Gas mixing structure and spraying assembly
By setting a partition block to form an annular chamber within the gas mixture body, and setting multiple air inlets around the annular chamber, the gas rotates and diffuses along the axial direction, solving the problem of uneven gas diffusion and achieving a more uniform gas distribution.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU MICROVIA NANO EQUIP TECH CO LTD
- Filing Date
- 2025-05-13
- Publication Date
- 2026-05-29
Smart Images
Figure CN224293574U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a gas mixing structure and a spraying assembly. Background Technology
[0002] In related fields, gas mixing structures typically consist of two inlets and a mixing chamber. Two different gases can enter the mixing chamber from the two inlets respectively, undergo initial diffusion within the mixing chamber, and then enter the spray plate. However, the gas diffusion direction is the same as the gas entry direction, and the gas flow and diffusion direction are entirely distributed through the mixing chamber and the spray plate. This results in uneven distribution of the gas in the center and edge directions, leading to an increase in impurities.
[0003] Therefore, how to improve the uniformity of gas diffusion has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0004] In view of this, the purpose of this application is to provide a gas mixing structure to improve the uniformity of gas diffusion.
[0005] Another objective of this application is to provide a spray assembly having the above-described gas mixing structure.
[0006] To achieve the above objectives, this application provides the following technical solution:
[0007] A gas-mixing structure, comprising:
[0008] A gas mixing body for connection with a spray assembly, the gas mixing body having a first end and a second end disposed opposite to each other, a cavity being provided inside the gas mixing body, a partition being provided inside the cavity, the partition extending from the first end of the gas mixing body toward the second end of the gas mixing body, the partition and the inner wall of the cavity restricting an annular chamber, and the cross-sectional area of the annular chamber increasing from the first end of the gas mixing body toward the second end of the gas mixing body, the gas mixing body being provided with at least two first air inlets, and the at least two first air inlets communicating with the annular chamber through an air inlet channel communicating along the circumference of the annular chamber.
[0009] Optionally, in the above-described gas mixing structure, the cross-sectional area of the partition gradually decreases from the first end of the gas mixing body toward the second end of the gas mixing body.
[0010] Optionally, in the above-mentioned gas mixing structure, the gas mixing body is further provided with a second air inlet, the second air inlet is disposed at the center of the partition, and the second air inlet extends from one end of the partition to the other end, and the second air inlet is isolated from the annular chamber.
[0011] Optionally, in the above-mentioned mixing structure, the second air inlet is located near the second end of the mixing body as the air outlet, and the air outlet is provided with a plurality of air distribution holes evenly spaced along the circumference.
[0012] Optionally, in the above-mentioned gas mixing structure, the gas outlet end is provided with a gas equalization channel, the gas equalization channel is connected to the gas distribution hole, and the gas equalization channel is arranged towards the spray plate of the spray assembly.
[0013] Optionally, in the above-mentioned gas mixing structure, the flow cross section of the gas equalization channel is constant or gradually narrowing along the gas flow direction.
[0014] Optionally, in the above-mentioned gas mixing structure, the end of the gas outlet is one of the following: frustum-shaped, hemispherical, prismatic, planar, or conical.
[0015] Optionally, in the above-described gas mixing structure, the gas outlet extends out of the annular chamber.
[0016] Optionally, in the above-described mixing structure, the second air inlet is located near the first end of the mixing body as the air inlet end, and the air inlet end extends out of the end face of the first end of the mixing body.
[0017] Optionally, in the above-described mixing structure, the first air inlet is located near the first end of the mixing body.
[0018] A spray assembly includes the gas mixing structure as described in any of the preceding claims.
[0019] The gas mixing structure provided in this application, by setting a partition block within the cavity of the gas mixing body, with the partition block extending from a first end to a second end of the gas mixing body, forms an annular chamber between the partition block and the cavity. The cross-sectional area of the annular chamber increases from the first end to the second end of the gas mixing body. Simultaneously, at least two first air inlets are provided on the gas mixing body, communicating with the annular chamber through air inlet channels in the circumferential direction. This allows different gases to enter the annular chamber through the first air inlets, forming a rotating airflow along the axial direction of the annular chamber, which facilitates rapid gas diffusion and prevents backflow between gases. As can be seen from the above example, the gas mixing structure provided in this application, through the annular chamber of the gas mixing body, prevents backflow between gases, promotes gas rotation, improves diffusion efficiency, and ensures uniform diffusion. Furthermore, by combining it with the spray plate of a spray assembly, it can facilitate radial gas diffusion, further improving the uniformity of gas diffusion.
