Molecular pump motor debugging device

Abstract

The application discloses a kind of molecular pump motor debugging device, it includes tool support and drive motor, tool support includes parallel and opposite drive motor support and measured motor support, drive motor support is used to fix drive motor, measured motor support is used to fix molecular pump body, and drive motor is set in the measured motor of molecular pump body, wherein, encoder is set on drive motor and is used to connect to external debugging system, the shaft portion of drive motor and the shaft portion of measured motor are oppositely arranged and are coaxially connected by shaft coupling.The molecular pump motor debugging device of the utility model, by the debugging of external debugging system to drive motor with encoder, drive motor synchronously drives the measured motor in molecular pump, to complete the debugging of the measured motor in molecular pump, to reach ideal debugging effect.

Description

Technical Field

[0001] The embodiments of this utility model relate to the field of motor debugging technology. More specifically, this utility model relates to a molecular pump motor debugging device. Background Technology

[0002] In the application of molecular pumps, a common technical solution is to install a motor without an encoder inside the molecular pump. This type of motor has a relatively simple structure and low cost.

[0003] However, during the debugging phase of the product control program, the lack of an encoder prevents the accurate feedback of the motor's real-time position information to the program. This motor position information is crucial for precise control program debugging; the absence of this key information directly leads to deviations in the debugging results, preventing the achievement of ideal accuracy and consequently impacting the overall performance optimization and precise control of the molecular pump within the product. Utility Model Content

[0004] In order to solve one or more of the technical problems mentioned above, this utility model provides a molecular pump motor debugging device.

[0005] The molecular pump motor debugging device of this utility model includes a tooling bracket and a drive motor. The tooling bracket includes a drive motor support and a test motor support arranged in parallel and opposite directions. The drive motor support is used to fix the drive motor, and the test motor support is used to fix the molecular pump body. The test motor is installed in the molecular pump body. The drive motor is equipped with an encoder for connecting to an external debugging system. The shaft of the drive motor and the shaft of the test motor are arranged opposite to each other and coaxially connected by a coupling.

[0006] In some embodiments, the tooling bracket further includes a tooling base plate, which is horizontally disposed on a fixed foundation, and the drive motor support and the motor under test support are fixedly connected to the tooling base plate in a direction perpendicular to the horizontal.

[0007] In some embodiments, the drive motor support includes a mounting plate, and a connecting base is symmetrically formed on the bottom of the mounting plate along the thickness direction. The connecting base has mounting holes. The mounting plate is used to be fixedly connected to the drive motor, and the connecting base is used to be fixedly connected to the tooling base plate.

[0008] In some embodiments, the mounting plate is provided with adjustment mounting holes evenly distributed around the positioning holes of the drive motor support. The adjustment mounting holes correspond to the motor mounting holes of the drive motor, and the diameter of the adjustment mounting holes is larger than the nominal diameter of the motor mounting holes.

[0009] In some embodiments, the drive motor support further includes two bottom pads, which are disposed on the bottom side of the tooling base plate. The two bottom pads have through holes corresponding to the mounting holes, and the connecting base, the tooling base plate, and the bottom pads are fixedly connected by bolts.

[0010] In some embodiments, two parallel waist-shaped grooves are also formed on the tooling base plate. The length direction of the two waist-shaped grooves is the axial direction of the shaft of the drive motor. Bolts pass through the mounting hole of the connecting base, the waist-shaped groove, and the through hole of the bottom pad in sequence to connect the connecting base, the tooling base plate, and the bottom pad plate.

[0011] In some embodiments, coaxial positioning holes are formed on the drive motor support and the motor under test support. The drive motor and the motor under test are respectively disposed at the positioning holes of the drive motor support and the motor under test support, so that the shaft of the drive motor, the shaft of the motor under test and the positioning holes are coaxial.

[0012] In some embodiments, the device further includes a tooling auxiliary leg, which is disposed on the side of the motor support opposite to the drive motor support. The tooling auxiliary leg includes a support leg and a fitting connection part. The two ends of the support leg are fixedly connected to the tooling base plate and the mounting plate at an angle, respectively. The fitting connection part is connected to the support leg and is fitted and fixed to the mounting plate.

[0013] In some embodiments, the tooling auxiliary leg further includes a gripping portion, one end of which is fixedly connected to the top of the fitting connection portion, and the other end extends in a direction away from the mounting plate to be flush with the edge of the tooling base plate.

[0014] In some embodiments, a tooling pad is also included, which is evenly distributed at the four corners of the bottom of the tooling base plate.

