shower tray

Abstract

The utility model provides a kind of spray tray. Spray tray includes base and the spray assembly fixed below base. Spray assembly includes first spray plate, solid adhesive layer and second spray plate which are sequentially stacked along height, and solid adhesive layer is fixed on first spray plate. Solid adhesive layer includes laser cutting area and discontinuous bonding area, and first spray plate is fixedly connected with second spray plate by solid adhesive layer. First spray plate and second spray plate are provided with several groups of through holes corresponding to the function of spray tray, and in the projection direction perpendicular to first spray plate, the projection range of discontinuous bonding area does not fall into the projection range of several groups of through holes. Compared with prior art, the utility model fixes and connects first spray plate and second spray plate by solid adhesive layer, and the bonding area of solid adhesive layer does not overlap with through hole, which eliminates the possibility of glue flowing into through hole and causing blockage, and ensures the uniformity of gas flow.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a spray plate. Background Technology

[0002] In semiconductor manufacturing processes, spray plates are key components used to uniformly distribute process gases or cooling gases, and their performance directly affects the uniformity of thin film deposition or etching on the wafer surface. As semiconductor device sizes continue to shrink, the precision requirements for spray plates become increasingly stringent. Due to their superior gas distribution uniformity and thermal management capabilities, double-layer spray plate structures are gradually becoming the mainstream solution.

[0003] However, the existing manufacturing process for double-layer spray panels has technical bottlenecks. Traditional processes use liquid adhesives (such as liquid silicone or epoxy resin) to bond the double-layer spray panels. Before curing, the liquid adhesive tends to flow and seep into the through-holes of the spray panel, causing blockage or reduction in the pore size.

[0004] In view of this, it is indeed necessary to propose a spray plate to solve the above problems. Utility Model Content

[0005] To achieve the above objectives, the present invention aims to provide a spray tray that can solve the problem of glue clogging the functional holes during the bonding of double-layer spray plates.

[0006] To address this, the present invention provides a spray tray, comprising: a base and a spray assembly fixed below the base. The spray assembly includes a first spray plate, a solid adhesive layer, and a second spray plate stacked sequentially along its height. The solid adhesive layer is fixed to the first spray plate and includes a laser-cut area and a discontinuous bonding area. The first spray plate is fixedly connected to the second spray plate through the solid adhesive layer. The first and second spray plates are provided with a plurality of through holes corresponding to the function of the spray tray. In the projection direction perpendicular to the first spray plate, the projection range of the discontinuous bonding area does not fall within the projection range of the plurality of through holes.

[0007] Optionally, the solid adhesive layer is a pre-formed sheet of adhesive, which is laser-cut to form a discontinuous bonding area. The solid adhesive layer is bonded to the side of the first spray plate near the second spray plate through the discontinuous bonding area. The first spray plate and the second spray plate are bonded together by the solid adhesive layer to form a horizontally aligned integral structure.

[0008] Optionally, the thickness of the discontinuous bonding area of ​​the solid adhesive layer is 0.1mm to 0.5mm.

[0009] Optionally, the discontinuous bonding area includes several sets of concentrically arranged first adhesive film areas and second adhesive film areas, with the second adhesive film areas surrounding the outer periphery of the first adhesive film areas, and the first adhesive film areas and second adhesive film areas arranged sequentially.

[0010] Optionally, several sets of concentric first adhesive film layers are provided on several sets of first adhesive film areas. In the projection direction perpendicular to the first spray plate, the projection range of the first adhesive film layer falls into the projection range of the first adhesive film area, and there is a completely cut-off isolation gap between two adjacent first adhesive film layers.

[0011] Optionally, the first adhesive film layer is circular in shape.

[0012] Optionally, the second adhesive film area is provided with several sets of circumferentially arranged second adhesive film layers, and there is a completely cut-off isolation gap between two adjacent second adhesive film layers.

[0013] Optionally, the shape of the second adhesive film layer includes an ellipse, a circle, a rectangle, a trapezoid, or a triangle.

[0014] Optionally, the first spray plate is provided with several sets of through-hole first fixing holes, and the base is provided with several sets of second fixing holes that correspond one-to-one with the first fixing holes. The first fixing holes and the second fixing holes are connected by connecting columns.

