High-stability linear module
By using multi-sensor fusion and communication collaboration mechanisms, the problems of weak anti-interference capability, insufficient communication reliability and lagging fault diagnosis of traditional linear modules are solved, realizing a linear module with high stability and high reliability, which is suitable for harsh industrial scenarios such as semiconductor manufacturing and precision machine tools.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGGUAN SHIDATONG AUTOMATION CO LTD
- Filing Date
- 2025-05-28
- Publication Date
- 2026-05-29
AI Technical Summary
Traditional linear modules have weak anti-interference capabilities, insufficient communication reliability, delayed fault diagnosis, and poor dynamic response, resulting in decreased positioning accuracy, equipment malfunction, and low production efficiency.
It adopts a multi-sensor fusion and communication coordination mechanism, including displacement, vibration and pressure sensors, combined with temperature monitoring and load detection, to achieve real-time data transmission and collaborative control between modules through CAN bus or industrial Ethernet, dynamically adjust motor parameters, and support dual-channel redundant communication and fault diagnosis units.
It improves positioning accuracy to ±0.005mm, reduces the risk of disconnection by 90%, reduces mechanical resonance by 40%~60%, shortens maintenance time by 50%, and increases production efficiency by 30%.
Smart Images
Figure CN224305596U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of linear module technology, and more specifically, to a highly stable linear module. Background Technology
[0002] Linear modules, as core transmission components of automated equipment, are widely used in precision machining, semiconductor packaging, robotics, and other fields. Traditional linear modules often employ open-loop or single closed-loop control (such as relying solely on motor encoder feedback), which has the following technical drawbacks:
[0003] Weak anti-interference capability: A single sensor cannot effectively cope with vibration, temperature drift and sudden load changes under complex working conditions, resulting in a decrease in positioning accuracy (for example, the thermal expansion error of the guide rail caused by temperature rise can reach ±0.1mm).
[0004] Insufficient communication reliability: Most existing modules use single-channel communication (such as RS232 or ordinary CAN bus), which is susceptible to electromagnetic interference or disconnection, resulting in delays or loss of control commands, and in severe cases, causing equipment to go out of control.
[0005] Delayed fault diagnosis: The lack of a real-time monitoring module means that abnormal conditions (such as motor overload or guide rail jamming) often rely on manual troubleshooting, resulting in long downtime for maintenance and impacting production efficiency.
[0006] Poor dynamic response: When the load changes, traditional PID control has difficulty adjusting parameters quickly, which leads to sudden acceleration and mechanical resonance, reducing motion stability. Utility Model Content
[0007] The problem this invention addresses is how to solve the problems of low precision, susceptibility to interference, and difficult maintenance of traditional linear modules.
[0008] To address the aforementioned issues, this invention provides a highly stable linear module, including a drive control module comprising a controller and a communication interface for generating motor control signals;
[0009] The communication bus module, using CAN bus or industrial Ethernet protocol, connects to the drive control module, sensor module, temperature monitoring module, and load detection module.
[0010] The sensor module includes a displacement sensor, a vibration sensor, and a pressure sensor mounted on the module guide rail. The sensor module transmits displacement, vibration, and load data to the drive control module in real time through a communication bus module.
[0011] The temperature monitoring module includes temperature sensors installed on the guide rail and motor housing, which are used to collect temperature data and send it to the drive control module through the communication bus module.
[0012] The load detection module includes strain gauges and pressure sensors fixed to the module slide, used to detect load changes and generate electrical signals;
[0013] The drive control module dynamically adjusts the motor operating parameters based on feedback data from the sensor module, temperature monitoring module, and load detection module, and achieves coordinated control between the modules through the communication bus module.
[0014] In an optional embodiment, the communication bus module adopts a dual-channel redundant structure, including a main communication channel and a backup communication channel. When the main communication channel fails, the backup communication channel is automatically activated by a switching circuit, and the switching response time is less than 100ms.
[0015] In an optional embodiment, the temperature monitoring module has temperature sensors embedded in the end, middle and inside the motor windings of the guide rail, respectively, and the temperature data is transmitted to the drive control module after being corrected by a linear compensation algorithm.
[0016] In an optional embodiment, the strain gauges of the load detection module are symmetrically attached to both sides of the slide, and the pressure sensor is installed at the connection of the actuator at the end of the module. The data from both are weighted and fused to generate a load feedback signal.
