Novel nanoimprint device

Abstract

The utility model discloses novel nanoimprint equipment, which comprises a fluid bearing body, a soft template, a lifting driving device, a substrate bearing seat and a UV (ultraviolet) curing lamp, a closed space for bearing liquid is arranged in the fluid bearing body, and an imprint part of the closed space can deform along with the gravity of the liquid in the closed space; the soft template is fixedly connected with the fluid bearing body, a plate body of the soft template is attached to the imprinting part of the closed space, and the plate body of the soft template can correspondingly deform along with deformation of the imprinting part; the lifting driving device is in transmission connection with the fluid bearing body and the soft template or the base plate bearing seat and can drive the fluid bearing body and the soft template or the base plate bearing seat to ascend and descend. According to the utility model, liquid gravity is utilized to drive the center of the soft template to protrude downwards and the edge of the soft template is gradually attached to the substrate, so that bubble-free attachment of diffusion from the center to the outside is realized, and the bubble defect of traditional rigid imprinting is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of nanoimprint technology, specifically relating to a novel nanoimprint device. Background Technology

[0002] Nanoimprint lithography, as a low-cost and high-efficiency method for replicating micro- and nano-patterned structures, occupies an important position in fields such as optical component manufacturing and semiconductor device processing.

[0003] Traditional nanoimprinting processes rely on rigid molds or pneumatic or hydraulically driven imprinting methods, but face many challenges in practical applications:

[0004] Firstly, during rigid mold imprinting, uneven pressure distribution can easily lead to deviations in the accuracy of micro-nano pattern replication. Especially in large-area imprinting scenarios, the pressure difference between the edge and center areas may cause pattern distortion.

[0005] Secondly, air bubbles are easily trapped during the bonding process between the mold and the substrate, leading to imprinting defects.

[0006] Third, the heat generated by the light source during UV curing may cause local overheating of the adhesive layer, which can easily lead to thermal expansion and deformation of the resin layer, affecting the accuracy of the pattern. Utility Model Content

[0007] To address the aforementioned technical problems, this invention proposes a novel nanoimprinting device.

[0008] To achieve the above objectives, the technical solution of this utility model is as follows:

[0009] This utility model discloses a novel nanoimprinting device, comprising:

[0010] A fluid carrier has a built-in sealed space for carrying liquid, and the imprinted part of the sealed space can deform with the gravity of the liquid in the sealed space.

[0011] The soft template has a micro-nano pattern structure. The soft template is fixedly connected to the fluid carrier, and the plate of the soft template is attached to the imprinting part of the closed space. The plate of the soft template can deform accordingly with the deformation of the imprinting part.

[0012] The lifting drive device is connected to the fluid carrier and the soft template or the substrate carrier for transmission, and can drive the fluid carrier and the soft template or the substrate carrier to lift.

[0013] Substrate support, used to support the substrate;

[0014] UV curing lamps are used to cure the adhesive imprinted on the substrate.

[0015] Based on the above technical solution, the following improvements can be made:

[0016] As a preferred embodiment, a bearing ring is fixedly installed on the fluid carrier near the imprinting part. The bearing ring is used to limit the edge of the soft template, and the soft template body is in contact with the imprinting part.

[0017] As a preferred embodiment, the fluid carrier is fixedly connected to the support frame, the support frame is driven by the lifting drive device, and the through hole on the support frame passes through the guide column, with the through hole and the guide column slidingly engaged to limit the lifting trajectory of the support frame.

[0018] As a preferred embodiment, the fluid carrier is provided with a communication port that communicates with the sealed space. The communication port is connected to the liquid storage device through a communication pipe. A control valve is installed on the communication pipe to adjust the liquid injection or extraction rate.

[0019] As a preferred embodiment, the novel nanoimprinting equipment also includes: a liquid level control device, which includes: a liquid level monitoring device and an angle adjustment drive device;

[0020] The liquid level monitoring device includes: a camera and / or a capacitive sensor. The camera is installed above the liquid surface, and the capacitive sensor is installed on the cavity wall at different locations in the sealed space of the fluid carrier. The liquid level monitoring device is used to monitor the liquid level angle of the liquid carried in the sealed space.

