Fixed accurate wafer separation device for flower basket silicon wafer

Abstract

The utility model relates to the technical field of silicon wafer slicing equipment, in particular to a fixed precise wafer slicing device for flower basket silicon wafers, which comprises a propelling device, a linear motor is fixedly mounted on one side of the propelling device, and a bearing table is fixedly connected to the sliding end of the linear motor; according to the utility model, the gaps between the first bearing blocks and the second bearing blocks on one side of the outer wall of the bearing rod are used for bearing silicon wafers, and the gaps between the first bearing blocks are larger than the gaps between the second bearing blocks; the adjusting knob drives the bearing rod to rotate and adjust, so that the first bearing block or the second bearing block can cooperatively bear the silicon wafer, and meanwhile, the linear motor is controlled to set two sets of intermittent lifting strokes to be matched with the bearing stroke of the first bearing block and the bearing stroke of the second bearing block; and the infrared transmitting end and the two groups of infrared receiving ends are matched to realize signal transmission so as to be matched with the linear motor to switch the lifting stroke, so that the problem that silicon wafers with different specifications and thicknesses are not accurate enough when being loaded in the bearing box is solved.

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