End effector of robot hand and wafer robot hand

Abstract

The utility model provides an end effector of mechanical hand, include: the object board, limiting piece and drive assembly, the object board has for bearing wafer bearing end face, limiting piece sets up on the object board with and is connected with the object board activity, drive assembly sets up on the object board for driving limiting piece to protrude from bearing end face when the object board bears wafer to carry out the limiting of the edge of wafer, the utility model discloses an end effector of wafer mechanical hand sets up limiting piece, carries out the limiting to the edge of wafer, can avoid wafer damage and equipment damage caused by wafer accidental slip in the process of transfer.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to an end effector for a robotic arm and a wafer robotic arm. Background Technology

[0002] Wafer robotic arms are key pieces of equipment used in semiconductor manufacturing to handle wafers, playing a crucial role in transferring wafers from one processing station to another. A typical wafer robotic arm consists of a robotic arm, an end effector, a drive system, and a control system. The end effector, the core component of the robotic arm, is usually composed of multiple links, similar in structure to a human arm, enabling multi-degree-of-freedom movement. The end effector, mounted at the end of the robotic arm, directly contacts the wafer to perform gripping and releasing actions. Under the control of the control system, the drive system drives the robotic arm and end effector to execute the target actions, completing the wafer pick-and-place operation.

[0003] Existing wafer robotic arms lack end effectors to prevent wafers from accidentally slipping off the arm, leading to frequent incidents of wafers falling from the robotic arm on production lines. This not only damages the wafers but also causes them to shatter inside the machine, scattering fragments throughout the wafer cassette and other parts of the machine. These fragments contaminate the machine environment and other wafers within the cassette. This results in direct economic losses from wafer breakage and indirectly causes equipment downtime and reduced production capacity. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide an end effector for a robotic arm and a wafer robotic arm to solve the problem that wafers are easily slipped off the wafer robotic arm during the transfer process in the prior art.

[0005] To solve the above-mentioned technical problems, the first aspect of this utility model provides an end effector for a robotic arm, comprising:

[0006] The carrier plate has a support surface for supporting the wafer;

[0007] A limiting member is provided on the carrier plate and is movably connected to the carrier plate;

[0008] A driving component, disposed on the carrier plate, is used to drive the limiting member to protrude from the bearing end face to limit the edge of the wafer when the carrier plate carries the wafer.

[0009] Preferably, the carrier plate has a mounting groove, the limiting member is slidably disposed in the mounting groove, and moves under the action of the driving component.

[0010] Preferably, the carrier plate has at least three of the mounting slots, and four of the mounting slots are spaced apart near the edge of the bearing end face.

[0011] Preferably, the interior of the carrier plate is provided with a gas cavity; the gas cavity extends to the lower part of the bearing end face and is used to introduce high-speed airflow to create a negative pressure environment inside the gas cavity;

[0012] The drive assembly includes an airbag and a linkage mechanism. The airbag is disposed in the mounting groove and communicates with the gas cavity. The airbag is connected to the limiting member through the linkage mechanism.

[0013] When a negative pressure environment is formed in the gas cavity, the airbag contracts and drives the limiting member to protrude from the bearing end face through the linkage mechanism.

[0014] Preferably, the linkage mechanism includes:

[0015] A support member is fixedly installed in the mounting groove to provide a fulcrum;

[0016] A transmission lever, the middle of which is hinged to the fulcrum;

[0017] A connector that is slidably connected to the top of the airbag;

[0018] One end of the transmission lever is hinged to the connecting member, and the other end abuts against the bottom surface of the limiting member.

[0019] Preferably, the bearing end face is provided with a negative pressure hole, which is connected to the gas cavity and is used to adsorb the wafer through negative pressure.

[0020] Preferably, it also includes a sensing device disposed on the bearing end face for detecting whether a wafer is present on the carrier plate;

[0021] When the sensing device detects a wafer on the support device, it generates a sensing signal and transmits the sensing signal to the driving component; after receiving the sensing signal, the driving component drives the limiting member to move.

[0022] Preferably, the gas cavity has an inlet end and an outlet end, the inlet end being connected to a gas source, and the outlet end being used to discharge gas.