[0021] An angle adjustment drive is connected to the fluid carrier and is used to adjust the liquid surface angle of the liquid carried in the sealed space of the fluid carrier.

[0022] As a preferred embodiment, one or more annular partitions are provided in the sealed space of the fluid carrier. The multiple annular partitions have different radii and are all distributed with the center of the imprinted part as the center.

[0023] The annular partition divides the imprinting section into multiple independent imprinting units, and each imprinting unit's corresponding subspace can independently hold the corresponding volume of liquid.

[0024] This utility model discloses a novel nanoimprinting device, which has the following beneficial effects:

[0025] First, pressure uniformity and bubble control. This invention utilizes the gravity of liquid to drive the soft template to bulge downwards at the center and gradually adhere to the substrate at the edges, achieving bubble-free bonding that diffuses outwards from the center, avoiding the bubble defects of traditional rigid imprinting; the fluidity of the liquid allows the pressure to be uniformly transmitted to the adhesive layer through the soft template, significantly improving the consistency of large-area imprinting.

[0026] Second, thermal stability is optimized. During the UV curing process, the liquid medium achieves a constant temperature effect through heat conduction, suppressing deformation of the adhesive layer caused by local overheating and improving the accuracy of structure replication.

[0027] Third, dynamic adjustment and high-precision control. The liquid level is monitored in real time by visual monitoring or capacitive sensors, and the angle adjustment drive device is used to fine-tune the liquid level angle to ensure dynamic and uniform pressure distribution; the newly added reverse feedback adjustment mechanism can adaptively optimize process parameters according to the imprinting results, improving the equipment's adaptability to complex scenarios. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 A schematic diagram of the structure of the novel nanoimprinting device provided in this embodiment of the present invention (without liquid support).

[0030] Figure 2 A schematic diagram of the structure of the novel nanoimprinting device (carrying liquid) provided for an embodiment of this utility model.

[0031] Figure 3 A schematic diagram of camera installation provided for an embodiment of this utility model.

[0032] Figure 4 This is a schematic diagram of the installation of a capacitive sensor provided for an embodiment of the present invention.

[0033] Figure 5 A schematic diagram of the angle adjustment drive device provided in an embodiment of this utility model.

[0034] Figure 6 This is a schematic diagram showing the separation of the embossing section provided in an embodiment of the present invention.

[0035] Figure 7 A flowchart of a novel nanoimprinting method provided for an embodiment of this utility model.

[0036] Wherein: 1-fluid carrier, 11-sealed space, 111-imprinting section, 12-liquid, 2-soft template, 3-UV curing lamp, 4-substrate, 5-imprinting adhesive, 6-carrying ring, 7-support frame, 8-guide column, 9-liquid storage device, 101-camera, 102-capacitive sensor, 103-angle adjustment drive device, 201-first partition, 202-second partition, 301-first unit, 302-second unit, 303-third unit. Detailed Implementation

[0037] The preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0039] Using ordinal numbers such as “first,” “second,” “third,” etc. to describe ordinary objects merely indicates different instances of similar objects and is not intended to imply that the objects being described must have a given order in time, space, sequence, or any other way.

[0040] The expression “includes” is an “open-ended” expression, which means that there is a corresponding component or step, and should not be interpreted as excluding additional components or steps.

[0041] To achieve the objectives of this invention, some embodiments of the novel nanoimprinting device, such as... Figure 1 and 2 As shown, the novel nanoimprinting equipment comprises, from top to bottom: a fluid carrier 1, a soft template 2, a lifting drive device (not shown in the figure), a substrate carrier (not shown in the figure), and a UV curing lamp 3.

[0042] The fluid carrier 1 has a sealed space 11 for carrying liquid 12, and the imprinted part 111 of the sealed space 11 can deform with the gravity of the liquid 12 in the sealed space 11, with the center bulging downward.

[0043] In this embodiment, liquid 12 may be, but is not limited to, water, oil, fluorinated liquid, etc.

