A particle counter

Abstract

This utility model discloses a particle counter module, which includes an air inlet, a clean air inlet, and an exhaust outlet. The sampling air path includes a first filter, a sampling pump, and a three-way connector I. The clean air path includes a purge clean air path, a self-cleaning clean air path, and a common clean air path. The purge clean air path and the self-cleaning clean air path are connected in parallel, and the common clean air path is connected to the clean air inlet. When the particle counter module is working, it operates in purge clean mode, the sampling pump is on, and the air supply pump is off. Gas flowing from the exhaust outlet flows through the sampling air path, the purge clean air path, and the common clean air path to the clean air inlet. When the particle counter module stops working, it operates in self-cleaning clean mode, the sampling pump is off, and the air supply pump is on. Atmospheric air flows through the self-cleaning clean air path and the common clean air path to the clean air inlet, and then exits from the air inlet. This invention solves the problems of optical lens protection during operation and self-cleaning of the internal space after operation.

Description

Technical Field

[0001] This utility model relates to the field of gas detection technology, and in particular to a particle counter. Background Technology

[0002] Most dust particle counters used for cleanroom cleanliness testing employ the principle of light scattering. After prolonged operation, the optical lenses in the particle counter's optical path are easily contaminated by aerosol particles, which affects the beam quality and the accuracy of the test results. Severe contamination can directly affect the lifespan of the particle counter.

[0003] Currently, there is no particle counter that can achieve both optical lens protection and internal space self-cleaning.

[0004] The information disclosed in this background section is only intended to enhance the understanding of the background technology of this application, and therefore may include prior art that is not known to those skilled in the art. Summary of the Invention

[0005] To address the problem that the optical lenses and internal space of a particle counter are easily contaminated by aerosol particles, this invention proposes a particle counter that solves the problems of protecting the optical lenses during operation and self-cleaning the internal space after operation.

[0006] To achieve the above-mentioned objectives, the present invention employs the following technical solution:

[0007] In some embodiments of this application, a particle counter is provided, comprising:

[0008] The particle counter module includes an air inlet, a clean air inlet, and an exhaust inlet;

[0009] The sampling gas path includes a first filter, a sampling pump, and a three-way connector I. The first port of the three-way connector I is connected to the atmosphere, and the sampling gas path is connected to the exhaust nozzle.

[0010] The clean air circuit includes a purge clean air circuit, a self-cleaning clean air circuit, and a common clean air circuit. The purge clean air circuit and the self-cleaning clean air circuit are arranged in parallel. The first ends of the purge clean air circuit and the self-cleaning clean air circuit are connected through a three-way connector II, and the second ends are connected through a three-way connector III. The three-way connector II is connected to the second port of the three-way connector I, and the three-way connector III is connected to the common clean air circuit. The common clean air circuit is connected to the clean air nozzle. An air supply pump is provided on the self-cleaning clean air circuit, and a second filter is provided on the common clean air circuit.

[0011] When the particle counter module is working, the particle counter enters the purge clean mode, the sampling pump is turned on, the air supply pump is turned off, and the gas flowing out from the exhaust nozzle flows through the sampling gas path, the purge clean gas path and the common clean gas path to the clean gas nozzle.

[0012] When the particle counter module stops working, the particle counter enters a self-cleaning mode, the sampling pump is turned off, the air supply pump is turned on, and the outside air flows through the first port of the three-way connector I, the self-cleaning air path, and the common clean air path to the clean air nozzle, and then is discharged from the air inlet.

[0013] Beneficial effects: The particle counter of this application has two cleaning gas operating modes: a purge cleaning module and a self-cleaning cleaning mode. The purge cleaning mode protects the optical lenses from contamination during operation, thus ensuring beam quality. The self-cleaning cleaning mode ensures the internal optical chamber cavity remains clean after the particle counter module stops working, without affecting the accuracy of subsequent detection results.

[0014] In some embodiments of this application, a one-way valve is provided in the purging clean air path.

[0015] Beneficial effects: The one-way valve prevents the airflow from flowing back through the purge clean air path when passing through the three-way connector III. In self-cleaning mode, because the one-way valve is installed in the purge clean air path, the airflow in the self-cleaning clean air path will not flow back to the air supply pump inlet through the three-way connector III, and the self-cleaning clean air path and the purge clean air path do not affect each other's airflow direction.

