Horizontal wafer drying machine with wafer box frame

Abstract

The utility model belongs to the technical field of wafer drying machines, and particularly relates to a horizontal wafer drying machine with a wafer box frame, which comprises a drying machine body and a cover body, the cover body is hinged to the top of the drying machine body, a processing device is arranged in the drying machine body, and the processing device comprises a mounting unit and a damping unit. According to the horizontal wafer spin-drying machine with the wafer box frame, by arranging the mounting unit, the sliding blocks on the outer side of the wafer box frame are aligned with the sliding rails, meanwhile, the pull rope is lifted upwards, the pull rope pulls the left clamping rod and the right clamping rod to retract into the sleeves, then the wafer box frame is pushed downwards to slide into the spin-drying barrel along the sliding rails through the sliding blocks, and after the wafer box frame completely enters the spin-drying barrel, the wafer box frame is driven to rotate. At the moment, the positioning hole, the clamping hole and the clamping rod are located on the same straight line, the clamping rod is pushed by the first spring to penetrate through the positioning hole to be connected with the clamping hole in a clamped mode, and therefore the wafer box frame is fixed into the spin dryer tube, and the wafer box frame is prevented from shaking when the spin dryer tube rotates, and wafers are prevented from being damaged.

Description

Technical Field

[0001] This utility model relates to the field of wafer spin dryer technology, specifically a horizontal wafer spin dryer with a wafer tray rack. Background Technology

[0002] A wafer is a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. It is called a wafer because of its circular shape. Various circuit element structures can be fabricated on silicon wafers to create electronic components with specific electrical functions.

[0003] Wet cleaning is a commonly used cleaning process for wafers. After cleaning, the wafers need to be dried. Wafer spin dryers are used to dry the surface of damp wafers through rotation and drying. Horizontal spin dryers are the most common type. As is well known, horizontal wafer spin dryers generally include wafer cassette racks, in which wafer cassettes are placed for spin drying.

[0004] However, when the existing wafer cassette holder is used, the wafer cassette will shake slightly inside the holder after being placed in it. During the high-speed rotation and spin-drying process of the wafer cassette holder, the wafers inside the cassette are easily damaged.

[0005] As disclosed in CN218826978U, a wafer cassette holder and a wafer spin dryer for a horizontal wafer spin dryer are provided. By adding positioning components to the wafer cassette holder and optimizing the overall structure of the wafer cassette holder, the structure is not only simple and lightweight, but also provides good positioning and balance for the wafer cassette, greatly reducing the probability of damage to the wafers in the wafer cassette during the spin drying process.

[0006] However, during use, after the device positions the wafer cassette holder using the positioning plate, it cannot effectively fix the wafer cassette holder, causing it to bounce when rotating. This results in the wafer cassette holder colliding with the wafer cassette holder and damaging the wafer cassette.

[0007] Therefore, we urgently need to provide a horizontal wafer spin dryer with a wafer tray rack. Utility Model Content

[0008] The purpose of this utility model is to provide a horizontal wafer spin dryer with a wafer cassette holder, in order to solve the problem mentioned in the background art that after the wafer cassette holder is positioned by the positioning plate during use, it cannot be effectively fixed, which causes the wafer cassette holder to bounce when rotating, resulting in collision between the wafer and the wafer cassette holder and damage to the wafer.

[0009] To achieve the above objectives, the present invention provides the following technical solution: a horizontal wafer spin dryer with a wafer cassette holder, comprising a spin dryer body and a cover, wherein the cover is hinged to the top of the spin dryer body, and a processing device is provided inside the spin dryer body, wherein the processing device includes an installation unit and a shock absorption unit.

[0010] The installation unit is located inside the spin dryer body, and the shock absorption unit is located at the bottom of the spin dryer body.