[0044] The soft template 2 has a micro-nano pattern structure. The soft template 2 is fixedly connected to the fluid carrier 1, and the plate body of the soft template 2 is attached to the imprinting part 111 of the sealed space 11. The plate body of the soft template 2 can deform accordingly with the deformation of the imprinting part 111.

[0045] In this embodiment, the soft template 2 may be, but is not limited to, PET, PC, PDMS, etc.

[0046] The lifting drive device is connected to the fluid carrier 1 and the soft template 2, and it can drive the fluid carrier 1 and the soft template 2 to rise and fall.

[0047] The substrate support is used to support substrate 4.

[0048] UV curing lamp 3 is used to cure the imprinted adhesive 5 on the substrate 4.

[0049] This utility model discloses a novel nanoimprinting device that can provide uniform and stable pressure and thermal stability.

[0050] Before imprinting, liquid 12 is poured into the sealed space 11. The liquid 12's own gravity causes the soft template 2 to deform under its weight, resulting in a downward bulge at the center. Then, the entire fluid carrier 1 is lowered, allowing the soft template 2 to adhere to the substrate 4 to be imprinted. This center-to-outward diffusion method avoids air bubbles during the bonding process, preventing defects. The flow characteristics of liquid 12 also ensure a more uniform pressure applied to the soft template 2. During the curing process, UV light irradiation generates heat. Excessive or uneven heat can lead to increased deformation and reduced quality of the imprinted sample. However, the liquid 12 in contact with the soft template 2 acts as a temperature regulator, further improving the quality of the imprinted sample.

[0051] In order to further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that a bearing ring 6 is fixedly installed on the fluid carrier 1 near the imprinting part 111. The bearing ring 6 is used to limit the edge of the soft template 2, and the plate body of the soft template 2 is in contact with the imprinting part 111.

[0052] In order to further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that the fluid carrier 1 is fixedly connected to the support frame 7, the support frame 7 is connected to the lifting drive device, and the through hole on the support frame 7 passes through the guide post 8, and the through hole and the guide post 8 are slidably engaged to limit the lifting trajectory of the support frame 7.

[0053] To further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that the fluid carrier 1 is provided with a communication port that communicates with the sealed space 11. The communication port is connected to the liquid storage device through a communication pipe. A control valve is installed on the communication pipe to adjust the liquid injection or extraction rate.

[0054] To further optimize the implementation effect of this utility model, in some other embodiments, the remaining technical features are the same, the difference being that, for example... Figure 3-5 As shown, the novel nanoimprinting equipment also includes: a liquid level control device, which includes: a liquid level monitoring device and an angle adjustment drive device 103;

[0055] The liquid level monitoring device includes: a camera 101 and / or a capacitive sensor 102. The camera 101 is installed on the side of the liquid surface of the liquid 12, and the capacitive sensor 102 is installed on the cavity wall at different positions of the sealed space 11 of the fluid carrier 1. The liquid level monitoring device is used to monitor the liquid level angle of the liquid 12 carried in the sealed space 11.

[0056] Angle adjustment drive device 103 is connected to the fluid carrier 1 for adjusting the liquid surface angle of the liquid 12 carried in the sealed space 11 of the fluid carrier 1.

[0057] The liquid level monitoring device can employ a visual inspection camera 101, using a high-precision camera 101 to acquire images and analyze the angle of the liquid level. Furthermore, to improve the accuracy of the analysis, a fluorescent agent can be injected into the liquid 12.

[0058] Alternatively, the liquid level monitoring device can employ capacitive sensors 102. Two, three, four, or five or more capacitive sensors 102 can be installed on the cavity walls at different locations within the sealed space 11 of the fluid carrier 1. By adding a polar solvent to the liquid 12, the effect of detecting the liquid level angle can be achieved. If capacitive sensors 102 are installed at the same height on both sides of the liquid cavity 12, the levelness of the liquid level can be detected.

