Low coupling high precision MEMS gyroscope

Abstract

The utility model relates to the technical field of MEMS gyroscopes, and discloses a low-coupling high-precision MEMS gyroscope, comprising: two drive frames distributed along a first direction; two coupling mass blocks arranged in the two drive frames respectively; orthogonal correction electrodes, four orthogonal correction electrodes being arranged on each coupling mass block; two detection mass blocks located between the two coupling mass blocks, each detection mass block being rigidly connected to a substrate along the first direction and elastically connected along a second direction; detection electrodes, two detection electrodes being arranged on each detection mass block in anti-symmetrical distribution relative to the first direction; and a first inclined U-shaped beam capable of driving the two detection mass blocks to make reverse reciprocating motion along the second direction in a detection mode. The low-coupling high-precision MEMS gyroscope disclosed by the utility model has low coupling error and high detection precision, and widens the application scenarios of the high-precision MEMS gyroscope.

Description

Technical Field

[0001] This utility model relates to the field of MEMS gyroscope technology, and in particular to a low-coupling, high-precision MEMS gyroscope. Background Technology

[0002] Traditional single-axis MEMS gyroscopes detect angular velocity based on the Coriolis effect, and are widely used in inertial sensing due to their simple structure and good process compatibility. However, existing single-axis MEMS gyroscopes suffer from significant coupling errors, specifically: first, the mechanical coupling between the driving and sensing modes generates orthogonal coupling errors; second, asymmetric sensing forces introduce in-phase coupling errors; and third, mechanical coupling between in-phase and out-of-phase modes also generates interference signals. The combined effect of these coupling error sources severely impacts the gyroscope's detection accuracy. Therefore, it is urgent to optimize the structure to reduce coupling errors and improve detection accuracy, thereby meeting the application requirements of high-precision inertial sensing. Utility Model Content

[0003] Based on the above, the purpose of this utility model is to provide a low-coupling, high-precision MEMS gyroscope with low coupling error and high detection accuracy, thereby broadening the application scenarios of this high-precision MEMS gyroscope.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A low-coupling, high-precision MEMS gyroscope, defining a first direction, a second direction, and a third direction that are mutually perpendicular, includes:

[0006] Two drive frames are distributed along the first direction, and each drive frame is elastically connected to the substrate along the second direction and is provided with a placement groove.

[0007] Two coupled mass blocks are distributed along the first direction and are respectively disposed in the two placement slots. The coupled mass blocks can reciprocate along the second direction with the drive frame. The two coupled mass blocks are configured to reciprocate in opposite directions along the first direction when the angular velocity in the third direction is detected.

[0008] The orthogonal correction electrodes are provided on each of the coupled mass blocks, and the four orthogonal correction electrodes are symmetrically distributed with respect to the first direction and anti-symmetrically distributed with respect to the second direction.

[0009] Two detection mass blocks are located between the two coupled mass blocks and the two detection mass blocks are distributed along the second direction. Each detection mass block is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection mass block is connected to the two coupled mass blocks.

[0010] Each of the detection mass blocks is provided with two detection electrodes that are antisymmetrically distributed relative to the first direction.

[0011] The first inclined U-shaped beam has one end connected to the coupling mass block and the other end connected to the detection mass block. The first inclined U-shaped beam can drive the two detection mass blocks to perform reciprocating motion in opposite directions along the second direction in the detection mode.

[0012] As a preferred embodiment of a low-coupling, high-precision MEMS gyroscope, the first inclined U-shaped beam includes a first crossbeam and at least two spaced-apart first inclined beams. One end of each first inclined beam is connected to the first crossbeam, the other end of at least one first inclined beam is connected to the detection mass block, and the other end of at least one first inclined beam is connected to the coupling mass block.

[0013] As a preferred embodiment of a low-coupling high-precision MEMS gyroscope, the low-coupling high-precision MEMS gyroscope further includes a connected second inclined U-shaped beam and a first driving coupling vertical beam, the first driving coupling vertical beam being connected to the driving frame, and the second inclined U-shaped beam being connected to the coupling mass block.

[0014] As a preferred embodiment of a low-coupling, high-precision MEMS gyroscope, there are four first inclined U-shaped beams, four second inclined U-shaped beams, and four first driving coupling vertical beams. Each of the coupling mass blocks corresponds to two first inclined U-shaped beams, two second inclined U-shaped beams, and two first driving coupling vertical beams.

