Silane conveying device and solar cell production equipment

Abstract

The utility model relates to a silane conveying device and solar cell production equipment. The silane conveying device comprises a gas inlet piece and a gas conveying piece. Wherein the gas transmission part comprises a plurality of gas outlet pipes which are arranged at intervals, the lengths of the gas outlet pipes in the first direction are not equal, each gas outlet pipe is provided with a through gas outlet hole, and the gas outlet holes are communicated with the gas inlet part. By arranging the multiple gas outlet pipes arranged at intervals, silane gas is directly conveyed to the ends, away from the gas inlet piece, of the gas outlet pipes through the gas outlet holes in the gas outlet pipes, the probability that amorphous silicon is accumulated in the gas outlet holes can be reduced, and the service life of the silane conveying device is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of solar cell production technology, and in particular to a silane delivery device and solar cell production equipment. Background Technology

[0002] In the LPCVD (Low-Pressure Chemical Vapor Deposition) process of solar cell production, silane gas is introduced to react and deposit a silicon-based thin film on the substrate surface for light absorption, carrier transport, passivation protection, and optical modulation. The quality of the silicon-based thin film directly affects the photoelectric conversion efficiency and stability of the solar cell. Prior art CN 214830646 U discloses an LPCVD gas inlet structure that uses pores on the gas inlet pipe to transport silane. However, the pores in the gas inlet structure can become clogged due to the accumulation of amorphous silicon, resulting in insufficient silane expulsion and affecting the quality of the silicon-based thin film formed on the solar cell. Utility Model Content

[0003] Therefore, it is necessary to provide a silane delivery device and solar cell production equipment that improves upon the above-mentioned defects, addressing the problem of insufficient silane gas output caused by pore blockage in existing silane delivery devices.

[0004] This application provides a silane delivery device, comprising:

[0005] Intake components; and

[0006] The gas delivery component includes a plurality of spaced-apart gas outlet pipes, each of which has a different length along a first direction. Each gas outlet pipe has a through-hole, which is connected to the gas inlet component to deliver the silane to the end of the gas outlet pipe away from the gas inlet component, thereby achieving delivery of the silane at different distances along the first direction.

[0007] By setting multiple spaced-apart outlet pipes, silane gas is directly delivered to the end of the outlet pipe away from the inlet through the outlet holes on the outlet pipe. Compared with the solution of delivering silane through multiple outlet holes on a single outlet pipe, delivering silane through multiple outlet pipes can increase the size of the outlet holes, reduce the probability of amorphous silicon accumulating in the outlet holes, and extend the service life of the silane delivery device.

[0008] In some embodiments, the length difference between two adjacent air outlet pipes along the first direction is equal, both being greater than or equal to 10 mm and less than or equal to 100 mm.

[0009] In some embodiments, the vent hole of the vent pipe with a larger length dimension along the first direction has a larger size.

[0010] In some embodiments, the vent holes are of equal size, and the gas delivery component further includes a flow meter and a regulating valve disposed on each of the vent pipes. The flow meter is disposed downstream of the regulating valve along the silane delivery direction, and the regulating valve adjusts its opening according to the value of the flow meter to ensure the uniformity of the silane flowing out of each of the vent pipes.

[0011] In some embodiments, the air outlets are of equal size, and along the first direction, the distance between the ends of two adjacent air outlets that are away from the air inlet decreases.

[0012] In some embodiments, the air outlet is a circular hole, and the diameter of each air outlet is greater than or equal to 5 mm and less than or equal to 15 mm.

[0013] In some embodiments, the outlet pipe includes a first diffusion section and a second diffusion section connected in communication. The first diffusion section extends along the first direction, and the second diffusion section extends at a certain angle to the first diffusion section to change the output direction of the silane.

[0014] In some embodiments, the silane delivery device further includes a buffer disposed between the inlet and the outlet along the first direction, wherein the size of the buffer gradually increases along the first direction.

[0015] Another aspect of this application provides a solar cell manufacturing apparatus, comprising:

[0016] An LPCVD reactor tube, including an LPCVD reaction chamber, wherein solar cells are placed inside the LPCVD reaction chamber;

[0017] A silane gas supply device is installed on one side of the LPCVD reactor tube; and

[0018] In the aforementioned silane delivery device, the gas delivery component is disposed within the LPCVD reaction chamber, and the gas inlet component is connected to the silane gas supply device to deliver the silane into the LPCVD reaction chamber.

