Image sensor pixel size ultra-precision machining calibration device
By designing a device that includes a base plate, a worktable, a ring plate, a sphere, a shell, and an adjustment mechanism, and combining it with a motor and a focused ion beam device, the problem of single positioning calibration of image sensors is solved, and flexible adjustment and high-quality ultra-precision machining are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NANYANG XIANGLONG OPTICAL CO LTD
- Filing Date
- 2025-04-24
- Publication Date
- 2026-05-29
AI Technical Summary
Existing image sensor positioning and calibration methods are limited and cannot adjust angles, resulting in low processing efficiency.
A device comprising a base plate, a worktable, a ring plate, a sphere, a shell, and an adjustment mechanism was designed. Through the cooperation of components such as a motor, a transmission wheel, and a threaded rod, the image sensor can be flexibly adjusted and precisely positioned, and ultra-precision machining can be performed using a focused ion beam device.
This improves the flexibility and processing quality of image sensors, enabling precise calibration and ultra-precision machining of image sensors.
Smart Images
Figure CN224306266U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of image sensor processing technology, and in particular to an ultra-precision processing and calibration device for image sensor pixel size. Background Technology
[0002] Image sensors utilize the photoelectric conversion function of optoelectronic devices to convert the light image on the photosensitive surface into an electrical signal proportional to the light image. Compared with photosensitive elements such as photodiodes and phototransistors, which are "point" light sources, image sensors are functional devices that divide the light image on the light-receiving surface into many small units and convert them into usable electrical signals. Image sensors are divided into photoconductive camera tubes and solid-state image sensors.
[0003] When processing pixels, the image sensor needs to be positioned and calibrated. To ensure stability during processing, the image sensor needs to be precisely positioned.
[0004] However, most existing positioning and calibration methods are relatively simple, and once fixed, the sensor angle cannot be adjusted, which makes it inconvenient to adjust the processing angle and significantly reduces processing efficiency.
[0005] Therefore, this utility model provides an ultra-precision machining and calibration device for image sensor pixel size to solve the problems in the background art. Utility Model Content
[0006] To solve the above-mentioned technical problems, the present invention provides an image sensor pixel size ultra-precision machining and calibration device, comprising: a base plate and an adjustment mechanism;
[0007] A worktable is provided on the base plate, a ring plate is slidably connected to the worktable, a sphere is movably connected inside the ring plate, an image sensor is provided on the top of the sphere, a focused ion beam device is provided on the worktable, the focused ion beam device is corresponding to the sphere, a housing is fixedly installed on the ring plate, and an adjustment mechanism for adjusting the sphere is provided on the housing;
[0008] The adjustment mechanism includes a second motor, a U-shaped plate, a transmission wheel, a third motor, a first motor, an electric push rod, and a threaded rod. The second motor is fixedly installed inside the housing, and the output end of the second motor is provided with a transmission wheel. The transmission wheel abuts against the ball. Through the cooperative design between the ring plate, the housing, the ball, and the adjustment mechanism, the ball can be flexibly adjusted, thereby enabling the calibration and positioning of the image sensor, improving flexibility and processing quality.
[0009] Preferably, a U-shaped plate is fixedly connected to the output end of the second motor, and a rotating shaft is rotatably connected to the U-shaped plate. The transmission wheel is fixedly connected to the rotating shaft and is used to adjust the rotation of the transmission wheel, thereby achieving the effect of adjusting the rotation direction of the ball.
[0010] Preferably, a motor three is fixedly installed on one side of the U-shaped plate. The output end of the motor three is fixedly connected to one end of the rotating shaft. Driven by the motor three and transmitted by the rotating shaft on the U-shaped plate, the transmission wheel rotates and transmits power to the ball, causing the ball to rotate at a certain angle. At the same time, the ball drives the image sensor to move synchronously, thereby achieving the effect of adjusting the tilt angle of the image sensor.
