A PVD coating carrier and coating equipment

Abstract

This utility model belongs to the field of physical vapor deposition technology and discloses a PVD coating carrier and coating equipment, including an outer frame, an inner frame, and an anti-detachment component. The outer frame includes a frame structure with a receiving groove, and the outer frame gradually slopes downward along the length direction of the receiving groove. The inner frame includes a top plate, a bottom plate, and at least two vertical plates. The top plate and the bottom plate are detachably connected to the upper and lower sides of the receiving groove, respectively. The at least two vertical plates are arranged opposite each other along the width direction of the receiving groove, and at least one vertical plate is adjustablely connected to the top plate and the bottom plate along the width direction of the receiving groove. Each of the top plate, the bottom plate, and each vertical plate includes a bearing part and a limiting part. The bearing part and the limiting part are arranged at an angle to form a limiting structure. The limiting structures of the top plate, the bottom plate, and the at least two vertical plates together enclose a groove for loading workpieces. The anti-detachment component includes a rotating blade. Each vertical plate is provided with at least one rotating blade that is adjustable along the length direction of the receiving groove. The rotating blade blocks the opening of the groove to prevent the workpiece from falling out.

Description

Technical Field

[0001] This utility model relates to the field of physical vapor deposition technology, and in particular to a PVD coating carrier and coating equipment. Background Technology

[0002] PVD (Physical Vapor Deposition) refers to the use of low-voltage, high-current arc discharge technology under vacuum conditions. The gas discharge causes the target material to evaporate and both the evaporated material and the gas to ionize. The electric field accelerates the process, causing the evaporated material and its reaction products to deposit on the workpiece.

[0003] Existing PVD coating carriers typically have clamps or slots of specific shapes to hold standard workpieces to be coated. However, these carriers are ill-suited for workpieces of various shapes and sizes. For irregularly shaped or small workpieces, existing fixing methods may lead to instability and displacement during the coating process, affecting coating quality. Furthermore, the carrier's fixing structure is usually in direct contact with the workpiece surface, which can easily cause scratches and wear during loading and unloading, reducing product yield. In addition, the workpiece loading and unloading process for PVD coating carriers is cumbersome and inefficient, requiring complete disassembly and cleaning for maintenance, which is time-consuming and labor-intensive.

[0004] Therefore, there is an urgent need to propose a PVD coating carrier and coating equipment to solve the above problems. Utility Model Content

[0005] The purpose of this utility model is to provide a PVD coating carrier and coating equipment to improve the versatility and flexibility of the carrier, adapt to workpieces of various shapes and sizes, reduce damage to workpieces, and improve loading, unloading and maintenance efficiency.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A PVD coating carrier, comprising:

[0008] The outer frame includes a frame structure with a receiving groove, and the outer frame gradually slopes downward along the length direction of the receiving groove;

[0009] The inner frame includes a top plate, a bottom plate, and at least two vertical plates. The top plate and the bottom plate are detachably connected to the upper and lower sides of the receiving groove and extend along the width direction of the receiving groove. The at least two vertical plates are arranged opposite each other along the width direction of the receiving groove and extend along the length direction of the receiving groove. At least one vertical plate is adjustablely connected to the top plate and the bottom plate along the width direction of the receiving groove. Each of the top plate, the bottom plate, and each vertical plate includes a supporting part and a limiting part. The supporting part and the limiting part are arranged at an angle to form a limiting structure. The limiting structures of the top plate, the bottom plate, and the at least two vertical plates can together enclose a slot for loading workpieces.

[0010] The anti-detachment component includes at least two rotating blades, with at least one rotating blade provided on each of the vertical plates. The rotating blades are tunably connected to the corresponding vertical plates along the length of the receiving groove, and at least a portion of the rotating blades cover the opening of the groove to prevent the workpiece from detaching.

[0011] Furthermore, both the top plate and the bottom plate are threadedly connected to the outer frame.