[0017] In an optional embodiment, the drive control module further includes a fault diagnosis unit connected to the communication bus module, which monitors sensor data jumps, communication delays, and temperature exceeding limits in real time, and triggers audible and visual alarms or emergency braking.
[0018] In an optional embodiment, the vibration sensor is a triaxial MEMS sensor, which is installed at the bottom of the module slide. The vibration data is analyzed by FFT spectrum to generate a resonance suppression command, which controls the motor to reduce the drive frequency.
[0019] In an optional embodiment, the communication interface of the drive control module supports the Modbus-TCP protocol, allowing connection to an external host computer or industrial PLC to achieve remote parameter configuration and real-time status monitoring.
[0020] In an optional embodiment, the displacement sensor (101) is a grating ruler or a magnetic grating ruler, which is installed parallel to the module guide rail. Its feedback signal is fused with the motor encoder data through Kalman filtering to generate a high-precision position closed-loop control signal.
[0021] Compared with the prior art, the high-stability linear module of this utility model has the following advantages:
[0022] This utility model achieves the following significant technical effects through modular structural design and communication collaboration mechanism:
[0023] Stability Improvement: By using multi-sensor fusion (displacement, vibration, pressure) and Kalman filtering, single sensor errors are eliminated, and the repeatability accuracy is improved to ±0.005mm.
[0024] The dual-channel redundant communication design (master / backup switchover time ≤ 50ms) ensures continuous transmission of control commands under extreme operating conditions, reducing the risk of disconnection by 90%.
[0025] Enhanced anti-interference capability: The temperature monitoring module, combined with a linear compensation algorithm, reduces the deformation error caused by temperature rise from ±0.1mm to ±0.02mm;
[0026] The triaxial MEMS vibration sensor (102) uses FFT spectrum analysis to suppress resonance in real time, reducing the amplitude by 40%~60%.
[0027] Reliability optimization: The load detection module uses a weighted fusion of strain gauge (106) and pressure sensor (103) to achieve a dynamic load detection accuracy of ±1%FS, avoiding guide rail wear caused by eccentric load;
[0028] The fault diagnosis unit enables multi-level early warning (audio-visual alarm, emergency braking), with a fault response time of ≤100ms, reducing the unexpected equipment downtime rate by 70%.
[0029] Maintainability and scalability: The modular design allows for independent replacement of sensors or communication units, reducing maintenance time by 50%;
[0030] The remote monitoring interface (Modbus-TCP) supports multi-device networking, enabling centralized management and control, and improving debugging efficiency by 30%.
[0031] Energy saving and extended lifespan: Dynamically adjusting the motor drive current (optimizing the acceleration curve based on the load change rate) reduces energy consumption by 15%~20%;
[0032] Active temperature control (triggered air cooling) reduces the operating temperature of the guide rail and motor by 10-15°C, extending the lifespan of key components by 2-3 times. Attached Figure Description
[0033] Figure 1 This is a schematic diagram of the structure of the high-stability linear module in the embodiment of this utility model;
[0034] Figure 2 This is a control principle diagram of the linear module in an embodiment of this utility model. Detailed Implementation
[0035] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.
[0036] In the attached diagram, the Z-axis represents the vertical direction, i.e., up and down, with the positive direction of the Z-axis representing up and the negative direction representing down. The X-axis represents the horizontal direction, specifically the left and right positions, with the positive direction of the X-axis representing the right side and the negative direction representing the left side. The Y-axis represents the front and back positions, with the positive direction of the Y-axis representing the rear and the negative direction representing the front. It should be noted that the aforementioned representations of the Z, Y, and X axes are merely for ease of description and simplification of the present invention, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.
[0037] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this utility model described herein can be implemented in sequences other than those illustrated or described herein.
[0038] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0039] In the description of this specification, references to terms such as "embodiment," "one embodiment," and "one implementation" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or implementation is included in at least one embodiment or illustrative embodiment of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or implementation. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or implementations.
[0040] like Figures 1 to 2 As shown, this utility model embodiment provides a high-stability linear module, including a drive control module, which includes a controller and a communication interface for generating motor control signals;
[0041] The communication bus module, using CAN bus or industrial Ethernet protocol, connects to the drive control module, sensor module, temperature monitoring module, and load detection module.
[0042] The sensor module includes a displacement sensor 101, a vibration sensor 102, and a pressure sensor 103 mounted on the module guide rail. The sensor module transmits displacement, vibration, and load data to the drive control module in real time through the communication bus module.
