A fluorinated diamond-like carbon film preparation device

Abstract

The utility model relates to thin film preparation device technical field discloses a fluorinated diamond-like carbon film preparation device, including one processing platform and two box bodies, the inner wall both ends of one end box body all are threaded and are connected with the first screw rod and rotate, the outer ring of first screw rod all are threaded and are connected with first nut pair, and first nut pair and box body sliding connection, fixedly connected with connecting plate between first nut pair, and connecting plate and box body sliding connection, one end of first screw rod all are fixedly connected with synchronous pulley, be provided with synchronous belt between synchronous pulley, one end box body top fixedly connected with brake motor. In the utility model, through the linkage between first screw rod, first nut pair, synchronous pulley, synchronous belt, control panel, macaroni pipe, electromagnetic valve, pressure sensor, gas sensor and pressure pipe can ensure that the change of sealed space volume is accurate and stable in the adjustment process.

Description

Technical Field

[0001] This utility model relates to the field of thin film preparation apparatus technology, specifically a fluorinated diamond-like thin film preparation apparatus. Background Technology

[0002] Thin film fabrication equipment is a key device used to manufacture one or more thin films on the surface of a substrate. It is widely used in semiconductor, optics, energy, biomedicine and other fields. Its working principle usually involves physical vapor deposition (such as sputtering and evaporation) or chemical vapor deposition (such as PECVD and ALD). By precisely controlling the gas flow rate, temperature, pressure and energy input, the material is grown layer by layer on the substrate to form a thin film with a specific thickness, composition and function. Such devices integrate a high vacuum system, heating / cooling module, plasma generator and precision control system to ensure the uniformity, adhesion and performance stability of the thin film. It is an indispensable basic tool for modern material preparation and device manufacturing.

[0003] Fluorinated diamond-like carbon (DLC) film fabrication equipment is typically based on plasma-enhanced chemical vapor deposition (PECVD) or plasma-assisted sputtering technology. Its core lies in introducing fluorine-containing precursors (such as CF4, CHF3, etc.) and carbon source gases. Under the action of radio frequency or microwave plasma, high-energy active particles bombard the substrate surface, promoting the formation and deposition of carbon-fluorine bonds. This equipment is equipped with a high-vacuum chamber, a precise gas ratio and flow control system, a substrate bias adjustment system, and a temperature control system. This ensures that, under specific process parameters (such as low temperature and low pressure, specific power), a composite film is grown on the substrate that combines the hardness and wear resistance of DLC films with the low coefficient of friction, corrosion resistance, and hydrophobic properties due to the introduction of fluorine-containing groups. It is widely used in low-friction coatings, biomedical applications, and special protective fields.

[0004] However, existing fluorinated diamond-like carbon (DLC) film preparation devices, with their traditional fixed connection methods, are difficult to adapt to various process requirements, limiting their application range. Furthermore, they can lead to insecure substrate fixation or inaccurate positioning, resulting in uneven film deposition, thickness variations, defects, and reduced film quality and performance. Additionally, they cannot adapt to substrates of different sizes and shapes or different preparation processes, limiting their application in research and production. To address these issues, a new fluorinated diamond-like carbon (DLC) film preparation device is proposed. Utility Model Content

[0005] The purpose of this invention is to provide a device for preparing fluorinated diamond-like films, which solves the problems in the prior art of unstable adjustment of vacuum volume, inability to automatically and stably release the required gas, and inability to automatically fix the substrate.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a fluorinated diamond-like film preparation device, comprising a processing platform and two housings. A first lead screw is rotatably connected to both ends of the inner wall of one housing. A first nut pair is threaded onto the outer ring of each lead screw and slidably connected to the housing. A connecting plate is fixedly connected between the first nut pairs and slidably connected to the housing. A synchronous pulley is fixedly connected to one end of each lead screw, and a synchronous belt is provided between the synchronous pulleys. A brake motor is fixedly connected to the top of one housing, and the output end of the brake motor passes through the housing and is fixedly connected to one end of one of the synchronous pulleys. A control panel is provided at one end of one housing and is electrically connected to the brake motor. A fixing plate is provided on the inner wall of the other housing. A pressure sensor is provided at one end of the top of the fixing plate and is electrically connected to the control panel. An adjustment component is provided on the top of the fixing plate. A transmission component is provided at one end of the processing platform.

