Mocvd multi-machine mo source supply system

Abstract

The utility model relates to the technical field of electronic new material, provide a kind of MOCVD multi-machine MO source supply system, by setting up gas pipeline by nitrogen to MO source bottle form the TMG carrier gas carrying trimethyl gallium, trimethyl gallium passes through TMG carrier gas and enters the condenser in water tank by gas pipeline, part TMG carrier gas after condensation by condenser enters MOCVD machine platform by supply pipeline, so as to realize the supply of MO source to MOCVD machine platform, and the trimethyl gallium condensed into liquid is refluxed into MO source bottle by reflux pipeline and continues to use.Water tank is pumped by water pump by being communicated with machine platform sink, water tank is arranged in machine platform sink by overflow port, and water is arranged in machine platform sink, so as to realize the water circulation in water tank, to ensure that the water temperature in water tank reaches the requirement, the circulation of water tank water can be realized by the sink of MOCVD machine platform, energy consumption is reduced, and water flow indicator is arranged to observe and monitor water flow condition.

Description

Technical Field

[0001] This utility model relates to the field of electronic new materials technology, and in particular to a MOCVD multi-machine MO source supply system. Background Technology

[0002] In recent years, the use of trimethylgallium (TMG) in MOCVD epitaxy has been increasing year by year. The water tanks equipped with MOCVD machines are only matched with 20L steel cylinders, leading to an increase in the frequency of source replacement from twice per year to six times per year. The quality fluctuations caused by frequent source cylinder replacements negatively impact cost control. Therefore, larger-scale TMG source solutions have significant market potential.

[0003] Chinese invention patent CN118932313A provides a continuous MO source supply device that replenishes the source by the vapor pressure difference formed by the temperature difference. However, this solution is only applicable to application scenarios where the temperature difference between the water tank and the ambient temperature is less than 5°C. When the temperature difference exceeds 5°C, this solution cannot be applied.

[0004] Chinese invention patent CN106006525A discloses a safe delivery device for trimethylaluminum, which delivers the liquid source to the source bottle of the machine through a pipeline to achieve continuous supply. However, it still cannot effectively solve the problem that trimethylgallium cannot be used directly when the temperature difference between the epitaxial process temperature and the ambient temperature is greater than 5°C.

[0005] Trimethylgallium (TMG) is primarily introduced into the epitaxial furnace cavity via carrier gas. Due to variations in the manufacturing process, the temperature of the TMG carrier gas is strictly controlled. Current methods involve immersing the TMG source bottle in a constant-temperature water bath for a certain period before introducing the carrier gas. However, the water bath space within the machine is limited. Conventional TMG cylinders have a volume of 1000ml-20000ml; cylinders exceeding 20000ml cannot fit into the machine's built-in water bath. The constant-temperature water bath cooling solution presents several challenges when using large-capacity cylinders. Firstly, overcoming the buoyancy generated by the empty cylinder cavity in later stages of use is crucial. For example, a 20000ml cylinder can weigh over 30kg. Secondly, the total weight of a cylinder filled with liquid source exceeds 50kg, making handling and disassembly within the limited space extremely difficult.

[0006] To address the aforementioned issues, this invention aims to provide a solution suitable for various trimethylgallium process temperatures, enabling long-term operation, centralized power supply for multiple machines, and solving the problem of assembly and disassembly within limited space. Utility Model Content

[0007] In view of this, the purpose of this utility model is to propose a MOCVD multi-machine MO source supply system, which solves the problems in the background art.

[0008] To achieve the above objectives, this utility model provides a MOCVD multi-machine MO source supply system, comprising an MO source bottle and a water tank. One end of the MO source bottle is connected to an inlet pipe, and the other end of the inlet pipe is connected to a nitrogen inlet to supply nitrogen to the MO source bottle. One end of the MO source bottle is connected to an outlet pipe on its surface, and the other end of the MO source bottle is connected to a return pipe. A condenser tube is installed inside the water tank. The other end of the outlet pipe is connected to one end of the condenser tube, and the other end of the condenser tube is connected to a three-way valve. The other two ends of the three-way valve are respectively connected to the other end of the return pipe and one end of the supply pipe. The other end of the supply pipe is connected to the MOCVD machine.

[0009] Preferably, a backflow preventer is provided on the return pipe. The backflow preventer includes a transparent, conical cylinder. One end of the conical cylinder tip is close to the water tank, and the other end is close to the MO source bottle. A blocking ball is provided inside the cylinder. The blocking ball is sized to match the tip of the cylinder tip to block that tip.

[0010] Preferably, both the return pipe and the intake pipe extend into the bottom of the MO source bottle, and the return pipe is in a U-shape at the bottom of the MO source bottle.

[0011] Preferably, the air inlet pipe, air outlet pipe, and return pipe are each equipped with two valves.

[0012] Preferably, VCR connectors are provided at the connection points of the air inlet pipe, air outlet pipe, and return pipe with the MO source bottle.

[0013] Preferably, a water pump is connected to the top of the water tank, and the water pump is connected to the water tank of the machine through a pipe, and a water flow indicator is installed on the pipe.