[0015] As a preferred embodiment of a low-coupling, high-precision MEMS gyroscope, the second inclined U-beam includes a second crossbeam and at least two spaced-apart second inclined beams. The same end of each second inclined beam is connected to the second crossbeam, the other end of at least one second inclined beam is connected to the other end of the first drive coupling vertical beam, and the other end of at least one second inclined beam is connected to the coupling mass block.

[0016] As a preferred embodiment of a low-coupling, high-precision MEMS gyroscope, the low-coupling, high-precision MEMS gyroscope further includes a central anchor point, a first detection coupling elastic beam, and a first detection connection elastic beam. The detection coupling elastic beam is deformable along the second direction, with one end connected to one of the detection mass blocks and the other end connected to another detection mass block. The first detection connection elastic beam is deformable along the second direction, with one end connected to the central anchor point and the other end connected to the detection mass block.

[0017] As a preferred embodiment of a low-coupling high-precision MEMS gyroscope, the low-coupling high-precision MEMS gyroscope further includes a first anchor point, a driving elastic beam, and a second driving coupling vertical beam. The first anchor point is fixed on the substrate. The driving elastic beam is deformable along the second direction, with one end connected to the first anchor point and the other end connected to the driving frame. One end of the second driving coupling vertical beam is connected to the driving frame, and the other end is connected to the coupling mass block.

[0018] As a preferred embodiment of a low-coupling high-precision MEMS gyroscope, the low-coupling high-precision MEMS gyroscope further includes a second anchor point, a third anchor point, and two drive rotating beams. The two drive rotating beams are distributed along the second direction and each drive rotating beam is located between the two drive frames. Each drive rotating beam is connected to the second anchor point and the third anchor point, and the drive rotating beam is capable of rotating along the third direction. The drive rotating beam is elastically connected to the drive frame.

[0019] As a preferred embodiment of a low-coupling high-precision MEMS gyroscope, the low-coupling high-precision MEMS gyroscope further includes a second detection connection elastic beam, which is deformable along the second direction and has one end connected to the second anchor point and the other end connected to the detection mass block.

[0020] As a preferred embodiment of a low-coupling, high-precision MEMS gyroscope, each of the driving rotation beams corresponds to a second anchor point and a third anchor point, and each driving rotation beam includes two driving rotation vertical beams, one driving rotation horizontal beam, and two driving rotation elastic beams. The two driving rotation vertical beams are respectively disposed on both sides of the driving rotation horizontal beam along the second direction and are both connected to the middle of the driving rotation horizontal beam. One driving rotation vertical beam is connected to the second anchor point, and the other driving rotation vertical beam is connected to the third anchor point. The two driving rotation elastic beams are both deformable along the first direction and are respectively disposed at both ends of the driving rotation horizontal beam along the first direction. One driving rotation elastic beam is connected to one driving frame, and the other driving rotation elastic beam is connected to the other driving frame.

[0021] The beneficial effects of this utility model are as follows:

[0022] The low-coupling, high-precision MEMS gyroscope disclosed in this invention features an added orthogonal correction electrode that can suppress orthogonal coupling signals generated between the driving mode and the detection mode due to mechanical coupling, thereby reducing coupling errors. This arrangement not only suppresses the additional DC force that may be introduced by the comb teeth of the orthogonal correction electrode, but also the additional DC torque that may be introduced by the comb teeth of the orthogonal correction electrode. Furthermore, the two detection electrodes on each detection mass block can suppress the changes in detection capacitance introduced by the unidirectional movement of the detection mass block, as well as the changes in detection capacitance introduced by the rotation of the detection mass block, thereby reducing errors introduced by interference mode coupling and improving the detection accuracy of this high-precision MEMS gyroscope. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of a low-coupling, high-precision MEMS gyroscope provided in a specific embodiment of this utility model;

[0025] Figure 2 This is a partial structural schematic diagram of a low-coupling, high-precision MEMS gyroscope provided in a specific embodiment of this utility model;

[0026] Figure 3 This is a schematic diagram of the center anchor point, the first detection connection elastic beam, the first detection coupling elastic beam, and the second detection coupling elastic beam of the low-coupling high-precision MEMS gyroscope provided in a specific embodiment of this utility model.