[0011] The installation unit includes a spin-drying drum, a slide rail, a sheet holder, a slider, a handle, a connecting plate, a sleeve, a spring, a locking rod, and a pull rope. The spin-drying drum is installed inside the spin dryer body. The slide rail is fixedly installed around the inner wall of the spin-drying drum. The sheet holder is located inside the spin-drying drum. The slider is fixedly installed around the outer side of the sheet holder. The handle is fixedly installed on the top left and right sides of the sheet holder. The connecting plate is fixedly installed on the front and rear sides of the sheet holder and symmetrically distributed on the left and right sides of the sheet holder. The sleeve is fixedly installed on one side of the connecting plate. One end of the spring is fixedly installed on the inner wall of the sleeve. The locking rod is fixedly installed on the other end of the spring. The pull rope connects the left and right locking rods and passes through the connecting plate.

[0012] Preferably, the shock absorption unit includes a second spring, a damping rod, and a base. The second spring is fixedly installed around the bottom of the spin dryer body, the damping rod is installed inside the second spring, and the base is fixedly installed at the bottom of the second spring.

[0013] Preferably, the slide rail has a groove inside that is the same size as the slider, and the slider is slidably connected inside the slide rail. The slider and the slide rail cooperate to facilitate the insertion of the sheet holder into the spin dryer body.

[0014] Preferably, a positioning hole is provided on one side of the slide rail, and a locking hole is provided inside the slider. The diameter of the positioning hole and the locking hole is equal to the diameter of the locking rod. After the tablet holder is completely inserted into the spin dryer, the positioning hole, the locking hole, and the locking rod are on the same straight line. The locking rod is pushed by a spring to pass through the positioning hole and the locking hole and engage, thereby fixing the tablet holder inside the spin dryer and preventing the tablet holder from shaking when the spin dryer rotates.

[0015] Preferably, the sleeve has a cavity inside, and the size of the cavity is equal to the straight line of the locking rod. The locking rod can slide along the inside of the cavity. By pulling the pull rope upward, the left and right locking rods are driven to retract into the sleeve, so that the locking rods disengage from the locking holes of the slider, thereby facilitating the removal of the cassette holder.

[0016] Preferably, the bottom of the base is provided with anti-slip texture to increase the friction between the base and the ground and prevent the spin dryer body from shifting when the spin dryer drum rotates.

[0017] Preferably, one end of the locking rod is hemispherical, which facilitates the locking rod to pass through the positioning hole and engage with the locking hole opened in the slider, thereby facilitating the fixing of the film box frame.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] 1. This horizontal wafer spin dryer with a wafer cassette holder, through the installation unit, aligns the slider on the outside of the wafer cassette holder with the slide rail. Simultaneously, lifting the pull rope causes it to pull two locking rods on the left and right into the sleeve. Then, pushing the wafer cassette holder downwards, it slides along the slide rail into the spin dryer drum. Once the wafer cassette holder is fully inside the drum, the positioning hole, locking hole, and locking rod are aligned. A spring pushes the locking rod through the positioning hole and locking hole, thus fixing the wafer cassette holder inside the drum. This prevents the wafer cassette holder from shaking during drum rotation, which could damage the wafers. This solves the problem in the background technology where, after positioning the wafer cassette holder with a positioning plate, it is impossible to effectively fix the wafer cassette holder, causing it to bounce during rotation and collide with the wafer, resulting in wafer damage.

[0020] 2. This horizontal wafer spin dryer with wafer tray rack, by setting up a shock absorption unit, reduces the vibration of the spin dryer body when the spin dryer drum rotates, thereby reducing the collision between the spin dryer body and the ground, and thus reducing the noise generated by the spin dryer body during operation. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a schematic diagram of the internal structure of the spin dryer body of this utility model;

[0023] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0024] Figure 4 This is a schematic diagram of the spin-drying drum structure of this utility model;

[0025] Figure 5 This is a partial structural exploded view of the installation unit of this utility model.

[0026] In the diagram: 1. Spin dryer body; 2. Cover; 301. Spin dryer drum; 302. Slide rail; 303. Sheet holder; 304. Slider; 305. Handle; 306. Connecting plate; 307. Sleeve; 308. Spring 1; 309. Locking rod; 310. Pull rope; 401. Spring 2; 402. Damping rod; 403. Base. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figures 1-5 This utility model provides a technical solution:

[0029] Example 1:

[0030] A horizontal wafer spin dryer with a wafer cassette holder includes a spin dryer body 1 and a cover 2. The cover 2 is hinged to the top of the spin dryer body 1. A processing device is provided inside the spin dryer body 1. The processing device includes an installation unit and a shock absorption unit.

