A crystal boat box

Abstract

This utility model discloses a wafer carrier box, applied in the field of wafer processing technology. It includes a wafer carrier box body, inside which a wafer is placed. A protective shell, which engages with the wafer carrier box body, is located at the bottom of the wafer. A button block, which works in conjunction with the wafer, is slidably connected to the top of the protective shell. A telescopic rod is located inside the protective shell. The button block supports the wafer; when the wafer is placed, the button block automatically moves downwards, providing a relatively cushioning force. When the wafer is removed, the button block slowly carries the wafer upwards, better protecting the wafer during removal and placement, and reducing debris generation caused by scratches and collisions. By sliding the wafer into the interior of the clamping plate, two movable clamping plates hold the wafer on both sides. This reduces the wafer's movement within the slot, preventing collisions between the wafer and the slot, and also preventing the wafer from being inserted at an angle or colliding with other wafers, ensuring wafer quality.

Description

Technical Field

[0001] This utility model belongs to the field of wafer processing technology, and specifically relates to a crystal boat box. Background Technology

[0002] A wafer carrier is a container used to store and transport semiconductor wafers. It is primarily used in the semiconductor manufacturing process to ensure the safety and stability of wafers during processing and transportation.

[0003] Currently, Chinese utility model patent CN222394780U discloses a wafer carrier box. Wafer carrier boxes used for packaging often have multiple grooves inside to hold the wafers, and these grooves are generally serrated to separate the wafers. However, this structure causes the wafer to suspend above the bottom of the wafer carrier box when it is lifted upwards. During wafer handling or transport, the relatively wide slots on the bottom of the wafer carrier box are prone to collisions or scrapes with the wafer due to shaking. Furthermore, it makes it easy for the slots to be inserted at an angle when manually handling the wafer, and robotic arms, lacking cushioning, are prone to collisions with the wafer carrier box slots when grabbing and placing the wafer back. All of these factors increase the risk of wafer breakage and cracking, thus affecting wafer quality. Utility Model Content

[0004] The purpose of this utility model is to provide a wafer carrier box, which has the advantages of preventing wafers from being inserted at an angle, and at the same time, it has a relatively buffering force when the wafer is put back, which can better protect the wafer and reduce the shaking amplitude of the wafer in the slot, and reduce the collision between the wafer and the slot.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a crystal boat box, including a crystal boat box body, a wafer is disposed inside the crystal boat box body, a protective shell is disposed at the bottom of the wafer and snapped into the crystal boat box body, a button block for use with the wafer is slidably connected to the top of the protective shell, a telescopic rod is disposed inside the protective shell, a first spring is sleeved on the surface of the telescopic rod, and a base that is respectively bolted to the button block and the protective shell is welded to both ends of the first spring.

[0006] The above technical solution utilizes a button block to support the wafer. When the wafer is placed, the button block automatically moves downwards, providing a relatively cushioning force. When the wafer is retrieved, the button block slowly carries the wafer upwards, better protecting it during retrieval and reducing debris caused by scratches and collisions. By sliding the wafer into the tray, two movable clamping plates hold the wafer on both sides. This reduces the wafer's movement within the tray, preventing collisions and also preventing tilting or collisions with other wafers, ensuring wafer quality.

[0007] The present invention is further configured such that: both sides of the interior of the crystal boat box are symmetrically welded with a card plate, the inside of the card plate is provided with a slot that is slidably connected to the wafer, both sides of the inside of the slot are symmetrically provided with movable clamping plates that are slidably connected to the card plate, and both movable clamping plates are bolted to a second spring that is fixedly connected to the card plate at one end away from each other.

[0008] By adopting the above technical solution, the wobbling amplitude of the wafer in the slot is reduced, preventing the wafer from colliding with the slot. At the same time, it can also prevent the wafer from being inserted at an angle and colliding with other wafers, thus ensuring the quality of the wafer.

[0009] The present invention is further configured such that a lifting handle is bolted to one side of the surface of the crystal boat box.

[0010] The above technical solution facilitates the lifting of the crystal boat box by holding the lifting handle, thereby transporting the internal wafers.

[0011] The present invention is further configured such that weight-adding blocks are snapped onto both sides of the bottom of the inner cavity of the crystal boat box.

[0012] By adopting the above technical solution, the weight at the bottom of the crystal boat box is increased, thereby improving placement stability and reducing the risk of tipping over.

[0013] The present invention is further configured such that elastic clamping strips are glued to the sides of the two movable clamping plates that are close to each other.

[0014] By adopting the above technical solution, the stability of the movable clamping plate in holding the wafer is improved, while avoiding wear caused by sliding between the wafer and the movable clamping plate.

[0015] The present invention is further configured such that: a slanted groove for use with the wafer is provided on the top side of the movable clamping plate near the elastic clamping strip.

[0016] By adopting the above technical solution, a slanted groove is opened on the top of the movable clamping plate, which facilitates the wafer to slide into the space between the two movable clamping plates.

[0017] In summary, this utility model has the following beneficial effects:

[0018] 1. The wafer is supported by a button block. When the wafer is placed, the button block automatically moves downwards, providing a relatively cushioning force on the wafer. When the wafer is picked up, the button block slowly carries the wafer upwards, which better protects the wafer and reduces the generation of debris caused by scratches and collisions during picking up or putting it back.

[0019] 2. By sliding the wafer into the inside of the card, two movable clamps hold the wafer on both sides. This reduces the wafer's movement within the slot, prevents collisions between the wafer and the slot, and also prevents the wafer from being inserted at an angle or colliding with other wafers, thus ensuring wafer quality. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 This is a cross-sectional view of the structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the key block structure of this utility model;

[0023] Figure 4 This is a cross-sectional view of the protective shell structure of this utility model;

[0024] Figure 5 This is a sectional view of the side structure of the card plate of this utility model.