[0015] Using the molecular pump motor debugging device provided above, the drive motor with encoder is debugged through an external debugging system. The drive motor synchronously drives the motor under test inside the molecular pump to complete the debugging of the motor under test inside the molecular pump, thereby achieving the ideal debugging effect. Attached Figure Description

[0016] The above and other objects, features, and advantages of the present invention will become readily understood by reading the following detailed description of exemplary embodiments with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0017] Figure 1 This is a schematic front view of the molecular pump motor debugging device according to an embodiment of the present invention;

[0018] Figure 2This is a side view schematic diagram of the molecular pump motor debugging device according to an embodiment of the present invention;

[0019] Figure 3 This is a top view schematic diagram of the molecular pump motor debugging device according to an embodiment of the present invention. Detailed Implementation

[0020] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0021] Figures 1-3 The following diagrams show the front view, side view, and top view of the molecular pump motor debugging device 100 according to an embodiment of the present invention. Figures 1 to 3 According to an embodiment of the present invention, a molecular pump motor debugging device 100 includes a tooling bracket 1 and a drive motor 2. The tooling bracket 1 includes a drive motor support 11 and a motor under test support 12 arranged in parallel and opposite directions. The drive motor support 11 is used to fix the drive motor 2, and the motor under test support 12 is used to fix the molecular pump body 3. The molecular pump body 3 is provided with a motor under test 31. The drive motor 2 is provided with an encoder and is used to connect to an external debugging system. The shaft of the drive motor 2 and the shaft of the motor under test 31 are arranged opposite to each other and coaxially connected by a coupling 4.

[0022] In the application of molecular pumps, motors without encoders are installed inside the molecular pumps. These motors have a relatively simple structure and low cost. Since the speed of the motor under test 31 inside the molecular pump is typically 6 rpm, this application requires ensuring the coaxial accuracy of the assembled drive motor 2 and the motor under test 31. According to the embodiment of this utility model, the molecular pump motor debugging device 100 is first fastened to the motor under test support 12 to fix the position of the motor under test 31 inside. Then, when installing the drive motor 2, to ensure a more precise coaxial position, the tooling bracket 1 can be adjusted to a vertical state, so that the molecular pump body 3 is located in a lower position in the vertical direction. The drive motor 2 is placed on the drive motor support 11 and its position is adjusted. After being fastened through the coupling 4, the drive motor 2 is then fastened. This maximizes the coaxial accuracy between the drive motor 2 and the motor under test 31. During testing, the tooling bracket 1 can maintain the vertical placement of the drive motor 2 or be returned to a horizontal position (i.e., the position shown in the figure).

[0023] With the above settings, the drive motor 2 with encoder is debugged by an external debugging system. The drive motor 2 synchronously drives the motor under test 31 in the molecular pump to complete the debugging of the motor under test 31 in the molecular pump, thereby achieving the ideal debugging effect.

[0024] Please refer to Figure 1 and Figure 2 In some embodiments, the tooling bracket 1 further includes a tooling base plate 13, which is set horizontally on a fixed foundation, and the drive motor support 11 and the tested motor support 12 are fixedly connected to the tooling base plate 13 in a direction perpendicular to the horizontal.

[0025] In this application, by vertically connecting the fixture base plate 13 with the drive motor support 11 and the motor under test support 12, the direction of the shaft axis of the motor under test 31 and the drive motor 2 remains parallel to the fixture base plate 13 no matter how the fixture bracket 1 is rotated when fixing the motor under test 31 and the drive motor 2, thereby further improving the connection accuracy of the shaft of the drive motor 2 and the shaft of the motor under test 31.

[0026] Please continue to refer to Figure 1 and Figure 2 In some embodiments, the drive motor support 11 may include a mounting plate 111, and a connecting base 112 is symmetrically formed on the bottom of the mounting plate 111 along the thickness direction. The connecting base 112 has mounting holes (not shown in the figure). The mounting plate 111 is used to fix the drive motor 2, and the connecting base 112 is used to fix the tooling base plate 13.

[0027] In this application, the connection base 112 is fixedly connected to the tooling base plate 13, providing a larger contact area to better improve the stability of the connection. This ensures that when the drive motor 2 is installed on the mounting plate 111, the plane of the mounting plate 111 can always remain perpendicular to the plane of the tooling base plate 13, thereby further enhancing the accuracy of the coaxial connection between the drive motor 2 and the motor under test 31.