[0023] Preferably, the limiting member has a bevel facing the edge of the wafer.

[0024] A second aspect of this utility model provides a wafer manipulator, including a robotic arm and an end effector of the manipulator, wherein the end effector of the manipulator is connected to the robotic arm.

[0025] The beneficial effects of this invention are as follows: By setting a limiting member on the end effector of the wafer manipulator, the edge of the wafer is limited, which can prevent the wafer from being accidentally slipped during transportation, thus avoiding damage to the wafer and equipment. In this embodiment, the drive assembly can drive the limiting member to protrude from the bearing end face when the wafer is carried by the carrier plate to limit the edge of the wafer. After the wafer is completely detached from the carrier plate, the limiting member retracts below the bearing end face, avoiding interference problems of the end effector during the movement of the non-carrying wafer. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of the end effector of the robotic arm according to an embodiment of the present invention;

[0027] Figure 2 This is a top view of the end effector of the robotic arm carrying a wafer according to an embodiment of the present invention;

[0028] Figure 3 for Figure 2 Side view of the end effector of a robotic arm carrying a wafer;

[0029] Figure 4 This is a schematic diagram of the gas channel structure within the carrier plate in an embodiment of this utility model;

[0030] Figure 5 This is a top view of the limiting member and driving assembly in the embodiments of this utility model;

[0031] Figure 6 for Figure 5 Cross-sectional view at point AA (the limiting component is located below the bearing end face);

[0032] Figure 7 for Figure 5 Cross-sectional view at point AA (the limiting component is located above the bearing end face);

[0033] Figure 8 for Figure 5 Cross-sectional view at point BB;

[0034] Figure 9 This is a schematic diagram of the drive component in another embodiment of the utility model.

[0035] Figure label:

[0036] 1-Carrier plate; 11-Bearing end face; 12-Mounting groove; 121-First mounting groove; 122-Second mounting groove;

[0037] 2-Limiting component; 21-Ceiling;

[0038] 3-Gas passage; 31-Negative pressure port; 311-First negative pressure port; 312-Second negative pressure port; 313-Third negative pressure port; 314-Fourth negative pressure port; 32-First air intake passage; 321-First air intake end; 33-Second air intake passage; 331-Second air intake end; 34-Air outlet passage; 341-Air outlet end;

[0039] 4-Drive assembly; 41-Airbag; 42-Linkage mechanism; 421-Transmission lever; 422-Connector; 423-Abutting wheel; 43-Support member; 431-Fulcrum; 432-First support member; 433-Second support member;

[0040] 44 - Electromagnetic coil; 45 - Electromagnet;

[0041] 5-Sensing device;

[0042] 6-Wafer. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0044] Please see Figure 1 , Figure 2 Figure 3 and Figure 5 The first aspect of this utility model provides an end effector for a robotic arm, comprising: a carrier plate 1, a limiting member 2, and a drive assembly 4.

[0045] The carrier plate 1 has a support end face 11 for supporting the wafer 6, such as... Figure 1 and Figure 3 As shown; the limiting member 2 is disposed on the carrier plate 1 and is movably connected to the carrier plate 1; the driving assembly 4 is disposed on the carrier plate 1 and is used to drive the limiting member 2 to protrude from the bearing end face 11 to limit the edge of the wafer 6 when the carrier plate 1 carries the wafer 6, as shown. Figure 2 and Figure 3 As shown.

[0046] In existing technologies, the wafer carrier 1 used by wafer robots does not have the aforementioned limiting member 2. Because there is no limiting structure at the wafer edge, there is no protection against accidental slippage during transport. This not only damages the wafer but also causes it to shatter inside the machine, contaminating the machine environment and other wafers in the wafer cassette. Compared to the existing technology, this embodiment adds the limiting member 2. The limiting member 2 can limit the edge of the wafer during accidental slippage, such as… Figure 2 and Figure 3 As shown, this prevents the wafer carrier plate 1 from slipping further. In this embodiment, the drive component 4 can drive the limiting member 2 to protrude from the bearing end face 11 to limit the edge of the wafer when the carrier plate 1 is carrying the wafer. After the wafer is completely detached from the carrier plate 1, the limiting member 2 retracts to below the bearing end face 11, avoiding interference problems of the end effector during the movement of the non-carrying wafer.