[0027] Figure 4 This is a schematic diagram of a low-coupling, high-precision MEMS gyroscope in driving mode provided by a specific embodiment of this utility model;

[0028] Figure 5 This is a schematic diagram of a low-coupling, high-precision MEMS gyroscope in detection mode provided in a specific embodiment of this utility model.

[0029] In the picture:

[0030] 11. Drive frame; 12. Drive elastic beam; 13. First drive coupling vertical beam; 14. Drive electrode; 15. Drive detection electrode; 16. Second drive coupling vertical beam;

[0031] 21. Coupled mass block; 22. Orthogonal correction electrode;

[0032] 31. Detection mass block; 32. Detection electrode;

[0033] 41. First inclined U-shaped beam; 411. First crossbeam; 412. First inclined beam; 42. Second inclined U-shaped beam; 421. Second crossbeam; 422. Second inclined beam;

[0034] 51. Central anchor point; 52. First anchor point; 53. Second anchor point; 54. Third anchor point;

[0035] 61. First detection of the connecting elastic beam; 62. First detection of the coupling elastic beam; 63. Second detection of the connecting elastic beam; 64. Second detection of the coupling elastic beam;

[0036] 7. Drive the rotating beam; 71. Drive the rotating vertical beam; 72. Drive the rotating horizontal beam; 73. Drive the rotating elastic beam. Detailed Implementation

[0037] To make the technical problems solved by this utility model, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0038] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0039] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] This embodiment provides a low-coupling, high-precision MEMS gyroscope, defining a first direction, a second direction, and a third direction that are perpendicular to each other, such as... Figures 1 to 5 As shown, the system includes two drive frames 11, two coupling mass blocks 21, orthogonal correction electrodes 22, two detection mass blocks 31, detection electrodes 32, and a first inclined U-shaped beam 41. The two drive frames 11 are distributed along a first direction, and each drive frame 11 is elastically connected to the substrate along a second direction and has a placement slot. The two coupling mass blocks 21 are distributed along the first direction and are respectively placed in the two placement slots. The coupling mass blocks 21 can reciprocate along the second direction with the drive frames 11. When the two coupling mass blocks 21 are configured to detect the angular velocity in the third direction, they reciprocate in the opposite direction along the first direction. Each coupling mass block 21 has four orthogonal correction electrodes 22, which are symmetrically distributed with respect to the first direction. The two detection mass blocks 31 are antisymmetrically distributed relative to the second direction. They are located between the two coupling mass blocks 21 and are distributed along the second direction. Each detection mass block 31 is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection mass block 31 is connected to the two coupling mass blocks 21. Each detection mass block 31 is provided with two detection electrodes 32 antisymmetrically distributed relative to the first direction. The two detection electrodes 32 are arranged on the same detection mass block 31 along the second direction. One end of the first inclined U-shaped beam 41 is connected to the coupling mass block 21 and the other end is connected to the detection mass block 31. In the detection mode, the two detection mass blocks 31 reciprocate in opposite directions along the second direction under the drive of the first inclined U-shaped beam 41.

[0041] like Figure 1As shown, in this embodiment, the two driving frames 11 have the same mass and symmetrical structure, the two coupled mass blocks 21 have the same mass and symmetrical structure, and the two detection mass blocks 31 have the same mass and symmetrical structure. This low-coupling high-precision MEMS gyroscope can ensure that the force on the two coupled mass blocks 21 is simultaneously transmitted to the detection mass block 31, thereby ensuring that the force on the two detection mass blocks 31 is ultimately the same, ensuring the consistency of detection, reducing the in-phase coupling error introduced by the low-coupling high-precision MEMS gyroscope due to unequal detection forces, and improving the differential effect of the detection electrode 32, thereby further increasing the accuracy and sensitivity of detection.

[0042] like Figure 1 As shown, in this embodiment, the first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. It should be noted that in other embodiments of this invention, the first direction can also be the Y-axis direction, in which case the second direction is the X-axis direction and the third direction is the Z-axis direction, depending on actual needs.

[0043] The low-coupling, high-precision MEMS gyroscope of this embodiment features an added orthogonal correction electrode 22 that can suppress orthogonal coupling signals generated between the driving mode and the detection mode due to mechanical coupling, thereby reducing coupling errors. This arrangement can not only suppress additional DC forces that may be introduced by the orthogonal correction electrode 22, but also suppress additional DC torques that may be introduced by the comb teeth of the orthogonal correction electrode 22. Furthermore, the two detection electrodes 32 on each detection mass block 31 can not only suppress changes in detection capacitance introduced by the unidirectional movement of the detection mass block 31, but also suppress changes in detection capacitance introduced by the rotation of the detection mass block 31, thereby reducing errors introduced by interference mode coupling and improving the detection accuracy of the high-precision MEMS gyroscope.