[0020] The technical features mentioned above, those to be mentioned below, and those shown individually in the accompanying drawings can be combined arbitrarily, provided that the combined technical features are not contradictory. All feasible combinations of features are the technical content explicitly described herein. Any one of the multiple sub-features contained in the same statement can be applied independently, without necessarily being applied together with other sub-features. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0022] Figure 1 This is a longitudinal cross-sectional schematic diagram of the gas mixing structure provided in Embodiment 1 of this application;
[0023] Figure 2 This is a schematic diagram of the horizontal cross-section of the gas mixing structure provided in Embodiment 1 of this application;
[0024] Figure 3 This is a longitudinal cross-sectional schematic diagram of the gas mixing structure provided in Embodiment 2 of this application;
[0025] Figure 4 Provided for Embodiment 2 of this application Figure 3 A magnified view of a portion of point A in the middle;
[0026] Figure 5 This is a schematic diagram of the gas mixing structure provided in Embodiment 2 of this application;
[0027] Figure 6 This is a schematic diagram of a conventional gas mixing structure provided in an embodiment of this application.
[0028] Among them, 100 is the gas mixing body, 101 is the partition block, 102 is the annular chamber, 103 is the first air inlet, 104 is the air inlet channel, 105 is the second air inlet, 1051 is the air outlet, 1052 is the air distribution hole, 1053 is the air equalization channel, and 1054 is the air inlet. Detailed Implementation
[0029] The core of this application lies in providing a gas mixing structure to improve the uniformity of gas diffusion.
[0030] Another key aspect of this application is to provide a spray assembly having the aforementioned gas mixing structure.
[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0032] In related fields, especially in the semiconductor field, such as Figure 6 As shown, the gas mixing structure typically consists of two inlets and a mixing chamber. For ease of understanding, the two inlets are defined as inlet A and inlet B. Two different gases can enter the mixing chamber from inlet A and inlet B respectively, undergo initial diffusion within the mixing chamber, and then enter the spray plate. However, the direction of gas flow into the mixing chamber is consistent with the direction of gas diffusion, and the gas flow and diffusion direction are entirely distributed through the mixing chamber and the spray plate. This results in uneven distribution of the gas in the center and edge directions, leading to an increase in impurities.
[0033] Therefore, such as Figure 1 As shown in the figure, this application discloses a gas mixing structure, including a gas mixing body 100.
[0034] The air-fuel mixture body 100 can be connected to the spray assembly. Furthermore, the air-fuel mixture body 100 has two oppositely positioned ends; for ease of understanding, these two ends are defined as a first end and a second end, respectively, with the first end being a closed end and the second end being an open end. Figure 1As shown, a cavity is provided inside the gas mixing body 100, and a partition 101 is provided inside the cavity. The partition 101 extends from the first end of the gas mixing body 100 toward the second end to form an annular chamber 102 between the partition 101 and the inner wall of the cavity. The cross-sectional area of the annular chamber 102 increases from the first end of the gas mixing body 100 toward the second end, thereby facilitating the radial diffusion of the gas. Furthermore, at least two first air inlets 103 are provided on the gas mixing body 100, and the two first air inlets 103 can be located close to the first end of the gas mixing body 100. Of course, the number of first air inlets 103 can also be three, four or more. The two first air inlets 103 can be connected to the annular chamber 102 through air intake channels 104, and of course, three or more first air inlets 103 can be connected to the annular chamber 102 through air intake channels 104. Meanwhile, the air intake channel 104 is connected along the circumferential direction of the annular chamber 102, allowing different gases to enter the annular chamber 102 through the first air intake 103 and form a rotating airflow along the axial direction of the annular chamber 102. This facilitates rapid gas diffusion, prevents direct communication between gases, promotes gas rotation, improves diffusion efficiency, and ensures uniformity of diffusion. Furthermore, by combining with the spray plate of the spray assembly, radial gas diffusion is facilitated, further enhancing the uniformity of gas diffusion.
[0035] For example, such as Figure 2 As shown, the intake passage 104 can be connected along the circumferential direction of the annular chamber 102, and the intake passage 104 can be tangent to the annular chamber 102. Specifically, the tangency of the intake passage 104 to the annular chamber 102 means that the line connecting the intersection of the central axis of the intake passage 104 and the median diameter of the cross-section of the annular chamber 102 is perpendicular to the line connecting this intersection point and the center of the cross-section of the annular chamber 102.
[0036] For example, such as Figure 1 and Figure 2As shown, four first air inlets 103 can be used, and all four first air inlets 103 can be connected to the annular chamber 102 through air inlet channels 104. To ensure that each air inlet channel 104 is tangent to the annular chamber 102, the four first air inlets 103 are located on both sides of the gas mixing body 100, and are arranged in two rows at intervals along the direction from the first end to the second end of the gas mixing body 100. The chemical source can enter the annular chamber 102 through one of the four first air inlets 103, while the other first air inlets 103 can be used to introduce reactants. When gas enters the annular chamber 102 through the first air inlet 103, a rotating airflow is formed along the axial direction of the annular chamber 102, which facilitates rapid gas diffusion and prevents backflow between the chemical source and reactants. Backflow refers to the phenomenon where gas flows in the opposite direction when one gas flow rate is high and another is low, and no partition 101 is provided. Furthermore, it promotes airflow rotation, improves diffusion efficiency, and ensures the uniformity of gas diffusion. At the same time, it can be combined with the spray plate of the spray assembly, which can facilitate the radial diffusion of gas, thereby improving the uniformity of gas diffusion and effectively solving the problem of the film being thick in the center and thin at both sides.