[0019] In some embodiments, the LPCVD reactor tube includes a first end cap and a second end cap spaced apart along a first direction, and the solar cell production equipment includes two silane delivery devices, with the gas inlet of each of the two silane delivery devices respectively disposed on the first end cap and the second end cap.

[0020] In some embodiments, the solar cell production equipment includes a carrier, the solar cell is disposed on the carrier, and the LPCVD reactor tube further includes a through hole. The through hole and the silane delivery device are respectively disposed on both sides of the carrier, so that the silane output from the vent hole flows through the carrier and then flows out from the through hole. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the solar cell production equipment in this embodiment of the present invention;

[0022] Figure 2 for Figure 1 The main view;

[0023] Figure 3 This is a schematic diagram of the silane delivery device in one embodiment of the present invention;

[0024] Figure 4 for Figure 3 The left view;

[0025] Figure 5 for Figure 4 Sectional view along AA;

[0026] Figure 6 for Figure 5 A magnified view of a portion of position B in the middle;

[0027] Figure 7 This is a schematic diagram of the silane delivery device in another embodiment of the present invention;

[0028] Figure 8 This is a schematic diagram of the silane delivery device in another embodiment of the present invention;

[0029] Explanation of reference numerals in the attached figures:

[0030] 1. Silane delivery device; 11. Inlet; 12. Delivery device, 121. Outlet pipe, 1211. Outlet hole, 1212. First dispersion section, 1213. Second dispersion section, 122. Flow meter, 123. Regulating valve; 13. Buffer.

[0031] 2LPCVD reactor tube, 21LPCVD reaction chamber, 22 first end cap, 23 second end cap, 24 through hole;

[0032] 3 vehicles;

[0033] d is the length of the vent pipe along the first direction;

[0034] X is the first direction. Detailed Implementation

[0035] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0036] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0038] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0039] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0040] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0041] To better understand the embodiments of this application, the following is combined with... Figures 1 to 8 The embodiments of this application will be described in detail.

[0042] like Figures 3 to 8 As shown, this application provides a silane delivery device 1 for delivering silane. The silane delivery device 1 includes an inlet 11 and a delivery device 12. The delivery device 12 includes a plurality of spaced-apart outlet pipes 121, each outlet pipe 121 having a different length along a first direction X, and each outlet pipe 121 having a through outlet hole 1211. The outlet hole 1211 is connected to the inlet 11 to deliver the silane from the inlet 11 to the end of the outlet pipe 121 away from the inlet 11, thereby realizing the delivery of silane at different distances along the first direction X.

[0043] The air inlet 11 can be cylindrical or square; this embodiment does not limit the shape. One end of the air inlet 11 is connected to the silane gas supply device, and the other end is connected to the gas delivery device 12 to deliver silane gas from the silane gas supply device to the gas delivery device 12. Figure 1 and Figure 2 As shown, in some embodiments, the silane delivery device 1 can also be installed and fixed through the air inlet 11.

[0044] The gas delivery unit 12 is a device for transporting and diffusing silane from the gas inlet 11 into the LPCVD reaction chamber. The gas delivery unit 12 includes a plurality of spaced-apart gas outlet pipes 121, which are used to distribute and transport silane.

[0045] Each vent pipe 121 is provided with a through vent hole 1211, that is, the vent hole 1211 connects the two end faces of the vent pipe 121. In addition, the vent hole 1211 is connected to the air inlet 11, which can realize the delivery of silane from one end of the vent pipe 121 to the other end. The cross-section of the vent hole 1211 can be a regular shape such as a circle or a square, or it can be an irregular shape composed of straight lines and / or curves. This application embodiment does not limit this.

[0046] The length d of each outlet pipe 121 along the first direction X is not equal; that is, the distance between the end of each outlet pipe 121 away from the inlet pipe 11 and the inlet pipe 11 along the first direction X is not equal. In this way, silane can be delivered to different positions through the outlet pipes 121. In practical use, silane can be delivered to different parts of the LPCVD reaction chamber 21 along the first direction X, ensuring uniform distribution of silane gas in the LPCVD reaction chamber 21 and improving the quality and consistency of the silicon-based thin film on the substrate surface of the solar cell.

