Rotary valve assembly and single crystal furnace

Abstract

The utility model belongs to monocrystal silicon production technical field, concretely relates to a kind of rotary plate valve assembly and single crystal furnace, and the rotary valve assembly includes: valve storehouse, with the cavity of hollow and the gas inlet and exhaust port being communicated with the cavity and outside;Rotary spray head, including spray head body and multiple nozzles, the gas inlet end of the spray head body is rotatably communicated to the gas inlet, multiple the nozzle ring is arranged in the gas outlet end of the spray head body;The projection of the gas jet direction of each nozzle on the rotation plane of the spray head body is inclined relative to the rotation radial of the spray head body, so that the gas that the nozzle sprays pushes the spray head body rotation along its axis.This rotary plate valve assembly not only can utilize gas to blow dust, but also can utilize gas to generate power to drive rotary spray head rotation, so that the nozzle of rotary spray head can realize 360° rotary blow in cavity, help to eliminate airflow blind area inside cavity, reduce health dead angle, improve the cleaning effect of rotary plate valve assembly.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production technology, and in particular to a rotary valve assembly and a monocrystalline furnace. Background Technology

[0002] A rotary valve is installed between the auxiliary chamber and the main chamber of the single crystal furnace to control their connection and isolation. During the multiple feeding processes into the single crystal furnace, silicon material enters the main chamber from the auxiliary chamber through the rotary valve. Dust easily accumulates inside the rotary valve, which can contaminate the crystal growth environment and lead to an increase in the crystal rod defect rate. Therefore, it is necessary to clean the rotary valve in a timely manner.

[0003] Some existing rotary valves are equipped with a purging mechanism that uses air to purge the inside of the valve for automated operation. Some purging mechanisms directly blow air into the valve body from the air inlet; others have air pipes extending into the valve body, blowing air through fixed nozzles on these pipes. Because these existing purging mechanisms blow air into the rotary valve in a fixed direction, there are many airflow blind spots inside the valve, resulting in poor cleaning performance. Utility Model Content

[0004] To improve the poor cleaning effect of existing rotary valves, this utility model provides a rotary valve assembly and a single crystal furnace.

[0005] According to an embodiment of the present invention, a first aspect provides a rotary valve assembly, comprising:

[0006] The valve chamber has a hollow cavity and an air inlet and an air outlet connecting the cavity to the outside;

[0007] A rotating nozzle is disposed inside the cavity. The rotating nozzle includes a nozzle body and multiple nozzles. The air inlet end of the nozzle body is rotatably connected to the air inlet, and the multiple nozzles are arranged in a ring around the air outlet end of the nozzle body.

[0008] The jet direction of each nozzle is toward the exhaust port, and its projection on the rotation plane of the nozzle body is inclined relative to the rotational radial direction of the nozzle body, such that the gas ejected from the nozzle pushes the nozzle body to rotate along its axis in the opposite direction.

[0009] In some embodiments, the projection of the jet direction of each nozzle onto the rotation plane of the nozzle body is inclined relative to the rotational radial direction of the nozzle body towards a first rotational direction, such that the gas ejected from the nozzle pushes the nozzle body to rotate along its axis in a second rotational direction opposite to the first rotational direction.

[0010] In some embodiments, the projection of the jet direction of the nozzle onto the rotation plane of the nozzle body is further inclined toward the rotational outer periphery of the nozzle body.

[0011] In some embodiments, the air inlet is connected to an external air source via an air supply pipe, and the exhaust outlet is connected to an external evacuation system via an exhaust pipe.

[0012] In some embodiments, the air inlet end of the nozzle body is rotatably connected to the air inlet via a magnetic levitation bearing;

[0013] The magnetic levitation bearing includes a stator located on the outer side and a rotor located on the inner side, wherein the air inlet and the air supply pipe are fixedly connected to the stator, and the air inlet end of the nozzle body is fixedly connected to the rotor.

[0014] In some embodiments, the air inlet and the air outlet are located on opposite sides of the cavity.

