A spin-drying device for wafers

Abstract

This utility model proposes a spin-drying device for wafers, specifically relating to the technical field of wafer processing equipment. It includes a machine body, an electric motor housed within the machine body, and a spin-drying component located on the top of the machine body and connected to the output end of the electric motor. The spin-drying component includes a column connected to the electric motor, a retaining plate on the outer surface of the column, and a placement component that engages with the column and the retaining plate. The placement component includes a plate and a groove formed at the bottom of the plate. A circular plate is placed within the groove, with a circular groove in the center of the circular plate that mates with the column. Two protrusions at the bottom of the circular plate that mate with the retaining plate are also provided. The advantage of the spin-drying component being connected to the column by engaging is that it facilitates the installation and disassembly of the spin-drying component by workers, and also facilitates the installation of spin-drying components of different specifications. Furthermore, it allows the equipment itself to be used for spin-drying wafers of different specifications.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing equipment technology, and in particular to a wafer spin dryer. Background Technology

[0002] The wafer manufacturing process involves grinding, polishing, and cleaning. After cleaning, water stains and dirt remain on the surface of the wafer, which need to be separated and dried individually. Wafer drying is also a very important step in the cleaning process and is an indispensable step to obtain a high-quality surface.

[0003] However, the existing spin dryers generally use screws or integrated connections to connect the spin dryer components to the machine body. However, the screw connection method is not convenient for operators to install and replace the spin dryer components. At the same time, the columns used to restrain the wafers on the existing spin dryer components are also generally integrated with the spin dryer components. This design will cause the columns to tilt after a long period of use. When the columns tilt, the restraining effect on the wafers will be reduced, which may cause the wafers to detach during the spin drying process. Utility Model Content

[0004] To address the aforementioned problems, this invention proposes a wafer spin-drying device to more accurately resolve these issues.

[0005] This utility model is achieved through the following technical solution:

[0006] This utility model proposes a spin-drying device for wafers, including a body, an electric motor disposed within the body, and a spin-drying component disposed on the top of the body and connected to the output end of the electric motor. The spin-drying component includes a column connected to the electric motor, a retaining plate disposed on the outer surface of the column, and a placement component that engages with the column and the retaining plate. The placement component includes a plate and a groove formed at the bottom of the plate. A circular plate is disposed within the groove. A circular groove that mates with the column is formed in the middle of the circular plate. Two protrusions that mate with the retaining plate are provided at the bottom of the circular plate. A plurality of evenly distributed limiting posts are disposed around the top circumference of the plate. A plurality of inclined protrusions are disposed on the top of the plate and between the plurality of limiting posts. A drainage groove is disposed between the plurality of protrusions.

[0007] Furthermore, the circular plate has several internal threaded holes on its top circumference, and a limiting post is internally threaded into each internal threaded hole. The lower end face of the limiting post is provided with an external thread that mates with the internal threaded hole.

[0008] Furthermore, this utility model provides six limiting posts and internal threaded holes.

[0009] Furthermore, the two ends of the card plate are arc-shaped, and the front and rear ends of the card plate are straight.

[0010] Furthermore, the protruding outer surface of this utility model is arc-shaped, and the inner side of the protrusion is straight, engaging with the straight surface of the card plate.

[0011] Furthermore, the top of the machine body is provided with an annular plate, and a through hole for the column to pass through is provided in the middle of the annular plate.

[0012] Furthermore, the front end of the machine body is provided with an operation panel, and a cover for covering the operation panel is hinged to one side of the front end of the machine body.

[0013] The beneficial effects of this utility model are:

[0014] The advantage of using a snap-fit ​​connection between the spin dryer and the column is that it not only facilitates the installation and disassembly of the spin dryer by the staff, but also facilitates the installation of spin dryers of different specifications. This also makes the equipment itself suitable for spin drying wafers of different specifications, thereby increasing the applicability of the equipment.

[0015] The tilted protrusions create a certain distance between the bottom of the wafer and the top of the disc after the wafer is placed. This distance not only ensures the efficiency of wafer desiccation but also provides a basis for removing water stains.

