A positioning device for repairing defects in a photomask substrate

Abstract

This utility model belongs to the field of photomask substrate defect repair, specifically relating to a positioning device for photomask substrate defect repair, including a positioning frame. When a photomask substrate needs repair processing, the user first places the photomask substrate on top of the positioning frame, then places a fixing frame on top of the positioning frame. A rotating worm gear drives a worm wheel to rotate, which in turn drives a rotating rod to rotate. The rotating rod drives a pressing block to rotate, pressing the pressing block firmly against the top of the fixing frame, ensuring the stability of the fixing frame. The user then pushes a limiting plate, allowing a slider to slide on a support rod. Next, the user rotates an operating block, which drives a screw to rotate. The screw rotates, causing a threaded sleeve to move downwards, pressing the top of a pressing plate firmly against the photomask substrate, facilitating subsequent laser repair and achieving a convenient positioning and repair effect.

Description

Technical Field

[0001] This utility model relates to the field of photomask substrate defect repair technology, specifically a positioning device for photomask substrate defect repair. Background Technology

[0002] Defect repair on photomask substrates is crucial in semiconductor manufacturing. Failure to repair not only increases costs but also affects delivery time. Defects on the substrate are generally classified into four categories: transparent defects, circular defects, grain-shaped defects, and fracture or pinhole-shaped defects. Transparent defects mainly exist within the MoSi layer of the photomask substrate; circular defects can exist in both the MoSi and Cr layers; grain-shaped defects may originate from external sources; fracture or pinhole-shaped defects are less common, although larger fracture defects can be found on some low-grade photomask substrates.

[0003] In current photomask substrate defect repair, laser vaporization is used. During the repair process, the photomask substrate needs to be fixed. If the photomask substrate shakes during the repair, it will affect the repair effect, making the repair unstable and inconvenient for users.

[0004] Therefore, it is necessary to provide a positioning device for repairing defects in photomask substrates to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a positioning device for repairing defects in photomask substrates. This device solves the problem that in current photomask substrate defect repair methods, laser vaporization is used for repair. During the repair process, the photomask substrate needs to be fixed, and any shaking of the photomask substrate during repair will affect the repair effect and make the repair unstable.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a positioning device for repairing defects in a photomask substrate, comprising a positioning frame, a fixed frame rotatably connected to the top of the positioning frame, a support rod slidably connected laterally inside the fixed frame, a pressing assembly slidably connected inside the fixed frame, a rotating rod rotatably connected to the front side of the top of the positioning frame, a pressing block fixedly connected to the top of the rotating rod, the pressing block contacting the fixed frame, and a transmission assembly provided on the surface of the rotating rod;

[0007] The clamping assembly is used to clamp the photomask substrate;

[0008] The transmission assembly is used to drive the clamping block.

[0009] Preferably, the clamping assembly includes a slider, which is slidably connected to the surface of the support rod. A limiting plate is fixedly connected to the top of the slider, and a connecting plate is longitudinally fixedly connected to the inner side of the slider. A clamping plate is provided at the bottom of the connecting plate, and a threaded sleeve is fixedly connected to the top of the clamping plate. A screw threadedly connected to the threaded sleeve is rotatably connected to the bottom of the connecting plate, and the top of the screw extends through to the top of the limiting plate.

[0010] Preferably, the transmission assembly includes a worm gear, the bottom of the rotating rod extends through to the bottom of the positioning frame, the worm gear is fixedly connected to the surface of the rotating rod, and a worm is engaged with the surface of the worm gear.

[0011] Preferably, an operating block is fixedly connected to the top of the screw, and the number of operating blocks is two.

[0012] Preferably, a positioning rod is fixedly connected to the top of the clamping plate, and both the connecting plate and the limiting plate are slidably connected to the positioning rod.

