Wafer carrying mechanism

Abstract

The utility model relates to the technical field of semiconductor storage equipment, and concretely is wafer bearing mechanism, including box body, be rotatively connected with pivot on the box body, and the pivot is fixedly connected with carousel, four bevelled grooves are equipped on the carousel circumference array, the sliding connection has the slide axle in the bevelled groove, four sliding slots are set up on the box body, the sliding connection has the stopper in the sliding slot, the bottom fixed connection of slide axle and stopper, install the box cover on the box body, install fixed structure on the box body, through the sliding fit of the bevelled groove on carousel and the slide axle of stopper bottom, make the spacing between four stoppers can be flexibly adjusted according to the size of wafer, to make the stopper can fix the wafer of different size, and then make the versatility of box body better, place more stable while taking and putting more convenient.

Description

Technical Field

[0001] This utility model relates to a support mechanism, specifically a wafer support mechanism, and belongs to the field of semiconductor storage device technology. Background Technology

[0002] A wafer is a silicon wafer used to manufacture silicon semiconductor circuits. Its raw material is silicon, which is generally made from high-purity polycrystalline silicon into large single crystals. After crystal growth, silicon ingots are obtained, and then ground, polished, and sliced ​​to form a wafer. A wafer box is an important packaging container used to store, transport, and protect wafers. Depending on the size of the wafers it contains, wafer boxes can be divided into four-inch wafer boxes, six-inch wafer boxes, eight-inch wafer boxes, twelve-inch wafer boxes, etc.

[0003] However, wafer sizes vary in the semiconductor industry, and the internal space of traditional wafer boxes is usually a fixed size. One type of wafer box can only accommodate one type of wafer. When a company needs to handle wafers of various sizes, it must prepare wafer boxes of different sizes, which increases the company's inventory costs and management difficulty. Furthermore, wafer boxes are not adaptable to future changes in wafer size. Utility Model Content

[0004] The purpose of this invention is to provide a wafer carrying mechanism to solve the above problems. By sliding the inclined groove on the turntable with the sliding shaft at the bottom of the stop block, the distance between the four stops can be flexibly adjusted according to the size of the wafer, so that the stops can fix wafers of different sizes, thereby improving the versatility of the box and making wafer placement more stable and convenient.

[0005] This utility model achieves the above-mentioned objectives through the following technical solution: a wafer carrier mechanism, including a housing, an adjustment structure mounted on the housing, the adjustment structure including a rotating shaft, a rotating shaft rotatably connected to the housing, a turntable fixedly connected to the rotating shaft, four inclined grooves arranged in a circumferential array on the turntable, a sliding shaft slidably connected in the inclined grooves, four sliding grooves opened on the housing, a stop block slidably connected in the sliding grooves, the bottom end of the sliding shaft being fixedly connected to the stop block, a housing cover mounted on the housing, and a fixing structure mounted on the housing.

[0006] Preferably, the overall cross-section of the stop block is T-shaped, the cross-section of the end of the stop block is arc-shaped, and a rubber pad is installed on the stop block.

[0007] Preferably, a knob is rotatably connected to the box body, a worm gear is fixedly connected to the end of the knob, and a worm wheel is fixedly connected to the bottom end of the rotating shaft, with the worm wheel meshing with the worm gear.

[0008] Preferably, the box body has four positioning holes, and the box cover is fixedly connected to four positioning posts, which engage with the positioning holes.

[0009] Preferably, the fixing structure includes a mounting block, the mounting block is fixedly connected to the box body, a locking block is slidably connected to the mounting block, an insert block is fixedly connected to the box cover, the insert block is slidably connected to the mounting block, the insert block has a locking groove, and the locking block engages with the locking groove.

[0010] Preferably, the end of the card block has a beveled structure, and the end of the insertion block has a trapezoidal structure.

[0011] Preferably, a guide rod is fixedly connected to the mounting block, and the locking block is slidably connected to the guide rod.

[0012] Preferably, a tension spring is sleeved on the outside of the guide rod, one end of the tension spring is fixedly connected to a mounting block, and the other end of the tension spring is fixedly connected to a locking block.

[0013] Preferably, the box body has two grooves, and the box lid is fixedly connected to two baffles, which are inserted into the grooves.