[0047] See Figure 3 In some embodiments, the carrier plate 1 has a mounting groove 12, the limiting member 2 is slidably disposed in the mounting groove 12, and moves under the action of the driving component 4.

[0048] Comprehensive reference Figure 2 and Figure 3 In this embodiment, the carrier plate 1 has four mounting slots 12, which are spaced apart near the edge of the bearing end face 11. In other embodiments, the number of mounting slots 12 on the carrier plate 1 may be three or five, but in order to effectively limit the position of the wafer, there are at least three mounting slots 12.

[0049] See Figure 4 In some embodiments, a gas channel 3 is provided inside the carrier plate 1. The gas channel 3 extends below the bearing end face 11 and is used to introduce a high-speed airflow to create a negative pressure environment within the gas channel 3. This utilizes Bernoulli's principle, which states that when the flow velocity of a fluid increases, its kinetic energy increases, and its pressure energy (manifested as pressure) decreases; conversely, when the flow velocity decreases, the pressure increases. By introducing a high-speed airflow into the gas channel 3 to create a negative pressure environment, it serves two purposes: firstly, to provide power to the drive component 4 (further explained below), and secondly, to provide negative pressure to the negative pressure orifice to adsorb the wafer during wafer transfer (as further explained later in this specification).

[0050] See Figure 5 and Figure 6The drive assembly 4 includes an airbag 41 and a linkage mechanism 42. The airbag 41 is disposed in the mounting groove 12 and communicates with the gas channel 3, while the mounting groove 12 is connected to the external air pressure. The airbag 41 is connected to the limiting member 2 through the linkage mechanism 42. When the gas channel 3 forms a negative pressure environment, the air pressure in the gas channel 3 is less than the external air pressure. The airbag 41 contracts under the action of the internal and external pressure difference and drives the limiting member 2 to protrude from the bearing end face 11 through the linkage mechanism 42.

[0051] Furthermore, the linkage mechanism 42 further includes: a support member 43, a transmission lever 421, and a connecting member 422. The support member 43 is fixedly disposed within the mounting groove 12, providing a fulcrum 431; the middle portion of the transmission lever 421 is hinged to the fulcrum 431; the connecting member 422 is slidably connected to the top of the airbag 41; one end of the transmission lever 421 is hinged to the connecting member 422, and the other end abuts against the bottom surface of the limiting member 2. Further, the end hinged to the connecting member 422 is the driving end, and the end abutting against the bottom surface of the limiting member 2 is the abutting end.

[0052] When a negative pressure environment is formed in the gas cavity 3, the airbag 41 contracts. In this embodiment, the airbag 41 has a bellows structure. When the airbag 41 contracts, its axial distance decreases, which is visually manifested as the top of the airbag 41 moving downward. During the downward movement of the top of the airbag 41, the connecting piece 422 at the top of the airbag 41 drives the transmission lever 421 to rotate clockwise around the fulcrum 431, while the abutting end pushes the limiting member 2 upward so that the top of the limiting member 2 protrudes out of the bearing end face 11.

[0053] In this embodiment, the support member 43 includes: a first support member 432 and a second support member 433, as shown below. Figure 5 As shown, a mounting space for the transmission lever 421 is formed between the first support member 432 and the second support member 433. A hinge shaft is mounted in the mounting space, and the transmission lever 421 is rotatably connected to the hinge shaft. Further, the support member divides the mounting groove 12 into a first mounting groove 121 and a second mounting groove 122. The limiting member 2 is slidably disposed in the first mounting groove 121, and the airbag 41 is disposed in the second mounting groove 122.