[0015] Optionally, an air inlet is provided on the side of the base away from the first spray plate, and the air inlet is connected to the first spray plate to input protective gas to prevent the base from oxidizing during laser cutting.

[0016] Compared with the prior art, the technical solution of the embodiments of this utility model has the following beneficial effects:

[0017] The spray tray of this invention firstly connects the first and second spray plates with a solid adhesive layer, physically preventing the possibility of adhesive flowing into the through holes. Secondly, the first and second spray plates are provided with several sets of through holes corresponding to the function of the spray tray. In the projection direction perpendicular to the first spray plate, the projection range of the discontinuous bonding area does not fall within the projection range of the several sets of through holes. This arrangement ensures that the bonding area of ​​the solid adhesive layer does not overlap with the through holes, eliminating the possibility of the solid adhesive layer clogging the through holes and ensuring the uniformity of gas flow. Finally, by fixing the solid adhesive layer to the first spray plate and using laser cutting to form the discontinuous bonding area, the secondary alignment error of the discontinuous bonding area is avoided. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the spray disc conforming to the preferred embodiment of the present utility model;

[0019] Figure 2 yes Figure 1 A sectional view;

[0020] Figure 3 yes Figure 1 Exploded view of the installation of the central spray plate;

[0021] Figure 4 yes Figure 1 Schematic diagram of the middle base;

[0022] Figure 5 yes Figure 4 A structural diagram of the base from another angle;

[0023] Figure 6 yes Figure 5 A close-up view of the area circled in the middle;

[0024] Figure 7 yes Figure 3 Schematic diagram of the central connecting column;

[0025] Figure 8 yes Figure 1 A schematic diagram of the spray assembly in the diagram;

[0026] Figure 9 yes Figure 1 A schematic diagram of the spray plate without the second spray plate;

[0027] Figure 10 This is a schematic diagram of the structure of the first spray plate conforming to the preferred embodiment of this utility model;

[0028] Figure 11 yes Figure 10 A structural schematic diagram of the first spray plate from another angle;

[0029] Figure 12 This is a schematic diagram of the structure of the second spray plate conforming to the preferred embodiment of this utility model;

[0030] Figure 13 This is a schematic diagram of the structure of the solid adhesive layer according to a preferred embodiment of the present invention;

[0031] Figure 14 yes Figure 13 A schematic diagram of the structure of the first adhesive film region;

[0032] Figure 15 yes Figure 13 A schematic diagram of the structure of the second adhesive film region.

[0033] The components in the attached diagram are labeled as follows:

[0034] Base 1, first annular groove 11, second fixing hole 12, guide groove 121, air inlet 13;

[0035] Spray assembly 2, first spray plate 21, first fixing hole 211, second annular groove 212, second spray plate 22, solid adhesive layer 23, laser cutting area 231, discontinuous bonding area 232, first adhesive film area 2321, second adhesive film area 2322, first adhesive film layer 2323, second adhesive film layer 2324, through hole 24;

[0036] Connecting column 3, first guide surface 31, second guide surface 32;

[0037] Sealing ring 4;

[0038] Sprayer tray 100. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and / or processing steps closely related to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0041] Additionally, it should be noted that the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0042] Please see Figures 1 to 15 As shown, an embodiment of this utility model provides a spray plate 100. The spray plate 100 includes a base 1 and a spray assembly 2 fixed below the base 1. The base 1 is provided with at least one set of air inlets 13, which penetrate the base 1 and are connected to a transmission pipeline (not shown). The transmission pipeline is used to transport gas to the air inlets 13, which deliver the gas to the spray assembly 2, and the gas is evenly sprayed out from the spray assembly 2.

[0043] Please see Figures 1 to 6 As shown, in this embodiment, the base 1 has three sets of air inlets 13 on the side opposite to the spray assembly 2. These three sets of air inlets 13 are arranged along the central axis of the base 1, ensuring that the gas is evenly distributed from both sides of the symmetrical axis, avoiding turbulence interference caused by multi-directional air intake. All three sets of air inlets 13 are connected to the first spray plate 21. By independently controlling the gas flow rate of the three air inlets 13, the gas pressure in different areas of the spray disk 100 can be dynamically adjusted to adapt to different process requirements, such as increasing the flow rate of the corresponding air inlet 13 during edge strengthening etching.