[0014] The beneficial effects of this utility model are as follows: a rotating shaft is rotatably connected to the box body, and a turntable is fixedly connected to the rotating shaft. Four inclined grooves are arranged in a circular array on the turntable, and a sliding shaft is slidably connected in the inclined grooves. Four sliding grooves are opened on the box body, and a stop block is slidably connected in the sliding grooves. The sliding shaft is fixedly connected to the bottom end of the stop block. Through the sliding cooperation between the inclined grooves on the turntable and the sliding shaft at the bottom end of the stop block, the distance between the four stop blocks can be flexibly adjusted according to the size of the wafer, so that the stop blocks can fix wafers of different sizes, thereby improving the versatility of the box body and making wafer placement more stable and easier to pick up and put away. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the connection structure between the stop and the sliding shaft of this utility model;

[0017] Figure 3 This is a schematic diagram of the connection structure between the wafer box and the knob of this utility model;

[0018] Figure 4 This is a schematic diagram of the connection structure between the rotating shaft and the turntable of this utility model;

[0019] Figure 5 This is a schematic diagram of the connection structure between the box cover and the positioning post of this utility model;

[0020] Figure 6 This is a schematic diagram of the connection structure between the box lid and the baffle of this utility model;

[0021] Figure 7 for Figure 6 The diagram shows an enlarged view of part A.

[0022] In the diagram: 1. Box body; 2. Box cover; 3. Adjustment structure; 301. Rotating shaft; 302. Turntable; 303. Inclined groove; 304. Sliding shaft; 305. Sliding groove; 306. Stop block; 307. Rubber pad; 308. Worm gear; 309. Worm; 310. Knob; 4. Fixing structure; 401. Mounting block; 402. Locking block; 403. Inserting block; 404. Locking groove; 405. Guide rod; 406. Tension spring; 5. Positioning post; 6. Positioning hole; 7. Groove; 8. Baffle. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figures 1-7 As shown, the wafer carrier mechanism includes a housing 1, an adjustment structure 3 mounted on the housing 1, and a rotating shaft 301 rotatably connected to the housing 1. A turntable 302 is fixedly connected to the rotating shaft 301. The turntable 302 has four inclined slots 303 arranged in a circular array. A sliding shaft 304 is slidably connected within the inclined slots 303. The housing 1 has four sliding slots 305, and a stop block 306 is slidably connected within the sliding slots 305. The bottom end of the sliding shaft 304 is fixedly connected to the stop block 306. A knob 310 is rotatably connected to the housing 1. A worm gear 309 is fixedly connected to the end of the knob 310. A worm wheel 308 is fixedly connected to the bottom end of the rotating shaft 301. The worm wheel 308 meshes with the worm gear 309. A housing cover 2 is mounted on the housing 1, and a fixing structure 4 is mounted on the housing 1.

[0025] As a technical optimization of this utility model, the overall cross-section of the stop block 306 is T-shaped, and the cross-section at the end of the stop block 306 is arc-shaped. A rubber pad 307 is installed on the stop block 306. The arc-shaped cross-section at the end of the stop block 306 facilitates the fit of the stop block 306 against the sidewall of the wafer, making the stop block 306 more effective in fixing the wafer. The rubber pad 307 provides good protection for the wafer and prevents damage to the wafer caused by shaking during transportation.

[0026] As a technical optimization of this utility model, the box body 1 is provided with four positioning holes 6, and the box cover 2 is fixedly connected with four positioning posts 5, which engage with the positioning holes 6; align the positioning posts 5 on the box cover 2 with the positioning holes 6 on the box body 1, and move the box cover 2 downward so that the positioning posts 5 engage with the positioning holes 6. The cooperation between the positioning posts 5 and the positioning holes 6 can quickly position the box cover 2.

[0027] As a technical optimization of this utility model, the fixing structure 4 includes a mounting block 401. The mounting block 401 is fixedly connected to the box body 1. A locking block 402 is slidably connected to the mounting block 401. An insert block 403 is fixedly connected to the box cover 2. The insert block 403 is slidably connected to the mounting block 401. A slot 404 is provided on the insert block 403. The locking block 402 engages with the slot 404. The end of the locking block 402 has a beveled structure, and the end of the insert block 403 has a trapezoidal structure. A guide rod 405 is fixedly connected to the mounting block 401. The locking block 402 is slidably connected to the guide rod 405. The outer surface of the guide rod 405... A tension spring 406 is provided on the sleeve. One end of the tension spring 406 is fixedly connected to the mounting block 401, and the other end of the tension spring 406 is fixedly connected to the locking block 402. During the downward movement of the cover 2, the insert block 403 slides into the mounting block 401. At this time, the insert block 403 slides against the locking block 402 and slides outward from the mounting block 401. The sliding of the locking block 402 simultaneously causes the tension spring 406 to extend. When the locking groove 404 on the insert block 403 aligns with the locking block 402, the tension spring 406 resets and drives the locking block 402 to engage with the locking groove 404, thereby quickly limiting the insert block 403 and preventing the cover 2 from moving upward. The cover 2 protects the wafer inside the box 1.

[0028] As a technical optimization of this utility model, two grooves 7 are provided on the box body 1, and two baffles 8 are fixedly connected to the box cover 2. The baffles 8 are inserted into the grooves 7. When the box cover 2 moves downward, the box cover 2 drives the baffles 8 to be inserted into the grooves 7. The grooves 7 are designed to facilitate the handling of wafers. The baffles 8 cover the grooves 7 to prevent external dust from entering the box body 1 and causing wafer contamination.