[0044] like Figure 1 As shown, the low-coupling high-precision MEMS gyroscope of this embodiment also includes a driving electrode 14 and a driving detection electrode 15. Both the driving electrode 14 and the driving detection electrode 15 are disposed on the driving frame 11. The driving electrode 14 can drive the driving frame 11 to move along the second direction, and the two driving frames 11 move synchronously in opposite directions. The driving detection electrode 15 on each driving frame 11 can reflect the movement of the driving frame 11, thereby facilitating the adjustment of the driving electrode 14 to drive the movement of the driving frame 11 and ensuring the stability of the driving frame 11 in the driving mode.

[0045] like Figure 2As shown, the first inclined U-shaped beam 41 in this embodiment includes a first crossbeam 411 and two spaced-apart and parallel first inclined beams 412. One end of each first inclined beam 412 is connected to the first crossbeam 411, the other end of one first inclined beam 412 is connected to the detection mass block 31, and the other end of the other first inclined beam 412 is connected to the coupling mass block 21. In other embodiments, the number of first inclined beams 412 is not limited to two in this embodiment, but can also be three or more spaced-apart. The same end of each first inclined beam 412 is connected to the first crossbeam 411, and the other end of at least one first inclined beam 412 is connected to the detection mass block 31, while the other ends of the remaining first inclined beams 412 are connected to the coupling mass block 21, depending on actual needs.

[0046] In this configuration, the line connecting the centroid of the driving frame 11 and the centroid of the coupled mass block 21 is called the centroid line. That is, the two centroids of the two driving frames 11 and the two centroids of the two coupled mass blocks 21 are all located on the centroid line. The centroid line extends along the first direction, and the two detection mass blocks 31 are symmetrically distributed relative to the centroid line. In the driving mode, the driving frame 11 with the above structure can perform linear reciprocating motion along the second direction without rotation, thereby ensuring that the coupled mass block 21 moves linearly accordingly. This ensures that the coupled mass block 21, under the angular velocity of the third direction, is subjected to a Coriolis force along the first direction without deflection. Ultimately, this allows the detection mass block 31 to move along the second direction under the steering action of the first inclined U-shaped beam 41, facilitating detection by the detection electrode 32.

[0047] like Figure 1 and Figure 2 As shown, the low-coupling, high-precision MEMS gyroscope of this embodiment also includes a second inclined U-shaped beam 42 and a first driving coupling vertical beam 13. The first driving coupling vertical beam 13 is connected to the driving frame 11, and the second inclined U-shaped beam 42 is connected to the coupling mass block 21. The first driving coupling vertical beam 13 can ensure that the coupling mass block 21 moves synchronously with the driving frame 11 along the second direction. The cooperation between the second inclined U-shaped beam 42 and the first inclined U-shaped beam 41 enables the coupling mass block 21 to drive the detection mass block 31 to move smoothly along the second direction when it moves along the first direction.

[0048] Specifically, such as Figure 2As shown, the second inclined U-shaped beam 42 includes a second crossbeam 421 and two spaced-apart and parallel second inclined beams 422. Each second inclined beam 422 has one end connected to the second crossbeam 421. The other end of one second inclined beam 422 is connected to the other end of the first driving coupling vertical beam 13, while the other end of the other second inclined beam 422 is connected to the coupling mass block 21. In other embodiments, the number of second inclined beams 422 can be three or more. Each second inclined beam has one end connected to the second crossbeam 421, with at least one second crossbeam 421 connected to the other end of the first driving coupling vertical beam 13, while the other ends of the remaining second inclined beams 422 are connected to the coupling mass block 21, depending on actual needs.

[0049] like Figure 1 As shown, in this embodiment, there are four first inclined U-shaped beams 41 and four second inclined U-shaped beams 42. Each coupling mass block 21 corresponds to two first inclined U-shaped beams 41 and two second inclined U-shaped beams 42. The two first inclined U-shaped beams 41 and the two second inclined U-shaped beams 42 are all connected to the same coupling mass block 21.

