Tubular furnace

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a tubular furnace, and aims to solve the problem that a tubular furnace in the related technology has safety risks. The tubular furnace comprises a furnace body; each wiring structure comprises a plurality of mounting bases and a plurality of wiring terminals, each mounting base comprises a base body and a connecting block, the base body is connected with the furnace body, the connecting blocks are connected to the side, away from the furnace body, of the base body, and the wiring terminals are connected to the connecting blocks in a one-to-one correspondence mode; in the circumferential direction of the furnace body, any connecting block in the two adjacent mounting seats of each wiring structure is connected to one end, far away from the seat body of the other mounting seat, of the seat body of the mounting seat where the connecting block is located, so that the distance between the two adjacent wiring terminals is larger than a first safety distance. And therefore, the wiring position is proper, and discharge sparking and local overheating phenomena cannot be generated between circuits formed by different wiring terminals.

Description

Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and in particular to a tube furnace. Background Technology

[0002] Tube furnaces are commonly used heating devices that heat materials under specific conditions. They are widely used in industrial and mining enterprises, research institutions, and university laboratories for chemical analysis, physical measurement, and heat treatment of metal parts and small mold steel parts. Additionally, tube furnaces are widely used in the manufacturing of semiconductor and photovoltaic products.

[0003] In the photovoltaic and semiconductor industries, sheet materials are typically fed into tube furnaces and reacted under specific temperature and pressure conditions to grow crystals. However, the wiring terminal designs of existing tube furnaces used in solar cell production have significant safety hazards. For example, insufficient planning of wiring space during the initial design leads to inadequate safety distances between different lines, resulting in improper wiring placement. During furnace operation, the current transmission at the terminals generates electric and magnetic fields, and insufficient safety distances can easily cause arcing and localized overheating between different lines. These issues not only damage the furnace's electrical system, affecting its normal operation and lifespan, but can also lead to fires and other safety accidents, posing significant safety risks and economic losses to production. Utility Model Content

[0004] In view of this, this application provides a tube furnace to address the safety risks associated with tube furnaces in related technologies.

[0005] In a first aspect, one embodiment of this application provides a tubular furnace, comprising: a furnace body; and multiple wiring structures, each wiring structure including multiple mounting seats and multiple terminals, each mounting seat including a base and a connecting block, the base being connected to the furnace body, the connecting block being connected to the side of the base away from the furnace body, and the multiple terminals being connected one-to-one to the multiple connecting blocks; wherein, in the circumferential direction of the furnace body, in each wiring structure, in two adjacent mounting seats, any connecting block is connected to the end of the base of the mounting seat away from the base of the other mounting seat, so that the distance between two adjacent terminals is greater than a first safety distance.

[0006] In conjunction with the first aspect, in the axial direction of the furnace body, the distance between two adjacent terminals of each wiring structure is greater than the second safety distance.

[0007] In conjunction with the first aspect, the wiring terminal also includes: a connecting terminal; a connecting plate connected to the connecting terminal, one side of the connecting plate being connected to the connecting block, and the other side of the connecting plate being connected to the furnace wire of the furnace body. In the axial direction of the furnace body, within the same wiring structure, the distance between two adjacent connecting terminals is greater than the distance between two adjacent connecting plates, and the distance between two adjacent connecting plates is greater than the second safety distance.

[0008] In conjunction with the first aspect, the terminal block also includes: a furnace wire pressure plate, which is disposed on the connecting block, and the furnace wire pressure plate has a fixing groove that is through-hole and avoids the furnace wire on the side facing the connecting block; in the axial direction of the furnace body, the outer edges of the furnace wire connecting plate and the furnace wire pressure plate are flush, so that the distance between two adjacent furnace wire pressure plates is greater than the second safety distance.

[0009] In conjunction with the first aspect, the furnace wire pressure plate is located on the side of the connecting block closer to the base, and the connecting terminal is located on the side of the connecting block farther from the base.

[0010] In conjunction with the first aspect, the connecting plate includes: a terminal connecting plate disposed on the connecting block, wherein the connecting terminal is connected to the terminal connecting plate; and a furnace wire connecting plate disposed on the connecting block, wherein the furnace wire connecting plate is connected to the end of the terminal connecting plate away from the base and is disposed at an angle, and the outer edges of the terminal connecting plate and the furnace wire connecting plate are flush in the axial direction of the furnace body.

[0011] In conjunction with the first aspect, the connecting terminal includes: a connecting post located on the side of the connecting block away from the base; and a flow plate connected to the connecting post, the flow plate being located on the side of the terminal connecting plate away from the connecting block, and the flow plate being in contact with the terminal connecting plate.