[0011] Preferably, a threaded rod is threadedly connected to the housing, the threaded rod is located below the sphere, and a motor is fixedly installed on the base plate. The output end of the motor is fixedly connected to one end of the threaded rod. Driven by the motor, the threaded rod can rotate and perform threaded transmission with the housing, thereby causing the housing to drive the sphere to move horizontally on the worktable through the ring plate, thus achieving the effect of moving and adjusting the image sensor.
[0012] Preferably, an electric push rod is fixedly installed inside the housing, and a push plate is fixedly connected to one end of the electric push rod. The second electric motor is fixedly installed on the push plate. Through the drive of the electric push rod and the transmission of the push plate, the second electric motor and the U-shaped plate, the distance between the transmission wheel and the ball can be adjusted, thereby avoiding the effect of the transmission wheel driving the ball to rotate synchronously during the rotation adjustment process of the second electric motor.
[0013] Preferably, the center of the ring plate corresponds to the center of the sphere to prevent the sphere from detaching from the ring plate.
[0014] Preferably, motor one, motor two, electric push rod, and motor three are all connected to the control module on the focused ion beam device. The focused ion beam device focuses a high-energy ion beam onto a tiny area to achieve precise removal or modification of the surface material of the image sensor, thereby achieving the effect of ultra-precision machining of the pixel size on the image sensor. The control module drives and controls motor one, motor two, electric push rod, and motor three to calibrate and adjust the image sensor.
[0015] Compared with related technologies, the image sensor pixel size ultra-precision machining and calibration device provided by this utility model has the following beneficial effects:
[0016] This invention provides an ultra-precision machining and calibration device for image sensor pixel size. Through the coordinated design of the ring plate, housing, sphere, and adjustment mechanism, the sphere can be flexibly adjusted, thereby enabling the calibration and positioning of the image sensor, improving flexibility and machining quality. Attached Figure Description
[0017] Figure 1 A three-dimensional structural schematic diagram of an image sensor pixel size ultra-precision machining and calibration device provided by this utility model;
[0018] Figure 2 A partial anatomical diagram of an image sensor pixel size ultra-precision machining and calibration device provided by this utility model;
[0019] Figure 3 A schematic diagram of the adjustment mechanism structure of an image sensor pixel size ultra-precision machining calibration device provided by this utility model;
[0020] Figure 4 This is a schematic diagram of the structure of the sphere and the ring plate.
[0021] Numbered in the diagram: 1. Base plate; 2. Worktable; 3. Ring plate; 4. Sphere; 5. Image sensor; 6. Focused ion beam device; 7. Housing; 8. Motor 1; 9. Motor 2; 10. U-shaped plate; 11. Transmission wheel; 12. Motor 3; 13. Electric push rod; 14. Threaded rod. Detailed Implementation
[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0023] Please refer to the following: Figures 1-4 An image sensor pixel size ultra-precision machining calibration device includes: a base plate 1 and an adjustment mechanism;
[0024] A worktable 2 is provided on the base plate 1. A ring plate 3 is slidably connected to the worktable 2. A sphere 4 is movably connected inside the ring plate 3. An image sensor 5 is provided on the top of the sphere 4. A focused ion beam device 6 is provided on the worktable 2. The focused ion beam device 6 corresponds to the sphere 4. A housing 7 is fixedly installed on the ring plate 3. An adjustment mechanism for adjusting the sphere 4 is provided on the housing 7.
[0025] The adjustment mechanism includes a second motor 9, a U-shaped plate 10, a transmission wheel 11, a third motor 12, a first motor 8, an electric push rod 13, and a threaded rod 14. The second motor 9 is fixedly installed inside the housing 7. The output end of the second motor 9 is provided with a transmission wheel 11, which abuts against the ball 4. Through the cooperative design between the ring plate 3, the housing 7, the ball 4, and the adjustment mechanism, the ball 4 can be flexibly adjusted, thereby enabling the calibration and positioning of the image sensor 5, improving flexibility and processing quality.