[0059] To further optimize the implementation effect of this utility model, in some other embodiments, the remaining technical features are the same, the difference being that, for example... Figure 6 As shown, two annular partitions are provided in the sealed space 11 of the fluid carrier 1. The two annular partitions have different radii and are distributed with the center of the imprinted part 111 as the center. Specifically, they are the first partition 201 and the second partition 202.

[0060] Two annular partitions divide the imprinting section 111 into three independent imprinting units (specifically: the first unit 301, the second unit 302, and the third unit 303), and the subspace corresponding to each imprinting unit can independently hold the corresponding volume of liquid 12.

[0061] In other embodiments, this invention also discloses a novel nanoimprinting method, which utilizes the aforementioned novel nanoimprinting equipment for imprinting, such as... Figure 7 As shown, it includes:

[0062] Step S101: A predetermined amount of liquid 12 is injected into the sealed space 11 of the fluid carrier 1. Under the influence of the gravity of the liquid 12, the plate of the soft template 2 deforms accordingly with the deformation of the imprinted portion 111 of the sealed space 11, with its center bulging downwards, as shown. Figure 7 As shown in (a) and (b);

[0063] Step S102: The lifting drive device moves the fluid carrier 1 and the soft template 2, or the substrate carrier, up and down, so that the center of the soft template 2 first contacts the substrate 4 coated with imprinting adhesive 5, and then they are slowly bonded together, such as... Figure 7 As shown in (c);

[0064] Step S103: After the pressure stabilizes, the UV curing lamp 3 is used to cure the imprinting adhesive 5 on the substrate 4, such as... Figure 7 As shown in (d);

[0065] Step S104: The lifting drive device moves the fluid carrier 1 and the soft template 2, or the substrate carrier, up and down, so that the soft template 2 separates from the substrate 4 and is demolded, thus achieving imprinting. Figure 7 As shown in (e).

[0066] In some other embodiments, step S104 further includes:

[0067] Step S104.1: Extract the liquid 12 from the sealed space 11 of the fluid carrier 1;

[0068] Step S104.2: The lifting drive device drives the fluid carrier 1 and the soft template 2, or the substrate carrier seat, to lift and lower, so that the soft template 2 separates from the substrate 4 and is demolded, thereby realizing the imprinting.

[0069] It is worth noting that step S104.1 above further includes:

[0070] Following the direction from the edge region to the center region of the imprinting section 111, liquid 12 is sequentially extracted from the subspace corresponding to the imprinting unit at the corresponding position, so that the pressure between the soft template 2 and the substrate 4 decreases sequentially from the edge region to the center region.

[0071] Specifically, step S104.1 includes:

[0072] Step S104.11: Extract the liquid 12 from the subspace corresponding to the third unit 303 to gradually reduce the pressure between the edge region of the soft template 2 and the substrate 4.

[0073] Step S104.12: Extract the liquid 12 from the subspace corresponding to the second unit 302, so that the pressure between the middle region of the soft template 2 and the substrate 4 gradually decreases.

[0074] Step S104.13: Extract the liquid 12 from the subspace corresponding to the first unit 301, so that the pressure between the central region of the soft template 2 and the substrate 4 gradually decreases.

[0075] It is worth noting that the liquid extraction rate 12 varies among different imprinting units. The liquid extraction rate 12 of the imprinting unit near the edge is greater than that of the unit near the center. The ratio of the liquid extraction rate 12 of the edge region to that of the center region is 2:1 to 5:1, and the liquid extraction rate 12 of the edge region is 0.1-1 L / min, while that of the center region is 0.05-0.5 L / min.

[0076] To further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that the above-mentioned novel nanoimprinting method further includes:

[0077] Step S105: The morphology of the micro-nano pattern structure imprinted on the substrate 4 is detected by a visual inspection device to obtain inspection data;

[0078] Step S106: Compare the collected detection data with the preset standard value, and adjust the liquid level angle and / or preset volume of liquid 12 in the sealed space 11 of fluid carrier 1 in reverse according to the deviation between the two.