[0007] By adopting the above technical solution, the volume of the sealed space can be stably adjusted through the linkage between the above structures, and the change in the volume of the sealed space during the adjustment process can be ensured to be precise and stable.

[0008] As a further description of the above technical solution: the adjustment component includes a gas sensor, which is disposed at the top of the fixed plate at one end and electrically connected to the control panel. A through-tube is provided through and fixedly connected to the bottom of the fixed plate. A solenoid valve is provided on the outer wall of the through-tube and is electrically connected to the control panel. A pressure tube is provided through and fixedly connected to one end of the housing at the other end and penetrates the fixed plate. A vacuum pump is provided at one end of the pressure tube and is electrically connected to the control panel.

[0009] By adopting the above technical solution, the linkage between the above components can ensure the stability of the atmosphere in the reaction space, avoid the instability of film quality caused by gas concentration fluctuations, and at the same time, the force sensor can monitor the pressure in the reaction space in real time, further ensuring the stability of the reaction conditions.

[0010] As a further description of the above technical solution: the transmission component includes a second servo motor, which is fixedly connected to one end of the processing platform. The output end of the second servo motor passes through the processing platform and is fixedly connected to a worm gear, which is rotatably connected to the processing platform. A third lead screw passes through and is rotatably connected to the top center of the processing platform. One end of the third lead screw is fixedly connected to a worm wheel, which meshes with the worm gear.

[0011] By adopting the above technical solution, the worm gear can be rotated on the machining platform by the installed second servo motor, thereby driving the third lead screw to slide on the machining platform.

[0012] As a further description of the above technical solution: the outer ring of the third lead screw is threadedly connected to a third nut assembly, and the third nut assembly is slidably connected to the processing platform. A push rod motor is provided on the inner wall of the third nut assembly, and the push rod motor is electrically connected to the control panel. A slider is fixedly connected to the output end of the push rod motor, and the slider is slidably connected to the third nut assembly. A vacuum suction cup is provided at the bottom of the slider, and a rack is provided on one side of the third nut assembly.

[0013] By adopting the above technical solution, the installed third nut pair allows the slider to move closer to or further away from the fixed plate, while simultaneously driving the rack to slide.

[0014] As a further description of the above technical solution: a bearing plate is fixedly connected to one side of the top of the processing platform, and a second lead screw is rotatably connected through the top of the bearing plate. A gear is fixedly connected through one end of the second lead screw, and the gear meshes with a rack.

[0015] By adopting the above technical solution, the installed gear can be driven by the sliding of the rack, thereby causing the gear to drive the second lead screw to rotate on the bearing plate.

[0016] As a further description of the above technical solution: the outer ring of the second lead screw is threaded with a second nut assembly, and the second nut assembly is slidably connected to the bearing plate, and the second nut assembly is fixedly connected to the housing.

[0017] By adopting the above technical solution, the installed second nut pair can be driven by the second lead screw, thereby enabling the housing to slide.

[0018] As a further description of the above technical solution: One end of the other side of the box is connected to a uniformly distributed air pipe, and all the air pipes are connected to a solenoid valve.

[0019] By adopting the above technical solution, the gas pipe can be controlled by the installed solenoid valve, thereby releasing the required gas.

[0020] As a further description of the above technical solution: a sealing gasket is provided at the other end of each of the boxes.

[0021] By adopting the above technical solution, the sealing gasket can ensure that the connecting plate and the fixing plate remain sealed.

[0022] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0023] This utility model provides a fluorinated diamond-like thin film preparation device. First, through the linkage between the first lead screw, the first nut pair, the synchronous pulley, the synchronous belt, the control panel, the through tube, the solenoid valve, the pressure sensor, the gas sensor, and the pressure tube, it can ensure that the change in the volume of the sealed space during the adjustment process is precise and stable, and ensure the stability of the atmosphere in the reaction space. This avoids the instability of film quality caused by gas concentration fluctuations, thereby improving the versatility and adaptability of the equipment, and can simultaneously fix the substrate.