[0026] In this method, a U-shaped plate 10 is fixedly connected to the output end of the motor 2 9, and a rotating shaft is rotatably connected to the U-shaped plate 10. The transmission wheel 11 is fixedly connected to the rotating shaft and is used to adjust the rotation of the transmission wheel 11, thereby achieving the effect of adjusting the rotation direction of the ball 4.
[0027] In this method, a motor 312 is fixedly installed on one side of the U-shaped plate 10. The output end of the motor 312 is fixedly connected to one end of the rotating shaft. Through the drive of the motor 312 and the transmission of the rotating shaft on the U-shaped plate 10, the transmission wheel 11 rotates and transmits to the ball 4, causing the ball 4 to rotate at a certain angle. At the same time, the ball 4 drives the image sensor 5 to move synchronously, thereby achieving the effect of adjusting the tilt angle of the image sensor 5.
[0028] In this method, a threaded rod 14 is threadedly connected to the housing 7. The threaded rod 14 is located below the ball 4. A motor 8 is fixedly installed on the base plate 1. The output end of the motor 8 is fixedly connected to one end of the threaded rod 14. Driven by the motor 8, the threaded rod 14 can rotate and perform threaded transmission with the housing 7. This causes the housing 7 to drive the ball 4 to move horizontally on the worktable 2 through the ring plate 3, thereby achieving the effect of moving and adjusting the image sensor 5.
[0029] In this method, an electric push rod 13 is fixedly installed inside the housing 7. One end of the electric push rod 13 is fixedly connected to a push plate. The second electric motor 9 is fixedly installed on the push plate. Through the drive of the electric push rod 13 and the transmission of the push plate, the second electric motor 9 and the U-shaped plate 10, the distance between the transmission wheel 11 and the ball 4 can be adjusted. This achieves the effect of preventing the transmission wheel 11 from driving the ball 4 to rotate synchronously during the rotation adjustment process of the second electric motor 9.
[0030] In this method, the center of the ring plate 3 corresponds to the center of the ball 4, preventing the ball 4 from detaching from the ring plate 3.
[0031] In this method, motor 8, motor 9, electric push rod 13, and motor 12 are all connected to the control module on the focused ion beam device 6. Motors 8, 9, and 12 are all servo motors, typically equipped with high-precision encoders. These encoders monitor the rotation angle and position of the motor shaft in real time and feed this information back to the controller. The controller calculates the position deviation based on the preset target position and the actual position information, and then adjusts the drive signal output to the servo motors through a control algorithm, causing the motors to rotate in the direction of reducing the deviation until the actual position matches the target position, thus achieving precise positioning. The focused ion beam device 6 focuses a high-energy ion beam onto a tiny area, enabling precise positioning of the image sensor 5. The precise removal or modification of surface materials achieves ultra-precision machining of pixel dimensions on the image sensor 5. The focused ion beam device 6 includes a focused ion beam exposure system and a control module. The focused ion beam exposure system is configured to project a focused ion beam onto the surface of the sample on the sample holder. The beam spot size and / or beam current of the focused ion beam are configured to allow the focused ion beam to remove material from the sample surface. The specific structure and working principle of the focused ion beam device 6 can be found in the literature with application number 202180053450.5, which is prior art and will not be described in detail here. The control module drives and controls motor 8, motor 9, electric push rod 13, and motor 12 to calibrate and adjust the image sensor 5.
[0032] The working principle of the ultra-precision machining and calibration device for image sensor pixel size provided by this utility model is as follows:
[0033] By focusing a high-energy ion beam onto a tiny area using the focused ion beam device 6, the surface material of the image sensor 5 can be precisely removed or modified, thereby achieving the effect of ultra-precision machining of the pixel size on the image sensor 5.
[0034] When the focused ion beam device 6 detects that a pixel on the image sensor 5 does not correspond to it, it drives and controls the motor 8, motor 9, electric push rod 13 and motor 12 to calibrate the image sensor 5.
[0035] Driven by the electric motor 312 and the transmission of the rotating shaft on the U-shaped plate 10, the transmission wheel 11 rotates and transmits power to the ball 4, causing the ball 4 to rotate at a certain angle. At the same time, the ball 4 drives the image sensor 5 to move synchronously, thereby achieving the effect of adjusting the tilt angle of the image sensor 5.