[0012] Furthermore, the lower end of the outer frame is provided with a guide rail, which can slide and engage with the first guide wheel of the coating equipment; and / or, the upper end of the outer frame is provided with a second U-shaped groove, which can slide and engage with the second guide wheel of the coating equipment.

[0013] Furthermore, the inner frame includes at least three vertical plates, each of which is arbitrarily connected to the top plate and the bottom plate along the width direction of the receiving groove.

[0014] Furthermore, the inner frame also includes a first sliding member and a first fastener. The top plate and the bottom plate are both provided with a first sliding groove extending along the width direction of the receiving groove. The first sliding member is slidably disposed in the first sliding groove. The first fastener is disposed on the vertical plate and is detachably connected to the first sliding member.

[0015] Furthermore, each end of the vertical plate has a first mounting hole, the first fastener passes through the first mounting hole, and one end of the first fastener is threadedly connected to the first sliding member, while the other end is used to press and fix the vertical plate to the top plate or the bottom plate.

[0016] Furthermore, the first mounting hole at the lower end of the vertical plate is a first U-shaped groove with an opening facing downwards.

[0017] Furthermore, the anti-detachment component also includes a second sliding member and a second fastener. Each of the vertical plates is provided with a second sliding groove extending along the length direction of the receiving groove. The second sliding member is slidably disposed in the second sliding groove. The second sliding member is disposed on the rotating plate and is detachably connected to the second sliding member.

[0018] Furthermore, a second mounting hole is provided at one end of the rotary blade, the second fastener passes through the second mounting hole, and one end of the second fastener is threadedly connected to the second sliding member, while the other end is used to press and fix the rotary blade to the vertical plate.

[0019] A coating apparatus includes a conveying mechanism and a PVD coating carrier as described in any of the preceding claims, the conveying mechanism being drively connected to the outer frame to drive the PVD coating carrier to move along a conveying path.

[0020] The beneficial effects of this utility model are:

[0021] This utility model provides a PVD coating carrier and coating equipment, including an outer frame, an inner frame, and an anti-detachment component. The outer frame includes a frame structure with a receiving groove, and the outer frame gradually slopes downward along the length direction of the receiving groove. The inner frame includes a top plate, a bottom plate, and at least two vertical plates. The top plate and the bottom plate are detachably connected to the upper and lower sides of the receiving groove and extend along the width direction of the receiving groove. The at least two vertical plates are arranged opposite to each other along the width direction of the receiving groove and extend along the length direction of the receiving groove. At least one vertical plate is adjustablely connected to the top plate and the bottom plate along the width direction of the receiving groove. The top plate, the bottom plate, and each vertical plate include a bearing part and a limiting part. The bearing part and the limiting part are arranged at an angle to form a limiting structure. The limiting structure of the top plate, the bottom plate, and the at least two vertical plates can jointly enclose a slot for loading workpieces. The anti-detachment component includes at least two rotating blades. Each vertical plate is provided with at least one rotating blade. The rotating blade is adjustablely connected to the corresponding vertical plate along the length direction of the receiving groove, and at least part of the rotating blade blocks the slot opening to prevent the workpiece from detaching. The outer frame gradually slopes downwards along the length of the receiving groove. When a workpiece is placed in the groove, its own weight keeps it at the bottom. Therefore, as long as the workpiece's length does not exceed the groove's length, it can be stably fixed within the groove, allowing the PVD coating carrier to accommodate workpieces of various lengths. Furthermore, by adjusting the position of at least one vertical plate along the width of the receiving groove, the groove width can be adjusted to accommodate workpieces of different widths and shapes. This design significantly enhances the carrier's versatility and flexibility, enabling the PVD coating carrier to adapt to workpieces of various shapes and sizes. Simultaneously, the rotating blades shield the groove opening. When the carrier unexpectedly shakes, the blades block the workpiece, effectively preventing it from detaching. During stable operation, the blades do not contact the workpiece surface, minimizing damage. Moreover, the adjustable position of the blades along the length of the receiving groove allows for adaptive adjustment based on the workpiece's length, further enhancing adaptability to workpieces of different sizes and shapes. In addition, the top and bottom plates are detachably connected to the outer frame, and the positions of the vertical plates and rotating blades are adjustable, making the vehicle more convenient to install, adjust, disassemble, and clean, and significantly improving the efficiency of loading, unloading, and maintenance. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the PVD coating carrier of this utility model;