[0016] The internal and external threads enable the installation and replacement of the limiting post, facilitating timely replacement by staff when the limiting post is damaged. Furthermore, the threaded installation method not only simplifies installation but also ensures the stability of the limiting post during use. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the limiting component structure in this utility model;

[0020] Figure 4 This is a schematic diagram of the structure of this utility model.

[0021] In the diagram, 1. Body; 2. Spin-drying component; 21. Column; 22. Clamping plate; 23. Placement component; 231. Plate; 232. Groove; 233. Circular plate; 234. Circular groove; 235. Protrusion; 236. Restricting post; 2361. External thread; 237. Inclined protrusion; 238. Drainage groove; 239. Internal threaded hole; 3. Annular plate; 31. Through hole; 4. Control panel; 5. Cover. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, a clear and complete description will be provided below in conjunction with the technical solutions in the embodiments of this utility model. Obviously, the described embodiments are some, but not all, of the embodiments of this utility model. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] Example

[0024] refer to Figure 1-4 A wafer spin-drying device includes a body 1, an electric motor disposed within the body 1, and a spin-drying component 2 disposed on the top of the body 1 and connected to the output end of the electric motor. The spin-drying component 2 includes a column 21 connected to the electric motor, a clamping plate 22 disposed on the outer surface of the column 21, and a placement component 23 engaged with the column 21 and the clamping plate 22. The placement component 23 includes a plate 231 and a groove 232 formed at the bottom of the plate 231. A circular plate 233 is disposed in the groove 232. A circular groove 234 that cooperates with the column 21 is formed in the middle of the circular plate 233. Two protrusions 235 that cooperate with the clamping plate 22 are provided at the bottom of the circular plate 233. A plurality of evenly distributed limiting posts 236 are provided on the top circumference of the plate 231. A plurality of inclined protrusions 237 are provided on the top of the plate 231 and between the plurality of limiting posts 236. A drainage groove 238 is provided between the plurality of protrusions.

[0025] The advantage of using a snap-fit ​​connection between the spin dryer 2 and the column 21 is that it not only facilitates the installation and disassembly of the spin dryer 2 by the staff, but also facilitates the installation of spin dryers 2 of different specifications by the staff, and makes the equipment itself applicable to the spin dryer of wafers of different specifications, thereby increasing the applicability of the equipment.

[0026] The electric motor drives the column 21 and the spin-drying component 2 to rotate, and completes the spin-drying of the wafer itself through the principle of centrifugal force. The presence of the limiting column 236 can limit the movement range of the wafer and ensure that the wafer can only move within a preset range. At the same time, the presence of the inclined protrusion and the discharge groove can facilitate the discharge of water stains. The inclined protrusion 237 ensures that there is a certain distance between the bottom of the wafer and the top of the circular plate 233 after the wafer is placed. This distance not only ensures the efficiency of wafer water spin-drying, but also provides a basis for the water stain discharge.

[0027] like Figure 3 As shown, the top circumference of the circular plate 233 is provided with several internal threaded holes 239, and the internal threaded holes 239 are internally threaded to a limiting post 236. The lower end face of the limiting post 236 is provided with an external thread 2361 that mates with the internal threaded holes 239.

[0028] The internal threaded hole 239 and the external thread 2361 enable the installation and replacement of the limiting post 236. This allows workers to easily replace the limiting post 236 when it is damaged. Furthermore, the threaded installation method of the limiting post 236 not only simplifies the installation process but also ensures the stability of the limiting post 236 during use.

[0029] In this embodiment, six limiting posts 236 and internal threaded holes 239 are provided.

[0030] like Figure 2 and Figure 4 As shown, the two ends of the card plate 22 are arc-shaped, and the front and rear ends of the card plate 22 are straight; the protruding outer surface is arc-shaped, and the inner side of the protrusion 235 is straight, and engages with the straight surface of the card plate 22.

[0031] The contact between the straight surface of the card plate 22 and the straight surface of the protrusion 235 completes the installation of the spin dryer 2. At the same time, the two protrusions 235 form a clamping connection for the card plate 22. Therefore, during the rotation of the card plate 22, the spin dryer will be driven to rotate synchronously to ensure the spin dryer operation.