[0014] Preferably, the water tank has an overflow port on its side, and the overflow port is connected to the machine's water tank through a pipe.

[0015] Preferably, the air inlet pipe and the air outlet pipe are connected by a pipe, and a connecting valve is provided on the pipe; the air inlet pipe and the return pipe are connected by a pipe, and a connecting valve is provided on the pipe.

[0016] The beneficial effects of this invention are as follows: This invention uses an inlet pipe to introduce nitrogen into the MO source bottle to form a TMG carrier gas carrying trimethylgallium. The trimethylgallium then passes through the TMG carrier gas and enters the condenser tube in the water tank via the outlet pipe. A portion of the condensed TMG carrier gas then enters the MOCVD machine through the supply pipe, thus achieving the supply of the MO source to the MOCVD machine. The condensed trimethylgallium, which becomes liquid, flows back into the MO source bottle through the return pipe for continued use.

[0017] The water tank is connected to the machine's water tank and pumped by a water pump. The water tank then discharges water back into the machine's water tank through an overflow port, thus achieving water circulation within the water tank to ensure that the water temperature in the tank reaches the required level. The water tank's water circulation can be achieved through the MOCVD machine's water tank, eliminating the need for other equipment to supply cold water, reducing energy consumption. Furthermore, a water flow indicator is installed to observe and monitor the water flow.

[0018] A backflow preventer is installed on the return pipe so that the liquid can only flow from one end of the conical cylinder to the other, thus flowing into the MO source bottle. Once backflow occurs, the stop ball inside the cylinder will be pushed to the tip of the cylinder to block it, thereby preventing backflow. In addition, the return pipe is located at the bottom of the MO source bottle with a 120° U-shaped bend to prevent the gas from directly short-circuiting into the machine when the gas in the MO source bottle is almost empty.

[0019] The inlet, outlet, and return pipes are each equipped with two valves to control their opening and closing. VCR connectors are also installed on all three pipes to ensure a tight seal between the pipes and the MO source bottle. Furthermore, the inlet, outlet, and return pipes are all connected together and opened and closed via connecting valves, allowing for displacement operations. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the system of this utility model;

[0022] The diagram is marked as follows:

[0023] 1-MO source bottle, 2-Inlet pipe, 3-Outlet pipe, 4-Return pipe, 5-Valve 1, 6-Valve 2, 7-Valve 3, 8-Condenser pipe, 9-Supply pipe, 10-Three-way valve, 11-Valve 4, 12-Valve 5, 13-Valve 6, 14-Connecting valve 1, 15-Connecting valve 2, 16-Water tank, 17-Backflow preventer, 18-120° U-bend, 19-Water pump, 20-Water flow indicator. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0025] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0026] like Figure 1 As shown, an MOCVD multi-machine MO source supply system includes an MO source bottle 1 and a water tank 16. One end of the MO source bottle 1 is connected to an inlet pipe 2, and the other end of the inlet pipe 2 is connected to a nitrogen port to supply nitrogen to the MO source bottle 1. One end of the MO source bottle 1 is connected to an outlet pipe 3, and the other end of the MO source bottle 1 is connected to a return pipe 4. A condenser tube 8 is installed in the water tank 16. The other end of the outlet pipe 3 is connected to one end of the condenser tube 8, and the other end of the condenser tube 8 is connected to a three-way valve 10. The other two ends of the three-way valve 10 are respectively connected to the other end of the return pipe 4 and one end of the supply pipe 9. The other end of the supply pipe 9 is connected to the MOCVD machine. By setting up an inlet pipe 2, nitrogen is introduced into the MO source bottle 1 to form a TMG carrier gas carrying trimethylgallium. The trimethylgallium is then introduced into the condenser pipe 8 in the water tank 16 through the outlet pipe 2 via the TMG carrier gas. A portion of the TMG carrier gas, after being condensed by the condenser pipe 8, enters the MOCVD machine through the supply pipe 9. This achieves the supply of the MO source to the MOCVD machine. The trimethylgallium, after being condensed into liquid, flows back into the MO source bottle 1 through the return pipe 4 for continued use.

[0027] A water pump 19 is connected to the top of the water tank 16. The water pump 19 is connected to the machine's water tank via a pipe, and a water flow indicator 20 is installed on this pipe. An overflow port is located on the side of the water tank 16, which is also connected to the machine's water tank via a pipe. A temperature sensor is installed inside the water tank 16. The water pump 19 is a DC 12V magnetic levitation pump with a head of 2-9 meters and a flow rate of 1200 L / h. Water is pumped from the water tank 16 via the water pump 19, and then discharged back into the machine's water tank through the overflow port. This achieves water circulation within the water tank 16, ensuring the water temperature reaches the required level. The water tank 16's water circulation is achieved through the MOCVD machine's water tank, reducing energy consumption. The water flow indicator 20 monitors the water flow. The temperature sensor detects the water temperature, which in turn controls the operation of the water pump 19 via a controller, ensuring the water temperature remains at the required level.

