A single crystal furnace consumption reduction gas guide cylinder

Abstract

The utility model discloses a single crystal furnace consumption reduction air guide cylinder, its characterized in that, including air guide cylinder body, the air guide cylinder body includes first air guide channel and second air guide channel, first air guide channel is connected with second air guide channel, first air guide channel is air inlet, second air guide channel is air outlet, first air guide channel is double -deck separation structure and is provided with hole, and the hole is set up in first air guide channel inside in staggered orientation opposition, the utility model discloses special flow guide structure, reduces the airflow turbulence, improves the distribution uniformity of inert gas in the furnace, improves the volatile material discharge efficiency, and compared with traditional air guide cylinder can reduce the energy consumption, reduces the crystal defect, improves the yield.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a single crystal furnace energy-saving gas guide tube. Background Technology

[0002] Monocrystalline silicon, also known as silicon single crystal, is a semiconductor material. A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon using a graphite heater in an inert gas environment (mainly nitrogen and helium) and grows dislocation-free single crystals using the Czochralski method. The diameter of the single crystal during growth is affected by factors such as temperature, pulling speed and rotation speed, crucible tracking speed and rotation speed, and the flow rate of the protective gas. Temperature primarily determines whether crystal formation occurs, while speed directly affects the intrinsic quality of the crystal, an effect that can only be detected after the single crystal is pulled out. A suitable thermal field with appropriate temperature distribution not only ensures smooth single crystal growth but also produces high-quality crystals. With the rapid increase in the production of N-type solar cells, especially TOPCon cells, the demand for N-type silicon wafers has increased dramatically, leading to a significant rise in demand. Because N-type silicon wafers have extremely high requirements for crystal quality and oxygen content, the manufacturing process of N-type solar cells involves many high-temperature stages, especially in the crystal pulling stage, where crystal quality control is extremely stringent. Intense convection occurs in high-temperature silicon solutions within quartz crucibles, causing oxygen atoms to dissolve and precipitate in concentric circles during high-temperature processing, impacting cell efficiency and yield. Therefore, reducing the oxygen content in monocrystalline silicon rods is crucial for ensuring product quality. Traditional monocrystalline technologies cannot meet these requirements, necessitating the development of new energy-saving technologies to reduce oxygen content and improve minority carrier lifetime and crystal quality.

[0003] Therefore, it is necessary to provide a gas guide tube for reducing energy consumption in a single crystal furnace to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this section is to outline some aspects of the embodiments of the present invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section, as well as in the abstract and title of the invention, to avoid obscuring the purpose of this section, the abstract and the title of the invention. Such simplifications or omissions shall not be used to limit the scope of the present invention.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a single crystal furnace energy-saving gas guide tube, characterized in that it includes a gas guide tube body, the gas guide tube body includes a first gas guide channel and a second gas guide channel, the first gas guide channel and the second gas guide channel are connected, the first gas guide channel is an air inlet, the second gas guide tube is an air outlet, the first gas guide channel is a double-layer separated structure and has holes, the holes are staggered and oppositely arranged inside the first gas guide channel.

[0006] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the holes are configured to be a plurality of holes.

[0007] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the opening diameter of the first gas guide channel is larger than the diameter of the second gas guide channel.

[0008] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the inner circumferential surface of the first gas guide channel is composed of a gas guide area and a protection area, and the gas guide area and the protection area are connected.

[0009] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the opening of the first gas guide channel is provided with outward flanges in all directions, and the thickness of the flanges is the same as the thickness of the first gas guide channel.

[0010] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the hole is a circular hole, and the circular holes are staggered in the gas guide area.

[0011] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the gas guide tube is made of stainless steel.

[0012] In a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, the first gas guide channel and the second gas guide channel have the same axial height.

[0013] As a preferred embodiment of the single crystal furnace energy-saving gas guide tube of this utility model, both the gas guide area and the protection area are provided with a smooth layer.

[0014] The beneficial effects of this utility model are as follows: This utility model adopts a special flow guiding structure to reduce airflow turbulence; improves the uniformity of inert gas distribution in the furnace; increases the efficiency of volatile matter discharge; and reduces energy consumption, reduces crystal defects, and increases the yield compared with traditional gas guide tubes. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0016] Figure 1 A schematic diagram of the structure of the single crystal furnace energy-saving gas guide tube according to an embodiment of this utility model;

[0017] Figure 2 A cross-sectional view of the single crystal furnace energy-saving gas guide tube according to an embodiment of this utility model;

[0018] Figure 3 A schematic diagram of the flanged gasket structure of the single crystal furnace energy-saving gas guide tube according to one embodiment of this utility model. Detailed Implementation

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0020] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0021] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0022] Furthermore, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0023] Example 1