[0050] like Figure 1 and Figure 3 As shown, the aforementioned low-coupling, high-precision MEMS gyroscope also includes four central anchor points 51, four first detection connection elastic beams 61, and one first detection coupling elastic beam 62. Each first detection connection elastic beam 61 corresponds to a central anchor point 51. The first detection connection elastic beam 61 can deform along the second direction. One end of each first detection connection elastic beam 61 is connected to the central anchor point 51, and the other end is connected to the detection mass block 31. The four central anchor points 51 and the four first detection connection elastic beams 61 can ensure that the detection mass block 31 moves smoothly along the second direction. The first detection coupling elastic beam 62 can deform along the second direction, and one end of it is connected to one detection mass block 31, and the other end is connected to another detection mass block 31, thus coupling the two detection mass blocks 31 together. Specifically, when the low-coupling high-precision MEMS gyroscope is subjected to a unidirectional detection force introduced by process error, the two detection mass blocks 31 move in the same direction. The first detection coupling elastic beam 62 can suppress the unidirectional movement of the two detection mass blocks 31, thereby reducing the displacement of the detection electrode 32 under the action of the unidirectional detection force and reducing the coupling error.

[0051] like Figure 1As shown, the low-coupling high-precision MEMS gyroscope of this embodiment also includes a first anchor point 52, a driving elastic beam 12, and a second driving coupling vertical beam 16. The first anchor point 52 is fixed on the substrate. The driving elastic beam 12 can deform along the second direction, and one end of it is connected to the first anchor point 52, and the other end is connected to the driving frame 11 to ensure that the driving frame 11 can move relative to the substrate along the second direction. One end of the second driving coupling vertical beam 16 is connected to the driving frame 11, and the other end is connected to the coupling mass block 21 to ensure that the coupling mass block 21 moves synchronously with the driving frame 11 along the second direction.

[0052] Specifically, there are eight first anchor points 52, eight driving elastic beams 12, and eight second driving coupling vertical beams 16. The eight first anchor points 52 correspond one-to-one with the eight driving elastic beams 12. Each driving frame 11 corresponds to four first anchor points 52, four driving elastic beams 12, and four second driving coupling vertical beams 16. The four first anchor points 52 are located at the four corners of the coupling mass block 21, and the four second driving coupling vertical beams 16 are connected to the four corners of the coupling mass block 21. This structure can ensure that the coupling mass block 21 moves with the driving frame 11 along the second direction in the driving mode, and also ensure that the coupling mass block 21 will not drive the driving frame 11 to move along the first direction in the detection mode, thus realizing the decoupling connection between detection and driving.

[0053] like Figure 1 As shown, the low-coupling, high-precision MEMS gyroscope of this embodiment also includes two second anchor points 53, two third anchor points 54, and two drive rotation beams 7. The two second anchor points 53 and the two third anchor points 54 are fixed on the substrate. The two drive rotation beams 7 are distributed along the second direction and each drive rotation beam 7 is located between two drive frames 11. Each drive rotation beam 7 is connected to a second anchor point 53 and a third anchor point 54. The second anchor point 53 and the third anchor point 54 are located on both sides of the drive rotation beam 7 along the second direction, and the drive rotation beam 7 can rotate along the third direction. The drive rotation beam 7 is elastically connected to the drive frame 11.

[0054] Specifically, each drive rotating beam 7 includes two drive rotating vertical beams 71, one drive rotating horizontal beam 72, and two drive rotating elastic beams 73. The two drive rotating vertical beams 71 are respectively arranged on both sides of the drive rotating horizontal beam 72 along the second direction and are both connected to the middle of the drive rotating horizontal beam 72. One drive rotating vertical beam 71 is connected to the second anchor point 53, and the other drive rotating vertical beam 71 is connected to the third anchor point 54. The two drive rotating elastic beams 73 are both deformable along the first direction and are respectively arranged at both ends of the drive rotating horizontal beam 72 along the first direction. One drive rotating elastic beam 73 is connected to a drive frame 11, and the other drive rotating elastic beam 73 is connected to another drive frame 11.

[0055] like Figure 1 As shown, the low-coupling, high-precision MEMS gyroscope of this embodiment also includes a second detection connection elastic beam 63. The second detection connection elastic beam 63 is deformable along the second direction, with one end connected to the second anchor point 53 and the other end connected to the detection mass block 31. The second detection connection elastic beam 63, in conjunction with the first detection connection elastic beam 61, enables the detection mass block 31 to move along the second direction in the detection mode, thus achieving smooth movement of the detection mass block 31 along the second direction.