[0043] The temperature monitoring module includes temperature sensors 104 installed on the guide rail and motor housing, which are used to collect temperature data and send it to the drive control module through the communication bus module.
[0044] The load detection module includes a strain gauge 106 and a pressure sensor 103 fixed to the module slide, which are used to detect load changes and generate electrical signals.
[0045] The drive control module dynamically adjusts the motor operating parameters based on feedback data from the sensor module, temperature monitoring module, and load detection module, and achieves coordinated control between the modules through the communication bus module.
[0046] Drive control module: Uses STM32 or industrial PLC as controller, integrates CAN / Ethernet communication interface, and drives servo motor through PWM signal.
[0047] Communication bus module: Shielded twisted pair or fiber optic cable is used to connect each module, and the bus protocol is configured as CAN 2.0B or Profinet.
[0048] Sensor module: Displacement sensor 101, such as a Heidenhain grating ruler, is mounted parallel to the side of the guide rail; vibration sensor 102, such as an ADI triaxial MEMS, is fixed to the bottom of the slide table; pressure sensor 103, such as a piezoelectric embedded end effector.
[0049] Temperature monitoring module: PT100 temperature sensor 104 is embedded in the end and middle of the guide rail and in the motor winding, and acquires temperature signals through ADC.
[0050] Load detection module: Strain gauges 106 are symmetrically attached to both sides of the slide table in the form of a Wheatstone bridge, and the end pressure sensor 103 is threaded.
[0051] Each module transmits data to the drive control module in real time via a communication bus. The controller integrates displacement error, vibration spectrum, load change and temperature data to dynamically adjust the motor current and acceleration curves, achieving multi-parameter coordinated control.
[0052] The communication bus module adopts a dual-channel redundant structure, including a primary communication channel and a backup communication channel. In the event of a failure in the primary communication channel, the backup communication channel is automatically activated via a switching circuit, with a switching response time of less than 100ms. The primary communication channel uses a CAN bus, while the backup channel uses RS485. The switching circuit utilizes solid-state relays such as the Omron G3VM-61BR, and the switching logic is implemented by an FPGA. When the primary channel is functioning normally, data is transmitted via CAN; upon detecting a communication interruption, the FPGA controls the relay to switch to the backup channel, ensuring continuous command execution.
[0053] In the temperature monitoring module, temperature sensors 104 are embedded at the ends and middle of the guide rail and inside the motor windings. Temperature data is transmitted to the drive control module after being corrected by a linear compensation algorithm. Two temperature sensors 104 are installed at the ends and middle of the guide rail, and one is embedded in the motor windings. Based on the temperature gradient at different locations on the guide rail, the thermal expansion deformation is calculated and compensated in reverse during position closed-loop control.
[0054] The strain gauges 106 of the load detection module are symmetrically attached to both sides of the slide, and the pressure sensor 103 is installed at the connection point of the actuator at the end of the module. The data from both are weighted and fused to generate a load feedback signal. The strain gauges 106 are symmetrically attached to both sides of the slide, forming a full-bridge circuit; the signals from the pressure sensor 103 and the strain gauges 106 are conditioned by an AD620 amplifier and then fused with a 6:4 weight. The strain gauges 106 detect the bending deformation of the slide, reflecting the load distribution, while the pressure sensor 103 detects the end load. The weighted and fused signals are then output as a comprehensive load signal.
[0055] The drive control module also includes a fault diagnosis unit, which is connected to the communication bus module. This unit monitors sensor data fluctuations, communication delays, and temperature exceeding limits in real time, triggering audible and visual alarms or emergency braking. The fault diagnosis unit is integrated into the controller and has preset thresholds. It monitors sensor data in real time, and when thresholds are exceeded, it triggers audible and visual alarms (such as a buzzer and flashing LEDs) or performs emergency braking to cut off motor power.
[0056] Vibration sensor 102 is a triaxial MEMS sensor mounted on the bottom of the module slide. Vibration data is analyzed via FFT spectrum to generate resonance suppression commands, controlling the motor to reduce its drive frequency. The triaxial MEMS sensor, such as the MPU6050, is bolted to the bottom of the slide. The FFT analysis is performed by the controller's built-in DSP, with a spectral resolution set to 10Hz. The X / Y / Z axis vibration spectra are detected, and resonant frequencies, such as 200Hz, are identified, dynamically reducing the motor drive frequency below the resonant frequency.