[0023] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0024] Figure 3 yes Figure 1 Enlarged view of point B in the middle.

[0025] In the picture:

[0026] 100. Workpiece;

[0027] 1. Outer frame;

[0028] 2. Inner frame; 21. Top plate; 211. First slide groove; 22. Bottom plate; 23. Vertical plate; 231. Bearing part; 232. Limiting part; 233. Second slide groove; 24. First fastener;

[0029] 3. Anti-detachment component; 31. Rotary vane; 32. Second fastener;

[0030] 4. Guide rail; 5. Second U-shaped groove. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0032] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0035] like Figures 1-3 As shown, this embodiment provides a PVD coating carrier, including an outer frame 1, an inner frame 2, and an anti-detachment component 3. The outer frame 1 includes a frame structure with a receiving groove, and the outer frame 1 gradually slopes downward along the length direction of the receiving groove. The inner frame 2 includes a top plate 21, a bottom plate 22, and at least two vertical plates 23. The top plate 21 and the bottom plate 22 are detachably connected to the upper and lower sides of the receiving groove, respectively, and extend along the width direction of the receiving groove. The at least two vertical plates 23 are arranged opposite to each other along the width direction of the receiving groove and extend along the length direction of the receiving groove. At least one vertical plate 23 is adjustablely connected to the top plate 21 and the bottom plate along the width direction of the receiving groove. 22; wherein, the top plate 21, the bottom plate 22 and each vertical plate 23 each include a bearing part 231 and a limiting part 232, the bearing part 231 and the limiting part 232 are arranged at an angle to form a limiting structure, and the limiting structures of the top plate 21, the bottom plate 22 and at least two vertical plates 23 can be used to enclose and form a slot for loading the workpiece 100; the anti-detachment component 3 includes at least two rotating blades 31, each vertical plate 23 is provided with at least one rotating blade 31, the rotating blades 31 are adjustablely connected to the corresponding vertical plate 23 along the length direction of the receiving slot, and at least part of the rotating blades 31 are blocked at the slot opening to prevent the workpiece 100 from detaching.

[0036] When the PVD coating carrier is installed at the output end of the conveying mechanism of the coating equipment, the outer frame 1 gradually tilts downwards along the length of the receiving groove. At this time, once the workpiece 100 is placed in the groove, it will remain at the bottom of the groove under its own weight. This means that as long as the length of the workpiece 100 does not exceed the length of the groove, it can be stably fixed in the groove, thus allowing the PVD coating carrier to accommodate workpieces 100 of various lengths. Furthermore, by adjusting the position of at least one vertical plate 23 in the width direction of the receiving groove, the width of the groove can be adjusted to accommodate workpieces 100 of different widths and shapes. The above configuration greatly enhances the versatility and flexibility of the carrier, enabling the PVD coating carrier to adapt to workpieces 100 of various shapes and sizes.

[0037] Meanwhile, the vane 31 blocks the opening of the slot. When the carrier shakes unexpectedly, the vane 31 can block the workpiece 100 and effectively prevent the workpiece 100 from falling out. When the carrier is running smoothly, the vane 31 will not contact the surface of the workpiece 100, which helps to reduce damage to the workpiece 100. In addition, the position of the vane 31 is adjustable along the length of the receiving slot. The position of the vane 31 can be adjusted according to the length of the workpiece 100, which further improves the adaptability to workpieces 100 of different sizes and shapes.