[0024] This utility model provides a fluorinated diamond-like film preparation device that ensures the substrate or raw material is placed in the correct position through the linkage between the second lead screw, the second nut pair, the gear, the rack, the worm, the third lead screw, the worm wheel, and the third nut pair. This reduces human error, improves the accuracy of feeding, and effectively prevents the box from moving accidentally due to external force or vibration, ensuring the stability and safety of the sealed environment. At the same time, it helps to improve the quality and performance of the film. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0026] Figure 2 This is a perspective view of the present utility model;

[0027] Figure 3 This is a cross-sectional view of the present invention;

[0028] Figure 4 for Figure 3 Enlarged view of point A in the middle;

[0029] Figure 5 This is a schematic diagram of the adjustment component of this utility model.

[0030] Legend:

[0031] 1. Machining platform; 2. Bearing plate; 3. Housing; 4. Brake motor; 5. First lead screw; 6. First nut pair; 7. Synchronous pulley; 8. Synchronous belt; 9. Connecting plate; 10. Control panel; 11. Sealing gasket; 12. Fixing plate; 13. Through tube; 14. Solenoid valve; 15. Pressure sensor; 16. Gas sensor; 17. Gas pipe; 18. Pressure pipe; 19. Vacuum pump; 20. Second nut pair; 21. Gear; 22. Rack; 23. Second servo motor; 24. Worm gear; 25. Third lead screw; 26. Worm wheel; 27. Third nut pair; 28. Push rod motor; 29. ​​Slider; 30. Vacuum suction cup; 31. Second lead screw. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] To further understand the contents of this utility model, a detailed description of this utility model will be provided with reference to the accompanying drawings.

[0034] Reference Figure 1 , Figure 2 , Figure 3 and Figure 5This utility model discloses a fluorinated diamond-like film preparation device, comprising a processing platform 1 and two housings 3. The first processing platform 1 and the two housings 3 can support the required equipment. A connecting plate 9 is fixedly connected between the first nut pairs 6, and the connecting plate 9 is slidably connected to the housings 3. The connecting plate 9 can support and fix the required upper electrode. A brake motor 4 is fixedly connected to the top of one end of the housing 3, and the output end of the brake motor 4 passes through the housing 3 and is fixedly connected to one end of a synchronous pulley 7 on one side. The installed brake motor 4 allows the synchronous pulley 7 on one side to move within the housing. The body 3 rotates, and a fixing plate 12 is provided on the inner wall of the other side of the housing 3. The fixing plate 12 can support the required lower electrode. A pressure pipe 18 is connected and fixed to one side of the other end of the housing 3, and the pressure pipe 18 passes through the fixing plate 12. The pressure pipe 18 can create a vacuum state between the connecting plate 9 and the fixing plate 12. A vacuum pump 19 is provided at one end of the pressure pipe 18, and the vacuum pump 19 is electrically connected to the control panel 10. The vacuum pump 19 can extract the required gas to the outside. The transmission component includes a second servo motor 23. The machine 23 is fixedly connected to one end of the processing platform 1. The worm gear 24 can rotate on the processing platform 1 by the installed second servo motor 23. The inner wall of the third nut assembly 27 is provided with a push rod motor 28, and the push rod motor 28 is electrically connected to the control panel 10. The output end of the push rod motor 28 is fixedly connected to a slider 29, and the slider 29 is slidably connected to the third nut assembly 27. A vacuum suction cup 30 is provided at the bottom of the slider 29. Driven by the installed push rod motor 28, the slider 29 slides on the third nut assembly 27, thereby allowing the vacuum suction cup 30 to move closer to or away from the fixed plate 12. The required substrate can be transported through the linkage of vacuum suction cup 30 and another solenoid valve 14. A bearing plate 2 is fixedly connected to the top side of the processing platform 1. The bearing plate 2 can support and fix the required components and structures. A uniformly distributed air pipe 17 is connected through and fixedly to one end of the box 3. All air pipes 17 are connected through and fixedly to the solenoid valve 14. The required gas can be transported through the multiple air pipes 17. A sealing gasket 11 is provided at the other end of the box 3. The sealing gasket 11 can ensure the sealing of the box 3.