[0054] See Figure 6 and Figure 7 In some embodiments, the abutting end is rotatably equipped with an abutting wheel 423. The abutting wheel 423 converts the sliding friction between the abutting end and the limiting member 2 into rolling friction. Specifically, during the process of the abutting end pushing the limiting member 2 upward, a relative displacement occurs between the abutting end and the bottom surface of the limiting member 2, such as... Figure 7As shown, when the abutting end is not provided with the abutting wheel 423, there is sliding friction between the abutting end and the limiting member 2. Sliding friction requires more effort than rolling friction. Therefore, this embodiment changes sliding to rolling by providing the abutting wheel 423 at the abutting end. Only a small force is needed to make the transmission lever 421 push the limiting member 2.

[0055] See 1 and Figure 4 In some embodiments, the bearing end face 11 is provided with a negative pressure hole 31, such as... Figure 1 As shown, the negative pressure hole 31 is connected to the gas channel 3 and is used to adsorb the wafer through negative pressure. Further, the gas channel 3 includes a first inlet channel 32, a second inlet channel 33, and an outlet channel 34, with the first inlet channel 32 and the second inlet channel 33 both connected to the outlet channel 34; further, the negative pressure hole 31 is located directly above the gas channel 3; in this embodiment, the bearing end face 11 has four negative pressure holes: a first negative pressure hole 311, a second negative pressure hole 312, a third negative pressure hole 313, and a fourth negative pressure hole 314, as shown. Figure 4 As shown; wherein, the first negative pressure hole 311 and the second negative pressure hole 312 are connected to the first air intake channel 32, and the third negative pressure hole 313 and the fourth negative pressure hole 314 are connected to the second air intake channel 33.

[0056] Referring to 1, in some embodiments, the end effector of the robotic arm further includes a sensing device 5, which is disposed on the bearing end face 11 and is used to detect whether a wafer is present on the carrier plate 1. When the sensing device 5 detects a wafer on the support device, it generates a sensing signal and transmits the sensing signal to the drive assembly 4. After receiving the sensing signal, the drive assembly 4 drives the limiting member 2 to move. In this embodiment, four sensing devices 5 are disposed on the bearing end face 11, and the six sensing devices 5 are symmetrically arranged in groups of three on the bearing end face 11. In this embodiment, the sensing device 5 is a pressure sensor. As soon as any one of the six pressure sensors detects a wafer, it will transmit a sensing signal to the drive assembly 4 immediately to trigger the drive assembly 4 to move.

[0057] Furthermore, the drive component 4 includes a controller (not shown) for receiving and generating a gas source control signal based on the sensing signal, the gas source control signal for controlling the gas source to be turned on or off.

[0058] refer to Figure 4In some embodiments, the gas cavity 3 has an inlet end and an outlet end 341. The inlet end is connected to a gas source (not shown), and the outlet end 341 is used to discharge gas. Further, the inlet end includes a first inlet end 321 and a second inlet end 331. The first inlet end 321 communicates with the first inlet cavity 32, the second inlet end 331 communicates with the second inlet cavity 33, and the outlet end 341 communicates with the outlet cavity 34.

[0059] refer to Figure 5 and Figure 8 In some embodiments, the limiting member 2 has a bevel 21 facing the edge of the wafer. The bevel 21 is provided because when the wafer accidentally slides on the carrier plate 1, it has a certain speed. When the edge of the wafer directly impacts the limiting member 2, it is easy to damage the edge of the wafer. By providing the limiting member 2 with a bevel 21 facing the edge of the wafer, the edge of the wafer first contacts the bevel 21 and slides a certain distance along the bevel 21. During this process, the wafer stops sliding under the action of friction between itself and the bevel 21, thereby buffering the impact on the wafer and effectively preventing the wafer from being damaged by impact.

[0060] Furthermore, the side of the limiting member 2 that is in contact with the wafer has a covering layer made of flexible silicone material. This covering layer can effectively buffer the impact on the wafer to effectively protect it.

[0061] participate Figure 9 In some embodiments, the driving component 4 includes an electromagnetic coil 44 and an electromagnet 45. The electromagnetic coil 44 is disposed in the mounting groove 12, and the electromagnet 45 is fixedly disposed at the bottom of the limiting member 2. When both the electromagnetic coil 44 and the electromagnet 45 are energized, the polarities of the opposite ends of the electromagnet 45 and the electromagnetic coil 44 are the same (e.g., S pole to S pole, N pole to N pole). The electromagnet 45 moves upward under the action of electromagnetic repulsion, thereby causing the limiting member 2 to protrude from the bearing end face 11. When both the electromagnetic coil 44 and the electromagnet 45 are de-energized, the repulsion between them disappears, and the limiting member 2 falls down under the action of gravity and retracts below the bearing end face 11.