[0037] For example, such as Figure 3 As shown, the cross-sectional area of the partition 101 can gradually decrease from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100. That is, the partition 101 can adopt an inverted conical structure so that the cross-sectional area of the annular chamber 102 gradually increases from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100, which is conducive to the radial diffusion of gas and ensures the uniformity of gas.
[0038] For example, the partition 101 may adopt a stepped structure, that is, the partition 101 may include a vertical section and an inverted conical section connected to the vertical section, and the vertical section of the partition 101 is disposed near the first end of the gas mixing body 100 and connected to the first end of the gas mixing body 100, and the inverted conical section of the partition 101 is disposed near the second end of the gas mixing body 100, so that the cross-sectional area of the annular chamber 102 near the second end of the gas mixing body 100 is larger than the cross-sectional area of the annular chamber 102 near the first end of the gas mixing body 100, thereby facilitating the radial diffusion of the gas.
[0039] For example, the partition 101 may also adopt a uniform cross-section structure, while the cross-sectional area of the cavity gradually increases from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100. That is, the cavity may adopt a conical structure so that the cross-sectional area of the annular chamber 102 formed between the partition 101 and the cavity gradually increases from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100.
[0040] Of course, the partition 101 can adopt an inverted conical structure, and the cross-sectional area of the cavity can gradually increase from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100, so that the cross-sectional area of the annular chamber 102 gradually increases from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100, which is conducive to the radial diffusion of gas and ensures the uniformity of gas.
[0041] For example, the partition block 101 can be integrated with the air-fuel mixture body 100 or it can be a separate structure. When the partition block 101 and the air-fuel mixture body 100 are separate structures, the partition block 101 and the air-fuel mixture body 100 can be fixed by means of bolts, snap-fit or plug-in connection.
[0042] It should be noted that, in the above embodiments, only some methods are given to increase the cross-sectional area of the annular chamber 102 from the first end of the gas mixing body 100 toward the second end of the gas mixing body 100. Other methods to increase the cross-sectional area of the annular chamber 102 are within the protection scope of this application.
[0043] The gas mixing structure disclosed in this application discloses a gas mixing structure in which a partition 101 is provided within the cavity of the gas mixing body 100, and the partition 101 extends from the first end of the gas mixing body 100 toward the second end, so that an annular chamber 102 is formed between the partition 101 and the cavity. The cross-sectional area of the annular chamber 102 can increase from the first end of the gas mixing body 100 toward the second end. At least two first air inlets 103 are provided on the gas mixing body 100 and communicate with the annular chamber 102 through air inlet channels 104, and the air inlet channels 104 are tangential to the annular chamber 102. This allows different gases to enter the annular chamber 102 through the first air inlets 103 respectively, forming a rotating airflow along the axial direction of the annular chamber 102, which is beneficial for rapid gas diffusion and prevents direct communication between gases. It should be noted that the gas mixing structure disclosed in this application can be used in thin film deposition stacking processes.
[0044] like Figure 3 As shown, the gas mixing body 100 is also provided with a second air inlet 105, which passes through the partition block 101 to isolate the second air inlet 105 from the annular chamber 102. When different gases are introduced from the first air inlet 103 and the second air inlet 105 respectively, the different gases can be completely isolated, thereby effectively solving the risk of particulate contamination in the annular chamber 102.
[0045] For example, such as Figure 3As shown, three first air inlets 103 can be used, and the second air inlet 105 can be located at the center of the partition block 101. The second air inlet 105 can extend from one end of the partition block 101 to the other end to achieve complete isolation of different gases. The chemical source can enter the spray plate of the spray assembly through the second air inlet 105, and the reactants can be tangentially introduced through the three first air inlets 103 and diffused along the axis of the annular chamber 102 into the spray plate of the spray assembly. This achieves complete isolation of oxides and reducing agents within the annular chamber 102, effectively solving the risk of impurity accumulation within the annular chamber 102 and ensuring the uniformity of the gas mixture within the annular chamber 102.