[0024] Reference Figures 1-3The first embodiment of this utility model is a single crystal furnace energy-saving gas guide tube, characterized in that it includes a gas guide tube body 100, the gas guide tube body 100 includes a first gas guide channel 101 and a second gas guide channel 102, the first gas guide channel 101 and the second gas guide channel 102 are connected, the upper end opening of the first gas guide channel 101 is an air inlet 104, the lower end opening of the second gas guide channel 102 is an air outlet 105, the first gas guide channel 101 has a double-layer separation structure and is provided with holes 103, the holes 103 are arranged in a staggered orientation inside the first gas guide channel 101. Specifically, the first air guide channel 101 is shaped like a "trumpet", with the upper opening having a larger diameter than the lower opening. The second air guide channel 102 is shaped like a "cylinder" and is connected to the lower opening of the first air guide channel 101. The lower opening of the first air guide channel 101 has outward flanges on all four sides, with the thickness of the flanges being the same as the thickness of the first air guide channel 101, and the width of the flanges being 10-15cm. A round hole is provided on the flange, and the contact surface between the second air guide channel 102 and the first air guide channel 101 also has an outward flange. The size of the flange is the same as that of the flange on the first air guide channel 101, and a round hole is also provided on the flange. The flanges on the first air guide channel 101 and the second air guide channel 102 are the same size, and the positions of the round holes on the flanges are matched. Washers are provided at the flanges on the first air guide channel 101 and the second air guide channel 102, and the washers have openings. The positions of the openings are consistent with the positions on the two flanges. The first air guide channel 101 and the second air guide channel 102 are connected by bolts. Both the first air guide channel 101 and the second air guide channel 102 are made of stainless steel. The first air guide channel 101 adopts a double-layer separation design. The inner circumferential surface of the first air guide channel 101 is composed of an air guide area 106 and a protective area 107, and the air guide area 106 and the protective area 107 are connected. Both the gas guiding area 106 and the protective area 107 are provided with a smooth layer. This reduces airflow turbulence, improves the uniformity of inert gas distribution within the furnace, and increases the efficiency of volatile matter discharge. The holes are circular and staggered in the gas guiding area, with 3-8 holes in total. The upper and lower holes are staggered and opposite each other, altering the airflow, stabilizing the temperature field distribution, and achieving energy savings. The thermal uniformity of the gas guiding cylinder body 100 is improved by using a special stainless steel insulation material combination design. Through the rational design of the exhaust hole position and number, the temperature gradient in the hot zone can be precisely controlled. The first gas guiding channel 101 adopts a special flow guiding structure to reduce airflow turbulence, improve the uniformity of inert gas distribution within the furnace, and increase the efficiency of volatile matter discharge. The first gas guiding channel 101 and the second gas guiding channel 102 are axially aligned. The inner diameter of the air inlet 104 on the first air guide channel 101 is twice that of the air outlet 105 on the second air guide channel 102. The larger the ratio of the inlet and outlet cross-sectional areas, the greater the enthalpy drop and the greater the conversion rate.Meanwhile, a smooth layer is also provided on the inner wall of the second air guide channel 102. By providing a smooth layer on the inner wall of the first air guide channel 101 and the second air guide channel 102, the possibility of blockage on the inner wall can be reduced. Furthermore, since the inner wall of the second air guide channel 102 is more prone to blockage, the smoothness of the smooth layer of the second air guide channel 102 is greater than that of the smooth layer of the first air guide channel 101 to better avoid blockage on the inner wall of the second air guide channel 102.

[0025] In summary, this invention can reduce the energy consumption of the air guide tube, improve the quality of the crystal, reduce crystal defects, increase the yield, and significantly reduce production costs through overall energy saving.

[0026] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0027] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to the implementation of the present invention) may be omitted.

[0028] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0029] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A gas guide tube for reducing energy consumption in a single crystal furnace, characterized in that, The system includes a gas guide cylinder body (100), which includes a first gas guide channel (101) and a second gas guide channel (102). The first gas guide channel (101) is connected to the second gas guide channel (102). The first gas guide channel (101) is an air inlet (104), and the second gas guide channel (102) is an air outlet (105). The first gas guide channel (101) has a double-layer separation structure and is provided with holes (103). The holes are arranged in a staggered manner inside the first gas guide channel (101).

2. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The holes (103) are configured to be a plurality of ones.

3. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The opening diameter of the first air guide channel (101) is larger than the diameter of the second air guide channel (102).

4. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The inner circumferential surface of the first air guide channel (101) is composed of an air guide area (106) and a protection area (107), and the air guide area (106) and the protection area (107) are connected.

5. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The opening of the first air guide channel (101) is provided with outward flanges (108) around its perimeter, and the thickness of the flanges is the same as the thickness of the first air guide channel (101).

6. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The hole (103) is a circular hole, and the circular holes are staggered in the air guiding area.

7. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The air guide cylinder body (100) is made of stainless steel.

8. The single crystal furnace energy-saving gas guide tube according to claim 1, characterized in that, The first air guide channel (101) and the second air guide channel (102) are aligned axially.

9. The single crystal furnace energy-saving gas guide tube according to claim 4, characterized in that, Both the air guiding area (106) and the protective area (107) are provided with a smooth layer.

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