[0056] In this embodiment, the angle between the first inclined beam 412 of the first inclined U-shaped beam 41 and the first direction is 40°, and the angle between the second inclined beam 422 of the second inclined U-shaped beam 42 and the first direction is also 40°. Furthermore, the first inclined beam 412 and the second inclined beam 422 are symmetrically arranged about the axis of symmetry along the second direction. It should be noted that in other embodiments of this utility model, the angle between the first inclined beam 412 and / or the second inclined beam 422 and the first direction is not limited to the 40° specified in this embodiment. It can be any angle between 30° and 45°, or other angles, as long as the first inclined U-shaped beam 41 and the second inclined U-shaped beam 42 can drive the detection mass block to move along the second direction. Specifically, it depends on the ratio of the total stiffness of the first detection connecting elastic beam 61 and the second detection connecting elastic beam 63 to the total stiffness of the second driving coupling vertical beam 16 and the first driving coupling vertical beam 13.

[0057] like Figure 3 As shown, this low-coupling, high-precision MEMS gyroscope also includes two second detection coupling elastic beams 64. One end of each second detection coupling elastic beam 64 is connected to the central anchor point 51, and the other end is connected to the middle of the first detection coupling elastic beam 62. The second detection coupling elastic beam 64 is a serpentine beam and can deform along the first direction. The second detection coupling elastic beam 64 can prevent the first detection coupling elastic beam 62 from colliding with the central anchor point 51, thus avoiding interference. The second detection coupling elastic beam 64 cooperates with the first detection coupling elastic beam 62 to jointly achieve the same-direction suppression function. The second detection coupling elastic beam 64 has greater stiffness in the second direction, but can rotate around the third direction.

[0058] In the driving mode, such as Figure 4 As shown, the driving electrode 14 drives the corresponding driving frame 11 to move along the Y-axis. The two driving frames 11 move synchronously in opposite directions, and the two driving rotating beams 7 rotate in opposite directions. The coupling mass block 21 moves synchronously under the drive of the second driving coupling vertical beam 16, so that the two coupling mass blocks 21 move in opposite directions along the Y-axis at the same time. The presence of the first inclined U-shaped beam 41 and the second inclined U-shaped beam 42 makes the detection mass block 31 not move with the coupling mass block 21 along the Y-axis.

[0059] In the detection mode, such as Figure 5As shown, when detecting the angular velocity in the Z-axis direction, the coupled mass block 21 reciprocates along the X-axis due to the Coriolis force in the X-axis direction. The two coupled mass blocks 21 move in opposite directions at the same time. Under the action of the first inclined U-beam 41, the detection mass block 31 moves along the Y-axis direction, and the two detection mass blocks 31 move in opposite directions. According to the simulation results, as long as the structure, material, and stiffness design of the first inclined U-beam 41, the second inclined U-beam 42, the first driving coupling vertical beam 13, the second driving coupling vertical beam 16, the first detection coupling elastic beam 62, the first detection connecting elastic beam 61, the second detection connecting elastic beam 63, and the second detection coupling elastic beam 64 are reasonable, the detection displacement of the detection mass block 31 can be greater than the displacement of the coupled mass block 21, thereby further improving the detection sensitivity of this low-coupling high-precision MEMS gyroscope.

[0060] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A low-coupled high-precision MEMS gyroscope, characterized by, Define the first, second, and third directions that are perpendicular to each other, including: Two drive frames are distributed along the first direction, and each drive frame is elastically connected to the substrate along the second direction and is provided with a placement groove. Two coupled mass blocks are distributed along the first direction and are respectively disposed in the two placement slots. The coupled mass blocks can reciprocate along the second direction with the drive frame. The two coupled mass blocks are configured to reciprocate in opposite directions along the first direction when the angular velocity in the third direction is detected. The orthogonal correction electrodes are provided on each of the coupled mass blocks, and the four orthogonal correction electrodes are symmetrically distributed with respect to the first direction and anti-symmetrically distributed with respect to the second direction. Two detection mass blocks are located between the two coupled mass blocks and the two detection mass blocks are distributed along the second direction. Each detection mass block is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection mass block is connected to the two coupled mass blocks. Each of the detection mass blocks is provided with two detection electrodes that are antisymmetrically distributed relative to the first direction. The first inclined U-shaped beam has one end connected to the coupling mass block and the other end connected to the detection mass block. The first inclined U-shaped beam can drive the two detection mass blocks to perform reciprocating motion in opposite directions along the second direction in the detection mode.