[0079] This utility model discloses a novel nanoimprinting device, which has the following beneficial effects:

[0080] First, pressure uniformity and bubble control. This invention utilizes the gravity-driven soft template 12 to gradually bond with the substrate 4 from the center outwards, achieving bubble-free bonding and avoiding the bubble defects of traditional rigid imprinting. The fluidity of the liquid 12 allows the pressure to be uniformly transmitted to the adhesive layer through the soft template, significantly improving the consistency of large-area imprinting.

[0081] Second, thermal stability is optimized. During the UV curing process, the liquid 12 medium achieves a constant temperature effect through heat conduction, suppressing deformation of the adhesive layer caused by local overheating and improving the accuracy of structure replication.

[0082] Third, dynamic adjustment and high-precision control. The liquid level is monitored in real time by visual monitoring or capacitive sensor 102, and the angle adjustment drive device 103 is used to fine-tune the angle of the liquid surface 12 to ensure dynamic and uniform pressure distribution; the newly added reverse feedback adjustment mechanism can adaptively optimize process parameters according to the imprinting results, improving the equipment's adaptability to complex scenarios.

[0083] Fourth, gentle demolding and structural protection. The demolding method of extracting liquid 12 in different areas reduces the damage of demolding stress to the micro-nano pattern structure by controlling the pressure release sequence of the edge and center areas. It is especially suitable for imprinting scenarios with high aspect ratios or fragile structures, further improving the yield of finished products.

[0084] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0085] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0086] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications may be made to this utility model without departing from its spirit and scope. All such changes and modifications fall within the scope of protection of this utility model as defined by the appended claims and their equivalents.

Claims

1. A novel nanoimprint apparatus characterized in that, include: A fluid carrier having a built-in sealed space for carrying liquid, and the imprinted portion of the sealed space being able to deform under the gravity of the liquid within the sealed space. A soft template having a micro-nano pattern structure is fixedly connected to a fluid carrier, and the plate of the soft template is attached to the imprinting part of a closed space. The plate of the soft template can deform accordingly with the deformation of the imprinting part. A lifting drive device is connected to the fluid carrier and the soft template or the substrate carrier for transmission, and is capable of driving the fluid carrier and the soft template or the substrate carrier to rise and fall. A substrate carrier, which is used to support a substrate; A UV curing lamp is used to cure the imprinted adhesive on the substrate.

2. The novel nanoimprinting apparatus according to claim 1, wherein A bearing ring is fixedly installed on the fluid carrier near the imprinting part. The bearing ring is used to limit the edge of the soft template. The soft template is in contact with the imprinting part.

3. The novel nanoimprinting apparatus according to claim 1, wherein The fluid carrier is fixedly connected to the support frame, the support frame is driven by the lifting drive device, and the through hole on the support frame passes through the guide column. The through hole and the guide column are slidably engaged to limit the lifting trajectory of the support frame.

4. The novel nanoimprinting apparatus according to claim 1, wherein The fluid carrier is provided with a communication port that communicates with the sealed space. The communication port is connected to the liquid storage device through a communication pipe. A control valve is installed on the communication pipe to adjust the liquid injection or extraction rate.

5. The novel nanoimprinting equipment according to claim 1, characterized in that, The novel nanoimprinting equipment also includes a liquid level control device, which includes a liquid level monitoring device and an angle adjustment drive device. The liquid level monitoring device includes a camera and / or a capacitive sensor. The camera is installed above the liquid surface, and the capacitive sensor is installed on the cavity wall at different positions in the sealed space of the fluid carrier. The liquid level monitoring device is used to monitor the liquid level angle of the liquid carried in the sealed space. The angle adjustment drive device is connected to the fluid carrier and is used to adjust the liquid surface angle of the liquid carried in the sealed space of the fluid carrier.

6. The novel nanoimprinting device according to claim 1, characterized in that, One or more annular partitions are provided within the sealed space of the fluid carrier. The radii of the multiple annular partitions are different, and they are all distributed with the center of the imprinted part as the center. The annular partition divides the imprinting section into multiple independent imprinting units, and the subspace corresponding to each imprinting unit can independently hold the corresponding volume of liquid.

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