[0015] In some embodiments, the nozzle body is a hollow cylinder, with one end along the axial direction near the air inlet being the air inlet end and the other end along the axial direction near the exhaust port being the air outlet end.

[0016] In some embodiments, the plurality of nozzles are evenly arranged around the circumference of the air outlet end of the nozzle body.

[0017] In some embodiments, the height of the top and bottom walls of the cavity decreases from one side of the air inlet to the other side of the air outlet.

[0018] The distance between the sidewalls of the cavity decreases from one side of the air inlet to the other side of the air outlet.

[0019] According to an embodiment of the present invention, a second aspect provides a single crystal furnace, including a secondary chamber and a main furnace chamber, wherein the aforementioned rotary valve assembly is disposed between the secondary chamber and the main furnace chamber.

[0020] The rotary valve assembly of this invention utilizes a nozzle that sprays gas at an angle, generating a force along the tangential direction of the nozzle body. This tangential force, in turn, drives the rotating nozzle to rotate, enabling the nozzle to achieve 360° rotation and blowing within the cavity. During nozzle rotation, the gas sprayed from the nozzle passes through multiple corners and hidden areas of the cavity, carrying dust from each area and discharging it through the exhaust port. Compared to the directional blowing method of traditional rotary valves, the rotary valve assembly of this invention not only utilizes gas to blow away dust but also uses the gas to generate power to drive the rotating nozzle, helping to eliminate airflow blind spots within the cavity, reduce dead zones, and improve the cleaning effect of the rotary valve assembly. Attached Figure Description

[0021] Figure 1 This is a structural diagram showing the assembly position of the rotary valve;

[0022] Figure 2 This is a schematic diagram of the rotary valve assembly in the top view of this embodiment;

[0023] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure at point AA;

[0024] Figure 4 This is a schematic diagram of the internal structure of the rotary valve assembly in this embodiment from a top view.

[0025] Figure 5 This is a schematic diagram of the connection between the rotating nozzle and the air supply pipe in this embodiment;

[0026] Figure 6 This is a schematic diagram of the air jet direction of the rotating nozzle in this embodiment;

[0027] Figure 7 This is a schematic diagram of the air jet direction of the rotating nozzle in this embodiment in another direction;

[0028] Figure 8 This is a schematic diagram of the magnetic levitation bearing in this embodiment.

[0029] In the figure: Valve chamber 10; Cavity 11; Side wall 12; Top wall 13; Bottom wall 14; Material guide hole 15; First opening 16; Second opening 17; Air inlet 18; Exhaust port 19; Valve plate 20; Driver 21; Swing arm 22; Rotary nozzle 30; Nozzle body 31; Nozzle 32; Air supply pipe 40; Exhaust pipe 41; Magnetic levitation bearing 50; Stator 51; Rotor 52; Magnet 53; Auxiliary chamber 60; Main furnace chamber 70. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0031] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this utility model can be implemented. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0032] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] like Figure 1 As shown, this embodiment provides a rotary valve assembly, which is disposed between the auxiliary chamber 60 and the main furnace chamber 70 of the single crystal furnace. The rotary valve assembly can control the connection and separation states of the auxiliary chamber 60 and the main furnace chamber 70.

[0034] See details Figure 2-6 As shown, the rotary valve assembly specifically includes a valve chamber 10 and a rotary nozzle 30. The valve chamber 10 has a hollow cavity 11 and an air inlet 18 and an air outlet 19 connecting the cavity 11 to the outside. The rotary nozzle 30 is disposed inside the cavity 11 and includes a nozzle body 31 and a plurality of nozzles 32. The air inlet end of the nozzle body 31 is rotatably connected to the air inlet 18. The plurality of nozzles 32 are arranged in a ring around the air outlet end of the nozzle body 31. The air jet direction of each nozzle 32 is towards the air outlet 19, and the projection of each nozzle 32 on the rotation plane of the nozzle body 31 is inclined radially relative to the rotation of the nozzle body 31, so that the gas ejected from the nozzle 32 pushes the nozzle body 31 to rotate along its axis.