2. The low-coupling, high-precision MEMS gyroscope according to claim 1, characterized in that, The first inclined U-shaped beam includes a first crossbeam and at least two spaced-apart first inclined beams. One end of each first inclined beam is connected to the first crossbeam, and the other end of at least one first inclined beam is connected to the detection mass block, and the other end of at least one first inclined beam is connected to the coupling mass block.

3. The low-coupling, high-precision MEMS gyroscope according to claim 1, characterized in that, The low-coupling high-precision MEMS gyroscope also includes a second inclined U-shaped beam and a first driving coupling vertical beam connected together. The first driving coupling vertical beam is connected to the driving frame, and the second inclined U-shaped beam is connected to the coupling mass block.

4. The low-coupling, high-precision MEMS gyroscope according to claim 3, characterized in that, There are four first inclined U-shaped beams, four second inclined U-shaped beams and four first driving coupling vertical beams, and each of the coupling mass blocks corresponds to two first inclined U-shaped beams, two second inclined U-shaped beams and two first driving coupling vertical beams.

5. The low-coupling, high-precision MEMS gyroscope according to claim 3, characterized in that, The second inclined U-shaped beam includes a second crossbeam and at least two spaced-apart second inclined beams. The same end of each second inclined beam is connected to the second crossbeam. The other end of at least one second inclined beam is connected to the other end of the first driving coupling vertical beam, and the other end of at least one second inclined beam is connected to the coupling mass block.

6. The low-coupling, high-precision MEMS gyroscope according to claim 1, characterized in that, The low-coupling high-precision MEMS gyroscope further includes a central anchor point, a first detection coupling elastic beam, and a first detection connection elastic beam. The detection coupling elastic beam is deformable along the second direction, with one end connected to one of the detection mass blocks and the other end connected to another detection mass block. The first detection connection elastic beam is deformable along the second direction, with one end connected to the central anchor point and the other end connected to the detection mass block.

7. The low-coupling, high-precision MEMS gyroscope according to claim 1, characterized in that, The low-coupling high-precision MEMS gyroscope further includes a first anchor point, a driving elastic beam, and a second driving coupling vertical beam. The first anchor point is fixed on the substrate. The driving elastic beam can deform along the second direction and one end of it is connected to the first anchor point, and the other end is connected to the driving frame. One end of the second driving coupling vertical beam is connected to the driving frame, and the other end is connected to the coupling mass block.

8. The low-coupling, high-precision MEMS gyroscope according to claim 1, characterized in that, The low-coupling high-precision MEMS gyroscope further includes a second anchor point, a third anchor point, and two drive rotating beams. The two drive rotating beams are distributed along the second direction and each drive rotating beam is located between the two drive frames. Each drive rotating beam is connected to the second anchor point and the third anchor point, and the drive rotating beam is capable of rotating along the third direction. The drive rotating beam is elastically connected to the drive frame.

9. The low-coupling, high-precision MEMS gyroscope according to claim 8, characterized in that, The low-coupling high-precision MEMS gyroscope also includes a second detection connection elastic beam, which is deformable along the second direction and has one end connected to the second anchor point and the other end connected to the detection mass block.

10. The low-coupling, high-precision MEMS gyroscope according to claim 8, characterized in that, Each of the driving rotating beams corresponds to a second anchor point and a third anchor point, and each driving rotating beam includes two driving rotating vertical beams, a driving rotating horizontal beam, and two driving rotating elastic beams. The two driving rotating vertical beams are respectively disposed on both sides of the driving rotating horizontal beam along the second direction and are both connected to the middle of the driving rotating horizontal beam. One of the driving rotating vertical beams is connected to the second anchor point, and the other driving rotating vertical beam is connected to the third anchor point. The two driving rotating elastic beams are both deformable along the first direction and are respectively disposed at both ends of the driving rotating horizontal beam along the first direction. One driving rotating elastic beam is connected to a driving frame, and the other driving rotating elastic beam is connected to the other driving frame.

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