[0038] In addition, the top plate 21 and the bottom plate 22 are detachably connected to the outer frame 1, and the positions of the vertical plate 23 and the rotating plate 31 are adjustable, making the vehicle more convenient in terms of installation, adjustment, disassembly and cleaning, and significantly improving the efficiency of loading, unloading and maintenance.

[0039] The outer frame 1 has an angle of 5° to 15° with the horizontal direction. This ensures that the workpiece 100 remains stably at the bottom of the slot under gravity, and also prevents the workpiece 100 from tipping over due to excessive tilting. Specifically, the angle between the outer frame 1 and the horizontal direction may be, but is not limited to, 5°, 10°, or 15°.

[0040] Furthermore, the inner frame 2 includes at least three vertical plates 23, each vertical plate 23 being tunably connected to the top plate 21 and the bottom plate 22 along the width direction of the receiving groove. A groove can be formed between two adjacent vertical plates 23, and the width of each groove is adjustable, so that the PVD coating carrier can simultaneously load at least two workpieces 100, which is beneficial to improving production efficiency.

[0041] like Figure 2 As shown, specifically, the inner frame 2 also includes a first sliding member and a first fastener 24. The top plate 21 and the bottom plate 22 are each provided with a first sliding groove 211 extending along the width direction of the receiving groove. The first sliding member is slidably disposed in the first sliding groove 211. The first fastener 24 is disposed on the vertical plate 23 and is detachably connected to the first sliding member. The vertical plate 23 is slidably connected to the top plate 21 and the bottom plate 22 through the first fastener 24 and the first sliding member, thereby realizing stepless adjustment of the groove width. The operator can conveniently and accurately adjust the groove width according to the size of the workpiece 100, which improves the adaptability of the groove to the workpiece 100, thereby improving the stability of the workpiece 100 loading and further improving the versatility and flexibility of the carrier.

[0042] In this embodiment, the vertical plate 23 has first mounting holes at both ends, and a first fastener 24 passes through the first mounting holes. One end of the first fastener 24 is threadedly connected to the first sliding member, and the other end is used to press and fix the vertical plate 23 onto the top plate 21 or the bottom plate 22. By loosening the first fastener 24, the operator can easily slide the vertical plate 23 to adjust the slot width. After adjustment, locking the first fastener 24 and the first sliding member ensures the connection stability between the vertical plate 23 and the top plate 21 and the bottom plate 22, thereby ensuring the stability of loading the workpiece 100. In other embodiments, the first fastener 24 and the first sliding member may be connected by snap-fit ​​or pin, which is not limited here.

[0043] Furthermore, the first mounting hole at the lower end of the vertical plate 23 is a downward-facing U-shaped groove. In the actual installation process, the first fastener 24 can be directly inserted into the U-shaped groove, which improves the tolerance for the assembly accuracy of the vertical plate 23 with the top plate 21 and the bottom plate 22, greatly reduces the installation difficulty and processing cost, effectively improves the installation efficiency, and makes the installation process more convenient and smooth.

[0044] Of course, in other embodiments, multiple first mounting positions can be provided at intervals and correspondingly on the top plate 21 and the bottom plate 22 along the width direction of the receiving groove. The two ends of the vertical plate 23 can be selectively connected to any one of the corresponding first mounting positions. The specific connection method between the two includes, but is not limited to, snap-fit ​​or threaded connection, which can also achieve the adjustment of the groove width, and is not limited here.

[0045] like Figure 3 As shown, the anti-detachment component 3 also includes a second sliding member and a second fastener 32. Each vertical plate 23 has a second sliding groove 233 extending along the length of the receiving groove. The second sliding member is slidably disposed in the second sliding groove 233. The second sliding member is disposed on the rotating plate 31 and is detachably connected to the second sliding member. The rotating plate 31 and the vertical plate 23 are slidably connected through the second fastener 32 and the second sliding member, thereby realizing stepless adjustment of the position of the rotating plate 31. The operator can conveniently and accurately rotate the plate 31 according to the size of the workpiece 100 to ensure that the rotating plate 31 is opposite to the workpiece 100, thereby ensuring the safety of loading the workpiece 100 and further improving the versatility and flexibility of the carrier.