[0016] In some embodiments of this application, a flow meter is also provided on the self-cleaning clean air path.

[0017] Beneficial effect: With the flow meter and air supply pump 6, the flow rate into the clean air nozzle in the self-cleaning mode can be adjusted to always be stable at 1L / min.

[0018] In some embodiments of this application, a needle valve is also provided on the public clean air line.

[0019] Beneficial effects: In the purge clean mode, the flow rate of the purge clean air path is adjusted by the resistance of the needle valve. After adjustment, the resistance is constant and the flow rate is relatively stable, which will not interfere with the sampling air path flow rate when the particle counter module is working.

[0020] In some embodiments of this application, the air supply pump is a diaphragm pump.

[0021] Beneficial effects: The diaphragm pump has a self-sealing characteristic when power is off, so the gas entering the clean gas path can only flow to the purging clean gas path under the negative pressure of the sampling pump.

[0022] Other features and advantages of this utility model will become clearer after reading the detailed embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of a particle counter according to some embodiments;

[0025] Figure 2 This is a schematic diagram of gas flow in a purge cleaning mode according to some embodiments of a particle counter;

[0026] Figure 3 This is a schematic diagram of gas flow in a self-cleaning mode according to some embodiments of a particle counter;

[0027] Figure 4 This is a structural diagram of a particle counter module according to some embodiments;

[0028] Figure 5 This is a cross-sectional view of a particle counter module according to some embodiments.

[0029] Figure label:

[0030] S1, Sampling gas path;

[0031] S2, Clean air path; S21, Purging clean air path; S22, Self-cleaning clean air path; S23, Common clean air path;

[0032] 100. Particle counter module; 110. Air inlet; 120. Exhaust nozzle; 130. Clean air nozzle; 140. Optical chamber; 150. Reflector; 160. Lens;

[0033] 01. First filter; 02. Sampling pump; 03. T-connector I; 04. T-connector II; 05. T-connector III; 06. T-connector IV; 07. Air supply pump; 08. Flow meter; 09. Check valve; 10. Needle valve; 11. Second filter. Detailed Implementation

[0034] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0035] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0036] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0037] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0038] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0040] In some embodiments of this application, a particle counter is provided. Figure 1 This is a schematic diagram of the structure of a particle counter.

[0041] The particle counter includes a particle counter module 100. Figure 4 This is a structural diagram of the particle counter module 100. Figure 5 This is a cross-sectional view of the particle counter module 100.

[0042] The particle counter module 100 has an air inlet 110 at the top, an exhaust outlet 120 at the bottom, and two clean air inlets 130 on the sides. The air inlet 110 is connected to the aerosol flow path. An optical chamber 140 is formed inside the particle counter module 100. A reflector 150 and a lens 160 are also provided inside the particle counter module 100. The particle counter module 100 uses existing equipment, and its specific structure will not be described in detail in this application.

[0043] The particle counter also includes a sampling gas path S1. The sampling gas path S1 includes a first filter 01, a sampling pump 02, and a three-way connector Ⅰ03. The first port of the three-way connector Ⅰ03 is connected to the atmosphere, and the sampling gas path S1 is connected to the exhaust nozzle 120.

[0044] Sampling pump 02 provides the power for gas flow. When particle counter module 100 is working, sampling pump 02 is turned on, and the gas circulates under the power of sampling pump 02.

[0045] The first filter 01 filters the gas flowing through the sampling gas path S1 to obtain clean gas.

[0046] The particle counter also includes a clean air path S2. The clean air path S2 includes a purge clean air path S21, a self-cleaning clean air path S22, and a common clean air path S23.

[0047] The purge clean air path S21 and the self-cleaning clean air path S22 are connected in parallel. The first ends of the purge clean air path S21 and the self-cleaning clean air path S22 are connected through a tee connector II04, and the second ends of the purge clean air path S21 and the self-cleaning clean air path S22 are connected through a tee connector III05. Tee connector II04 is connected to the second port of tee connector I03, and tee connector III05 is connected to the common clean air path S23. The common clean air path S23 is connected to the clean air nozzle 130.