[0035] In the rotary valve assembly of this embodiment, the jet direction of each nozzle 32 faces the exhaust port 19, allowing the nozzle 32 to generate airflow from the air inlet 18 to the exhaust port 19, thereby purging the entire valve chamber 10. The airflow carries away dust particles. The projection of the jet direction of each nozzle 32 onto the rotation plane of the nozzle body 31 is inclined relative to the rotational radial direction of the nozzle body 31, causing the gas ejected from the nozzle 32 at an angle to exert a force along the tangential direction of the nozzle body 31. This tangential force can drive the rotating nozzle 30 to rotate, enabling the nozzle 32 to achieve 360° rotational purging within the cavity 11. During the rotation of the rotating nozzle 30, the gas ejected from the nozzle 32 can pass through multiple corners and concealed areas of the cavity 11, carrying dust particles from each area and discharging them from the exhaust port 19. Compared to the traditional rotary valve's directional air blowing method, the rotary valve assembly in this embodiment can not only use gas to blow away dust, but also use gas to generate power to drive the rotating nozzle 30 to rotate, which helps to eliminate airflow blind spots inside the cavity 11, reduce hygiene dead corners, and improve the cleaning effect of the rotary valve assembly.

[0036] See details Figure 6The projection of the jet direction of each nozzle 32 onto the rotation plane of the nozzle body 31 is inclined relative to the rotational radial direction of the nozzle body 31 towards the first rotational direction, causing the gas ejected from the nozzle 32 to push the nozzle body 31 to rotate along its axis in a second rotational direction opposite to the first rotational direction. It should be noted that in this embodiment, the jet direction is specifically the direction of arrow a, the direction in which the gas pushes the nozzle body 31 is the direction of arrow b, the first rotational direction is the direction of arrow c, and the second rotational direction is the direction of arrow d.

[0037] See details Figure 5-7 In this embodiment, the jet direction of the nozzle 32 is preferably projected onto the rotation plane of the nozzle body 31 further toward the outer circumference of the nozzle body 31 so that the gas ejected from the nozzle 32 diffuses in the cavity 11. It should be noted that the jet direction of the nozzle 32 in this embodiment can also be directed in other directions as needed so that the gas ejected from the nozzle 32 can sweep away the dust in the cavity 11.

[0038] See details Figure 3 and Figure 4 In this embodiment, the air inlet 18 of the nozzle body 31 is connected to an external air source through an air supply pipe 40, and the exhaust port 19 of the cavity 11 is connected to an external vacuum system through an exhaust pipe 41. The vacuum system can generate negative pressure to suck out the dust inside the cavity 11. The air inlet end of the nozzle body 31 is rotatably connected to the air supply pipe 40, so that the rotating nozzle 30 can rotate freely relative to the air supply pipe 40 and the air source.

[0039] See details Figure 5 The air inlet end of the nozzle body 31 is preferably connected to the air inlet 18 rotatably via a magnetic levitation bearing 50. There is no mechanical contact between the stator 51 and the rotor 52 of the magnetic levitation bearing 50, which can eliminate friction and make it easier for the rotating nozzle 30 to maintain high-speed rotation.

[0040] See details Figure 8 The magnetic levitation bearing 50 specifically includes a stator 51 located on the outer side, a rotor 52 located on the inner side, and a magnet 53 sandwiched between the stator 51 and the rotor 52. In this embodiment, the air inlet 18 and the air supply pipe 40 are fixedly connected to the stator 51, and the air inlet end of the nozzle body 31 is fixedly connected to the rotor 52 to meet the rotation requirements of the rotating nozzle 30. It should be noted that the nozzle body 31 can also use other conventional rotatable structures to connect the air inlet 18 and the air supply pipe 40. The structure and working principle of the magnetic levitation bearing 50 are existing technologies and will not be described in detail in this embodiment.