[0046] Furthermore, a second mounting hole is provided at one end of the rotating plate 31, and a second fastener 32 passes through the second mounting hole. One end of the second fastener 32 is threadedly connected to the second sliding member, and the other end is used to press and fix the rotating plate 31 onto the vertical plate 23. By loosening the second fastener 32, the operator can easily adjust the position of the rotating plate 31 along the length of the receiving groove, and the rotating plate 31 can rotate around the second fastener 32, thereby adjusting the rotating plate 31 to block the groove opening to limit the workpiece 100, or to exit the groove opening to release the workpiece 100. After adjustment, locking the second fastener 32 and the second sliding member can ensure the connection stability between the rotating plate 31 and the vertical plate 23, thereby ensuring the safety of loading the workpiece 100. In other embodiments, the second fastener 32 and the second sliding member are not limited to snap-fit ​​or pin-fit, which are not limited here.

[0047] Similarly, in other embodiments, multiple second mounting positions can be provided at intervals and correspondingly on the vertical plate 23 along the length direction of the receiving groove. The rotating plate 31 can be selectively connected to any of the corresponding second mounting positions. The specific connection methods between the two include, but are not limited to, snap-fit ​​or threaded connection, which can also achieve the adjustment of the position of the rotating plate 31, and are not limited here.

[0048] In this embodiment, both the top plate 21 and the bottom plate 22 are threadedly connected to the outer frame 1. This ensures the stability of the connection between the top plate 21 and the bottom plate 22, and also allows workers to easily install and remove the top plate 21 and the bottom plate 22, improving the convenience of cleaning and maintenance. In other embodiments, the top plate 21 and the bottom plate 22 may be snapped or pinned to the outer frame 1, and this is not limited to these embodiments.

[0049] like Figure 1 As shown, the lower end of the outer frame 1 is provided with a guide rail 4, which can slide and cooperate with the first guide wheel of the coating equipment to provide guidance for the transmission of the PVD coating carrier and ensure that the carrier moves along the preset transmission path.

[0050] Furthermore, the upper end of the outer frame 1 is provided with a second U-shaped groove 5, which can slide and cooperate with the second guide wheel of the coating equipment to further guide the PVD coating carrier and improve the stability of the carrier operation.

[0051] In addition, this embodiment also provides a coating equipment, including a conveying mechanism and a PVD coating carrier of any of the above embodiments. The conveying mechanism is connected to the outer frame 1 for transmission to drive the PVD coating carrier to move along the conveying path. By applying the above PVD coating carrier, the versatility and flexibility of the carrier can be improved, adapting to workpieces 100 of various shapes and sizes, reducing damage to workpieces 100, and improving loading, unloading and maintenance efficiency.

[0052] The conveying mechanism includes a drive component, the output of which is connected to the PVD coating carrier to drive the PVD coating carrier to move along the conveying path. Optionally, the drive component may include, but is not limited to, a drive motor or a cylinder, etc., and is not limited thereto.

[0053] Furthermore, the conveying mechanism also includes a first guide wheel and a second guide wheel. The first guide wheel is slidably engaged with the guide rail 4, and the second guide wheel is slidably engaged with the second U-shaped groove 5. The first guide wheel and the second guide wheel together provide guidance for the movement of the PVD coating carrier along the conveying path, and the height of the second guide wheel is higher than the height of the first guide wheel, so that the outer frame 1 gradually tilts downward along the length direction of the receiving groove.