[0012] In conjunction with the first aspect, the wiring terminal includes: a connecting terminal having a through-hole first clearance hole; a first connector extending in the circumferential direction of the furnace body; a connecting block having a through-hole second clearance hole; the first connector passing through the first clearance hole and the second clearance hole to connect the connecting terminal to the connecting block; and in the circumferential direction of the furnace body, the distance between the first connectors of two adjacent wiring terminals is greater than a second safety distance.

[0013] In conjunction with the first aspect, the tubular furnace also includes: a second connector, a connection hole provided on the furnace body, a third clearance hole provided on the base body, the third clearance hole being provided through the furnace body in the radial direction, and the second connector passing through the third clearance hole and connecting to the connection hole.

[0014] In conjunction with the first aspect, multiple wiring structures are arranged sequentially along the axial direction of the furnace body.

[0015] Applying the technical solution of this application, the tubular furnace includes a furnace body and multiple wiring structures. Connecting the wiring terminals to an external power source and to the furnace wire leads allows current to be applied to the tubular furnace, creating a high-temperature environment inside. Because the connecting blocks of adjacent mounting seats of each wiring structure are connected to the end of one mounting seat furthest from the other in the circumferential direction of the furnace body, the distance between the two connecting blocks of adjacent mounting seats in the circumferential direction of the furnace body is increased. Since the wiring terminals are connected to the connecting blocks, the distance between adjacent wiring terminals in the circumferential direction of the furnace body can be increased, exceeding a first safety distance. This ensures proper wiring positioning, preventing discharge arcing and localized overheating between lines formed by different wiring terminals, preventing damage to the electrical system, and ensuring normal operation and use of the furnace body, thus avoiding safety accidents. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a tubular furnace provided in an embodiment of this application.

[0018] Figure 2 As shown Figure 1 A magnified view of a portion of point A in the middle.

[0019] Figure 3 The diagram shown is a schematic diagram of the wiring structure of the tubular furnace provided in an embodiment of this application.

[0020] Figure 4 The image shown is an exploded view of a tubular furnace provided in an embodiment of this application.

[0021] Figure label:

[0022] 1. Furnace wire;

[0023] 10. Furnace body;

[0024] 20. Wiring structure; 21. Mounting base; 211. Base body; 2111. Third clearance hole; 212. Connecting block; 2121. Second clearance hole; 22. Terminal block; 221. Connecting terminal; 2211. Connecting post; 2212. Flow plate; 2213. First clearance hole; 222. Connecting plate; 2222. Terminal connecting plate; 2223. Furnace wire connecting plate; 223. First connecting piece; 23. Furnace wire pressure plate; 231. Fixing groove;

[0025] 30. Second connector;

[0026] L1, first safety distance; L2, second safety distance. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] For example, such as Figures 1 to 4 As shown, one embodiment of this utility model provides a tubular furnace, which includes a furnace body 10 and multiple wiring structures 20. Each wiring structure 20 includes multiple mounting bases 21 and multiple terminals 22. Each mounting base 21 includes a base body 211 and a connecting block 212. The base body 211 is connected to the furnace body 10, and the connecting block 212 is connected to the side of the base body 211 away from the furnace body 10. The multiple terminals 22 are connected one-to-one to the multiple connecting blocks 212. In the circumferential direction of the furnace body 10, in each pair of adjacent mounting bases 21 of each wiring structure 20, any connecting block 212 is connected to the end of the base body 211 of the mounting base 21 that is away from the base body 211 of the other mounting base 21, so that the distance between two adjacent terminals 22 is greater than a first safety distance L1.

[0029] Applying the technical solution of this application, the tubular furnace includes a furnace body 10 and multiple wiring structures 20. The wiring terminals 22 are connected to an external power source, and the wiring terminals 22 are connected to the leads of the heating wires 1, thus applying current to the tubular furnace and creating a high-temperature environment inside. Because, in the circumferential direction of the furnace body 10, the connecting blocks 212 of two adjacent mounting seats 21 of each wiring structure 20 are connected to the end of the seat body 211 of one mounting seat 21 that is away from the seat body 211 of the other mounting seat 21, the distance between the two connecting blocks 212 of two adjacent mounting seats 21 in the circumferential direction of the furnace body 10 is increased. Since the wiring terminals 22 are connected to the connecting blocks 212, the distance between two adjacent wiring terminals 22 in the circumferential direction of the furnace body 10 can be increased and exceed the first safety distance L1. This ensures proper wiring positioning, preventing discharge arcing and localized overheating between the lines formed by different wiring terminals 22, preventing damage to the electrical system, and allowing the furnace body 10 to operate normally and be used, thus avoiding safety accidents.