[0046] like Figure 3 As shown, the second air inlet 105 is positioned near the first end of the mixing body 100 as the air inlet end 1054, and the second air inlet 105 is positioned near the second end of the mixing body 100 as the air outlet end 1051. The air inlet end 1054 of the second air inlet 105 can extend beyond the end face of the first end of the mixing body 100. Meanwhile, as... Figure 5 As shown, a plurality of air distribution holes 1052 are evenly spaced along the circumference at the outlet end 1051 of the second air inlet 105, so that after the gas enters the second air inlet 105 from the inlet end 1054, it can be discharged to the spray plate of the spray assembly through the air distribution holes 1052 at the outlet end 1051, thereby improving the uniformity of the gas discharged through the second air inlet 105.
[0047] For example, the outlet end 1051 may extend out of the annular chamber 102 to prevent reverse gas flow. The end of the outlet end 1051 may be one of the following shapes: frustum, hemisphere, truncated pyramid, planar, or conical. The specific shape may be determined according to the selection of the spray assembly connected to the rear end of the gas mixing structure.
[0048] To ensure the uniformity of gas entering the spray plate from the multiple air distribution holes 1052 at the air outlet 1051, such as Figure 3 and Figure 4 As shown, a uniform air distribution channel 1053 is provided at the air outlet 1051, and the uniform air distribution channel 1053 is connected to the air distribution hole 1052. At the same time, the uniform air distribution channel 1053 is oriented towards the spray plate to ensure the uniformity of gas entering the spray plate through the multiple air distribution holes 1052 at the air outlet 1051, and to control the gas outlet direction so as to cooperate with the back-end accessories to achieve different effects.
[0049] For example, the aperture of the gas distribution channel 1053 may be smaller than the aperture of the second air inlet 105 to increase the resistance to reverse gas flow and reduce the possibility of process gas backflow.
[0050] For example, the flow cross section of the gas equalization channel 1053 can be a constant cross section in the direction of gas flow. Of course, the flow cross section of the gas equalization channel 1053 can also be a tapered cross section to further increase the resistance to reverse gas flow and reduce the risk of reverse flow of process gas.
[0051] This application also discloses a spray assembly, including a spray plate, a top plate, and a gas mixing structure as disclosed in the above embodiments. Therefore, the spray assembly has all the technical effects of the above-mentioned gas mixing structure, which will not be repeated here.
[0052] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0053] Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.
[0054] Unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.
[0055] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.
Claims
1. A gas-mixing structure, characterized in that, include: A mixing body (100) is used to connect to a spray assembly. The mixing body (100) has a first end and a second end disposed opposite to each other. A cavity is provided inside the mixing body (100). A partition (101) is provided inside the cavity. The partition (101) extends from the first end of the mixing body (100) toward the second end of the mixing body (100). An annular chamber (102) is restricted between the partition (101) and the inner wall of the cavity. The cross-sectional area of the annular chamber (102) increases from the first end of the mixing body (100) toward the second end of the mixing body (100). At least two first air inlets (103) are provided on the mixing body (100). The at least two first air inlets (103) are connected to the annular chamber (102) through an air inlet channel (104). The air inlet channel (104) is connected circumferentially along the annular chamber (102).
2. The gas mixing structure according to claim 1, characterized in that, The cross-sectional area of the partition (101) gradually decreases from the first end of the gas mixing body (100) toward the second end of the gas mixing body (100).
3. The gas mixing structure according to claim 1, characterized in that, The mixing body (100) is also provided with a second air inlet (105), which is located at the center of the partition (101) and extends from one end of the partition (101) to the other end. The second air inlet (105) is isolated from the annular chamber (102).
4. The gas mixing structure according to claim 3, characterized in that, The second air inlet (105) is located near the second end of the mixing body (100) as the air outlet (1051), and the air outlet (1051) is provided with a plurality of air distribution holes (1052) evenly spaced along the circumference.
5. The gas mixing structure according to claim 4, characterized in that, The air outlet (1051) is provided with an air distribution channel (1053), which is connected to the air distribution hole (1052). The air distribution channel (1053) is arranged in the direction of the spray plate of the spray assembly.
6. The gas mixing structure according to claim 5, characterized in that, The flow cross section of the gas equalization channel (1053) is constant or gradually narrowing along the gas flow direction.
7. The gas mixing structure according to claim 4, characterized in that, The end of the air outlet (1051) is one of the following shapes: frustum, hemisphere, prismatic, planar, or conical.
8. The gas mixing structure according to claim 4, characterized in that, The air outlet (1051) extends out of the annular chamber (102).
9. The gas mixing structure according to claim 3, characterized in that, The second air inlet (105) is located near the first end of the mixing body (100) as the air inlet end (1054), which extends out of the end face of the first end of the mixing body (100).
10. The gas mixing structure according to any one of claims 1 to 9, characterized in that, The first air inlet (103) is located near the first end of the mixing body (100).
11. A spray assembly, characterized in that, Includes the gas-mixing structure as described in any one of claims 1 to 10.