[0028] Please refer to Figure 2 In some embodiments, the mounting plate 111 is provided with adjustment mounting holes 113 evenly distributed around the positioning holes of the drive motor support 11. The adjustment mounting holes 113 correspond to the motor mounting holes of the drive motor 2, and the diameter of the adjustment mounting holes 113 is larger than the nominal diameter of the motor mounting holes.

[0029] In this application, the number of adjustment mounting holes 113 is consistent with the motor mounting holes of the drive motor 2, typically four. The fact that the diameter of the adjustment mounting holes 113 is larger than the nominal diameter of the motor mounting holes can be understood as follows: when the tooling base plate 13 is adjusted to a vertical position, the drive motor 2 is placed in the positioning hole of the drive motor support 11, and the drive motor 2 is in a free state in the left and right directions, i.e., it has the freedom of movement. Tightening the coupling 4 in this state, and then tightening the fastening screws 115 of the drive motor 2, better ensures the coaxiality of the drive motor 2 and the motor under test 31.

[0030] Please refer to Figure 1 In some embodiments, the drive motor support 11 may also include two bottom pads 116. The two bottom pads 116 are disposed on the bottom side of the tooling base plate 13. Through holes corresponding to the mounting holes are formed on the two bottom pads 116. The connecting base 112, the tooling base plate 13 and the bottom pads 116 are fixedly connected by bolts.

[0031] In this application, the bottom pad 116 provides a larger contact area, which can better improve the stability of the connection, so that when the drive motor 2 is installed on the mounting plate 111, the plane on which the mounting plate 111 is located can always remain perpendicular to the plane on which the tooling base plate 13 is located, thereby further enhancing the accuracy of the coaxial connection between the drive motor 2 and the motor under test 31.

[0032] Please refer to Figure 3 In some embodiments, two parallel waist-shaped grooves 131 may also be formed on the tooling base plate 13. The length direction of the two waist-shaped grooves 131 is the axial direction of the shaft of the drive motor 2. The bolts pass through the mounting hole of the connecting base 112, the waist-shaped grooves 131, and the through hole of the bottom pad 116 in sequence to connect the connecting base 112, the tooling base plate 13, and the bottom pad 116.

[0033] In this application, during the connection or assembly of the connecting base 112 and the tooling base plate 13, the waist-shaped groove 131 can provide a certain position adjustment margin for both, allowing for fine adjustment of the horizontal position within a certain range, which facilitates alignment and leveling during equipment installation and ensures the installation accuracy of the equipment.

[0034] In some embodiments, coaxial positioning holes (not shown in the figure) may be formed on the drive motor support 11 and the motor under test support 12. The drive motor 2 and the motor under test 31 are respectively disposed at the positioning holes of the drive motor support 11 and the motor under test support 12, so that the shaft of the drive motor 2, the shaft of the motor under test 31 and the positioning hole are coaxial.

[0035] In this application, both the drive motor 2 and the motor under test 31 are fixed at the position of the positioning hole. After the shafts of the two pass through the positioning hole, they are connected and fixed by the coupling 4 to ensure the connection accuracy.

[0036] Please return Figure 1 In some embodiments, the tooling auxiliary support leg 5 is also included. The tooling auxiliary support leg 5 is disposed on the side of the motor support 12 opposite to the drive motor support 11. The tooling auxiliary support leg 5 includes a support leg 51 and a fitting connection part 52. The two ends of the support leg 51 are fixedly connected to the tooling base plate 13 and the mounting plate 111 at an angle, respectively. The fitting connection part 52 connects to the support leg 51 and fits and is fixed to the mounting plate 111.

[0037] In this application, the support leg 51, the tooling base plate 13 and the mounting plate 111 form a triangular structure. By setting the tooling auxiliary support leg 5, the mounting plate 111 can provide a more stable support effect, so that when the heavier molecular pump body 3 is installed, the mounting plate 111 can still maintain good perpendicularity with the tooling base plate 13.

[0038] Please continue to refer to Figure 1 In some embodiments, the tooling auxiliary support leg 5 also includes a gripping part 53, one end of which is fixedly connected to the top of the fitting connection part 52, and the other end extends in a direction away from the mounting plate 111 to be flush with the edge of the tooling base plate 13.

[0039] In this application, by providing a gripping part 53, on the one hand, the gripping part 53 facilitates the movement, reversal and other operations of the tooling bracket 1. On the other hand, the other end of the gripping part 53 extends in a direction away from the mounting plate 111 to be flush with the edge of the tooling base plate 13, which also enables the tooling bracket 1 to form good support through the edge of the tooling base plate 13 and the free end of the gripping part 53 when the drive motor 2 is installed, so as to improve the coaxial accuracy of the drive motor 2 and the motor under test 31 through the coupling 4.