[0029] In use, when wafers of different sizes need to be placed into the housing 1, the knob 310 is turned. The knob 310 drives the worm gear 309 to rotate, which in turn drives the worm wheel 308 to rotate. The rotation of the worm wheel 308 simultaneously drives the rotating shaft 301 to rotate, which in turn drives the turntable 302 to rotate. The turntable 302, through the sliding engagement of four sliding grooves 305 and four sliding shafts 304, drives four stops 306 to slide backwards in the sliding grooves 305, thereby slightly reducing the space between the four stops 306. The wafer is placed in the housing 1 between four stops 306, and the knob 310 is turned to move the stops 306 toward the center of the housing 1 and into contact with the wafer, thus fixing the wafer. The four stops 306 can be slidably to fix wafers of different sizes, improving the versatility of the housing 1 and making wafer placement and removal more convenient while ensuring more stable wafer placement. The arc-shaped end section of the stops 306 facilitates contact between the stops 306 and the sidewalls of the wafer, enhancing the fixing effect of the stops 306 on the wafer. For better positioning, the rubber pad 307 provides excellent protection for the wafer, preventing damage caused by shaking during handling. Next, align the positioning pin 5 on the cover 2 with the positioning hole 6 on the box body 1, and move the cover 2 downwards so that the positioning pin 5 engages with the positioning hole 6. This engagement allows for quick positioning of the cover 2. As the cover 2 moves downwards, it causes the baffle 8 to insert into the groove 7. The groove 7 facilitates wafer handling, and the baffle 8 protects the groove 7 from external dust entering the box. The interior of body 1 is contaminated with wafers. During the downward movement of the cover 2, the insert 403 slides into the mounting block 401. At this time, the insert 403 slides against the locking block 402 towards the outside of the mounting block 401. The sliding of the locking block 402 simultaneously causes the tension spring 406 to extend. When the slot 404 on the insert 403 aligns with the locking block 402, the tension spring 406 resets and drives the locking block 402 to engage with the slot 404, thereby quickly limiting the insert 403 and preventing the cover 2 from moving upwards. The cover 2 protects the wafers inside the body 1.

[0030] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0031] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A wafer carrier mechanism, comprising a housing (1), characterized in that: An adjustment structure (3) is installed on the box body (1). The adjustment structure (3) includes a rotating shaft (301). The rotating shaft (301) is rotatably connected to the box body (1). A turntable (302) is fixedly connected to the rotating shaft (301). Four inclined grooves (303) are arranged in a circular array on the turntable (302). A sliding shaft (304) is slidably connected in the inclined grooves (303). Four sliding grooves (305) are opened on the box body (1). A stop block (306) is slidably connected in the sliding grooves (305). The bottom end of the sliding shaft (304) is fixedly connected to the stop block (306). A box cover (2) is installed on the box body (1). A fixing structure (4) is installed on the box body (1).

2. The wafer carrier mechanism according to claim 1, characterized in that: The overall cross-section of the stop block (306) is "T" shaped, and the cross-section at the end of the stop block (306) is arc-shaped. A rubber pad (307) is installed on the stop block (306).

3. The wafer carrier mechanism according to claim 1, characterized in that: A knob (310) is rotatably connected to the box body (1). A worm (309) is fixedly connected to the end of the knob (310). A worm wheel (308) is fixedly connected to the bottom end of the rotating shaft (301). The worm wheel (308) meshes with the worm (309).

4. The wafer carrier mechanism according to claim 3, characterized in that: The box body (1) has four positioning holes (6), and the box cover (2) is fixedly connected with four positioning posts (5), which engage with the positioning holes (6).

5. The wafer carrier mechanism according to claim 1, characterized in that: The fixing structure (4) includes a mounting block (401), which is fixedly connected to the box body (1). A locking block (402) is slidably connected to the mounting block (401), and an insert block (403) is fixedly connected to the box cover (2). The insert block (403) is slidably connected to the mounting block (401), and a slot (404) is provided on the insert block (403). The locking block (402) engages with the slot (404).

6. The wafer carrier mechanism according to claim 5, characterized in that: The end of the card block (402) has a beveled structure, and the end of the insert block (403) has a trapezoidal structure.

7. The wafer carrier mechanism according to claim 6, characterized in that: A guide rod (405) is fixedly connected to the mounting block (401), and the locking block (402) is slidably connected to the guide rod (405).

8. The wafer carrier mechanism according to claim 7, characterized in that: A tension spring (406) is sleeved on the outside of the guide rod (405). One end of the tension spring (406) is fixedly connected to the mounting block (401), and the other end of the tension spring (406) is fixedly connected to the locking block (402).

9. The wafer carrier mechanism according to claim 1, characterized in that: The box body (1) has two grooves (7), and the box cover (2) is fixedly connected to two baffles (8), which are inserted into the grooves (7).

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