[0025] Reference numerals in the attached diagram: 1. Crystal boat box; 2. Wafer; 3. Protective shell; 4. Button block; 5. Base; 6. Telescopic rod; 7. First spring; 8. Clamping plate; 9. Slot; 10. Second spring; 11. Movable clamping plate; 12. Lifting handle; 13. Weighting block; 14. Slanted groove; 15. Elastic clamping strip. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings.

[0027] Example 1:

[0028] refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 A wafer carrier box includes a wafer carrier body 1, inside which a wafer 2 is disposed. A protective shell 3, which engages with the wafer carrier body 1, is located at the bottom of the wafer 2. A button block 4, which works in conjunction with the wafer 2, is slidably connected to the top of the protective shell 3. A telescopic rod 6 is disposed inside the protective shell 3, and a first spring 7 is fitted onto the surface of the telescopic rod 6. Both ends of the first spring 7 are welded with bases 5, which are respectively bolted to the button block 4 and the protective shell 3. The button block 4 supports the wafer 2. When the wafer 2 is placed, the button block 4 automatically moves downwards, providing a relatively cushioning force on the wafer 2. When the wafer is removed, the button block 4 slowly carries the wafer 2 upwards, better protecting the wafer and reducing the generation of debris caused by scratches and collisions during removal and placement.

[0029] refer to Figure 1A lifting handle 12 is attached to one side of the surface of the crystal boat box 1. This allows the crystal boat box 1 to be lifted by holding the lifting handle 12, thereby transporting the wafers inside.

[0030] refer to Figure 2 Weight-increasing blocks 13 are attached to both sides of the bottom of the inner cavity of the crystal boat box 1. This increases the weight at the bottom of the crystal boat box 1, thereby improving its stability and reducing the risk of tipping over.

[0031] Brief description of usage: Wafer 2 is placed inside the crystal boat housing 1, with its bottom positioned on button block 4. Each wafer 2 is aligned with a single button block 4. The first spring 7 and telescopic rod 6 at the bottom of button block 4 provide cushioning as wafer 2 is lowered, allowing it to descend slowly. The button block 4 at the bottom acts as a support and limiter. When wafer 2 is removed, the button block 4 slowly carries it upwards, detaching it from the crystal boat housing 1.

[0032] Example 2:

[0033] refer to Figure 1 , Figure 2 , Figure 5 A wafer carrier box is described, in which two symmetrical clamping plates 8 are welded to the inside of the box body 1. The clamping plates 8 have slots 9 that slide and connect to a wafer 2. Two movable clamping plates 11, also sliding and connected to the clamping plates 8, are symmetrically arranged on both sides of the slots 9. Each movable clamping plate 11 has a second spring 10 fixedly connected to the clamping plate 8 at one end. By sliding the wafer 2 into the clamping plates 8, the two movable clamping plates 11 clamp the wafer 2 on both sides. This reduces the wafer's movement within the slots, prevents collisions between the wafer and the slots, and also prevents the wafer from being inserted at an angle or colliding with other wafers, thus ensuring wafer quality.

[0034] refer to Figure 5 Elastic clamping strips 15 are bonded to the sides of the two movable clamping plates 11 that are close to each other. This improves the stability of the movable clamping plates 11 in holding the wafer, while preventing the wafer from sliding and causing wear between the wafer and the movable clamping plates 11.

[0035] refer to Figure 5 The top of the movable clamping plate 11 is provided with a slanted groove 14 for use with the wafer 2 near the elastic clamping strip 15. By providing the slanted groove 14 on the top of the movable clamping plate 11, it is easier for the wafer to slide into the space between the two movable clamping plates 11.

[0036] Brief description of the usage process: By placing wafer 2 into the interior of the wafer boat housing 1, both sides of wafer 2 will slide into the housing 8 through slots 9, allowing wafer 2 to be compressed by the movable clamping plate 11 against the second spring 10. Then, the second spring 10 rebounds after being compressed, causing the movable clamping plate 11 to conform to the sides of wafer 2, thereby allowing the two movable clamping plates 11 to compress and clamp wafer 2, thus securing wafer 2 in place.

[0037] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A crystal boat box, comprising a crystal boat box body (1), characterized in that: The crystal boat box (1) contains a wafer (2). The bottom of the wafer (2) is fitted with a protective shell (3) that is snapped into the crystal boat box (1). The top of the protective shell (3) is slidably connected to a button block (4) that works with the wafer (2). The inside of the protective shell (3) contains a telescopic rod (6). The surface of the telescopic rod (6) is fitted with a first spring (7). Both ends of the first spring (7) are welded with bases (5) that are respectively bolted to the button block (4) and the protective shell (3).

2. The crystal boat box according to claim 1, characterized in that: The crystal boat box (1) has symmetrically welded card plates (8) on both sides inside. The card plates (8) have slots (9) that are slidably connected to the wafer (2) inside. The slots (9) have movable clamps (11) that are slidably connected to the card plates (8) on both sides inside. The two movable clamps (11) are each bolted to a second spring (10) that is fixedly connected to the card plates (8) at one end away from each other.

3. A crystal boat box according to claim 1, characterized in that: A lifting handle (12) is bolted to one side of the surface of the crystal boat box (1).

4. A crystal boat box according to claim 1, characterized in that: Weight blocks (13) are attached to both sides of the bottom of the inner cavity of the crystal boat box (1).

5. A crystal boat box according to claim 2, characterized in that: Elastic clips (15) are glued to the side of the two movable clamps (11) that are close to each other.

6. A crystal boat box according to claim 5, characterized in that: The movable clamping plate (11) has a slanted groove (14) on the side near the elastic clamping strip (15) at the top, which is used in conjunction with the wafer (2).

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