[0044] In some preferred embodiments, the three air inlets 13 are symmetrically distributed at 120° to form a stable and supported flow field structure, so that the gas enters from the top surface and diffuses evenly to the entire spray area.

[0045] When the base material of the base 1 is aluminum, the transmission pipeline can transport protective gas to the first spray plate 100 through the air inlet 13, so as to introduce protective gas or cooling gas during laser cutting to prevent oxidation of the base 1. When the base 1 is made of aluminum, protective gases such as nitrogen are simultaneously introduced through the three air inlets 13, which can quickly form a uniform gas coverage layer and avoid oxidation caused by local high temperature during laser cutting. Protective gases or cooling gases include, but are not limited to, nitrogen, argon, helium and other inert gases, and are not restricted here. Users can flexibly select the most suitable gas type according to specific processing requirements, cost budget and physicochemical properties of the gas.

[0046] The base 1 has a first annular groove 11 and several sets of second fixing holes 12 on the side facing the spray assembly 2. Each set of second fixing holes 12 is fixedly connected to a connecting post 3. The several sets of second fixing holes 12 are connected one-to-one with the several sets of connecting posts 3. One end of the connecting post 3 abuts against the bottom surface of the second fixing hole 12. A guide groove 121 is provided on one side of the second fixing hole 12 to provide installation leeway, a foolproof design, and facilitate the installation of the connecting post 3.

[0047] Please see Figure 7 As shown, in this embodiment, the connecting post 3 is a cylinder with a first guide surface 31 and a second guide surface 32 at both ends. This not only facilitates the alignment and insertion of the connecting post 3 with the second fixing hole 12, but also ensures that the connecting post 3 can be tightly and firmly abutted against the bottom surface of the second fixing hole 12, thereby achieving a stable fixed connection.

[0048] Please see Figure 3 , Figure 5 , Figure 8 and Figure 9 As shown, the spray assembly 2 includes a first spray plate 21, a solid adhesive layer 23, and a second spray plate 22 stacked sequentially along its height. The solid adhesive layer 23 is fixed to the first spray plate 21, and the first spray plate 21 is fixedly connected to the second spray plate 22 through the solid adhesive layer 23. The solid adhesive layer 23 not only serves as a fixing connection but also fills the tiny gaps between the first spray plate 21 and the second spray plate 22, forming a good sealing effect and preventing gas leakage inside the spray assembly 2. A second annular groove 212 corresponding to the first annular groove 11 is provided on the side of the first spray plate 21 facing the base 1. Sealing rings 4 are installed on the first annular groove 11 and the second annular groove 212 to seal the gas introduced through the air inlet 13.

[0049] Please see Figures 10 to 11As shown, the first spray plate 21 has several sets of first fixing holes 211 corresponding one-to-one with the second fixing holes 12, and each set of first fixing holes 211 penetrates the first spray plate 21. The first fixing holes 211 and the second fixing holes 12 are connected by connecting posts 3, thereby fixing the base 1 and the first spray plate 21 together. In addition, the connecting posts 3 provide support to the first spray plate 21, so that the force on the first spray plate 21 can be evenly distributed on multiple connection points, avoiding local stress concentration and reducing the risk of damage to the spray plate 100 due to uneven force.

[0050] In other embodiments, the base 1 and the first spray plate 21 can also be connected by screws, studs, or threads, and there is no limitation here.

[0051] Please see Figures 12 to 15 As shown, the solid adhesive layer 23 includes a laser-cut area 231 and a discontinuous bonding area 232. The first spray plate 21 and the second spray plate 22 are provided with several sets of through holes 24 corresponding to the functions of the spray disk 100. These sets of through holes 24 are evenly distributed on the first spray plate 21 and the second spray plate 22. Each set of through holes 24 on the first spray plate 21 corresponds one-to-one with the set of through holes 24 on the second spray plate 22. In the projection direction perpendicular to the first spray plate 21, the projection range of the discontinuous bonding area 232 does not fall within the projection range of the sets of through holes 24. This arrangement avoids the solid adhesive layer 23 clogging the through holes 24, ensuring that the through holes 24 remain unobstructed, guaranteeing the gas transmission efficiency of the spray disk 100 and the uniform flow rate within the through holes 24. Gas can be efficiently transmitted from the air inlet 13 to the spray assembly 2 and finally sprayed out uniformly.