[0048] In other words, the first port of T-connector I03 is open to the outside atmosphere, the third port of T-connector I03 is connected to the gas path, and the second port of T-connector I03 is connected to the first port of T-connector II04 via a pipeline. The second port of T-connector II04 is connected to the self-cleaning clean gas path S22, and the third port of T-connector II04 is connected to the purging clean gas path S21. The first port of T-connector III05 is connected to the purging clean gas path S21, the second port of T-connector III05 is connected to the common clean gas path S23, and the third port of T-connector III05 is connected to the self-cleaning clean gas path S22.

[0049] An air supply pump 07 is installed on the self-cleaning clean air path S22. The air supply pump 07 is used to provide the power for gas flow. When the particle counter module 100 is not working, the sampling pump 02 is turned off and the air supply pump 07 is turned on. The outside atmosphere flows through the self-cleaning clean air path S22 and the common clean air path S23 to the particle counter module 100 under the action of the air supply pump 07.

[0050] A second filter 11 is installed on the public clean gas circuit S23. The second filter 11 filters the gas flowing through the public clean gas circuit S23 to obtain clean gas.

[0051] Reference Figure 2 When the particle counter module 100 is working, the particle counter enters the purge clean mode, the sampling pump 02 is turned on, the air supply pump 07 is turned off, and the gas flowing out from the exhaust nozzle 120 flows to the clean air nozzle 130 through the sampling air path S1, the purge clean air path S21 and the common clean air path S23.

[0052] In other words, the purge clean mode operates when the particle counter module 100 begins sampling. At this time, the sampling pump 02 is turned on, the air supply pump 07 is turned off, and the airflow flows into the particle counter module 100 through the air inlet 110 and the clean air nozzle 130, respectively. After being discharged from the exhaust nozzle 120, it enters the sampling air path S1. After passing through the first filter 01, most of the dust particles are filtered out. When passing through the three-way connector I03, most of the particles are discharged into the ambient air, and a small portion enters the purge clean air path S21 under the negative pressure of the pipeline. Here, since the airflow required by the clean air nozzle 130 is much smaller than the flow rate of the sampling pump 02, a portion of the gas needs to be discharged into the atmosphere. The gas entering the purge clean air path S21 flows into the common clean air path S23, is filtered by the second filter 11, and then flows back to the particle counter module 100 through the clean air nozzle 130 to purge the surfaces of the lens 160 and the reflector 150, ensuring that dust particles entering the optical chamber 140 through the air inlet 110 do not adhere to the surface of the optical lens, thus avoiding affecting the quality of the beam transmitted through the optical lens.

[0053] Reference Figure 3 When the particle counter module 100 stops working, the particle counter enters the self-cleaning mode, the sampling pump 02 is turned off, the air supply pump 07 is turned on, and the outside air flows through the first port of the three-way connector I03, the self-cleaning air passage S22 and the common clean air passage S23 to the clean air nozzle 130, and then is discharged from the air inlet 110.

[0054] In other words, the self-cleaning mode operates when the particle counter module 100 finishes sampling. At this time, the sampling pump 02 is off, the air supply pump 07 is on, and the purge clean air path S21 has no airflow without negative pressure. Ambient air enters the self-cleaning clean air path S22 under the negative pressure of the air supply pump 07. After entering the self-cleaning clean air path S22, the airflow flows to the common clean air path S23 under the positive pressure of the air supply pump 07, and then enters the particle counter module 100 through the clean air nozzle 130, finally exiting from the air inlet 110. Due to the high resistance of the exhaust nozzle 120, there is no airflow through the exhaust nozzle 120. The clean airflow replaces the residual dust particles in the light chamber 140, achieving the self-cleaning function.

[0055] The particle counter of this application has two cleaning gas operating modes: a purge cleaning mode and a self-cleaning mode. The purge cleaning mode protects the optical lenses of the particle counter module 100 from contamination during operation, thus ensuring beam quality. The self-cleaning mode ensures that the internal optical chamber 140 of the particle counter module 100 remains clean after operation, without affecting the accuracy of subsequent detection results.

[0056] In some embodiments of this application, the gas supply pump 07 is a diaphragm pump. The diaphragm pump has a self-sealing characteristic when power is off, so the gas entering the clean gas path S2 can only flow to the purging clean gas path S21 under the negative pressure of the sampling pump 02.

[0057] In some embodiments of this application, a one-way valve 09 is provided on the purge clean air path S21. The one-way valve 09 can prevent the airflow from flowing back through the purge clean air path S21 when it passes through the three-way connector Ⅲ05.