[0030] In the relevant technology, in the circumferential direction of the furnace body 10, in each wiring structure 20, the connecting blocks 212 of two adjacent mounting bases 21 are connected to the ends of the two bases 211 that are close to each other, so that the distance between the two connecting blocks 212 is small. After the wiring terminal 22 is connected to the connecting block 212, the distance between the two wiring terminals 22 is further reduced, so that the distance between the two wiring terminals 22 cannot meet the safety distance requirements.

[0031] In the related technology, the minimum distance between the terminals 22 is about 32mm, while in the solution of this application, the minimum distance between the two terminals 22 is about 43mm, which exceeds the standard for safe distance.

[0032] In one embodiment, the tubular furnace is powered by three-phase electricity. Each wiring structure 20 includes four terminals 22, which are respectively connected to the three-phase wires and the neutral wire of the three-phase electricity to power the tubular furnace. The four terminals 22 are arranged in pairs opposite each other on the circumference of the furnace body 10.

[0033] Specifically, the base 211 extends along the circumferential direction of the furnace body 10, and the mounting block extends along the radial direction of the furnace body 10.

[0034] like Figure 2 As shown, in the axial direction of the furnace body 10, the distance between two adjacent terminals 22 of each wiring structure 20 is greater than the second safety distance L2. This arrangement ensures that, in the axial direction of the furnace body 10, the distance between two adjacent terminals 22 of the wiring structure 20 also meets safety requirements, further improving safety performance.

[0035] In related technologies, the distance between two adjacent terminals 22 in the axial direction of the furnace body 10 is approximately 13mm. This solution redesigns the mounting base 21 and the terminals 22, increasing the distance between two adjacent terminals 22 in the axial direction of the furnace body 10 to approximately 21mm, thus meeting the safety distance requirements.

[0036] In particular, the distance between two adjacent terminals 22 can be increased along the axial direction of the furnace body 10. This can be achieved by increasing the size of the mounting base 21 or by adjusting the installation position of the terminals 22.

[0037] like Figure 3As shown, the terminal block 22 also includes a connecting terminal 221 and a connecting plate 222. The connecting terminal 221 is connected to the connecting plate 222. One side of the connecting plate 222 is connected to the connecting block 212, and the other side of the connecting plate 222 is connected to the furnace wire 1 of the furnace body 10. In the axial direction of the furnace body 10, within the same wiring structure 20, the distance between two adjacent connecting terminals 221 is greater than the distance between two adjacent connecting plates 222, and the distance between two adjacent connecting plates 222 is greater than the second safety distance L2. Using the above-mentioned terminal block 22, the current introduced by the connecting terminal 221 can be transmitted to the welding plate of the furnace wire 1 through the connecting plate 222, and the furnace wire 1 can be fixed by the connecting plate 222.

[0038] It should be noted that the specific structure of the connecting plate 222 needs to be determined according to the specific arrangement of the connecting terminal 221 and the heating wire 1. Furthermore, since the distance between two adjacent connecting terminals 221 is greater than the distance between two adjacent connecting plates 222, the minimum distance between two adjacent terminals 22 is formed on the connecting plate 222 of the terminals 22 in the axial direction of the furnace body 10. Therefore, the distance between two adjacent connecting plates 222 can be increased by changing the installation position of the connecting plate 222 on the connecting block 212 or by adjusting the size of the connecting plate 222.

[0039] like Figure 3 As shown, the terminal block 22 also includes a furnace wire clamping plate 23, which is disposed on the connecting block 212. The furnace wire clamping plate 23 has a fixing groove 231 on the side facing the connecting block 212, which is through-cut and avoids the furnace wire 1. In the axial direction of the furnace body 10, the outer edges of the furnace wire connecting plate 2223 and the furnace wire clamping plate 23 are flush, so that the distance between two adjacent furnace wire clamping plates 23 is greater than the second safety distance L2. The fixing groove 231 on the furnace wire clamping plate 23 can fix the furnace wire 1, which is conducive to welding the furnace wire 1 to the connecting plate 222 and ensures the accurate welding position of the furnace wire 1.

[0040] like Figure 3 As shown, the heating wire pressure plate 23 is located on the side of the connecting block 212 closer to the base 211, and the connecting terminal 221 is located on the side of the connecting block 212 away from the base 211. With this structure, by placing the heating wire pressure plate 23 and the connecting terminal 221 on opposite sides of the connecting block 212, the space on both sides of the connecting block 212 is utilized more efficiently, increasing space utilization. This allows for a reduction in the size of the connecting plate 222 and the heating wire pressure plate 23, ensuring that adjacent terminals 22 can meet the second safety distance L2 requirement along the axial direction of the furnace body 10.