[0013] Preferably, the bottom of the clamping plate is fixedly connected with four rubber pads.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] This invention allows the user to perform repair processing on a photomask substrate. First, the user places the photomask substrate on top of the positioning frame. Then, a fixing frame is placed on top of the positioning frame. Next, the worm gear is rotated, causing the worm wheel to rotate. The worm wheel's rotation causes the rotating rod to rotate, which in turn rotates the clamping block, pressing it firmly against the top of the fixing frame to ensure stability. The user then pushes the limiting plate, allowing the slider to slide on the support rod. Finally, the operating block is rotated, causing the screw to rotate. The screw's rotation causes the screw sleeve to move downwards, pressing it firmly against the top of the clamping plate. This clamping plate effectively secures the photomask substrate, facilitating subsequent laser repair and achieving a convenient positioning and repair effect. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the present utility model;

[0017] Figure 2 This is a three-dimensional bottom view of the structure of this utility model;

[0018] Figure 3 This is a three-dimensional schematic diagram of the structure of this utility model;

[0019] Figure 4 This is an exploded view of the structural clamping assembly of this utility model;

[0020] Figure 5 This utility model Figure 2 Enlarged structure at point A in the middle.

[0021] In the diagram: 1. Positioning frame; 2. Fixing frame; 3. Support rod; 4. Clamping assembly; 41. Slider; 42. Limiting plate; 43. Connecting plate; 44. Clamping plate; 46. Screw sleeve; 47. Screw; 5. Rotating rod; 6. Clamping block; 7. Transmission assembly; 71. Worm gear; 72. Worm; 8. Operating block; 9. Positioning rod; 10. Rubber pad. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-5 A positioning device for repairing defects in a photomask substrate includes a positioning frame 1, a fixed frame 2 rotatably connected to the top of the positioning frame 1, a support rod 3 slidably connected to the inside of the fixed frame 2, a pressing assembly 4 slidably connected to the inside of the fixed frame 2, a rotating rod 5 rotatably connected to the front side of the top of the positioning frame 1, a pressing block 6 fixedly connected to the top of the rotating rod 5, the pressing block 6 contacting the fixed frame 2, and a transmission assembly 7 provided on the surface of the rotating rod 5.

[0024] The clamping component 4 is used to clamp the photomask substrate;

[0025] The transmission assembly 7 is used to drive the clamping block 6.

[0026] Please see Figure 1-4 The clamping assembly 4 includes a slider 41, which is slidably connected to the surface of the support rod 3. A limiting plate 42 is fixedly connected to the top of the slider 41. A connecting plate 43 is longitudinally fixedly connected to the inner side of the slider 41. A clamping plate 44 is provided at the bottom of the connecting plate 43. A screw sleeve 46 is fixedly connected to the top of the clamping plate 44. A screw 47, which is threadedly connected to the screw sleeve 46, is rotatably connected to the bottom of the connecting plate 43. The top of the screw 47 extends through to the top of the limiting plate 42.

[0027] Furthermore, through the configuration of the clamping component 4, we can effectively clamp the photomask substrate. This design ensures the stability of the photomask substrate during operation, greatly reduces the possibility of the photomask substrate shaking, and thus improves the safety of the entire operation process.

[0028] Please see Figure 1-5 The transmission assembly 7 includes a worm gear 71. The bottom of the rotating rod 5 extends through to the bottom of the positioning frame 1. The worm gear 71 is fixedly connected to the surface of the rotating rod 5, and a worm 72 meshes with the surface of the worm gear 71.

[0029] Furthermore, through the ingenious design of the transmission component 7, we can precisely control the transmission of the rotating rod 5, enabling the rotating rod 5 to stably drive the clamping block 6 to rotate. This design makes it easier for users to operate.

[0030] Please see Figure 4 The top of the screw 47 is fixedly connected to an operating block 8, and there are two operating blocks 8.

[0031] Furthermore, by setting up the operating block 8, we facilitate the rotation of the screw 47. The rotation of the screw 47 will drive the screw sleeve 46 to move, thereby causing the screw sleeve 46 to move downward and press against the clamping plate. This design makes the entire clamping process smoother and improves the ease of operation.

[0032] Please see Figure 4 A positioning rod 9 is fixedly connected to the top of the clamping plate 44, and the connecting plate 43 and the limiting plate 42 are slidably connected to the positioning rod 9.

