Substrate handling robot and substrate processing apparatus

By employing elastic seals and an open air groove design in the substrate handling robot, the problems of reliable adsorption of warped substrates and cleaning of negative pressure channels are solved, achieving efficient adsorption of substrates and cleanliness of the robot, thus meeting the handling needs of large-size substrates.

CN224312753UActive Publication Date: 2026-06-02NINGBO RUNHUA QUANXIN MICROELECTRONICS EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
NINGBO RUNHUA QUANXIN MICROELECTRONICS EQUIP CO LTD
Filing Date
2026-03-23
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

In existing technologies, it is difficult to achieve reliable adsorption on warped substrates, and the internal negative pressure channels are complex to process and easily leave contaminants, leading to substrate contamination and robotic arm failure.

Method used

Design a substrate handling robotic arm that uses a negative pressure channel composed of elastic seals and open air grooves, and a structure in which the support is separated from the main body, to achieve floating of the adsorption component and simplify processing.

Benefits of technology

It improves the success rate of adsorption on warped substrates, avoids substrate stress damage, ensures the cleanliness and miniaturization of the robotic arm, and meets the high cleanliness requirements of semiconductor processes.

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Abstract

This utility model discloses a substrate handling robotic arm and substrate processing equipment, belonging to the field of substrate handling technology. The substrate handling robotic arm includes a main body, at least three support members, and an adsorption member disposed on the support members. An elastic sealing member is provided between the adsorption member and the support members to enable the adsorption member to float and adapt to the warping of the substrate surface, ensuring the reliability of adsorption and avoiding substrate damage. Simultaneously, a negative pressure channel is provided within the main body and the support members, the portion of which within the main body consists of an open air groove formed on one surface of the main body and a cover member that airtightly seals the air groove. The support members are mounted on the opposite surface of the main body, opposite to the surface where the open air groove is located. This substrate handling robotic arm is easy to manufacture, effectively avoids the risk of substrate contamination caused by particulate matter residue, improves equipment cleanliness, and ensures the reliability of substrate adsorption during handling.
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