[0047] like Figure 3 and Figure 8 As shown, in some embodiments, multiple air outlet pipes 121 are arranged in one or more rows at intervals along a straight line. For example... Figure 7 As shown, in other embodiments, the multiple outlet pipes 121 may also be arranged in a ring or multiple rings with intervals. When the multiple outlet pipes 121 are arranged in multiple rows or multiple rings with intervals, it is necessary to ensure that the length d along the first direction of the outlet pipes 121 located on the inner side or inner ring is greater than the length d along the first direction of the outlet pipes 121 located on the outer side or outer ring, so as to prevent the outlet pipes 121 on the outer side or outer ring from blocking the diffusion direction of silane and affecting the uniformity of silane in the LPCVD reaction chamber 21. By arranging the multiple outlet pipes 121 in multiple rows or multiple rings with intervals, the number of outlet pipes 121 can be increased, enabling the delivery of silane at more different distances, increasing the size of the LPCVD reaction chamber 21 while ensuring the uniformity of silane gas in the LPCVD reaction chamber 21.

[0048] By setting multiple spaced-apart vent pipes 121, silane gas is directly delivered to the end of the vent pipe 121 away from the inlet 11 through the vent holes 1211 on the vent pipe 121. Compared with the scheme of delivering silane through multiple vent holes 1211 on a single vent pipe 121, the direct delivery of silane through multiple vent pipes 121 can increase the size of the vent holes 1211, reduce the probability of amorphous silicon accumulating in the vent holes 1211, and extend the service life of the silane delivery device 1.

[0049] like Figure 3 and Figure 5 As shown, in some embodiments, the difference in length d between two adjacent air outlet pipes 121 along the first direction X is equal, both being greater than or equal to 10 mm and less than or equal to 100 mm.

[0050] The difference in length d between two adjacent outlet pipes 121 along the first direction X is equal, that is, the distance between the ends of two adjacent outlet pipes 121 away from the inlet 11 along the first direction X is equal. In this way, it can be ensured that the silane in the silane delivery device 1 can be uniformly delivered into the LPCVD reaction chamber 21.

[0051] When the difference in length d between two adjacent outlet pipes 121 along the first direction X is less than 10 mm, more outlet pipes 12 are needed to ensure that silane can be delivered to every position in the LPCVD reaction chamber 21 along the first direction X. Furthermore, as the number of outlet pipes 12 increases, the volume of the silane delivery device 1 increases, occupying more space in the LPCVD reaction chamber 21, reducing the space available for solar cell placement, and lowering the production rate. Conversely, when the difference in length d between two adjacent outlet pipes 121 along the first direction X is greater than 100 mm, the spacing between the outlet sections becomes too large, affecting the uniformity of silane within the LPCVD reaction chamber 21 and reducing the production quality of the solar cells. Therefore, the difference in length d between two adjacent outlet pipes 121 along the first direction X should be greater than or equal to 10 mm and less than or equal to 100 mm.

[0052] In some embodiments, the larger the length d along the first direction X, the larger the size of the air outlet 1211 of the air outlet pipe 121.

[0053] The larger the length d along the first direction X, the larger the size of the air outlet 1211 of the air outlet pipe 121. That is, there is a direct proportional relationship between the length d of the air outlet pipe 121 along the first direction X and the air outlet 1211 of the air outlet pipe 121.

[0054] When gas flows in a pipe, the gas pressure gradually decreases with increasing flow distance due to factors such as viscous resistance and frictional losses. Therefore, under the same conditions, as the length d of the outlet pipe 121 along the first direction X increases, the amount of silane ultimately delivered by the outlet pipe 121 decreases. Setting the size of the outlet orifice 1211 of the outlet pipe 121, which has a larger length d along the first direction X, can compensate for the reduced silane flow rate due to the increased delivery distance, ensuring the consistency of the final silane flow rate delivered in each outlet orifice 1211, guaranteeing the uniform distribution of silane within the LPCVD reaction chamber 21, and improving the production quality of solar cells.

[0055] In some embodiments, the vent holes 1211 are of equal size, and the gas delivery component 12 further includes a flow meter 122 and a regulating valve 123 disposed on the vent pipe 121. The flow meter 122 is disposed downstream of the regulating valve 123 along the silane delivery direction, and the regulating valve 123 adjusts the opening according to the value of the flow meter 122 to ensure the uniformity of the silane flowing out of each vent pipe 121.

