottom of the pressing block 36 contacts the top of the wedge block 35. The top of the wedge block 35 is a slope. Through the sliding effect of the wedge block 35, the pressing block 36 can move vertically. The inner side of the trapezoidal block 37 is engaged with the outer wall of the insert rod 31. When the rotating disk 292... At different positions, trapezoidal block 37 can engage with insert rod 31 and insert block 33 respectively, thereby limiting the rotation disk 292. When the support platform 23 moves above the extrusion block 36, the inclined surface of the inclined block 34 can press the extrusion block 36, causing the extrusion block 36 to move downward to extrude wedge block 35. This causes wedge block 35 to drive trapezoidal block 37 to move, thereby releasing the engagement effect between trapezoidal block 37 and insert rod 31, and simultaneously releasing the limiting effect on rotation disk 292. At this time, drive motor 291 can drive rotation of rotation disk 292, adjusting the position of rack 293 and linear guide rail 294, and simultaneously adjusting insert rod 31 and electric telescopic rod 3. Position 2 allows the support platform 23 to continue moving onto the rotating disk 292. When the inclined block 34 passes the pressing block 36, the spring 38 drives the wedge block 35 to reset, allowing the trapezoidal block 37 to engage with the insert block 33, limiting the rotation disk 292. This facilitates the installation and removal of workpieces on the support platform 23 by the workers. After the workpieces on the support platform 23 are installed, the electric telescopic rod 32 is controlled to retract, releasing the engagement between the insert block 33 and the trapezoidal block 37. The position of the rotating disk 292 is then readjusted to facilitate the feeding of the workpiece into the furnace body 1. At the same time, the insert rod 31 can press the inclined surface of the trapezoidal block 37 and engage with the trapezoidal block 37.
[0030] Reference Figure 2 , Figure 3 and Figure 7The cooling mechanism 4 includes an inlet fan 41, an outlet fan 42, an impeller 43, an outlet duct 44, an outlet duct 45, and a distribution pipe 46. The inlet fan 41 is fixedly installed at one end of the top of the housing 21. By starting the inlet fan 41, cold air from the outside is drawn in. The outlet fan 42 is fixedly installed at the bottom of the housing 21, away from the inlet fan 41. By starting the outlet fan 42, hot air inside the housing 21 is drawn out. The impeller 43 is rotatably installed on the inner side of the mounting plate 27. Multiple sets of impellers 43 are symmetrically distributed. The outlet duct 44 is fixedly installed at the top of the distribution pipe 46, and the outlet duct 45 is fixedly installed at the bottom of the distribution pipe 46. The outlet duct 44 and the outlet duct 45 are arranged opposite to each other. The distribution pipe 46 is fixedly installed at the outlet of the inlet fan 41. At the outlet, the cold air drawn by the inlet fan 41 is delivered to outlet pipe 44 and outlet pipe 45 respectively through the diversion pipe 46. The top of outlet pipe 44 is fixedly connected to the top inner side of the housing 21, and outlet pipe 45 is fixedly installed at the bottom inner side of the housing 21. Air outlets are opened at the bottom of outlet pipe 44 and the top of outlet pipe 45. The ends of outlet pipe 44 and outlet pipe 45 are closed. When the cold air inside outlet pipe 44 and outlet pipe 45 is discharged from the air outlet, it will form an upward and downward convection, so that the gas will circulate inside the housing 21, improving the cooling effect of the workpiece. At the same time, when the air blows the impeller 43 to swing irregularly, it can further disperse the air force and ensure the uniformity of heat dissipation.
[0031] The external carrier circulation mechanism of this formic acid furnace, through its circulation, rotation, and positioning mechanisms, enables the carrier platform to move along the annular guide rail and annular toothed rail. This allows the empty carrier platform to be transported from the outlet to the inlet of the formic acid furnace, achieving a carrier circulation effect. Simultaneously, the positioning mechanism limits the position of the rotating disk, preventing the carrier platform from shifting during movement. This improves the working efficiency and effectiveness of both the carrier and the formic acid furnace, while reducing the labor required of workers. Furthermore, the included cooling mechanism dissipates heat from the processed workpieces on the carrier platform during transport, improving cooling efficiency and facilitating the removal of the processed workpieces from the platform.
[0032] It should be stated that the above-described specific embodiments are merely preferred embodiments of this utility model and the technical principles employed. Those skilled in the art should understand that various modifications, equivalent substitutions, and variations can be made to this utility model. However, such variations, as long as they do not depart from the spirit of this utility model, should be within the protection scope of this utility model. Furthermore, some terminology used in this application specification and claims is not limiting, but merely for ease of description.