[0058] In the self-cleaning mode, because the purge clean air path S21 is equipped with a one-way valve 09, the airflow in the self-cleaning clean air path S22 will not flow back to the air supply pump 07 through the three-way connector Ⅲ 05. The self-cleaning clean air path S22 and the purge clean air path S21 do not affect each other's airflow direction.

[0059] In some embodiments of this application, a flow meter 08 is also provided on the self-cleaning clean air path S22. The flow meter 08, in conjunction with the air supply pump 07, can adjust the flow rate entering the clean air nozzle 130 in the self-cleaning clean mode to always keep it stable at 1L / min.

[0060] In some embodiments of this application, a needle valve 10 is also provided on the common clean air path S23. In the purge clean mode, the flow rate of the purge clean air path S21 is adjusted by the resistance of the needle valve 10. After adjustment, the resistance is constant and the flow rate is relatively stable, which will not interfere with the flow rate of the sampling air path S1 when the particle counter module 100 is working.

[0061] In some embodiments of this application, a three-way connector IV06 is also provided on the public clean air circuit S23. Two ports of the three-way connector IV06 are connected to the clean air nozzle 130, and the other port is connected to the public clean air circuit S23.

[0062] In some embodiments of this application, the filtration accuracy of the first filter 01 is 0.1 μm, and the flow rate of the sampling gas path S1 is ≤50 L / min.

[0063] In some embodiments of this application, the filtration accuracy of the second filter 11 is 0.1 μm, and the flow rate of the common clean air path S23 is ≤2 L / min.

[0064] In some embodiments of this application, the tee connector I03 is a reducing tee connector.

[0065] In some embodiments of this application, the total airflow rate of the sampling air path S1 is 29.3 L / min, the airflow rate of the two clean air nozzles 130 is adjusted to 1 L / min by the needle valve 10, and the airflow rate of the air inlet nozzle 110 is 28.3 L / min.

[0066] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0067] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A particle counter, characterized in that, Including: The particle counter module includes an air inlet, a clean air inlet, and an exhaust inlet; The sampling gas path includes a first filter, a sampling pump, and a three-way connector I. The first port of the three-way connector I is connected to the atmosphere, and the sampling gas path is connected to the exhaust nozzle. The clean air circuit includes a purge clean air circuit, a self-cleaning clean air circuit, and a common clean air circuit. The purge clean air circuit and the self-cleaning clean air circuit are arranged in parallel. The first ends of the purge clean air circuit and the self-cleaning clean air circuit are connected through a three-way connector II, and the second ends are connected through a three-way connector III. The three-way connector II is connected to the second port of the three-way connector I, and the three-way connector III is connected to the common clean air circuit. The common clean air circuit is connected to the clean air nozzle. An air supply pump is provided on the self-cleaning clean air circuit, and a second filter is provided on the common clean air circuit. When the particle counter module is working, the particle counter enters the purge clean mode, the sampling pump is turned on, the air supply pump is turned off, and the gas flowing out from the exhaust nozzle flows through the sampling gas path, the purge clean gas path and the common clean gas path to the clean gas nozzle. When the particle counter module stops working, the particle counter enters a self-cleaning mode, the sampling pump is turned off, the air supply pump is turned on, and the outside air flows through the first port of the three-way connector I, the self-cleaning air path, and the common clean air path to the clean air nozzle, and then is discharged from the air inlet.

2. The particle counter according to claim 1, characterized in that, A one-way valve is installed on the purging clean air line.

3. The particle counter according to claim 1, characterized in that, A flow meter is also installed on the self-cleaning clean air circuit.

4. The particle counter according to claim 1, characterized in that, A needle valve is also installed on the public clean air line.

5. The particle counter according to claim 1, characterized in that, The public clean air line is also equipped with a three-way connector IV, two of which are connected to the clean air nozzle.

6. The particle counter according to any one of claims 1 to 5, characterized in that, The air supply pump is a diaphragm pump.

7. The particle counter according to any one of claims 1 to 5, characterized in that, The first filter has a filtration accuracy of 0.1 μm, and the flow rate of the sampling gas path is ≤50 L / min.

8. The particle counter according to any one of claims 1 to 5, characterized in that, The second filter has a filtration accuracy of 0.1 μm, and the flow rate of the common clean air path is ≤2 L / min.

9. The particle counter according to any one of claims 1 to 5, characterized in that, The tee connector I is a reducing tee connector.

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