[0033] Furthermore, by setting the positioning rod 9, we have achieved stable sliding between the pressing plate 44 and the limiting plate 42, which allows the pressing plate 44 to move vertically up and down, further improving the convenience of operation.

[0034] Please see Figure 4 The bottom of the clamping plate 44 is fixedly connected with four rubber pads 10.

[0035] Furthermore, by setting the rubber pad 10, we increased the friction between the photomask substrate and the clamping plate 44. This design significantly improved the clamping efficiency, effectively avoided the problem of slippage and offset, and further enhanced the convenience of user operation. In general, these carefully designed components work together to provide a reliable guarantee for the stable clamping of the photomask substrate, making the whole operation process safer and more convenient.

[0036] The specific implementation process of this utility model is as follows: When the user needs to repair the photomask substrate, the user first places the photomask substrate on top of the positioning frame 1, then covers the top of the positioning frame 1 with the fixing frame 2, and then rotates the worm gear 72. The worm gear 72 drives the worm wheel 71 to rotate, and the worm wheel 71 rotates to drive the rotating rod 5 to rotate. The rotating rod 5 drives the pressing block 6 to rotate, so that the pressing block 6 presses and fixes the top of the fixing frame 2, which can ensure the stability of the fixing frame 2. Then the user pushes the limiting plate 42 so that the slider 41 can slide on the support rod 3. Then the user rotates the operating block 8, and the operating block 8 drives the screw 47 to rotate. The rotation of the screw 47 drives the screw sleeve 46 to move downward. The downward movement of the screw sleeve 46 can press and fix the top of the pressing plate 44, so that the pressing plate 44 can press and fix the photomask substrate, which is convenient for subsequent laser repair, thereby achieving the effect of convenient positioning and repair.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A positioning device for repairing defects in a photomask substrate, comprising a positioning frame (1), characterized in that: The top of the positioning frame (1) is rotatably connected to a fixed frame (2), and the inside of the fixed frame (2) is slidably connected to a support rod (3). The inside of the fixed frame (2) is slidably connected to a pressing assembly (4). The front side of the top of the positioning frame (1) is rotatably connected to a rotating rod (5). The top of the rotating rod (5) is fixedly connected to a pressing block (6). The pressing block (6) contacts the fixed frame (2). The surface of the rotating rod (5) is provided with a transmission assembly (7). The clamping assembly (4) is used to clamp the photomask substrate; The transmission assembly (7) is used to drive the clamping block (6).

2. The positioning device for repairing defects in a photomask substrate according to claim 1, characterized in that: The clamping assembly (4) includes a slider (41), which is slidably connected to the surface of the support rod (3). A limiting plate (42) is fixedly connected to the top of the slider (41). A connecting plate (43) is fixedly connected to the inner side of the slider (41) longitudinally. A clamping plate (44) is provided at the bottom of the connecting plate (43). A screw sleeve (46) is fixedly connected to the top of the clamping plate (44). A screw rod (47) that is threadedly connected to the screw sleeve (46) is rotatably connected to the bottom of the connecting plate (43). The top of the screw rod (47) extends through to the top of the limiting plate (42).

3. The positioning device for repairing defects in a photomask substrate according to claim 1, characterized in that: The transmission assembly (7) includes a worm gear (71), the bottom of the rotating rod (5) extends through to the bottom of the positioning frame (1), the worm gear (71) is fixedly connected to the surface of the rotating rod (5), and a worm (72) meshes with the surface of the worm gear (71).

4. The positioning device for repairing defects in a photomask substrate according to claim 2, characterized in that: The top of the screw (47) is fixedly connected to an operating block (8), and there are two operating blocks (8).

5. A positioning device for repairing defects in a photomask substrate according to claim 2, characterized in that: The top of the pressing plate (44) is fixedly connected to a positioning rod (9), and the connecting plate (43) and the limiting plate (42) are both slidably connected to the positioning rod (9).

6. A positioning device for repairing defects in a photomask substrate according to claim 2, characterized in that, The bottom of the clamping plate (44) is fixedly connected with a rubber pad (10), and the number of rubber pads (10) is four.

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