[0052] In this embodiment, the solid adhesive layer 23 is made of solid sheet adhesive, which allows for precise control of its thickness. The thickness of the solid adhesive layer 23 is 0.1mm to 0.5mm. Specifically, the thickness of the solid adhesive layer 23 can be any value among 0.1mm, 0.2mm, 0.3mm, 0.4mm, and 0.5mm. This design helps improve the flatness of the working surface after the double-layer spray plate is bonded.

[0053] In some other embodiments, the solid adhesive layer 23 is made of liquid silicone or epoxy resin adhesive, suitable for applications where high precision is not required. The thickness of the solid adhesive layer 23 ranges from 0.1 mm to 1 mm.

[0054] Solid adhesive layer 23 is a pre-formed sheet of adhesive. Solid adhesive layer 23 is bonded to the first spray plate 21, and the base 1, which is fixedly connected to the first spray plate 21, is placed on the worktable of the CO2 laser. The CO2 laser cuts in the laser cutting area 231, and the solid adhesive layer 23 is cut by the CO2 laser to form a discontinuous bonding area 232. That is, the area outside the discontinuous bonding area 232 in the solid adhesive layer 23 is the laser-cut area 231, and has been removed by the laser. Figure 9 , Figure 13 As shown. With this setup, the entire process eliminates the need to manually adhere the discontinuous adhesive areas 232 to the first spray plate 21, avoiding positioning errors and alignment deviations that may occur during manual adhesive application. This effectively improves the assembly accuracy between the solid adhesive layer 23 and the first spray plate 21. It also avoids potential secondary alignment issues after adhesive application, saving significant manpower and time costs and improving assembly efficiency.

[0055] Preferably, when the base 1 is made of aluminum, it will oxidize at high temperatures. During the cutting process, the CO2 laser releases a large amount of heat, requiring the introduction of a protective or cooling gas to effectively isolate oxidizing gases such as oxygen, thus preventing oxidation of the base 1 under high-temperature cutting conditions. For example, nitrogen or liquid nitrogen can be introduced when cutting the solid adhesive layer 23 to prevent oxidation of the base 1. The heat generated during laser cutting can cause thermal stress in the solid adhesive layer 23, affecting the structural stability and performance of the spray plate 100. Using cooling measures such as liquid nitrogen can quickly reduce the temperature of the solid adhesive layer 23, thereby eliminating the thermal stress.

[0056] In some embodiments, if the solid adhesive layer 23 is thick, a spiral progressive cutting method can be used to reduce the stress on the solid adhesive layer 23 and avoid large stress concentration caused by a single cut.

[0057] After cutting, the dimensions of the cut solid adhesive layer are checked using an image scanner. Once the dimensions of the solid adhesive layer 23 are confirmed to be correct, the first spray plate 21 and the second spray plate 22 are bonded together using the solid adhesive layer 23 to form a double-layer spray plate. The outer diameters of the first spray plate 21, the solid adhesive layer 23, and the second spray plate 22 are the same. Specifically, the solid adhesive layer 23 is bonded to the side of the first spray plate 21 near the second spray plate 22 through a discontinuous bonding area 232. The first spray plate 21 and the second spray plate 22 are bonded together using the solid adhesive layer 23 to form a horizontally aligned overall structure, ensuring that the surface levelness error of the double-layer spray plate after bonding is ≤0.03mm, thus ensuring the flatness of the working surface of the spray tray 100. In the projection direction perpendicular to the first spray plate 21, the lower surface of the second spray plate 22 remains horizontal and at the same level, which helps to ensure the uniform distribution of gas within the spray tray 100 and avoids uneven spraying caused by surface unevenness, thereby improving spray uniformity.