[0057] The drive control module's communication interface supports the Modbus-TCP protocol, allowing connection to a host computer or industrial PLC for remote parameter configuration and real-time status monitoring. The drive control module uses a WIZnet W5500 Ethernet chip, supporting the Modbus-TCP protocol; the host computer displays the module's status, such as position and temperature, in real-time via LabVIEW or configuration software. Remote commands are sent to the controller via TCP / IP protocol, and real-time data is uploaded to the monitoring platform.
[0058] The displacement sensor 101 is a grating ruler or magnetic grating ruler, which is installed parallel to the module guide rail. Its feedback signal and the motor encoder data are fused through Kalman filtering to generate a high-precision position closed-loop control signal.
[0059] The linear encoder (such as the Renishaw RGH24) is mounted on a parallel rail with a resolution of 1μm. A Kalman filter algorithm runs on the controller, fusing data from the linear encoder and the motor encoder. The linear encoder provides absolute position feedback, while the encoder provides relative position feedback. Noise (such as motor step loss and linear encoder jitter) is eliminated through filtering.
[0060] Through modular hardware design (sensor layout, redundant communication), data fusion algorithms (Kalman filtering, FFT analysis), and dynamic compensation mechanisms (temperature, load, vibration), this solution achieves high stability, high reliability, and strong anti-interference capability for linear modules, making it suitable for harsh industrial scenarios such as semiconductor manufacturing and precision machine tools.
[0061] Although the present invention has been disclosed above, its protection scope is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and all such changes and modifications will fall within the protection scope of the present invention.
Claims
1. A high-stability linear module, characterized in that, It includes a drive control module, which contains a controller and a communication interface for generating motor control signals; The communication bus module, using CAN bus or industrial Ethernet protocol, connects to the drive control module, sensor module, temperature monitoring module, and load detection module. The sensor module includes a displacement sensor, a vibration sensor, and a pressure sensor mounted on the module guide rail. The sensor module transmits displacement, vibration, and load data to the drive control module in real time through a communication bus module. The temperature monitoring module includes temperature sensors installed on the guide rail and motor housing, which are used to collect temperature data and send it to the drive control module through the communication bus module. The load detection module includes strain gauges and pressure sensors fixed to the module slide, used to detect load changes and generate electrical signals; The drive control module dynamically adjusts the motor operating parameters based on feedback data from the sensor module, temperature monitoring module, and load detection module, and achieves coordinated control between the modules through the communication bus module.
2. The high-stability linear module according to claim 1, characterized in that, The communication bus module adopts a dual-channel redundant structure, including a main communication channel and a backup communication channel. When the main communication channel fails, the backup communication channel is automatically activated by a switching circuit, and the switching response time is less than 100ms.
3. The high-stability linear module according to claim 1, characterized in that, In the temperature monitoring module, temperature sensors are embedded in the end, middle and inside the motor windings of the guide rail, respectively. The temperature data is transmitted to the drive control module after being corrected by a linear compensation algorithm.
4. The high-stability linear module according to claim 1, characterized in that, The strain gauges of the load detection module are symmetrically attached to both sides of the slide, and the pressure sensor is installed at the connection of the actuator at the end of the module. The data from both are weighted and fused to generate a load feedback signal.
5. The high-stability linear module according to claim 1, characterized in that, The drive control module also includes a fault diagnosis unit, which is connected to the communication bus module to monitor sensor data jumps, communication delays and temperature exceeding limits in real time, and trigger audible and visual alarms or emergency braking.
6. The high-stability linear module according to claim 1, characterized in that, The vibration sensor is a triaxial MEMS sensor, which is installed at the bottom of the module slide. The vibration data is analyzed by FFT spectrum to generate resonance suppression command, which controls the motor to reduce the drive frequency.
7. The high-stability linear module according to claim 1, characterized in that, The communication interface of the drive control module supports the Modbus-TCP protocol, allowing connection to an external host computer or industrial PLC to achieve remote parameter configuration and real-time status monitoring.
8. The high-stability linear module according to claim 1, characterized in that, The displacement sensor is an optical or magnetic ruler, which is installed parallel to the module guide rail. Its feedback signal is fused with the motor encoder data through Kalman filtering to generate a high-precision position closed-loop control signal.