[0031] The mounting unit is located inside the spin dryer body 1, and the shock absorption unit is located at the bottom of the spin dryer body 1.

[0032] The installation unit includes a spin-drying drum 301, a slide rail 302, a sheet holder 303, a slider 304, a handle 305, a connecting plate 306, a sleeve 307, a spring 308, a locking rod 309, and a pull rope 310. The spin-drying drum 301 is installed inside the spin dryer body 1. The slide rail 302 is fixedly installed around the inner wall of the spin-drying drum 301. The slide rail 302 has a groove inside that is the same size as the slider 304. The slide rail 304 is slidably connected to the inside of the spin dryer body 1. The slider 304 is connected to the slide rail 305. 2. This facilitates the placement of the tablet holder 303 inside the spin dryer body 1. The tablet holder 303 is located inside the spin dryer drum 301. The slider 304 is fixedly installed around the outside of the tablet holder 303. The handle 305 is fixedly installed on the top left and right sides of the tablet holder 303. The connecting plate 306 is fixedly installed on the front and rear sides of the tablet holder 303 and symmetrically distributed on the left and right sides of the tablet holder 303. The sleeve 307 is fixedly installed on one side of the connecting plate 306. The sleeve 307 has a cavity inside, and the cavity is large. The straight line of the small locking rod 309 is equal to that of the locking rod 309. The locking rod 309 can slide along the inside of the cavity. By pulling the pull rope 310 upward, the two locking rods 309 are driven to retract into the sleeve 307, so that the locking rods 309 disengage from the locking holes of the slider 304, thereby facilitating the removal of the disc tray holder 303. One end of the spring 308 is fixedly installed on the inner wall of the sleeve 307, and the locking rod 309 is fixedly installed on the other end of the spring 308. A positioning hole is opened on one side of the slide rail 302, and a locking hole is opened inside the slider 304. Furthermore, the diameters of the positioning hole and the locking hole are equal to the diameter of the locking rod 309. After the tablet holder 303 is fully inserted into the spin dryer 301, the positioning hole, the locking hole, and the locking rod 309 are on the same straight line. The spring 308 pushes the locking rod 309 through the positioning hole and the locking hole to lock it in place, thereby fixing the tablet holder 303 inside the spin dryer 301 and preventing the tablet holder 303 from shaking when the spin dryer 301 is rotated. The pull rope 310 connects the left and right locking rods 309 and passes through the connecting plate 306.

[0033] Example 2:

[0034] Based on Embodiment 1: The shock absorption unit includes a second spring 401, a damping rod 402, and a base 403. The second spring 401 is fixedly installed around the bottom of the spin dryer body 1, and the damping rod 402 is installed inside the second spring 401. The vibration of the spin dryer body 1 is reduced by the second spring 401 and the damping rod 402, thereby reducing the collision between the spin dryer body 1 and the ground, and thus reducing the noise generated by the spin dryer body 1 during operation. The base 403 is fixedly installed at the bottom of the second spring 401.

[0035] Example 3:

[0036] Based on Embodiment 2: The bottom of the base 403 is provided with anti-slip texture. The anti-slip texture increases the friction between the base 403 and the ground, preventing the spin dryer body 1 from shifting when the spin dryer drum 301 rotates.

[0037] Example 4:

[0038] Based on Embodiment 1: One end of the locking rod 309 is hemispherical, which facilitates the locking rod 309 to pass through the positioning hole and engage with the locking hole opened in the slider 304, thereby facilitating the fixing of the disc holder 303.