[0041] See details Figure 3 and Figure 4In this embodiment, the air inlet 18 and the exhaust port 19 are located on opposite sides of the cavity 11. The gas first enters the cavity 11 through the air inlet 18, then blows the entire cavity 11 towards the exhaust port 19, and finally carries the dust out through the exhaust port 19. This helps the gas flow through all areas inside the cavity 11 and eliminates airflow blind spots.

[0042] In this embodiment, the nozzle body 31 is specifically a hollow cylinder. The end of the nozzle body 31 closest to the air inlet 18 along the axial direction is the air inlet end, and the other end closest to the exhaust port 19 along the axial direction is the air outlet end. The air inlet end of the nozzle body 31 is adapted to the contour of the stator 51 to facilitate a fixed connection between the nozzle body 51 and the stator. Multiple nozzles 32 are evenly arranged along the circumference of the air outlet end of the nozzle body 31 to ensure that the nozzles 32 uniformly drive the nozzle body 31 to rotate.

[0043] In this embodiment, the height of the top wall 13 and bottom wall 14 of the cavity 11 decreases from the side of the air inlet 18 to the side of the exhaust port 19, so that the entire cavity 11 is inclined with the side of the air inlet 18 being higher and the side of the exhaust port 19 being lower. This inclined cavity 11 helps to guide the gas carrying dust into the exhaust port 19.

[0044] In this embodiment, the distance between the sidewalls 12 of the cavity 11 decreases from the air inlet 18 side to the exhaust outlet 19 side, making the entire cavity wider on the air inlet 18 side and narrower on the exhaust outlet 19 side, so that the gas carrying dust can collect at the exhaust outlet 19. Specifically, in this embodiment, the sidewalls 12 of the cavity 11 form a streamlined teardrop shape around the contour of the cavity 11, that is, the contour of the cavity 11 in the top / bottom view is teardrop-shaped. The part of the sidewalls 12 of the cavity 11 near the air inlet 18 is arc-shaped, the part of the sidewalls 12 of the cavity 11 near the exhaust outlet 19 is sharp-angled, and the part of the sidewalls 12 of the cavity 11 between the two is a decreasing curve, so that the contour of the cavity 11 has no dead corners for dust retention, which can further ensure the cleaning effect of the rotary valve assembly.

[0045] See details Figure 2 The rotary valve assembly of this embodiment further includes a valve plate 20, a swing arm 22, and a driver 21. The valve chamber 10 has a guide hole 15 extending vertically through the cavity 11, which allows material to pass through the rotary valve assembly. The valve plate 20 is movably disposed within the cavity 11. The driver 21 drives the swing arm 22 to open or close the guide hole 15. When the valve plate 20 opens the guide hole 15, the auxiliary chamber 60 and the main furnace chamber 70 of the single crystal furnace are in a connected state; when the valve plate 20 closes the guide hole 15, the auxiliary chamber 60 and the main furnace chamber 70 of the single crystal furnace are separated. It should be noted that the operation of the driver 21 driving the swing arm 22 to move the valve plate 20 is prior art and will not be described in detail in this embodiment.

[0046] See details Figure 3 In this embodiment, the material guide hole 15 forms a first opening 16 on the top wall 13 of the cavity 11, which is used to connect to the auxiliary chamber 60; the material guide hole 15 forms a second opening 17 on the bottom wall 14 of the cavity 11, which is used to connect to the main furnace chamber 70. When the valve plate 20 closes the material guide hole 15, the valve plate 20 in this embodiment preferably blocks the second opening 17, so that the valve plate 20 separates the cavity 11 from the main furnace body. When the valve plate 20 closes the material guide hole 15, it can prevent the dust remaining in the cavity 11 from falling into the main furnace body, thus ensuring the sealing of the main furnace body.