[0056] Setting the size of the vent 1211 to be the same facilitates the production, manufacturing, installation, and maintenance of the vent pipe 121. At this time, in order to compensate for the decrease in silane flow rate due to the increase in conveying distance, a flow meter 122 and a regulating valve 123 are required to ensure the consistency of the silane flow rate ultimately conveyed by the vent 1211.

[0057] Flow meter 122 is a device used to detect the flow rate of silane flowing through outlet 121, while regulating valve 123 is a device that can adjust its opening to regulate the flow rate of silane gas. Regulating valve 123 adjusts its opening based on the value measured by flow meter 122. Specifically, when flow meter 122 detects a low flow rate of silane delivered through outlet 121, it controls regulating valve 123 to increase its opening; conversely, it decreases its opening to ensure that the flow rate of silane output from outlet 121 remains stable within the set range.

[0058] By setting up a flow meter 122 and a regulating valve 123, the regulating valve 123 can adjust its opening according to the value of the flow meter 122, thereby controlling the flow rate of silane output from the outlet 121 and ensuring the consistency of the final silane flow rate delivered by each outlet 1211.

[0059] The flow meter 122 is positioned downstream of the regulating valve 123 along the direction of silane delivery. This means that when silane flows through the outlet 121, it first passes through the regulating valve 123 and then through the flow meter 122. This arrangement ensures that the silane flow rate detected by the flow meter 122 is the flow rate after adjustment by the regulating valve 123, representing the final flow rate of silane exiting the outlet 121, thus guaranteeing the accuracy of flow detection and the effectiveness of the regulating valve 123.

[0060] In some embodiments, the air outlets 1211 are of equal size, and along the first direction X, the distance between the ends of two adjacent air outlets 121 that are away from the air inlet 11 becomes smaller and smaller.

[0061] Along the first direction X, the distance between the ends of two adjacent outlet pipes 121 furthest from the inlet component 11 decreases, meaning the difference in length between two adjacent outlet pipes 121 along the first direction X decreases, resulting in a denser gas outlet. In this way, even when the outlet holes 1211 are of equal size, the density of the gas outlets in the gas delivery component 12 can compensate for the reduced silane flow rate due to the increased delivery distance, ensuring the consistency of silane flow rate in all parts of the LPCVD reaction chamber 21 and improving the production quality of solar cells. The shape of the outlet holes can be regular, such as circular or square, or irregular; this embodiment does not impose any limitations on this.

[0062] In some embodiments, the vent 1211 is a circular hole, and the diameter of each vent 1211 is greater than or equal to 5 mm and less than or equal to 15 mm.

[0063] Turbulence and eddies can form at the right angles of square holes, affecting the uniformity of silane delivery. Therefore, using circular vent holes 1211 can reduce the risk of turbulence and eddies, thereby improving the uniformity of delivered silane, reducing particle deposition, and improving the production quality of solar cells.

[0064] When the diameter of the vent 1211 is less than 5 mm, the excessively small vent 1211 will become clogged due to the deposition of amorphous silicon, shortening the service life of the silane delivery device 1. Conversely, when the diameter of the vent 1211 is greater than 15 mm, it will, on the one hand, reduce the flow rate, exacerbate the boundary layer effect, and disrupt the pressure balance, leading to uneven silane delivery; on the other hand, it will increase the size of the silane delivery device 1, occupying too much space in the LPCVD reaction chamber 21 and reducing production efficiency. Therefore, the diameter of the vent 1211 should be set to be greater than or equal to 5 mm and less than or equal to 15 mm.

[0065] like Figure 8 As shown, in some embodiments, the outlet pipe 121 includes a first diffusion section 1212 and a second diffusion section 1213 connected in series. The first diffusion section 1212 extends along a first direction X, and the second diffusion section 1213 extends at a certain angle to the first diffusion section 1212 to change the output direction of silane.

[0066] By providing a first dispersion section 1212 and a second dispersion section 1213, when silane is transported, the silane gas flows through the first dispersion section 1212 and then into the LPCVD reaction chamber through the second dispersion section 1213. Since the second dispersion section 1213 is positioned at a certain angle to the first dispersion section 1212, the transport direction of the silane can be changed during the transport process, allowing the silane to be transported towards the direction in which the solar cells are placed into the LPCVD reaction chamber, thereby improving the production quality and efficiency of the solar cells.