[0036] Driven by the second electric motor 9, the U-shaped plate 10 can be rotated by a certain angle, thereby achieving the purpose of rotating and adjusting the transmission wheel 11, and thus achieving the effect of adjusting the rotation direction of the ball 4; at the same time, driven by the electric push rod 13 and the transmission of the push plate, the second electric motor 9 and the U-shaped plate 10, the distance between the transmission wheel 11 and the ball 4 can be adjusted, thereby avoiding the effect of the transmission wheel 11 driving the ball 4 to rotate synchronously during the rotation adjustment process of the second electric motor 9;
[0037] Driven by the electric motor 8, the threaded rod 14 can rotate and perform threaded transmission with the housing 7, thereby causing the housing 7 to drive the ball 4 to move horizontally on the worktable 2 through the ring plate 3, thus achieving the effect of moving and adjusting the image sensor 5.
[0038] In summary, this allows for the calibration of the image sensor 5.
[0039] Compared with related technologies, the ultra-precision machining and calibration device for image sensor pixel size provided by this utility model has the following beneficial effects: through the cooperation of various components, the sphere 4 can be flexibly adjusted, thereby enabling the calibration and positioning of the image sensor 5, improving flexibility and machining quality, and having a simple structure and higher practicality.
[0040] The above are merely embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A device for ultra-precision machining and calibration of image sensor pixel size, characterized in that, Includes a base plate (1) and an adjustment mechanism; A worktable (2) is provided on the base plate (1), a ring plate (3) is slidably connected on the worktable (2), a sphere (4) is movably connected inside the ring plate (3), an image sensor (5) is provided on the top of the sphere (4), a focused ion beam device (6) is provided on the worktable (2), the focused ion beam device (6) corresponds to the sphere (4), a housing (7) is fixedly installed on the ring plate (3), and an adjustment mechanism for adjusting the sphere (4) is provided on the housing (7); The adjustment mechanism includes a second motor (9), a U-shaped plate (10), a transmission wheel (11), a third motor (12), a first motor (8), an electric push rod (13), and a threaded rod (14); the second motor (9) is installed inside the housing (7), and the output end of the second motor (9) is provided with a transmission wheel (11), which abuts against the ball (4).
2. The ultra-precision machining and calibration device for image sensor pixel size according to claim 1, characterized in that, The output end of the second motor (9) is fixedly connected to a U-shaped plate (10), and a rotating shaft is rotatably connected to the U-shaped plate (10). The transmission wheel (11) is fixedly connected to the rotating shaft.
3. The ultra-precision machining and calibration device for image sensor pixel size according to claim 2, characterized in that, A motor three (12) is fixedly installed on one side of the U-shaped plate (10), and the output end of the motor three (12) is fixedly connected to one end of the rotating shaft.
4. The ultra-precision machining and calibration device for image sensor pixel size according to claim 1, characterized in that, A threaded rod (14) is threaded onto the housing (7), and the threaded rod (14) is located below the sphere (4).
5. The image sensor pixel size ultra-precision machining and calibration device according to claim 4, characterized in that, An electric motor (8) is fixedly installed on the base plate (1), and the output end of the electric motor (8) is fixedly connected to one end of the threaded rod (14).
6. The ultra-precision machining and calibration device for image sensor pixel size according to claim 1, characterized in that, An electric push rod (13) is fixedly installed inside the housing (7). One end of the electric push rod (13) is fixedly connected to a push plate, and the second electric motor (9) is fixedly installed on the push plate.
7. The ultra-precision machining and calibration device for image sensor pixel size according to claim 1, characterized in that, The center of the ring plate (3) corresponds to the center of the sphere (4).
8. The ultra-precision machining and calibration device for image sensor pixel size according to claim 1, characterized in that, The first motor (8), the second motor (9), the electric push rod (13), and the third motor (12) are all connected to the control module on the focused ion beam device (6).