[0028] A backflow preventer 17 is installed on the return pipe 4. The backflow preventer 17 includes a transparent, conical cylinder. One end of the conical cylinder is close to the water tank 16, and the other end is close to the MO source bottle 1. A blocking ball is installed inside the cylinder, and the size of the blocking ball matches that of the pointed end of the cylinder to block that end. Both the return pipe 4 and the air inlet pipe 2 extend into the bottom of the MO source bottle 1. The return pipe 4 is located at the bottom of the MO source bottle 1 with a 120° U-shaped bend 18. A backflow preventer 17 is installed on the return pipe 5, so that the liquid can only flow from one end of the conical cylinder tip of the backflow preventer 17 to the other end, thus flowing into the MO source bottle 1. Once backflow occurs, the stop ball inside the cylinder will be pushed to the tip of the cylinder to block it, thereby preventing backflow. In addition, the return pipe 5 is located at the bottom of the MO source bottle 1 with a 120° U-shaped bend 18 to prevent the gas from directly short-circuiting into the machine when the gas in the MO source bottle 1 is almost empty.

[0029] The intake pipe 2, located outside the MO source bottle 1, is equipped with valves 5 and 11. The outlet pipe 3 is equipped with valves 6 and 12. The return pipe 4, located outside the MO source bottle 1, is equipped with valves 7 and 13. The intake pipe 2 and the outlet pipe 3 are connected by a connecting valve 14, which is located between valves 6 and 12, and between valves 5 and 11. The intake pipe 2 and the return pipe 4 are connected by a connecting valve 15, which is located between valves 5 and 11, and between valves 7 and 13. Thus, when air is intaked through the intake pipe 2, connecting valves 14 and 25 are closed, while valves 5, 4, 6, 12, 7, and 13 are opened to supply trimethylgallium. When the supply is not in operation, open connecting valve 14 and connecting valve 25 to connect the inlet pipe 2, outlet pipe 3 and return pipe 4, thereby introducing nitrogen into the three pipes to replace the pipes.

[0030] VCR connectors are provided at the connection points of the air inlet pipe 2, air outlet pipe 3, and return pipe 4 with the MO source bottle 1 to ensure the airtightness of the connection between the pipes and the MO source bottle.

[0031] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this utility model is limited to these examples; within the framework of this utility model, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of this utility model as described above, which are not provided in the details for the sake of brevity. Any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A MOCVD multi-machine MO source supply system, comprising a MO source bottle (1) and a water tank (16), characterized in that, The MO source bottle (1) is inserted into one end of an air inlet pipe (2), and the other end of the air inlet pipe (2) is connected to a nitrogen port to supply nitrogen to the MO source bottle (1). The surface of the MO source bottle (1) is connected to one end of an air outlet pipe (3), and the MO source bottle (1) is inserted into one end of a return pipe (4). The water tank (16) is equipped with a condenser pipe (8), and the other end of the air outlet pipe (3) is connected to one end of the condenser pipe (8). The other end of the condenser pipe (8) is connected to a three-way valve (10). The other two ends of the three-way valve (10) are respectively connected to the other end of the return pipe (4) and one end of the supply pipe (9). The other end of the supply pipe (9) is connected to the MOCVD machine.

2. The MOCVD multi-machine MO source supply system according to claim 1, characterized in that, A backflow preventer (17) is provided on the backflow pipe (4). The backflow preventer (17) includes a transparent conical cylinder. One end of the conical cylinder tip is close to the water tank (16), and the other end is close to the MO source bottle (1). A blocking ball is provided inside the cylinder. The size of the blocking ball matches that of one end of the cylinder tip to block one end of the cylinder tip.

3. The MOCVD multi-machine MO source supply system according to claim 1, characterized in that, The return pipe (4) and the intake pipe (2) both extend into the bottom of the MO source bottle (1). The return pipe (4) is located at the bottom of the MO source bottle (1) with a 120° U-shaped bend (18).

4. The MOCVD multi-machine MO source supply system according to claim 1, characterized in that, The air inlet pipe (2), air outlet pipe (3), and return pipe (4) are each equipped with two valves.

5. The MOCVD multi-machine MO source supply system according to claim 1, characterized in that, VCR connectors are provided at the connection points of the air inlet pipe (2), air outlet pipe (3), and return pipe (4) with the MO source bottle (1).

6. The MOCVD multi-machine MO source supply system according to claim 1, characterized in that, The top of the water tank (16) is connected to a water pump (19), which is connected to the machine water tank through a pipe. A water flow indicator (20) is installed on the pipe.

7. The MOCVD multi-machine MO source supply system according to claim 6, characterized in that, The water tank (16) has an overflow port on its side, which is connected to the machine's water tank via a pipe.

8. The MOCVD multi-machine MO source supply system according to claim 1, characterized in that, The intake pipe (2) and the outlet pipe (3) are connected by a pipe, and a connecting valve (14) is provided on the pipe; the intake pipe (2) and the return pipe (4) are connected by a pipe, and a connecting valve (15) is provided on the pipe.

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