[0067] When the angle between the first dispersion section 1211 and the second dispersion section is less than 45°, the abrupt change in the silane transport direction leads to an increase in silane flow resistance, generating turbulence and eddies, resulting in uneven silane transport and affecting the production quality of solar cells. Conversely, when the angle between the first dispersion section 1211 and the second dispersion section 1212 is greater than 135°, the silane gas velocity decreases at the bottom of the bend, forming a low-velocity zone or even a stagnant dead zone, causing silane to linger in this area and increasing the risk of amorphous silicon deposition. Therefore, in some embodiments, the angle between the first dispersion section 1211 and the second dispersion section is greater than or equal to 45° and less than or equal to 135°.

[0068] like Figure 3 , 5 As shown in Figures 7 and 8, in some embodiments, the silane delivery device 1 further includes a buffer 13 disposed between the air inlet 11 and the air delivery device 12 along a first direction X, wherein the size of the buffer 13 gradually increases along the first direction X.

[0069] By setting the buffer 13, the silane gas in the inlet 11 can be distributed to each outlet pipe 121 of the gas delivery 12, ensuring the uniformity of silane delivery and improving the production quality of solar cells.

[0070] like Figure 1 and Figure 2 As shown, this application also provides a solar cell manufacturing apparatus, including an LPCVD reactor tube 2, a silane gas supply device, and a silane delivery device 1. The LPCVD reactor tube 2 includes an LPCVD reaction chamber 21, within which solar cells are placed. The silane gas supply device is located on one side of the LPCVD reactor tube 2. The gas delivery component 12 of the silane delivery device 1 is located within the LPCVD reaction chamber 21, and the gas inlet component 11 is connected to the silane gas supply device to deliver silane into the LPCVD reaction chamber 21.

[0071] The silane gas supply device is a component that provides silane gas. By setting up a silane delivery device 1, the gas inlet 11 is connected to the silane gas supply device, and the gas delivery device 12 is set in the LPCVD reaction chamber 21. The silane supplied by the silane gas supply device is delivered to the LPCVD reaction chamber 21 through the gas delivery device 1, so that the solar cell is placed in the LPCVD reaction chamber 21 filled with silane gas, and the reaction is carried out to deposit a silicon-based thin film on the substrate surface, thus completing the vapor deposition process of the solar cell.

[0072] like Figure 1 and Figure 2As shown, in some embodiments, the LPCVD reactor tube 2 includes a first end cap 22 and a second end cap 23 spaced apart along a first direction X, and the solar cell production equipment includes two silane delivery devices 1, with the gas inlet 11 of the two silane delivery devices 1 respectively disposed on the first end cap 22 and the second end cap 23.

[0073] By providing the first end cap 22 and the second end cap 23, the LPCVD reaction chamber 21 becomes a closed chamber, ensuring uniform diffusion of silane gas within the LPCVD reaction chamber 21. Furthermore, the first end cap 22 and the second end cap 23 also provide an installation location for the silane delivery device 1.

[0074] The solar cell manufacturing equipment includes two silane delivery devices 1, with their respective gas inlets 11 mounted on a first end cap 22 and a second end cap 23. This allows silane gas to be delivered to the LPCVD reaction chamber 21 from both sides via the two silane delivery devices 1. This reduces the size of a single silane delivery device 1 and facilitates control over the uniformity of silane delivery within each device, improving the uniformity of silane distribution throughout the LPCVD reaction chamber 21.

[0075] Along the first direction X, the interval between the two silane delivery devices 1 is greater than or equal to 10 mm and less than or equal to 100 mm, so as to ensure the uniformity of silane in the LPCVD reaction chamber 21 at the corresponding positions between the two.

[0076] like Figure 1 and Figure 2 As shown, in some embodiments, the solar cell production equipment includes a carrier 3, on which solar cells are disposed; and the LPCVD reactor tube 2 also includes a through hole 24, which is disposed on both sides of the carrier 3 with the silane delivery device 1, so that the silane output from the vent 1211 flows through the carrier 3 and then flows out through the through hole 24.