[0041] In related technologies, for the same wiring structure 20, in the circumferential direction of the furnace body 10, the connecting terminal 221 and the furnace wire pressure plate 23 are arranged on the same side of the connecting block 212 and spaced apart along the axial direction of the furnace body 10. This results in the wiring terminal 22 occupying too much space in the axial direction of the furnace body 10, and the size of the connecting plate 222 and the furnace wire pressure plate 23 has to be made relatively large to meet the arrangement requirements of the connecting terminal 221 and the furnace wire 1. As a result, the distance between two adjacent connecting plates 222 and two adjacent furnace wire pressure plates 23 cannot meet the requirements of the second safety distance L2.

[0042] like Figure 3 As shown, the connecting plate 222 includes a terminal connecting plate 2222 and a furnace wire connecting plate 2223 arranged at an angle. The terminal connecting plate 2222 is disposed on the connecting block 212, and the connecting terminal 221 is connected to the terminal connecting plate 2222. The furnace wire connecting plate 2223 is disposed on the connecting block 212, and the end of the furnace wire connecting plate 2222 away from the base 211 is connected to the end of the terminal connecting plate 2222. In the axial direction of the furnace body 10, the outer edges of the terminal connecting plate 2222 and the furnace wire connecting plate 2223 are flush. Using the above-mentioned connecting plate 222, the terminal connecting plate 2222 is connected to the connecting terminal 221, and the furnace wire connecting plate 2223 is connected to the furnace wire 1. Furthermore, the furnace wire connecting plate 2223 and the terminal connecting plate 2222 are arranged at an angle, so that they are respectively arranged at different positions on the connecting block 212, thereby increasing the space utilization of the mounting base 21.

[0043] In this embodiment, in the radial direction of the furnace body 10, the furnace wire connecting plate 2223 is located at the end of the connecting block 212 away from the furnace body 10, and in the circumferential direction of the furnace body 10, the terminal connecting plate 2222 is located on the side of the connecting block 212 away from the base 211.

[0044] like Figure 3 As shown, the connection terminal 221 includes a connection post 2211 and a current-carrying plate 2212. The connection post 2211 is located on the side of the connection block 212 away from the base 211. The current-carrying plate 2212 is connected to the connection post 2211 and is located on the side of the terminal connection plate 2222 away from the connection block 212. The current-carrying plate 2212 is in contact with the terminal connection plate 2222. By using the above-described connection terminal 221 and utilizing the contact between the current-carrying plate 2212 and the terminal connection plate 2222, the contact area between the two can be increased. Consequently, when the same current flows through, the heat generated between the current-carrying plate 2212 and the terminal connection plate 2222 is lower, improving safety.

[0045] like Figure 3As shown, the terminal block 22 includes a connecting terminal 221 and a first connecting member 223. The connecting terminal 221 has a through-hole 2213. The first connecting member 223 extends along the circumferential direction of the furnace body 10. The connecting block 212 has a through-hole 2121. The first connecting member 223 passes through the first and second clearance holes 2213 and 2121 to connect the connecting terminal 221 to the connecting block 212. In the circumferential direction of the furnace body 10, the distance between the first connecting members 223 of two adjacent terminals 22 is greater than the second safety distance L2. Using the above structure, the connecting terminal 221 is connected to the connecting block 212 via the first connecting member 223, which has the advantages of simple structure and easy assembly.

[0046] The first connecting member 223 includes a connecting bolt and a connecting nut, with the connecting bolt locked onto the connecting block 212 by the connecting nut. The torque between the connecting bolt and the nut is greater than or equal to 13 N·m.

[0047] Specifically, the connecting bolts pass through the flow plate 2212, the terminal connecting plate 2222, the connecting block 212, and the furnace wire pressure plate 23 in sequence to connect the above components.

[0048] like Figure 2 and Figure 3 As shown, the tubular furnace also includes a second connector 30. A connection hole is provided on the furnace body 10, and a third clearance hole 2111 is provided on the base 211. The third clearance hole 2111 extends through the furnace body 10 in the radial direction. The second connector 30 passes through the third clearance hole 2111 and connects to the connection hole. Using the second connector 30 to connect the mounting base 21 to the furnace body 10 has the advantages of simple structure and easy assembly.

[0049] Compared to the mounting base 21 in related technologies, in the circumferential direction of the furnace body 10, the two mounting bases 21 of this application rotate 180° about the radial direction of the furnace body 10. When improving the tube furnace, it is only necessary to rearrange the positions of the connection holes on the furnace body 10, without redesigning the furnace body 10, thus simplifying the design process.