[0039] In use, open the cover 2, then align the slider 304 on the outside of the tablet holder 303 with the slide rail 302, and simultaneously lift the pull rope 310 upwards, causing the pull rope 310 to pull the two locking rods 309 into the sleeve 307. Then push the tablet holder 303 downwards, allowing it to slide along the slide rail 302 through the slider 304 into the spin dryer 301. At this time, the locking rods 309, under the action of the spring 308, push against the side of the slide rail 302 and slide along the side of the slide rail 302. When the tablet holder 303 is fully inside the spin dryer 301, the positioning hole, locking hole, and locking rod 309 are aligned on the same straight line. The spring 308 then pushes the locking rods 309... 09. The positioning hole and the locking hole are engaged to fix the tablet holder 303 inside the spin dryer 301. Then, close the cover 2 and start the spin dryer body 1 to drive the spin dryer 301 and the tablet holder 303 to rotate, spin dry the round crystals in the tablet holder 303. With the help of spring 401 and damping rod 402, the vibration of the spin dryer body 1 is reduced. After spin drying, open the cover 2 and then lift the pull rope 310 upwards. The pull rope 310 pulls the two locking rods 309 on the left and right to retract into the sleeve 307, so that the locking rods 309 are disengaged from the positioning hole opened in the slide rail 302. Then, pull the handle 305 upwards to pull the tablet holder 303 out of the spin dryer 301.

[0040] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A horizontal wafer spin dryer with a wafer cassette holder, comprising a spin dryer body (1) and a cover (2), wherein the cover (2) is hinged to the top of the spin dryer body (1), characterized in that: The spin dryer body (1) is equipped with a processing device inside, which includes an installation unit and a shock absorption unit; The installation unit is located inside the spin dryer body (1), and the shock absorption unit is located at the bottom of the spin dryer body (1); The installation unit includes a spin dryer drum (301), a slide rail (302), a sheet holder (303), a slider (304), a handle (305), a connecting plate (306), a sleeve (307), a spring (308), a locking rod (309), and a pull rope (310). The spin dryer drum (301) is installed inside the spin dryer body (1). The slide rail (302) is fixedly installed around the inner wall of the spin dryer drum (301). The sheet holder (303) is located inside the spin dryer drum (301). The slider (304) is fixedly installed on the outside of the sheet holder (303). Around the perimeter, the handle (305) is fixedly installed on the top left and right sides of the disc holder (303), the connecting plate (306) is fixedly installed on the front and rear sides of the disc holder (303) and symmetrically distributed on the left and right sides of the disc holder (303), the sleeve (307) is fixedly installed on one side of the connecting plate (306), one end of the spring (308) is fixedly installed on the inner wall of the sleeve (307), the clamping rod (309) is fixedly installed on the other end of the spring (308), and the pull rope (310) connects the two clamping rods (309) on the left and right sides and passes through the connecting plate (306).

2. A horizontal wafer spin dryer with a wafer cassette holder according to claim 1, characterized in that: The shock absorption unit includes a second spring (401), a damping rod (402), and a base (403). The second spring (401) is fixedly installed around the bottom of the spin dryer body (1). The damping rod (402) is installed inside the second spring (401). The base (403) is fixedly installed at the bottom of the second spring (401).

3. A horizontal wafer spin dryer with a wafer cassette rack according to claim 1, characterized in that: The slide rail (302) has a groove inside that is the same size as the slider (304), and the slider (304) is slidably connected inside the slide rail (302).

4. A horizontal wafer spin dryer with a wafer cassette rack according to claim 1, characterized in that: The slide rail (302) has a positioning hole on one side, and the slider (304) has a locking hole inside. The diameter of the positioning hole and the locking hole is equal to the diameter of the locking rod (309). After the tablet holder (303) is completely inserted into the spin dryer (301), the positioning hole, the locking hole and the locking rod (309) are on the same straight line.

5. A horizontal wafer spin dryer with a wafer cassette holder according to claim 1, characterized in that: The sleeve (307) has a cavity inside, and the size of the cavity is equal to the straight line of the clamping rod (309). The clamping rod (309) can slide along the inside of the cavity.

6. A horizontal wafer spin dryer with a wafer cassette holder according to claim 2, characterized in that: The base (403) has anti-slip texture on the bottom.

7. A horizontal wafer spin dryer with a wafer cassette holder according to claim 1, characterized in that: One end of the lever (309) is hemispherical.

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