[0040] Please continue to refer to Figure 1 In some embodiments, a tooling pad 6 may also be included, which is evenly distributed at the four corners of the bottom of the tooling base plate 13 to improve the stability of the tooling base plate 13.

[0041] Please refer to Figure 3 In some embodiments, a groove 7 extending through both ends is formed at the center line of the top of the tooling base plate 13 along the length direction, so that the stress is more concentrated at the location of the groove 7, thereby reducing the problem of reduced fitting accuracy of the shaft of the drive motor 2 and the shaft of the tested motor 31 due to stress dispersion.

[0042] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0043] Based on the above description of this application, those skilled in the art will also understand that the following terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as a limitation on the present invention.

[0044] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0045] While various embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and intent of the present invention. It should be understood that various alternatives to the embodiments of the present invention described herein may be employed in the practice of the present invention. The appended claims are intended to define the scope of protection of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A molecular pump motor debugging device, characterized in that, The device includes a tooling bracket and a drive motor. The tooling bracket includes a drive motor support and a motor under test support arranged parallel and opposite to each other. The drive motor support is used to fix the drive motor, and the motor under test support is used to fix the molecular pump body. The motor under test is installed inside the molecular pump body. The drive motor is equipped with an encoder for connecting to an external debugging system. The shaft of the drive motor and the shaft of the motor under test are arranged opposite to each other and coaxially connected by a coupling.

2. The molecular pump motor debugging device according to claim 1, characterized in that, The tooling bracket also includes a tooling base plate, which is set horizontally on a fixed foundation. The drive motor support and the tested motor support are fixedly connected to the tooling base plate in a direction perpendicular to the horizontal.

3. The molecular pump motor debugging device according to claim 2, characterized in that, The drive motor support includes a mounting plate, and a connecting base is symmetrically formed on the bottom of the mounting plate along the thickness direction. The connecting base has mounting holes. The mounting plate is used to fix the drive motor, and the connecting base is used to fix the tooling base plate.

4. The molecular pump motor debugging device according to claim 3, characterized in that, The mounting plate is provided with adjustment mounting holes evenly distributed around the positioning holes of the drive motor support. The adjustment mounting holes correspond to the motor mounting holes of the drive motor, and the diameter of the adjustment mounting holes is larger than the nominal diameter of the motor mounting holes.

5. The molecular pump motor debugging device according to claim 3, characterized in that, The drive motor support also includes two bottom pads, which are disposed on the bottom side of the tooling base plate. The two bottom pads have through holes corresponding to the mounting holes. The connecting base, the tooling base plate, and the bottom pads are fixedly connected by bolts.

6. The molecular pump motor debugging device according to claim 5, characterized in that, The tooling base plate also has two parallel waist-shaped grooves. The length direction of the two waist-shaped grooves is the axial direction of the shaft of the drive motor. The bolts pass through the mounting hole of the connecting base, the waist-shaped grooves, and the through hole of the bottom pad in sequence to connect the connecting base, the tooling base plate, and the bottom pad plate.

7. The molecular pump motor debugging device according to any one of claims 1-6, characterized in that, The drive motor support and the motor under test support have coaxial positioning holes. The drive motor and the motor under test are respectively disposed at the positioning holes of the drive motor support and the motor under test support, so that the shaft of the drive motor, the shaft of the motor under test and the positioning holes are coaxial.

8. The molecular pump motor debugging device according to any one of claims 3-6, characterized in that, It also includes a tooling auxiliary support leg, which is disposed on the side of the motor support under test opposite to the drive motor support. The tooling auxiliary support leg includes a support leg and a fitting connection part. The two ends of the support leg are fixedly connected to the tooling base plate and the mounting plate at an angle, respectively. The fitting connection part is connected to the support leg and is fitted and fixed to the mounting plate.

9. The molecular pump motor debugging device according to claim 8, characterized in that, The tooling auxiliary support leg also includes a gripping part, one end of which is fixedly connected to the top of the fitting connection part, and the other end extends in a direction away from the mounting plate to be flush with the edge of the tooling base plate.

10. The molecular pump motor debugging device according to claim 2, characterized in that, It also includes tooling pads, which are evenly distributed at the four corners of the bottom of the tooling base plate.

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