[0032] In this embodiment, an annular plate 3 is provided on the top of the body 1, and a through hole 31 for the column 21 to pass through is provided in the middle of the annular plate 3.

[0033] like Figure 1 As shown, the front end of the machine body 1 is provided with an operation panel 4, and a cover 5 for covering the operation panel 4 is hinged to one side of the front end of the machine body 1.

[0034] The operation panel 4 allows operators to easily adjust the working status of the spin dryer 2, such as usage time and rotation speed. Optionally, the operation panel 4 includes a device switch, a time setter, a speed setter, and an on / off button, all of which are electrically connected to the motor via the CPU motherboard.

[0035] The cover 5 is designed to cover the operation panel 4, ensuring the safety of the operation panel 4 during use and storage. The cover 5 is transparent.

[0036] Working principle:

[0037] First, the operator takes out the spin dryer 2 that is compatible with the wafers to be spin-dried and connects the spin dryer 2 to the top of the column 21. Then, the spin dryer 2 is pressed downwards, and the end of the column 21 moves upwards along the circular groove 234. At the same time, the straight surface of the protrusion 235 gradually contacts the straight surface of the clamping plate 22, thus completing the installation of the spin dryer 2. Next, the operator places the wafers to be spin-dried on the top of the plate 231 and makes the bottom of the wafers contact several inclined support blocks. Finally, the operator starts the motor through the operation panel 4. The motor drives the spin dryer to rotate through the column 21 and completes the spin-drying of the wafers. During the rotation of the spin dryer 2, six limiting posts 236 limit the movement range of the wafers. After the limiting posts 236 have been used for a period of time, the operator can remove the limiting posts 236 by rotating them counterclockwise and replace them with new limiting posts 236.

[0038] It should be noted that this utility model only protects the mechanical part, and the functions implemented by the software control part are not within the scope of protection of this utility model.

[0039] Of course, there may be other implementations of this utility model. Based on this implementation, other implementations obtained by those skilled in the art without any creative effort are all within the scope of protection of this utility model.

Claims

1. A spin-drying device for wafers, characterized in that, The device includes a body, an electric motor disposed within the body, and a spin-drying component disposed on the top of the body and connected to the output end of the electric motor. The spin-drying component includes a column connected to the electric motor, a retaining plate disposed on the outer surface of the column, and a placement component that engages with the column and the retaining plate. The placement component includes a plate and a groove formed at the bottom of the plate. A circular plate is disposed within the groove. A circular groove that mates with the column is formed in the middle of the circular plate. Two protrusions that mate with the retaining plate are provided at the bottom of the circular plate. A plurality of evenly distributed limiting posts are disposed around the top circumference of the plate. A plurality of inclined protrusions are disposed at the top of the plate and between the plurality of limiting posts. A drainage groove is disposed between the plurality of protrusions.

2. The wafer spin-drying apparatus according to claim 1, characterized in that, The circular plate has several internally threaded holes on its top circumference. Each internally threaded hole is connected to a limiting post, and the lower end face of the limiting post has an external thread that mates with the internally threaded hole.

3. The wafer spin-drying apparatus according to claim 2, characterized in that, The limiting post and internal threaded hole are provided in six parts.

4. The wafer spin-drying apparatus according to claim 1, characterized in that, The two ends of the card plate are arc-shaped, and the front and rear ends of the card plate are straight.

5. A wafer spin-drying apparatus according to claim 1, characterized in that, The protruding outer surface is arc-shaped, and the inner side of the protrusion is straight, engaging with the straight surface of the card plate.

6. A wafer spin-drying apparatus according to claim 1, characterized in that, The top of the machine body is provided with an annular plate, and a through hole for the column to pass through is provided in the middle of the annular plate.

7. A wafer spin-drying apparatus according to claim 1, characterized in that, The front end of the machine body is provided with an operation panel, and a cover for covering the operation panel is hinged to one side of the front end of the machine body.

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