[0058] Please see Figures 13 to 15 As shown, the discontinuous bonding region 232 includes several concentrically arranged first adhesive film regions 2321 and second adhesive film regions 2322. The first adhesive film regions 2321 and second adhesive film regions 2322 are arranged alternately. The second adhesive film regions 2322 surround the periphery of the first adhesive film regions 2321, and there is a completely cut-off isolation gap between adjacent first adhesive film regions 2321 and second adhesive film regions 2322, further reducing stress transmission and avoiding stress concentration that could lead to cracking or delamination of the solid adhesive layer 23. The first adhesive film regions 2321 and second adhesive film regions 2322 are arranged sequentially, and the second adhesive film region 2322 is located between two adjacent first adhesive film regions 2321.

[0059] The number of first adhesive film regions 2321 and second adhesive film regions 2322 is related to the arrangement of the through holes 24 on the first spray plate 21 and the second spray plate 22. In this embodiment, the discontinuous bonding region 232 includes 13 sets of first adhesive film regions 2321 and 12 sets of second adhesive film regions 2322. By setting multiple sets of adhesive film regions, the contact area between the solid adhesive layer 23 and the first spray plate 21 and the second spray plate 22 is increased, thereby improving the bonding strength.

[0060] The plurality of first adhesive film regions 2321 include a plurality of concentrically arranged first adhesive film layers 2323. In the projection direction perpendicular to the first spray plate 21, the projection range of the first adhesive film layer 2323 falls within the projection range of the first adhesive film region 2321, and there is a completely cut-off isolation gap between two adjacent first adhesive film layers 2323.

[0061] In some preferred embodiments, the first adhesive film layer 2323 is annular in shape, which can uniformly distribute stress. In the projection direction perpendicular to the first spray plate 21, the projected area of ​​the first adhesive film layer 2323 is equal to the projected area of ​​the first adhesive film region 2321, which can maximize the bonding area and make the first spray plate 21 and the second spray plate 22 firmly bonded.

[0062] Furthermore, the 13 groups of first adhesive film regions 2321 include a first group of first adhesive film layers 2323, a second group of first adhesive film layers 2323, ..., a 13th group of first adhesive film layers 2323 arranged outwards from the center. The circumferential width of the first group of first adhesive film layers 2323 is greater than or equal to the circumferential width of the 13th group of first adhesive film layers 2323, which is also greater than or equal to the circumferential width of the other groups of first adhesive film layers 2323. By widening the central first adhesive film layer 2323 and the edge first adhesive film layers 2323 and the 13th group of first adhesive film layers 2323, the bonding strength of the first adhesive film regions 2321 is increased. This arrangement makes the bonding between the first spray plate 21 and the second spray plate 22 more secure at the center and edges, effectively improving the overall structural strength of the double-layer spray plate.

[0063] In some embodiments, since the through holes 24 are uniformly distributed, the diameters of the second group of first adhesive film layers 2323 to the 12th group of first adhesive film layers 2323 are different, but their annular widths are the same.

[0064] In some other embodiments, the projected area of ​​the first adhesive layer 2323 in the projection direction perpendicular to the first spray plate 21 may also be smaller than the projected area of ​​the first adhesive region 2321, so as to save the amount of solid adhesive layer 23 used.

[0065] The second adhesive film region 2322 has several groups of circumferentially arranged second adhesive film layers 2324, meaning that the groups of second adhesive film layers 2324 are evenly spaced along a ring to uniformly distribute the solid adhesive and avoid bonding strength problems caused by uneven distribution of solid adhesive. There is a completely cut-off isolation gap between two adjacent second adhesive film layers 2324. The through hole 24 is located in the second adhesive film region 2322 and within the isolation gap between two adjacent second adhesive film layers 2324, ensuring smooth airflow through the through hole 24.

[0066] In the projection direction perpendicular to the first spray plate 21, the projected area of ​​the second adhesive film layer 2324 is equal to the projected area of ​​the second adhesive film region 2322. Furthermore, there is a completely cut-off isolation gap between adjacent second adhesive film layers 2324 and first adhesive film layers 2323.

[0067] The shape of the second adhesive layer 2324 includes elliptical, circular, rectangular, trapezoidal, triangular, or other irregular shapes. Furthermore, the shapes of multiple second adhesive layers 2324 can be exactly the same or not exactly the same, which is not limited here, as long as it can enable good adhesion between the first spray plate 21 and the second spray plate 22.

[0068] Preferably, the second adhesive film layer 2324 is elliptical in shape, such as... Figure 15 As shown, this can increase the bonding area, thereby increasing the viscosity between the first spray plate 21 and the second spray plate 22.