[0054] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A PVD coating carrier, characterized in that, include: The outer frame (1) includes a frame structure with a receiving groove, and the outer frame (1) gradually slopes downward along the length direction of the receiving groove; The inner frame (2) includes a top plate (21), a bottom plate (22), and at least two vertical plates (23). The top plate (21) and the bottom plate (22) are detachably connected to the upper and lower sides of the receiving groove and extend along the width direction of the receiving groove. The at least two vertical plates (23) are arranged opposite to each other along the width direction of the receiving groove and extend along the length direction of the receiving groove. At least one vertical plate (23) is adjustablely connected to the top plate along the width direction of the receiving groove. The top plate (21) and the bottom plate (22); wherein the top plate (21), the bottom plate (22) and each of the vertical plates (23) each include a supporting part (231) and a limiting part (232), the supporting part (231) and the limiting part (232) are arranged at an angle to form a limiting structure, and the limiting structures of the top plate (21), the bottom plate (22) and at least two of the vertical plates (23) can be used to enclose and form a slot for loading the workpiece (100); The anti-detachment component (3) includes at least two rotating blades (31), each of the vertical plates (23) is provided with at least one rotating blade (31), the rotating blades (31) are tunably connected to the corresponding vertical plate (23) along the length direction of the receiving groove, and at least part of the rotating blades (31) are blocked at the opening of the groove to prevent the workpiece (100) from detaching.

2. The PVD coating carrier according to claim 1, characterized in that, Both the top plate (21) and the bottom plate (22) are threadedly connected to the outer frame (1).

3. The PVD coating carrier according to claim 1, characterized in that, The lower end of the outer frame (1) is provided with a guide rail (4), which can slide with the first guide wheel of the coating equipment; and / or, the upper end of the outer frame (1) is provided with a second U-shaped groove (5), which can slide with the second guide wheel of the coating equipment.

4. The PVD coating carrier according to claim 1, characterized in that, The inner frame (2) includes at least three vertical plates (23), each of which is tunably connected to the top plate (21) and the bottom plate (22) along the width direction of the receiving groove.

5. The PVD coating carrier according to any one of claims 1 to 4, characterized in that, The inner frame (2) further includes a first sliding member and a first fastener (24). The top plate (21) and the bottom plate (22) are both provided with a first sliding groove (211) extending along the width direction of the receiving groove. The first sliding member is slidably disposed in the first sliding groove (211). The first fastener (24) is disposed on the vertical plate (23) and is detachably connected to the first sliding member.

6. The PVD coating carrier according to claim 5, characterized in that, The vertical plate (23) has a first mounting hole at both ends. The first fastener (24) passes through the first mounting hole. One end of the first fastener (24) is threadedly connected to the first sliding member, and the other end is used to press and fix the vertical plate (23) onto the top plate (21) or the bottom plate (22).

7. The PVD coating carrier according to claim 6, characterized in that, The first mounting hole at the lower end of the vertical plate (23) is a first U-shaped groove with an opening facing downwards.

8. The PVD coating carrier according to any one of claims 1 to 4, characterized in that, The anti-detachment component (3) further includes a second sliding member and a second fastener (32). Each vertical plate (23) is provided with a second sliding groove (233) extending along the length direction of the receiving groove. The second sliding member is slidably disposed in the second sliding groove (233). The second sliding member is disposed on the rotating plate (31) and is detachably connected to the second sliding member.

9. The PVD coating carrier according to claim 8, characterized in that, The rotating blade (31) has a second mounting hole at one end, the second fastener (32) passes through the second mounting hole, and one end of the second fastener (32) is threadedly connected to the second sliding member, and the other end is used to press and fix the rotating blade (31) onto the vertical plate (23).

10. A coating apparatus, characterized in that, It includes a conveying mechanism and a PVD coating carrier as described in any one of claims 1 to 9, wherein the conveying mechanism is drivenly connected to the outer frame (1) to drive the PVD coating carrier to move along the conveying path.

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