[0035] Reference Figure 3 - Figure 5One end of the housing 3 has a first lead screw 5 that is rotatably connected to both ends of its inner wall. The outer ring of each lead screw 5 is threaded with a first nut assembly 6, which is slidably connected to the housing 3. One end of each lead screw 5 is fixedly connected to a synchronous pulley 7, and a synchronous belt 8 is installed between the pulleys 7. The rotation of one synchronous pulley 7, and the transmission through the synchronous belt 8, causes both lead screws 5 to rotate synchronously on the housing 3, thus allowing the connecting plate 9 to slide stably on the housing 3. This ensures that the change in the sealed space volume during adjustment is precise and stable. One end of the housing 3 has a control panel 10, which is electrically connected to the brake motor 4. One end of the top of the fixing plate 12 has a pressure sensor 15, which is connected to the control panel 10. Electrically connected, the top of the fixed plate 12 is provided with an adjustment component, and one end of the processing platform 1 is provided with a transmission component. The adjustment component includes a gas sensor 16, which is located on the top side of the fixed plate 12 and electrically connected to the control panel 10. A through-tube 13 is connected through and fixed to the bottom of the fixed plate 12. A solenoid valve 14 is provided on the outer wall of the through-tube 13 and electrically connected to the control panel 10. Through the linkage between the gas sensor 16 and the pressure sensor 15, the required signal is transmitted to the control panel 10 to control the solenoid valve 14 and drive the vacuum pump 19. This allows for automatic completion of operations such as adjusting the volume of the sealed space, fixing the substrate, and releasing gas, greatly improving production efficiency and ease of operation.

[0036] Reference Figure 1 - Figure 3The output end of the second servo motor 23 passes through the processing platform 1 and is fixedly connected to a worm gear 24, which is rotatably connected to the processing platform 1. A third lead screw 25 passes through and is rotatably connected to the top center of the processing platform 1. One end of the third lead screw 25 is fixedly connected to a worm wheel 26, which meshes with the worm gear 24. The outer ring of the third lead screw 25 is threaded with a third nut assembly 27, which is slidably connected to the processing platform 1. By rotating the worm gear 24, the worm wheel 26 drives the third lead screw 25 to rotate on the processing platform 1, thereby causing the third nut assembly 27 to move the required substrate. This avoids the risk of accidental movement of the housing 3 after loading, and the stable formation of the sealed environment also reduces... To mitigate safety hazards such as gas leaks and ensure the safety of operators and equipment, a rack 22 is provided on one side of the third nut assembly 27. A second lead screw 31 is rotatably connected through and to the top of the support plate 2. A gear 21 is fixedly connected through and to one end of the second lead screw 31, and the gear 21 meshes with the rack 22. A second nut assembly 20 is threadedly connected to the outer ring of the second lead screw 31, and the second nut assembly 20 is slidably connected to the support plate 2. The second nut assembly 20 is fixedly connected to the housing 3. By sliding the rack 22, the gear 21 drives the second lead screw 31 to rotate on the support plate 2, thereby allowing the second nut assembly 20 to slide on the support plate 2. This causes the housings 3 to move closer or further apart, thus helping to improve the quality and performance of the membrane.

[0037] Working principle: The worm 24 rotates on the processing platform 1, and through the meshing connection between the worm 24 and the worm wheel 26, the worm wheel 26 drives the third lead screw 25 to rotate on the processing platform 1. This causes the third lead screw 25 to drive the third nut assembly 27 to slide on the processing platform 1, allowing the rack 22 to slide on the support plate 2. Subsequently, through the meshing connection between the rack 22 and the gear 21, the gear 21 drives the second lead screw 31 to rotate on the support plate 2. This causes the second lead screw 31 to drive the second nut assembly 20 to slide on the support plate 2, causing the second nut assembly 20 to move the housing 3 closer together or further apart. This causes the slider 29 to approach the fixed plate 12, releasing the required substrate. Then, through the reset of the third nut assembly 27, the housing 3 move closer together and make contact. The presence of the sealing gasket 11 ensures that the inside of the housing 3 remains sealed. Finally, the control panel 10 drives... The synchronous belt 8 drives the other synchronous pulley 7 to rotate on the housing 3, which in turn drives the first lead screws 5 on both sides to rotate synchronously on the housing 3. This drives the first nut assembly 6 to slide synchronously on the housing 3, allowing the connecting plate 9 to slide on the housing 3. The control panel 10 then drives the vacuum pump 19 to maintain a vacuum between the connecting plate 9 and the fixing plate 12. The pressure sensor 15 detects and ensures the stability of the vacuum environment. The solenoid valve 14 is then controlled to fix the required substrate and control the required gas to release it between the connecting plate 9 and the fixing plate 12. The gas sensor 16 detects and analyzes the gas. Finally, the upper electrode at the bottom of the connecting plate 9 and the lower electrode at the top of the fixing plate 12 are used to prepare the required thin film.