Claims
1. A circulating mechanism for an external carrier of a formic acid furnace, characterized in that, The furnace includes a furnace body (1), a circulation mechanism (2), a positioning mechanism (3), and a cooling mechanism (4). The circulation mechanism (2) is fixedly installed on the outer wall of the furnace body (1) and is used to drive the external carrier of the formic acid furnace to move in a circulation manner. The positioning mechanism (3) is fixedly installed on the circulation mechanism (2) and is used to position the circulation mechanism (2). The cooling mechanism (4) is fixedly installed on the inner side of the circulation mechanism (2) and is used to cool the processing parts placed on the external carrier of the formic acid furnace. The circulation mechanism (2) includes a shell (21), a mounting plate (27), and a rotating mechanism (29). The shell (21) is fixedly installed on the outer wall of the furnace body (1), the mounting plate (27) is fixedly installed on the inner side of the shell (21), and the rotating mechanism (29) is rotatably installed on the inner side of the mounting plate (27) and is used to adjust the moving direction of the external carrier of the formic acid furnace.
2. The formic acid furnace external carrier circulation mechanism according to claim 1, characterized in that, The circulation mechanism (2) also includes an annular gear (22), a support platform (23), a motor (24), a gear (25), a roller (26), and an annular guide rail (28). The annular gear (22) is fixedly installed on the top of the mounting plate (27), the annular guide rail (28) is fixedly installed on the top of the mounting plate (27), the motor (24) is fixedly installed on the inner side of the support platform (23), the top of the gear (25) is fixedly connected to the output shaft of the motor (24), the roller (26) is rotatably installed on the bottom of the support platform (23), the gear (25) meshes with the annular gear (22), and the roller (26) is slidably installed on the inner side of the annular guide rail (28).
3. The external carrier circulation mechanism for a formic acid furnace according to claim 1, characterized in that, The rotating mechanism (29) includes a drive motor (291), a rotating disk (292), a rack (293), and a linear guide (294). The drive motor (291) is fixedly installed on the bottom left side of the inner side of the housing (21). The bottom of the rotating disk (292) is fixedly connected to the output shaft of the drive motor (291). The rack (293) is fixedly installed on the top of the rotating disk (292). The linear guide (294) is fixedly installed on the top of the rotating disk (292). The rotating disk (292) is rotatably connected to the inner side of the mounting plate (27). The rack (293) meshes with the gear (25). The inner side of the linear guide (294) is slidably connected to the outer wall of the roller (26).
4. The external carrier circulation mechanism for a formic acid furnace according to claim 1, characterized in that, The positioning mechanism (3) includes a plug rod (31), an electric telescopic rod (32), a plug block (33), and an inclined block (34). The plug rod (31) is fixedly installed at the bottom of the rotating disk (292), the electric telescopic rod (32) is fixedly installed at the bottom of the rotating disk (292), the plug block (33) is fixedly installed at the output end of the electric telescopic rod (32), and the inclined block (34) is fixedly installed at the bottom of the support platform (23).
5. The formic acid furnace external carrier circulation mechanism according to claim 4, characterized in that, The positioning mechanism (3) also includes a wedge (35), a pressing block (36), a trapezoidal block (37), a spring (38), and a connecting post (39). The pressing block (36) is slidably installed on the top inner side of the mounting plate (27). The wedge (35) is slidably connected to the bottom inner side of the mounting plate (27). The trapezoidal block (37) is fixedly installed on the bottom of the wedge (35). The connecting post (39) is fixedly installed on one side of the wedge (35). One end of the spring (38) is fixedly connected to the inner side of the mounting plate (27). The other end of the spring (38) is fixedly installed on the end of the connecting post (39). The connecting post (39) is slidably installed on the inner side of the mounting plate (27). The bottom of the pressing block (36) contacts the top of the wedge (35). The inner side of the trapezoidal block (37) is engaged with the outer wall of the insert rod (31).
6. The external carrier circulation mechanism for a formic acid furnace according to claim 1, characterized in that, The cooling mechanism (4) includes an inlet fan (41), an outlet fan (42), an impeller (43), an outlet duct one (44), an outlet duct two (45), and a splitter pipe (46). The inlet fan (41) is fixedly installed at the top end of the housing (21), and the outlet fan (42) is fixedly installed at the bottom end of the housing (21) away from the inlet fan (41). The impeller (43) is rotatably installed on the inner side of the mounting plate (27). The outlet duct one (44) The first air outlet pipe (44) is fixedly installed at the top of the split pipe (46), the second air outlet pipe (45) is fixedly installed at the bottom of the split pipe (46), the split pipe (46) is fixedly installed at the output end of the air inlet fan (41), the top of the first air outlet pipe (44) is fixedly connected to the top of the inner side of the housing (21), the second air outlet pipe (45) is fixedly installed at the bottom of the inner side of the housing (21), and air outlets are provided at the bottom of the first air outlet pipe (44) and the top of the second air outlet pipe (45).