[0077] The carrier 3 refers to the device used to place solar cells. By setting up the carrier 3, multiple solar cells can be placed into the LPCVD reaction chamber 21, thereby improving the production efficiency of solar cells.

[0078] The through hole 24 refers to the hole set on the tube wall of the LPCVD reactor tube 2, which can connect the LPCVD reaction chamber 21 with the external environment, realize the output of gases such as silane in the LPCVD reaction chamber 21, and ensure the pressure balance inside and outside the LPCVD reaction chamber 21.

[0079] The through-hole 24 and the silane delivery device 1 are respectively set on both sides of the carrier 3. In this way, the silane gas output from the vent 1211 will flow through the carrier 3 before flowing out of the through-hole 24 during the diffusion process in the LPCVD reaction chamber 21, ensuring that the solar cell is in a silane-filled environment and improving production quality.

[0080] Specifically, such as Figures 1 to 8 As shown, during solar cell production, the carrier 3 containing the solar cells is placed inside the LPCVD reaction chamber 21. Silane from the silane gas supply device is delivered to the LPCVD reaction chamber 21 via the silane delivery device 1, filling the LPCVD reaction chamber 21 with silane gas. A silicon-based thin film is deposited on the substrate surface of the solar cells, completing the chemical vapor deposition process.

[0081] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0082] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A silane conveying device for conveying silane, characterized in that, The silane delivery device includes: Intake components; and The gas delivery component includes a plurality of spaced-apart gas outlet pipes, each of which has a different length along a first direction, and each of which has a circular gas outlet hole with a diameter greater than or equal to 5 mm and less than or equal to 15 mm. The gas outlet hole is connected to the gas inlet component to deliver the silane to the end of the gas outlet pipe away from the gas inlet component, thereby realizing the delivery of the silane at different distances along the first direction.

2. The silane delivery device according to claim 1, characterized in that, The difference in length between two adjacent air outlet pipes along the first direction is equal, both being greater than or equal to 10 mm and less than or equal to 100 mm.

3. The silane delivery device according to claim 2, characterized in that, The longer the length of the vent pipe along the first direction, the larger the size of the vent hole.

4. The silane delivery device according to claim 2, characterized in that, The vent holes are of equal size, and the gas delivery component also includes a flow meter and a regulating valve disposed on the vent pipe. The flow meter is disposed downstream of the regulating valve along the silane delivery direction. The regulating valve adjusts its opening according to the value of the flow meter to ensure the uniformity of the silane flowing out of each vent pipe.

5. The silane delivery device according to claim 1, characterized in that, The air outlets are of equal size, and along the first direction, the distance between the ends of two adjacent air outlets that are far from the air inlet decreases.

6. The silane delivery device according to any one of claims 1 to 5, characterized in that, The outlet pipe includes a first diffusion section and a second diffusion section connected together. The first diffusion section extends along the first direction, and the second diffusion section extends at a certain angle to the first diffusion section to change the output direction of the silane.

7. The silane delivery device according to any one of claims 1 to 5, characterized in that, The silane delivery device further includes a buffer disposed between the air inlet and the air delivery component along the first direction, wherein the size of the buffer gradually increases along the first direction.

8. A solar cell manufacturing equipment, characterized in that, The solar cell manufacturing equipment includes: An LPCVD reactor tube, including an LPCVD reaction chamber, wherein solar cells are placed inside the LPCVD reaction chamber; A silane gas supply device is installed on one side of the LPCVD reactor tube; and The silane delivery device according to any one of claims 1 to 7, wherein the gas delivery component is disposed in the LPCVD reaction chamber, and the gas inlet component is connected to the silane gas supply device to deliver the silane into the LPCVD reaction chamber.

9. The solar cell production equipment according to claim 8, characterized in that, The LPCVD reactor tube includes a first end cap and a second end cap spaced apart along a first direction. The solar cell production equipment includes two silane delivery devices, and the gas inlet of the two silane delivery devices is respectively disposed on the first end cap and the second end cap.

10. The solar cell production equipment according to claim 8 or 9, characterized in that, The solar cell production equipment includes a carrier, the solar cell is disposed on the carrier, the LPCVD reactor tube also includes a through hole, the through hole and the silane delivery device are respectively disposed on both sides of the carrier, so that the silane output from the vent hole flows through the carrier and then flows out from the through hole.

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