[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for preparing a fluorinated diamond-like carbon film, comprising a processing platform (1) and two boxes (3), characterized in that: Both ends of the inner wall of the housing (3) at one end are connected to a first lead screw (5) that passes through and rotates. The outer ring of the first lead screw (5) is threaded with a first nut pair (6), and the first nut pair (6) is slidably connected to the housing (3). A connecting plate (9) is fixedly connected between the first nut pairs (6), and the connecting plate (9) is slidably connected to the housing (3). One end of the first lead screw (5) is fixedly connected to a synchronous pulley (7), and a synchronous belt (8) is provided between the synchronous pulleys (7). A brake motor (4) is fixedly connected to the top of the housing (3) at one end, and the brake motor... The output end of the machine (4) passes through the housing (3) and is fixedly connected to one end of the synchronous pulley (7) on one side. One end of the housing (3) is provided with a control panel (10), and the control panel (10) is electrically connected to the brake motor (4). The inner wall of the housing (3) on the other side is provided with a fixing plate (12). One end of the top side of the fixing plate (12) is provided with a pressure sensor (15), and the pressure sensor (15) is electrically connected to the control panel (10). The top of the fixing plate (12) is provided with an adjustment component, and one end of the processing platform (1) is provided with a transmission component.

2. The apparatus for preparing a fluorinated diamond-like carbon film according to claim 1, wherein: The regulating component includes a gas sensor (16), which is located at the top of the fixed plate (12) at one end. The gas sensor (16) is electrically connected to the control panel (10). A through tube (13) is fixedly connected to the bottom of the fixed plate (12). A solenoid valve (14) is provided on the outer wall of the through tube (13), and the solenoid valve (14) is electrically connected to the control panel (10). A pressure tube (18) is fixedly connected to one end of the housing (3) at the other end, and the pressure tube (18) is connected to the fixed plate (12). A vacuum pump (19) is provided at one end of the pressure tube (18), and the vacuum pump (19) is electrically connected to the control panel (10).

3. The apparatus for preparing a fluorinated diamond-like carbon film according to claim 1, wherein: The transmission assembly includes a second servo motor (23), which is fixedly connected to one end of the processing platform (1). The output end of the second servo motor (23) passes through the processing platform (1) and is fixedly connected to a worm gear (24). The worm gear (24) is rotatably connected to the processing platform (1). A third lead screw (25) passes through and is rotatably connected to the middle of the top of the processing platform (1). One end of the third lead screw (25) is fixedly connected to a worm wheel (26), and the worm wheel (26) meshes with the worm gear (24).

4. The apparatus for preparing a fluorinated diamond-like carbon film according to claim 3, wherein: The outer ring of the third lead screw (25) is threaded with a third nut pair (27), and the third nut pair (27) is slidably connected to the processing platform (1). The inner wall of the third nut pair (27) is provided with a push rod motor (28), and the push rod motor (28) is electrically connected to the control panel (10). The output end of the push rod motor (28) is fixedly connected with a slider (29), and the slider (29) is slidably connected to the third nut pair (27). The bottom of the slider (29) is provided with a vacuum suction cup (30), and a rack (22) is provided on one side of the third nut pair (27).

5. The apparatus for preparing a fluorinated diamond-like carbon film according to claim 1, wherein: A bearing plate (2) is fixedly connected to one side of the top of the processing platform (1). A second lead screw (31) is rotatably connected through the top of the bearing plate (2). A gear (21) is rotatably connected through one end of the second lead screw (31), and the gear (21) meshes with the rack (22).

6. The apparatus for preparing a fluorinated diamond-like carbon film according to claim 5, wherein: The outer ring of the second lead screw (31) is threaded with a second nut pair (20), and the second nut pair (20) is slidably connected to the bearing plate (2), and the second nut pair (20) is fixedly connected to the housing (3).

7. The apparatus for preparing fluorinated diamond-like thin films according to claim 6, characterized in that: The other end of the box (3) has a uniformly distributed air pipe (17) that is fixedly connected to one side of the other end, and the air pipe (17) is fixedly connected to the solenoid valve (14).

8. The apparatus for preparing fluorinated diamond-like thin films according to claim 1, characterized in that: The other end of each box (3) is provided with a sealing gasket (11).

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