[0069] In summary, the spray tray 100 of this invention is fixedly connected to the first spray plate 21 and the second spray plate 22 by a solid adhesive layer 23, thus physically preventing the possibility of adhesive flowing into the through holes 24. The first spray plate 21 and the second spray plate 22 are provided with several sets of through holes 24 corresponding to the function of the spray tray 100. In the projection direction perpendicular to the first spray plate 21, the projection range of the discontinuous bonding area 232 does not fall within the projection range of the several sets of through holes 24. This arrangement ensures that the bonding area of ​​the solid adhesive layer 23 does not overlap with the through holes 24, eliminating the possibility of the solid adhesive layer 23 blocking the through holes 24 and ensuring the uniformity of gas flow. By fixing the solid adhesive layer 23 to the first spray plate 21 and using laser cutting to form the discontinuous bonding area 232, the secondary alignment error of the discontinuous bonding area 232 is avoided.

[0070] The above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model.

Claims

1. A spray disc, characterized in that, include: The base (1) and the spray assembly (2) fixed below the base (1) are provided. The spray assembly (2) includes a first spray plate (21), a solid adhesive layer (23) and a second spray plate (22) stacked sequentially along the height. The solid adhesive layer (23) is fixed on the first spray plate (21). The solid adhesive layer (23) includes a laser-cut area (231) and a discontinuous bonding area (232). The first spray plate (21) is fixedly connected to the second spray plate (22) through the solid adhesive layer (23). The first spray plate (21) and the second spray plate (22) are provided with a number of through holes (24) corresponding to the function of the spray disc (100). In the projection direction perpendicular to the first spray plate (21), the projection range of the discontinuous bonding area (232) does not fall into the projection range of the number of through holes (24).

2. The spray disc according to claim 1, characterized in that, The solid adhesive layer (23) is a pre-formed sheet film, which is laser-cut to form the discontinuous bonding area (232). The solid adhesive layer (23) is bonded to the side of the first spray plate (21) near the second spray plate (22) through the discontinuous bonding area (232). The first spray plate (21) and the second spray plate (22) are bonded together by the solid adhesive layer (23) to form a horizontally aligned integral structure.

3. The spray disc according to claim 1, characterized in that, The thickness of the discontinuous bonding area (232) of the solid adhesive layer (23) is 0.1mm~0.5mm.

4. The spray disc according to claim 3, characterized in that, The discontinuous bonding area (232) includes several sets of concentrically arranged first adhesive film areas (2321) and second adhesive film areas (2322). The second adhesive film areas (2322) are arranged around the periphery of the first adhesive film areas (2321). The first adhesive film areas (2321) and the second adhesive film areas (2322) are arranged in sequence.

5. The spray disc according to claim 4, characterized in that, A plurality of concentric first adhesive film layers (2323) are provided on a plurality of first adhesive film areas (2321). In the projection direction perpendicular to the first spray plate (21), the projection range of the first adhesive film layer (2323) falls into the projection range of the first adhesive film area (2321), and there is a completely cut-off isolation gap between two adjacent first adhesive film layers (2323).

6. The spray disc according to claim 5, characterized in that, The first adhesive film layer (2323) is in the shape of a ring.

7. The spray disc according to claim 4, characterized in that, The second adhesive film area (2322) is provided with a plurality of circumferentially arranged second adhesive film layers (2324), and there is a completely cut-off isolation gap between two adjacent second adhesive film layers (2324).

8. The spray disc according to claim 7, characterized in that, The shape of the second adhesive film layer (2324) includes ellipse, circle, rectangle, trapezoid or triangle.

9. The spray disc according to claim 2, characterized in that, The first spray plate (21) is provided with several sets of through-hole first fixing holes (211), and the base (1) is provided with several sets of second fixing holes (12) that correspond one-to-one with the first fixing holes (211). The first fixing holes (211) and the second fixing holes (12) are connected by connecting columns (3).

10. The spray disc according to claim 2, characterized in that, The base (1) has an air inlet (13) on the side opposite to the first spray plate (21). The air inlet (13) is connected to the first spray plate (21) and is used to input protective gas to prevent the base (1) from oxidizing during laser cutting.

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