[0050] Specifically, the second connector 30 includes a connecting bolt.

[0051] The connecting terminal 221 is made of high-conductivity copper tube T2 with a tin plating thickness of ≥3μm. The connecting plate 222 is made of 304 stainless steel with a thickness of 1.5mm and a current-carrying area of ​​41.25mm². 2 The furnace wire pressure plate 23 is made of 304 stainless steel with a thickness of 1.5mm. The mounting base 21 is made of 95 ceramic and serves as insulation and support. The above materials are universal and remain unchanged compared to tube furnaces in related technologies, avoiding the increased costs associated with large-scale material replacement.

[0052] like Figure 1 and Figure 4 As shown, multiple wiring structures 20 are arranged sequentially along the axial direction of the furnace body 10. This arrangement fully utilizes the space along the axial direction of the furnace body 10, facilitating layout.

[0053] If it is necessary to add a wiring structure 20, it can be arranged again in the axial direction of the furnace body 10 without affecting the safety distance of the existing wiring terminals 22.

[0054] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0055] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0056] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0057] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0058] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A tubular furnace, characterized in that, include: Furnace body; Multiple wiring structures are provided, each of which includes multiple mounting bases and multiple terminals. Each mounting base includes a base body and a connecting block. The base body is connected to the furnace body, and the connecting block is connected to the side of the base body away from the furnace body. The multiple terminals are connected to the multiple connecting blocks one by one. In the circumferential direction of the furnace body, in each of the two adjacent mounting bases of the wiring structure, any one of the connecting blocks is connected to the end of the base of the mounting base away from the base of the other mounting base, so that the distance between the two adjacent wiring terminals is greater than the first safety distance.

2. The tubular furnace according to claim 1, characterized in that, In the axial direction of the furnace body, the distance between two adjacent terminals of each wiring structure is greater than the second safety distance.

3. The tubular furnace according to claim 2, characterized in that, The terminal block includes: Connecting terminals; A connecting plate connected to the connecting terminal, one side of the connecting plate is connected to the connecting block, and the other side of the connecting plate is connected to the furnace wire of the furnace body. In the axial direction of the furnace body, within the same wiring structure, the distance between two adjacent connecting terminals is greater than the distance between two adjacent connecting plates, and the distance between two adjacent connecting plates is greater than the second safety distance.

4. The tubular furnace according to claim 3, characterized in that, The terminal block also includes: A furnace wire pressure plate is disposed on the connecting block, and the side of the furnace wire pressure plate facing the connecting block has a through-hole fixing groove that avoids the furnace wire; In the axial direction of the furnace body, the outer edges of the furnace wire connecting plate and the furnace wire pressure plate are flush, so that the distance between two adjacent furnace wire pressure plates is greater than the second safety distance.

5. The tubular furnace according to claim 4, characterized in that, The furnace wire pressure plate is located on the side of the connecting block closer to the base, and the connecting terminal is located on the side of the connecting block away from the base.

6. The tubular furnace according to claim 3, characterized in that, The connecting plate includes: A terminal connecting plate is disposed on the connecting block, and the connecting terminals are connected to the terminal connecting plate; A furnace wire connecting plate is disposed on the connecting block. The furnace wire connecting plate is connected to the end of the terminal connecting plate away from the base and is disposed at an angle. In the axial direction of the furnace body, the outer edges of the terminal connecting plate and the furnace wire connecting plate are flush.

7. The tubular furnace according to claim 6, characterized in that, The connection terminal includes: A connecting post is located on the side of the connecting block away from the base; A flow-through plate is connected to the connecting post. The flow-through plate is located on the side of the terminal connecting plate away from the connecting block, and the flow-through plate is in contact with the terminal connecting plate.

8. The tubular furnace according to any one of claims 2 to 7, characterized in that, The terminal block includes: The connecting terminal has a through-hole for clearance. The first connector extends along the circumferential direction of the furnace body. The connecting block has a through-hole second clearance hole. The first connector passes through the first clearance hole and the second clearance hole to connect the connecting terminal to the connecting block. In the circumferential direction of the furnace body, the distance between the first connectors of two adjacent terminals is greater than the second safety distance.

9. The tubular furnace according to any one of claims 1 to 7, characterized in that, The tubular furnace also includes: The second connector has a connecting hole on the furnace body and a third clearance hole on the base body. The third clearance hole extends through the furnace body in the radial direction, and the second connector passes through the third clearance hole and connects to the connecting hole.

10. The tubular furnace according to any one of claims 1 to 7, characterized in that, Multiple wiring structures are arranged sequentially along the axial direction of the furnace body.

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