[0047] During the cleaning of the rotary valve assembly, the gas generated by the air source first enters the rotary nozzle 30 through the air supply pipe 40 and the air inlet 18 of the cavity 11. The gas in the rotary nozzle 30 is then ejected from the nozzle 32, causing the ejected gas to drive the rotary nozzle 30 to rotate on one hand, and on the other hand, it carries dust from the higher and wider air inlet 18 side of the cavity 11 to the lower and narrower exhaust port 19 side. Finally, under the negative pressure of the vacuum system, it is discharged from the exhaust port 19 of the cavity 11 and the exhaust pipe 41 in sequence.

[0048] During its rotation, the rotating nozzle 30 enables the nozzle 32 to rotate 360° within the cavity 11 to eliminate airflow blind spots. The cavity 11 has an inclined structure with one side higher than the air inlet 18 and the other side lower than the exhaust port 19. The teardrop-shaped contour of the cavity 11 helps guide the gas to carry dust into the exhaust port 19 and reduce dead zones, which can effectively improve the cleaning effect of the rotary valve assembly.

[0049] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A rotary valve assembly, characterized in that, include: Valve chamber (10) has a hollow cavity (11) and an air inlet (18) and an air outlet (19) connecting the cavity (11) and the outside. A rotating nozzle (30) is disposed inside the cavity (11). The rotating nozzle (30) includes a nozzle body (31) and a plurality of nozzles (32). The air inlet end of the nozzle body (31) is rotatably connected to the air inlet (18), and the plurality of nozzles (32) are arranged around the air outlet end of the nozzle body (31). Each of the nozzles (32) is directed toward the exhaust port (19), and its projection on the rotation plane of the nozzle body (31) is inclined relative to the rotational radial direction of the nozzle body (31), such that the gas ejected from the nozzle (32) pushes the nozzle body (31) to rotate along its axis in the opposite direction.

2. The rotary valve assembly according to claim 1, characterized in that, The projection of the jet direction of each nozzle (32) onto the rotation plane of the nozzle body (31) is inclined in the first rotation direction relative to the rotation radial direction of the nozzle body (31), such that the gas ejected from the nozzle (32) pushes the nozzle body (31) to rotate along its axis in the second rotation direction opposite to the first rotation direction.

3. The rotary valve assembly according to claim 1, characterized in that: The projection of the jet direction of the nozzle (32) onto the rotation plane of the nozzle body (31) is further toward the outer rotational periphery of the nozzle body (31).

4. The rotary valve assembly according to claim 1, characterized in that: The air inlet (18) is connected to an external air source through an air supply pipe (40), and the exhaust port (19) is connected to an external evacuation system through an exhaust pipe (41).

5. The rotary valve assembly according to claim 4, characterized in that: The air inlet end of the nozzle body (31) is rotatably connected to the air inlet (18) via a magnetic levitation bearing (50). The magnetic levitation bearing (50) includes a stator (51) located on the outer side and a rotor (52) located on the inner side, wherein the air inlet (18) and the air supply pipe (40) are fixedly connected to the stator (51), and the air inlet end of the nozzle body (31) is fixedly connected to the rotor (52).

6. The rotary valve assembly according to claim 1, characterized in that: The air inlet (18) and the exhaust outlet (19) are located on opposite sides of the cavity (11).

7. The rotary valve assembly according to claim 6, characterized in that, The nozzle body (31) is a hollow cylinder, with one end along the axial direction near the air inlet (18) being the air inlet end and the other end along the axial direction near the exhaust port (19) being the air outlet end.

8. The rotary valve assembly according to claim 7, characterized in that, The plurality of nozzles (32) are evenly arranged around the circumference of the outlet end of the nozzle body (31).

9. The rotary valve assembly according to any one of claims 1-8, characterized in that: The height of the top wall (13) and bottom wall (14) of the cavity (11) decreases from the side of the air inlet (18) to the side of the exhaust port (19); The distance between the sidewall (12) of the cavity (11) and the sidewall (19) decreases from the side of the air inlet (18) to the side of the exhaust port (19).

10. A single crystal furnace, comprising a secondary chamber (60) and a main furnace chamber (70), characterized in that: A rotary valve assembly as described in any one of claims 1-9 is provided between the auxiliary chamber (60) and the main furnace chamber (70).

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