[0062] Both the electromagnetic coil 44 and the electromagnet 45 are electrically connected to the controller. When the controller receives a sensing signal from the sensing device 5, it will control the electromagnetic coil 44 and the electromagnet 45 to be energized simultaneously according to the sensing signal.

[0063] The second aspect of this invention provides a wafer manipulator, which includes a robotic arm and an end effector as described in the first aspect of this invention, wherein the end effector is connected to the robotic arm.

[0064] In summary, this utility model, by incorporating a limiting component on the end effector of a wafer robotic arm, can limit the edge of the wafer during accidental slippage, such as... Figure 2 and Figure 3 As shown, this prevents the wafer from slipping further off the carrier plate. In this embodiment, the driving component can drive the limiting member to protrude from the carrier end face to limit the edge of the wafer when the carrier plate is carrying the wafer. After the wafer is completely detached from the carrier plate, the limiting member retracts below the carrier end face, avoiding interference from the end effector during the movement of the non-carrying wafer. Therefore, this invention effectively overcomes the defects of the prior art and has high industrial application value.

[0065] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. An end effector for a robotic arm, characterized in that, include: The carrier plate has a support surface for supporting the wafer; A limiting member is provided on the carrier plate and is movably connected to the carrier plate; A driving component, disposed on the carrier plate, is used to drive the limiting member to protrude from the bearing end face to limit the edge of the wafer when the carrier plate carries the wafer.

2. The end effector of the robotic arm according to claim 1, characterized in that: The carrier plate has a mounting groove, the limiting member is slidably disposed in the mounting groove, and moves under the action of the driving component.

3. The end effector of the robotic arm according to claim 2, characterized in that: The carrier plate has at least three of the mounting slots, and four of the mounting slots are spaced apart near the edge of the bearing end face.

4. The end effector of the robotic arm according to claim 3, characterized in that: The interior of the carrier plate is provided with a gas channel; the gas channel extends to the lower part of the bearing end face and is used to introduce a high-speed airflow to create a negative pressure environment inside the gas channel; The drive assembly includes an airbag and a linkage mechanism. The airbag is disposed in the mounting groove and communicates with the gas cavity. The airbag is connected to the limiting member through the linkage mechanism. When a negative pressure environment is formed in the gas cavity, the airbag contracts and drives the limiting member to protrude from the bearing end face through the linkage mechanism.

5. The end effector of the robotic arm according to claim 4, characterized in that: The linkage mechanism includes: A support member is fixedly installed in the mounting groove to provide a fulcrum; A transmission lever, the middle of which is hinged to the fulcrum; A connector that is slidably connected to the top of the airbag; One end of the transmission lever is hinged to the connecting member, and the other end abuts against the bottom surface of the limiting member.

6. The end effector of the robotic arm according to claim 4, characterized in that: The bearing end face is provided with a negative pressure hole, which is connected to the gas cavity and is used to adsorb the wafer through negative pressure.

7. The end effector of the robotic arm according to any one of claims 1-6, characterized in that: It also includes a sensing device disposed on the bearing end face, used to detect whether a wafer is present on the carrier plate; When the sensing device detects a wafer on the support device, it generates a sensing signal and transmits the sensing signal to the driving component; after receiving the sensing signal, the driving component drives the limiting member to move.

8. The end effector of the robotic arm according to claim 4, characterized in that: The gas cavity has an inlet end and an outlet end. The inlet end is connected to a gas source, and the outlet end is used to discharge gas.

9. The end effector of the robotic arm according to claim 1, characterized in that: The limiting member has a bevel facing the edge of the wafer.

10. A wafer robotic arm, characterized in that: It includes a robotic arm and an end effector of a robotic hand as described in any one of claims 1-9, wherein the end effector of the robotic hand is connected to the robotic arm.

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